JP7474422B2 - 紫外線照射装置 - Google Patents
紫外線照射装置 Download PDFInfo
- Publication number
- JP7474422B2 JP7474422B2 JP2021551644A JP2021551644A JP7474422B2 JP 7474422 B2 JP7474422 B2 JP 7474422B2 JP 2021551644 A JP2021551644 A JP 2021551644A JP 2021551644 A JP2021551644 A JP 2021551644A JP 7474422 B2 JP7474422 B2 JP 7474422B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode block
- excimer
- irradiation device
- excimer lamp
- ultraviolet irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000605 extraction Methods 0.000 claims description 32
- 239000000919 ceramic Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 239000011810 insulating material Substances 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000002310 reflectometry Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 26
- 230000003287 optical effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 5
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 5
- 239000004810 polytetrafluoroethylene Substances 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 4
- 230000001954 sterilising effect Effects 0.000 description 4
- 238000000295 emission spectrum Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 210000004027 cell Anatomy 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000005283 ground state Effects 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 210000003491 skin Anatomy 0.000 description 2
- 208000017520 skin disease Diseases 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 238000004659 sterilization and disinfection Methods 0.000 description 2
- 210000000434 stratum corneum Anatomy 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 241000894006 Bacteria Species 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 210000004207 dermis Anatomy 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 210000002510 keratinocyte Anatomy 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/06—Radiation therapy using light
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
Landscapes
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Physics & Mathematics (AREA)
- Radiology & Medical Imaging (AREA)
- Electromagnetism (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Plasma & Fusion (AREA)
- Toxicology (AREA)
- Pathology (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019184817 | 2019-10-07 | ||
| JP2019184817 | 2019-10-07 | ||
| PCT/JP2020/037742 WO2021070781A1 (ja) | 2019-10-07 | 2020-10-05 | 紫外線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2021070781A1 JPWO2021070781A1 (zh) | 2021-04-15 |
| JP7474422B2 true JP7474422B2 (ja) | 2024-04-25 |
Family
ID=75438170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021551644A Active JP7474422B2 (ja) | 2019-10-07 | 2020-10-05 | 紫外線照射装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7474422B2 (zh) |
| CN (1) | CN114342042A (zh) |
| TW (1) | TWI825353B (zh) |
| WO (1) | WO2021070781A1 (zh) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006040867A (ja) | 2004-06-23 | 2006-02-09 | Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 | エキシマランプ装置 |
| JP2018166091A (ja) | 2017-03-28 | 2018-10-25 | 株式会社オーク製作所 | 放電ランプおよびオゾン生成方法 |
| JP2020092968A (ja) | 2018-12-14 | 2020-06-18 | ウシオ電機株式会社 | 紫外線照射装置 |
| JP6729820B1 (ja) | 2018-11-13 | 2020-07-22 | ウシオ電機株式会社 | エキシマランプ光源装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1713337A (zh) * | 2004-06-23 | 2005-12-28 | 豪雅冠得股份有限公司 | 受激准分子灯装置 |
| JP4837726B2 (ja) * | 2006-03-17 | 2011-12-14 | 篠田プラズマ株式会社 | 表示装置 |
| BRPI0818040A2 (pt) * | 2007-12-14 | 2015-03-31 | Sharp Kk | Dispositivo de display de cristal líquido |
| JP2011107264A (ja) * | 2009-11-13 | 2011-06-02 | Harison Toshiba Lighting Corp | 紫外線照射装置 |
| JP4885286B2 (ja) * | 2010-03-17 | 2012-02-29 | 篠田プラズマ株式会社 | 紫外光照射装置 |
| JP5633354B2 (ja) * | 2010-12-13 | 2014-12-03 | ウシオ電機株式会社 | エキシマランプおよびエキシマ光照射装置 |
| JP2013033948A (ja) * | 2011-06-27 | 2013-02-14 | Gs Yuasa Corp | 紫外線照射装置 |
| JP6103730B2 (ja) * | 2015-07-28 | 2017-03-29 | 合同会社紫光技研 | ガス放電発光装置 |
| JP2018190686A (ja) * | 2017-05-11 | 2018-11-29 | 合同会社紫光技研 | 紫外光源装置とその製造方法 |
-
2020
- 2020-09-30 TW TW109134055A patent/TWI825353B/zh active
- 2020-10-05 WO PCT/JP2020/037742 patent/WO2021070781A1/ja active Application Filing
- 2020-10-05 JP JP2021551644A patent/JP7474422B2/ja active Active
- 2020-10-05 CN CN202080060577.5A patent/CN114342042A/zh active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006040867A (ja) | 2004-06-23 | 2006-02-09 | Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 | エキシマランプ装置 |
| JP2018166091A (ja) | 2017-03-28 | 2018-10-25 | 株式会社オーク製作所 | 放電ランプおよびオゾン生成方法 |
| JP6729820B1 (ja) | 2018-11-13 | 2020-07-22 | ウシオ電機株式会社 | エキシマランプ光源装置 |
| JP2020092968A (ja) | 2018-12-14 | 2020-06-18 | ウシオ電機株式会社 | 紫外線照射装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI825353B (zh) | 2023-12-11 |
| WO2021070781A1 (ja) | 2021-04-15 |
| TW202128249A (zh) | 2021-08-01 |
| CN114342042A (zh) | 2022-04-12 |
| JPWO2021070781A1 (zh) | 2021-04-15 |
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