JP7567933B2 - 量子デバイス及びその製造方法 - Google Patents

量子デバイス及びその製造方法 Download PDF

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JP7567933B2
JP7567933B2 JP2022566737A JP2022566737A JP7567933B2 JP 7567933 B2 JP7567933 B2 JP 7567933B2 JP 2022566737 A JP2022566737 A JP 2022566737A JP 2022566737 A JP2022566737 A JP 2022566737A JP 7567933 B2 JP7567933 B2 JP 7567933B2
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conductor
conductor layer
layer
oxide film
josephson junction
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JPWO2022118463A5 (https=
JPWO2022118463A1 (https=
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哲朗 佐藤
剛 山本
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NEC Corp
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NEC Corp
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices
    • H10N60/12—Josephson-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/805—Constructional details for Josephson-effect devices

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP2022566737A 2020-12-04 2020-12-04 量子デバイス及びその製造方法 Active JP7567933B2 (ja)

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PCT/JP2020/045247 WO2022118463A1 (ja) 2020-12-04 2020-12-04 量子デバイス及びその製造方法

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JPWO2022118463A1 JPWO2022118463A1 (https=) 2022-06-09
JPWO2022118463A5 JPWO2022118463A5 (https=) 2023-08-16
JP7567933B2 true JP7567933B2 (ja) 2024-10-16

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JP (1) JP7567933B2 (https=)
WO (1) WO2022118463A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI20225827A1 (en) * 2022-09-23 2024-03-24 Iqm Finland Oy Superconducting vacuum-bridged josephson junctions
WO2024069696A1 (ja) * 2022-09-26 2024-04-04 富士通株式会社 量子デバイス、量子演算装置及び量子デバイスの製造方法
WO2025249819A1 (ko) * 2024-05-28 2025-12-04 (주)포인트엔지니어링 양극산화막을 이용한 부품 및 그 제조 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017015432A1 (en) 2015-07-23 2017-01-26 Massachusetts Institute Of Technology Superconducting integrated circuit
WO2019032115A1 (en) 2017-08-11 2019-02-14 Intel Corporation QUANTIC BIT DEVICES WITH JOSEPHSON JUNCTION CONNECTED BELOW SUPPORT CIRCUITS
US20190363239A1 (en) 2016-06-13 2019-11-28 Intel Corporation Josephson junctions made from refractory and noble metals

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59135783A (ja) * 1983-01-24 1984-08-04 Agency Of Ind Science & Technol ジヨセフソン記憶装置
JPS6474777A (en) * 1987-09-17 1989-03-20 Sanyo Electric Co Manufacture of micro-bridge type josephson device
JP2727773B2 (ja) * 1991-02-25 1998-03-18 日本電気株式会社 ジョセフソン集積回路の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017015432A1 (en) 2015-07-23 2017-01-26 Massachusetts Institute Of Technology Superconducting integrated circuit
US20190363239A1 (en) 2016-06-13 2019-11-28 Intel Corporation Josephson junctions made from refractory and noble metals
WO2019032115A1 (en) 2017-08-11 2019-02-14 Intel Corporation QUANTIC BIT DEVICES WITH JOSEPHSON JUNCTION CONNECTED BELOW SUPPORT CIRCUITS

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JPWO2022118463A1 (https=) 2022-06-09
WO2022118463A1 (ja) 2022-06-09
US20240099160A1 (en) 2024-03-21

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