JP7482967B2 - 表示パネル及び表示装置 - Google Patents
表示パネル及び表示装置 Download PDFInfo
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- JP7482967B2 JP7482967B2 JP2022170243A JP2022170243A JP7482967B2 JP 7482967 B2 JP7482967 B2 JP 7482967B2 JP 2022170243 A JP2022170243 A JP 2022170243A JP 2022170243 A JP2022170243 A JP 2022170243A JP 7482967 B2 JP7482967 B2 JP 7482967B2
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- 229910052751 metal Inorganic materials 0.000 claims description 110
- 239000002184 metal Substances 0.000 claims description 110
- 239000000758 substrate Substances 0.000 claims description 48
- 239000003990 capacitor Substances 0.000 claims description 19
- 239000004020 conductor Substances 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims 1
- 239000010410 layer Substances 0.000 description 244
- 239000010408 film Substances 0.000 description 139
- 238000000034 method Methods 0.000 description 51
- 239000000463 material Substances 0.000 description 34
- 229920002120 photoresistant polymer Polymers 0.000 description 22
- 238000010586 diagram Methods 0.000 description 19
- 239000011810 insulating material Substances 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 9
- MSFGZHUJTJBYFA-UHFFFAOYSA-M sodium dichloroisocyanurate Chemical compound [Na+].ClN1C(=O)[N-]C(=O)N(Cl)C1=O MSFGZHUJTJBYFA-UHFFFAOYSA-M 0.000 description 8
- 239000010936 titanium Substances 0.000 description 8
- 208000033361 autosomal recessive with axonal neuropathy 2 spinocerebellar ataxia Diseases 0.000 description 7
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 239000011651 chromium Substances 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 229910052721 tungsten Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- -1 aluminum (Al) Chemical class 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- HRHKULZDDYWVBE-UHFFFAOYSA-N indium;oxozinc;tin Chemical compound [In].[Sn].[Zn]=O HRHKULZDDYWVBE-UHFFFAOYSA-N 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- NQBRDZOHGALQCB-UHFFFAOYSA-N oxoindium Chemical compound [O].[In] NQBRDZOHGALQCB-UHFFFAOYSA-N 0.000 description 2
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical compound [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium(II) oxide Chemical compound [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 208000035405 autosomal recessive with axonal neuropathy spinocerebellar ataxia Diseases 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
- H01L27/1244—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits for preventing breakage, peeling or short circuiting
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41733—Source or drain electrodes for field effect devices for thin film transistors with insulated gate
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/124—Insulating layers formed between TFT elements and OLED elements
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1216—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being capacitors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
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Description
300 基板
371 第1のカラーフィルタ
372 第2のカラーフィルタ
331 第1のアクティブ層
401 第1の絶縁膜
402 第2の絶縁膜
390 バンク
Claims (17)
- 基板と、
前記基板上に配置された第1~第4の信号ライン及びアクティブ層と、
前記アクティブ層の上面の一部に配置され、互いに離隔された第1の金属層及び第2の金属層と、
前記第1及び第2の金属層が配置された基板上に配置された第1の絶縁膜と、
前記第1の絶縁膜上に配置され、前記アクティブ層上に配置された前記第1及び第2の金属層の少なくとも一部に重畳し、前記第1~第4の信号ラインに重畳し、前記アクティブ層の上面の一部に重畳しない第2の絶縁膜と、
前記アクティブ層上に配置され、前記第1の絶縁膜上に配置され、前記第2の絶縁膜に重畳されない電極パターンと、
前記第2の絶縁膜上に配置され、互いに離隔された前記第1~第4の信号ラインに交差する第5の信号ラインと、
第1の電極上に配置された発光層と、
前記発光層上に配置された第2の電極と、
前記第1の電極及び前記第5の信号ラインと同一層に配置されたプレートとを含み、
前記第1の電極は、前記アクティブ層上に配置された前記第1の金属層の上面に接触し、
前記第5の信号ラインは前記第1の電極と同一層に配置されており、
前記第1の電極、前記プレート及び前記電極パターンのそれぞれは下部層及び前記下部層上に配置された上部層を含み、
前記下部層は透明導電物質を含み、
前記上部層は金属層を含む、表示装置。 - 前記電極パターンは、トランジスタのゲート電極であり、
前記第1の金属層及び前記第2の金属層のうちの一方は、前記トランジスタのソース電極であり、他方は、ドレイン電極である、請求項1に記載の表示装置。 - 前記アクティブ層及び前記第2の金属層が積層された領域において、前記第2の金属層および前記プレートの間に、前記第1の絶縁膜が配置され、前記第2の絶縁膜が配置されない領域を含み、前記第2の金属層および前記プレートは、ストレージキャパシタを形成する、請求項1に記載の表示装置。
- 前記電極パターンは、前記ストレージキャパシタが備えられた領域に配置されたプレートと同一層に配置され、前記第2の絶縁膜上に配置され、透明導電物質を含む下部層及び前記下部層上に配置され、金属を含む上部層を含む、請求項3に記載の表示装置。
- 前記第1の電極の前記下部層の一部と、前記第1の電極の前記上部層の全体上には、第3の絶縁膜が配置され、
前記第3の絶縁膜上には、バンクが配置されている、請求項1に記載の表示装置。 - 前記プレートは、前記第1及び第2の絶縁膜に設けられたコンタクトホールを介して、前記第2の金属層の上面と接触されている、請求項1に記載の表示装置。
- 前記基板上に配置された少なくとも1つのパッド電極を含み、
前記パッド電極は、第1のパッド電極、前記第1のパッド電極上に配置された第2のパッド電極及び前記第2のパッド電極上に配置された第3のパッド電極を含む、請求項1に記載の表示装置。 - 前記第1~第4の信号ラインのそれぞれは、第1の層及び第1の層上に配置された第2の層を含み、
前記第1のパッド電極は、前記アクティブ層及び前記第1~第4の信号ラインのそれぞれの第1の層と同一層に配置され、
前記第2のパッド電極は、前記第1及び第2の金属層及び前記第1~第4の信号ラインのそれぞれの第2の層と同一層に配置されている、請求項7に記載の表示装置。 - 前記第3のパッド電極は、前記第1の電極の下部層と同一層に配置されている、請求項7に記載の表示装置。
- 前記第1の絶縁膜は、前記アクティブ層の表面の一部に重畳しない領域を含み、
前記アクティブ層が前記第1の絶縁膜に重畳しない領域は、導体化された領域である、請求項1に記載の表示装置。 - 前記第1の絶縁膜は、前記アクティブ層の上面及び側面の全体に重畳し、
前記アクティブ層が前記電極パターンに重畳する領域を除いた残りの領域は、イオンドーピングされた領域である、請求項1に記載の表示装置。 - 前記アクティブ層の下部に配置され、前記アクティブ層のチャンネル領域に重畳する遮光層をさらに含む、請求項1に記載の表示装置。
- 基板と、
前記基板上に配置された第1~第4の信号ライン及びアクティブ層と、
前記アクティブ層の上面の一部に配置され、互いに離隔された第1の金属層及び第2の金属層と、
前記第1及び第2の金属層が配置された基板上に配置された第1の絶縁膜と、
前記第1の絶縁膜上に配置され、前記アクティブ層上に配置された前記第1及び第2の金属層の少なくとも一部に重畳し、前記第1~第4の信号ラインに重畳し、前記アクティブ層の上面の一部に重畳しない第2の絶縁膜と、
前記アクティブ層上に配置され、前記第1の絶縁膜上に配置され、前記第2の絶縁膜に重畳されない電極パターンと、
前記第2の絶縁膜上に配置され、互いに離隔された前記第1~第4の信号ラインに交差する第5の信号ラインと、
第1の電極上に配置された発光層と、
前記発光層上に配置された第2の電極と、
前記第1の電極は、前記アクティブ層上に配置された第1の金属層の上面に接触し、
前記第5の信号ラインは第1の電極と同一層に配置されており、
前記基板は、発光領域及び非発光領域に区分けられ、
前記第2の絶縁膜は、前記非発光領域で複数のスリットを備える、表示装置。 - 前記第2の絶縁膜の前記複数のスリットのうち少なくとも1つは、異なる発光領域間の前記非発光領域に設けられている、請求項13に記載の表示装置。
- 前記アクティブ層は、駆動トランジスタのアクティブ層であり、
前記第2の絶縁膜の前記複数のスリットは、前記非発光領域に配置された駆動トランジスタの前記アクティブ層のチャンネル領域の少なくとも3つの側面と対応するように配置されている、請求項13に記載の表示装置。 - 前記第2の絶縁膜の表面は、平坦な形状である、請求項1に記載の表示装置。
- 発光領域及び非発光領域に区分けられる基板と、
前記基板上に配置された第1~第4の信号ライン及びアクティブ層と、
前記アクティブ層の上面の一部に配置され、互いに離隔された第1の金属層及び第2の金属層と、
前記第1及び第2の金属層が配置された基板上に配置された第1の絶縁膜と、
前記第1の絶縁膜上に配置され、前記アクティブ層上に配置された前記第1及び第2の金属層の少なくとも一部に重畳し、前記第1~第4の信号ラインに重畳し、前記アクティブ層の上面の一部に重畳しない第2の絶縁膜と、
前記アクティブ層上に配置され、前記第1の絶縁膜上に配置され、前記第2の絶縁膜に重畳しない電極パターンと、
前記第2の絶縁膜上に配置され、互いに離隔された前記第1~第4の信号ラインと交差する第5の信号ラインと、
第1の電極上に配置された発光層と、
前記発光層上に配置された第2の電極と、
前記第1の電極及び前記第5の信号ラインと同一層に配置されたプレートとを含み、
前記第1の電極は、前記アクティブ層上に配置された第1の金属層の上面に接触し、
前記第5の信号ラインは、第1の電極と同一層に配置されており、
前記第1の電極、前記プレート及び前記電極パターンのそれぞれは下部層及び前記下部層上に配置された上部層を含み、
前記下部層は透明導電物質を含み、
前記上部層は金属層を含む、表示パネル。
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