JP7493686B1 - 半導体装置及び電力変換装置 - Google Patents

半導体装置及び電力変換装置 Download PDF

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Publication number
JP7493686B1
JP7493686B1 JP2023560654A JP2023560654A JP7493686B1 JP 7493686 B1 JP7493686 B1 JP 7493686B1 JP 2023560654 A JP2023560654 A JP 2023560654A JP 2023560654 A JP2023560654 A JP 2023560654A JP 7493686 B1 JP7493686 B1 JP 7493686B1
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Prior art keywords
semiconductor device
cooler
sealing member
heat spreader
semiconductor
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JP2023560654A
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Japanese (ja)
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JPWO2024004026A1 (https=
JPWO2024004026A5 (https=
Inventor
祥 小杉
穂隆 六分一
羽香奈 増田
翔太 森
耕三 原田
圭 山本
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/40—Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids
    • H10W40/47—Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids by flowing liquids, e.g. forced water cooling
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/20—Arrangements for cooling
    • H10W40/25—Arrangements for cooling characterised by their materials
    • H10W40/255—Arrangements for cooling characterised by their materials having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/70—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
    • H10W40/77—Auxiliary members characterised by their shape
    • H10W40/778—Auxiliary members characterised by their shape in encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H10W74/114—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/481—Leadframes for devices being provided for in groups H10D8/00 - H10D48/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/853—On the same surface
    • H10W72/865—Die-attach connectors and bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/884—Die-attach connectors and bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
JP2023560654A 2022-06-28 2022-06-28 半導体装置及び電力変換装置 Active JP7493686B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/025735 WO2024004026A1 (ja) 2022-06-28 2022-06-28 半導体装置及び電力変換装置

Publications (3)

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JPWO2024004026A1 JPWO2024004026A1 (https=) 2024-01-04
JP7493686B1 true JP7493686B1 (ja) 2024-05-31
JPWO2024004026A5 JPWO2024004026A5 (https=) 2024-06-04

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JP2023560654A Active JP7493686B1 (ja) 2022-06-28 2022-06-28 半導体装置及び電力変換装置

Country Status (5)

Country Link
US (1) US20250364368A1 (https=)
JP (1) JP7493686B1 (https=)
CN (1) CN119365978A (https=)
DE (1) DE112022007435T5 (https=)
WO (1) WO2024004026A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240321698A1 (en) * 2023-03-23 2024-09-26 Toyota Motor Engineering & Manufacturing North America, Inc. Chip-on-chip power card having immersion cooling
WO2025243727A1 (ja) * 2024-05-22 2025-11-27 三菱電機株式会社 電力半導体装置、及び、電力変換装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02202043A (ja) * 1989-01-31 1990-08-10 Nec Corp 樹脂封止型半導体装置
JPH0427147A (ja) * 1990-05-22 1992-01-30 Seiko Epson Corp 半導体装置
JPH04254359A (ja) * 1991-02-06 1992-09-09 Toshiba Corp 樹脂封止型半導体装置および半導体装置の実装構造
US20060038284A1 (en) * 2004-08-17 2006-02-23 Brandenburg Scott D Fluid cooled encapsulated microelectronic package
JP2012079950A (ja) * 2010-10-04 2012-04-19 Toyota Motor Corp 半導体冷却装置
JP2012164697A (ja) * 2011-02-03 2012-08-30 Mitsubishi Electric Corp 電力用パワーモジュール及び電力用半導体装置
JP2020053611A (ja) * 2018-09-28 2020-04-02 三菱電機株式会社 半導体モジュール、および、半導体モジュールの製造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02202043A (ja) * 1989-01-31 1990-08-10 Nec Corp 樹脂封止型半導体装置
JPH0427147A (ja) * 1990-05-22 1992-01-30 Seiko Epson Corp 半導体装置
JPH04254359A (ja) * 1991-02-06 1992-09-09 Toshiba Corp 樹脂封止型半導体装置および半導体装置の実装構造
US20060038284A1 (en) * 2004-08-17 2006-02-23 Brandenburg Scott D Fluid cooled encapsulated microelectronic package
JP2012079950A (ja) * 2010-10-04 2012-04-19 Toyota Motor Corp 半導体冷却装置
JP2012164697A (ja) * 2011-02-03 2012-08-30 Mitsubishi Electric Corp 電力用パワーモジュール及び電力用半導体装置
JP2020053611A (ja) * 2018-09-28 2020-04-02 三菱電機株式会社 半導体モジュール、および、半導体モジュールの製造方法

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JPWO2024004026A1 (https=) 2024-01-04
WO2024004026A1 (ja) 2024-01-04
DE112022007435T5 (de) 2025-04-10
US20250364368A1 (en) 2025-11-27
CN119365978A (zh) 2025-01-24

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