JP7470784B2 - 異常機器トレース検出および分類 - Google Patents

異常機器トレース検出および分類 Download PDF

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JP7470784B2
JP7470784B2 JP2022520973A JP2022520973A JP7470784B2 JP 7470784 B2 JP7470784 B2 JP 7470784B2 JP 2022520973 A JP2022520973 A JP 2022520973A JP 2022520973 A JP2022520973 A JP 2022520973A JP 7470784 B2 JP7470784 B2 JP 7470784B2
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trace
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JP2023501062A (ja
JP2023501062A5 (enExample
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バーチ，リチャード
デイビッド，ジェフェリー，ディー．
チュー，チン
智土 本田
チェオン，リン，リー
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ピーディーエフ ソリューションズ，インコーポレイテッド
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/079—Root cause analysis, i.e. error or fault diagnosis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0706—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation the processing taking place on a specific hardware platform or in a specific software environment
    • G06F11/0736—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation the processing taking place on a specific hardware platform or in a specific software environment in functional embedded systems, i.e. in a data processing system designed as a combination of hardware and software dedicated to performing a certain function
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0751—Error or fault detection not based on redundancy
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0766—Error or fault reporting or storing
    • G06F11/0778—Dumping, i.e. gathering error/state information after a fault for later diagnosis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/21—Design or setup of recognition systems or techniques; Extraction of features in feature space; Blind source separation
    • G06F18/211—Selection of the most significant subset of features
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/40—Software arrangements specially adapted for pattern recognition, e.g. user interfaces or toolboxes therefor
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/045—Combinations of networks
    • G06N3/0455—Auto-encoder networks; Encoder-decoder networks
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/0464—Convolutional networks [CNN, ConvNet]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G06N3/0895—Weakly supervised learning, e.g. semi-supervised or self-supervised learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G06N3/09—Supervised learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G06N3/091—Active learning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
    • G06F3/0481—Interaction techniques based on graphical user interfaces [GUI] based on specific properties of the displayed interaction object or a metaphor-based environment, e.g. interaction with desktop elements like windows or icons, or assisted by a cursor's changing behaviour or appearance
    • G06F3/0482—Interaction with lists of selectable items, e.g. menus
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N7/00—Computing arrangements based on specific mathematical models
    • G06N7/01—Probabilistic graphical models, e.g. probabilistic networks

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • Data Mining & Analysis (AREA)
  • Software Systems (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Mathematical Physics (AREA)
  • Computing Systems (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Biophysics (AREA)
  • Computational Linguistics (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Medical Informatics (AREA)
  • Evolutionary Biology (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Human Computer Interaction (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Debugging And Monitoring (AREA)
JP2022520973A 2019-10-06 2020-10-06 異常機器トレース検出および分類 Active JP7470784B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962911346P 2019-10-06 2019-10-06
US62/911,346 2019-10-06
PCT/US2020/054431 WO2021071854A1 (en) 2019-10-06 2020-10-06 Anomalous equipment trace detection and classification

Publications (3)

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JP2023501062A JP2023501062A (ja) 2023-01-18
JP2023501062A5 JP2023501062A5 (enExample) 2023-10-16
JP7470784B2 true JP7470784B2 (ja) 2024-04-18

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US (1) US11609812B2 (enExample)
JP (1) JP7470784B2 (enExample)
KR (1) KR102627062B1 (enExample)
CN (1) CN114600087A (enExample)
TW (1) TWI841793B (enExample)
WO (1) WO2021071854A1 (enExample)

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AU2022256363A1 (en) * 2021-04-14 2023-11-02 Amgen Inc. Automated outlier removal for multivariate modeling
CN113516174B (zh) * 2021-06-03 2022-04-19 清华大学 调用链异常检测方法、计算机设备以及可读存储介质
CN113807441B (zh) * 2021-09-17 2023-10-27 长鑫存储技术有限公司 半导体结构制备中的异常传感器监测方法及其装置
CN114519225B (zh) * 2022-01-20 2024-08-30 南水北调中线干线工程建设管理局 一种鲁棒的暗渠结构应力异常识别方法及系统
US11961030B2 (en) 2022-01-27 2024-04-16 Applied Materials, Inc. Diagnostic tool to tool matching methods for manufacturing equipment
US12189380B2 (en) 2022-01-27 2025-01-07 Applied Materials, Inc. Diagnostic tool to tool matching and comparative drill-down analysis methods for manufacturing equipment
US12298748B2 (en) 2022-01-27 2025-05-13 Applied Materials, Inc. Diagnostic tool to tool matching and full-trace drill-down analysis methods for manufacturing equipment
KR102705022B1 (ko) * 2022-11-28 2024-09-09 (주)위세아이텍 빅데이터 플랫폼의 지속학습을 이용한 유지보수 장치 및 방법
KR102723094B1 (ko) * 2023-05-11 2024-10-31 (주)빅아이 제품 검사장치
US12462369B2 (en) * 2023-08-16 2025-11-04 Applied Materials, Inc. Method for image-based sensor trace analysis

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JP2009237832A (ja) 2008-03-26 2009-10-15 Tokyo Gas Co Ltd 可変的予測モデル構築方法、及び、可変的予測モデル構築システム
US20170109646A1 (en) 2014-11-25 2017-04-20 Stream Mosaic, Inc. Process control techniques for semiconductor manufacturing processes
US20180039898A1 (en) 2016-08-04 2018-02-08 Adobe Systems Incorporated Anomaly detection for time series data having arbitrary seasonality
US20190146032A1 (en) 2017-09-21 2019-05-16 Pdf Solutions, Inc. Failure detection for wire bonding in semiconductors

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Publication number Publication date
KR102627062B1 (ko) 2024-01-18
KR20220070302A (ko) 2022-05-30
TW202139033A (zh) 2021-10-16
US11609812B2 (en) 2023-03-21
WO2021071854A1 (en) 2021-04-15
US20210103489A1 (en) 2021-04-08
TWI841793B (zh) 2024-05-11
JP2023501062A (ja) 2023-01-18
CN114600087A (zh) 2022-06-07

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