JP7539394B2 - バルブ装置 - Google Patents

バルブ装置 Download PDF

Info

Publication number
JP7539394B2
JP7539394B2 JP2021543058A JP2021543058A JP7539394B2 JP 7539394 B2 JP7539394 B2 JP 7539394B2 JP 2021543058 A JP2021543058 A JP 2021543058A JP 2021543058 A JP2021543058 A JP 2021543058A JP 7539394 B2 JP7539394 B2 JP 7539394B2
Authority
JP
Japan
Prior art keywords
valve
rib
valve body
valve seat
abutment surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021543058A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2021039984A1 (enExample
JPWO2021039984A5 (enExample
Inventor
博士 末永
研郎 吉野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
1/1ASAHI YUKIZAI CORPORATION
Original Assignee
1/1ASAHI YUKIZAI CORPORATION
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 1/1ASAHI YUKIZAI CORPORATION filed Critical 1/1ASAHI YUKIZAI CORPORATION
Publication of JPWO2021039984A1 publication Critical patent/JPWO2021039984A1/ja
Publication of JPWO2021039984A5 publication Critical patent/JPWO2021039984A5/ja
Application granted granted Critical
Publication of JP7539394B2 publication Critical patent/JP7539394B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/12Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32Details
    • F16K1/34Cutting-off parts, e.g. valve members, seats
    • F16K1/36Valve members
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32Details
    • F16K1/34Cutting-off parts, e.g. valve members, seats
    • F16K1/42Valve seats
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32Details
    • F16K1/48Attaching valve members to screw-spindles
    • F16K1/482Attaching valve members to screw-spindles with a collar on the spindle or a groove in the spindle, by which a fixing element is supported, the spindle reaching into the valve member
    • F16K1/485Attaching valve members to screw-spindles with a collar on the spindle or a groove in the spindle, by which a fixing element is supported, the spindle reaching into the valve member with a groove in the spindle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F16K17/04Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/12Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Lift Valve (AREA)
JP2021543058A 2019-08-30 2020-08-28 バルブ装置 Active JP7539394B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019158708 2019-08-30
JP2019158708 2019-08-30
PCT/JP2020/032662 WO2021039984A1 (ja) 2019-08-30 2020-08-28 バルブ装置

Publications (3)

Publication Number Publication Date
JPWO2021039984A1 JPWO2021039984A1 (enExample) 2021-03-04
JPWO2021039984A5 JPWO2021039984A5 (enExample) 2023-08-23
JP7539394B2 true JP7539394B2 (ja) 2024-08-23

Family

ID=74685955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021543058A Active JP7539394B2 (ja) 2019-08-30 2020-08-28 バルブ装置

Country Status (5)

Country Link
US (1) US11773985B2 (enExample)
JP (1) JP7539394B2 (enExample)
KR (1) KR102774030B1 (enExample)
CN (1) CN114341534B (enExample)
WO (1) WO2021039984A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7627039B2 (ja) * 2021-05-24 2025-02-05 アドバンス電気工業株式会社 電動弁
JP7763086B2 (ja) * 2021-12-03 2025-10-31 旭有機材株式会社 ダイヤフラム弁
DE102024001225A1 (de) * 2024-04-17 2025-10-23 Vat Holding Ag Gaseinlassventil mit verbesserter durchflussgeometrie

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4840347A (en) 1988-03-14 1989-06-20 Fujikura Rubber, Ltd. Pneumatically-operated valve
JP2012127487A (ja) 2010-12-17 2012-07-05 Ckd Corp 流体制御弁
JP2015215028A (ja) 2014-05-09 2015-12-03 サーパス工業株式会社 遮断弁
JP2017133542A (ja) 2016-01-25 2017-08-03 旭有機材株式会社 バルブ装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0341398Y2 (enExample) 1984-11-24 1991-08-30
JPH02116070U (enExample) * 1989-03-03 1990-09-17
JP3842870B2 (ja) * 1997-07-11 2006-11-08 Smc株式会社 開閉弁
US7021330B2 (en) * 2003-06-26 2006-04-04 Planar Systems, Inc. Diaphragm valve with reliability enhancements for atomic layer deposition
JP3808071B2 (ja) * 2003-12-01 2006-08-09 シーケーディ株式会社 薬液制御弁
JP5138863B2 (ja) * 2004-12-10 2013-02-06 Ckd株式会社 ダイアフラム弁
JP4519770B2 (ja) * 2005-12-26 2010-08-04 シーケーディ株式会社 流体制御弁
US7686280B2 (en) * 2005-12-28 2010-03-30 Circor Instrumentation Technologies, Inc. Removable valve seat member for diaphragm valve
JP4744319B2 (ja) * 2006-02-22 2011-08-10 旭有機材工業株式会社 ダイヤフラム弁
JP2008291911A (ja) 2007-05-24 2008-12-04 Alps Electric Co Ltd バルブ装置
JP6527684B2 (ja) * 2014-10-31 2019-06-05 株式会社フジキン バルブ、流体制御装置、半導体制御装置、および半導体製造方法
US10167960B2 (en) 2014-12-11 2019-01-01 Ckd Corporation Fluid control valve
JP6193955B2 (ja) * 2014-12-11 2017-09-06 Ckd株式会社 流体制御バルブ
US10100935B2 (en) * 2015-09-11 2018-10-16 Mueller International, Llc Air valve seat and land
JP6873991B2 (ja) 2016-06-21 2021-05-19 Ckd株式会社 流体制御弁、及び流体制御弁製造方法
CN207989768U (zh) * 2017-11-22 2018-10-19 中核苏阀科技实业股份有限公司 一种截止阀用弹性锥面阀座密封结构

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4840347A (en) 1988-03-14 1989-06-20 Fujikura Rubber, Ltd. Pneumatically-operated valve
JP2012127487A (ja) 2010-12-17 2012-07-05 Ckd Corp 流体制御弁
JP2015215028A (ja) 2014-05-09 2015-12-03 サーパス工業株式会社 遮断弁
JP2017133542A (ja) 2016-01-25 2017-08-03 旭有機材株式会社 バルブ装置

Also Published As

Publication number Publication date
US11773985B2 (en) 2023-10-03
CN114341534B (zh) 2024-05-10
CN114341534A (zh) 2022-04-12
KR102774030B1 (ko) 2025-02-27
US20220325802A1 (en) 2022-10-13
JPWO2021039984A1 (enExample) 2021-03-04
WO2021039984A1 (ja) 2021-03-04
KR20220051187A (ko) 2022-04-26

Similar Documents

Publication Publication Date Title
JP7539394B2 (ja) バルブ装置
JP6681723B2 (ja) バルブ装置
US11118690B2 (en) Fluid control valve and fluid control valve manufacturing method
US10527177B2 (en) Control plate in a valve
TWI410575B (zh) 流體壓力機器之閥構造
JP7357639B2 (ja) ダイヤフラム弁
KR20060051512A (ko) 다이어프램 밸브
US7175157B2 (en) Fluid controller
US10047870B2 (en) One way valve assembly
CN106164549A (zh) 流体控制器
JPWO2021039984A5 (enExample)
JP5214660B2 (ja) 流体制御弁
JP4879284B2 (ja) 単一物の二重膜ダイヤフラム弁
JP7763086B2 (ja) ダイヤフラム弁
JP4234499B2 (ja) 可変流量調整器
JP5248660B2 (ja) ダイアフラム弁
JP4813047B2 (ja) ダイアフラム弁
JP4067303B2 (ja) シール構造およびそれを用いた流体制御弁
JP6534842B2 (ja) ダイアフラムバルブ、流体制御装置およびこれらを用いた半導体製造方法
JP7345697B1 (ja) ダイヤフラム及びこれを備えるダイヤフラムバルブ
JP7401896B2 (ja) バルブ
JP4440798B2 (ja) ダイアフラムバルブ
JP7636037B2 (ja) バルブ装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230815

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230815

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20231222

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240402

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240806

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240813

R150 Certificate of patent or registration of utility model

Ref document number: 7539394

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150