CN114600087A - 异常设备迹线检测和分类 - Google Patents

异常设备迹线检测和分类 Download PDF

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Publication number
CN114600087A
CN114600087A CN202080075571.5A CN202080075571A CN114600087A CN 114600087 A CN114600087 A CN 114600087A CN 202080075571 A CN202080075571 A CN 202080075571A CN 114600087 A CN114600087 A CN 114600087A
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China
Prior art keywords
traces
trace
anomalies
modified
additional
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CN202080075571.5A
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English (en)
Chinese (zh)
Inventor
R·伯奇
J·D·大卫
朱青
本田智纪
L·L·郑
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Pdf Decision Co
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Pdf Decision Co
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    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00Error detection; Error correction; Monitoring
    • G06F11/07Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/079Root cause analysis, i.e. error or fault diagnosis
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00Error detection; Error correction; Monitoring
    • G06F11/07Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0706Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation the processing taking place on a specific hardware platform or in a specific software environment
    • G06F11/0736Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation the processing taking place on a specific hardware platform or in a specific software environment in functional embedded systems, i.e. in a data processing system designed as a combination of hardware and software dedicated to performing a certain function
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00Error detection; Error correction; Monitoring
    • G06F11/07Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0751Error or fault detection not based on redundancy
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00Error detection; Error correction; Monitoring
    • G06F11/07Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0766Error or fault reporting or storing
    • G06F11/0778Dumping, i.e. gathering error/state information after a fault for later diagnosis
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00Pattern recognition
    • G06F18/20Analysing
    • G06F18/21Design or setup of recognition systems or techniques; Extraction of features in feature space; Blind source separation
    • G06F18/211Selection of the most significant subset of features
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00Pattern recognition
    • G06F18/20Analysing
    • G06F18/24Classification techniques
    • G06F18/241Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00Pattern recognition
    • G06F18/40Software arrangements specially adapted for pattern recognition, e.g. user interfaces or toolboxes therefor
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00Machine learning
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/04Architecture, e.g. interconnection topology
    • G06N3/045Combinations of networks
    • G06N3/0455Auto-encoder networks; Encoder-decoder networks
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/04Architecture, e.g. interconnection topology
    • G06N3/0464Convolutional networks [CNN, ConvNet]
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/08Learning methods
    • G06N3/0895Weakly supervised learning, e.g. semi-supervised or self-supervised learning
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/08Learning methods
    • G06N3/09Supervised learning
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/08Learning methods
    • G06N3/091Active learning
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048Interaction techniques based on graphical user interfaces [GUI]
    • G06F3/0481Interaction techniques based on graphical user interfaces [GUI] based on specific properties of the displayed interaction object or a metaphor-based environment, e.g. interaction with desktop elements like windows or icons, or assisted by a cursor's changing behaviour or appearance
    • G06F3/0482Interaction with lists of selectable items, e.g. menus
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00Computing arrangements based on biological models
    • G06N3/02Neural networks
    • G06N3/08Learning methods
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N7/00Computing arrangements based on specific mathematical models
    • G06N7/01Probabilistic graphical models, e.g. probabilistic networks

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • Data Mining & Analysis (AREA)
  • Software Systems (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Mathematical Physics (AREA)
  • Computing Systems (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Biophysics (AREA)
  • Computational Linguistics (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Medical Informatics (AREA)
  • Evolutionary Biology (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Human Computer Interaction (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Debugging And Monitoring (AREA)
CN202080075571.5A 2019-10-06 2020-10-06 异常设备迹线检测和分类 Pending CN114600087A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962911346P 2019-10-06 2019-10-06
US62/911,346 2019-10-06
PCT/US2020/054431 WO2021071854A1 (en) 2019-10-06 2020-10-06 Anomalous equipment trace detection and classification

Publications (1)

Publication Number Publication Date
CN114600087A true CN114600087A (zh) 2022-06-07

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US (1) US11609812B2 (enExample)
JP (1) JP7470784B2 (enExample)
KR (1) KR102627062B1 (enExample)
CN (1) CN114600087A (enExample)
TW (1) TWI841793B (enExample)
WO (1) WO2021071854A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11176019B2 (en) * 2020-04-01 2021-11-16 International Business Machines Corporation Automated breakpoint creation
AU2022256363A1 (en) * 2021-04-14 2023-11-02 Amgen Inc. Automated outlier removal for multivariate modeling
CN113516174B (zh) * 2021-06-03 2022-04-19 清华大学 调用链异常检测方法、计算机设备以及可读存储介质
CN113807441B (zh) * 2021-09-17 2023-10-27 长鑫存储技术有限公司 半导体结构制备中的异常传感器监测方法及其装置
CN114519225B (zh) * 2022-01-20 2024-08-30 南水北调中线干线工程建设管理局 一种鲁棒的暗渠结构应力异常识别方法及系统
US11961030B2 (en) 2022-01-27 2024-04-16 Applied Materials, Inc. Diagnostic tool to tool matching methods for manufacturing equipment
US12189380B2 (en) 2022-01-27 2025-01-07 Applied Materials, Inc. Diagnostic tool to tool matching and comparative drill-down analysis methods for manufacturing equipment
US12298748B2 (en) 2022-01-27 2025-05-13 Applied Materials, Inc. Diagnostic tool to tool matching and full-trace drill-down analysis methods for manufacturing equipment
KR102705022B1 (ko) * 2022-11-28 2024-09-09 (주)위세아이텍 빅데이터 플랫폼의 지속학습을 이용한 유지보수 장치 및 방법
KR102723094B1 (ko) * 2023-05-11 2024-10-31 (주)빅아이 제품 검사장치
US12462369B2 (en) * 2023-08-16 2025-11-04 Applied Materials, Inc. Method for image-based sensor trace analysis

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060282708A1 (en) * 2005-06-10 2006-12-14 Nec Laboratories America, Inc. System and method for detecting faults in a system
CN106104496A (zh) * 2014-03-18 2016-11-09 微软技术许可有限责任公司 用于任意时序的不受监督的异常检测
US20170109646A1 (en) * 2014-11-25 2017-04-20 Stream Mosaic, Inc. Process control techniques for semiconductor manufacturing processes
CN107440679A (zh) * 2016-05-31 2017-12-08 意法半导体股份有限公司 用于检测心电图异常的方法及对应系统
US20180032905A1 (en) * 2016-07-29 2018-02-01 Appdynamics Llc Adaptive Anomaly Grouping
US20190146032A1 (en) * 2017-09-21 2019-05-16 Pdf Solutions, Inc. Failure detection for wire bonding in semiconductors
WO2019145018A1 (en) * 2018-01-23 2019-08-01 Siemens Aktiengesellschaft System, device and method for detecting abnormal traffic events in a geographical location
US20190277913A1 (en) * 2018-03-09 2019-09-12 Streammosaic, Inc. Failure detection and classsification using sensor data and/or measurement data
US20190294538A1 (en) * 2018-03-21 2019-09-26 Sap Se Adaptive monitoring of applications

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4723466B2 (ja) * 2006-12-19 2011-07-13 三菱電機株式会社 データ処理装置及びデータ処理方法及びプログラム
JP5119022B2 (ja) * 2008-03-26 2013-01-16 東京瓦斯株式会社 可変的予測モデル構築方法、及び、可変的予測モデル構築システム
US9880842B2 (en) * 2013-03-15 2018-01-30 Intel Corporation Using control flow data structures to direct and track instruction execution
US11580375B2 (en) * 2015-12-31 2023-02-14 Kla-Tencor Corp. Accelerated training of a machine learning based model for semiconductor applications
US11023577B2 (en) * 2016-08-04 2021-06-01 Adobe Inc. Anomaly detection for time series data having arbitrary seasonality
KR102408426B1 (ko) * 2016-10-12 2022-06-10 삼성에스디에스 주식회사 설비 노화 지수를 이용한 이상 감지 방법 및 장치
KR101970619B1 (ko) * 2017-06-28 2019-04-22 한국과학기술연구원 비정상 상황 검출 방법 및 이를 수행하기 위한 시스템
KR20190040825A (ko) * 2017-10-11 2019-04-19 주식회사 씨세론 데이터 처리 방법 및 장치
CN108829933B (zh) * 2018-05-22 2023-04-07 北京天泽智云科技有限公司 一种半导体制造设备的预测性维护与健康管理的方法
US11232368B2 (en) * 2019-02-20 2022-01-25 Accenture Global Solutions Limited System for predicting equipment failure events and optimizing manufacturing operations

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060282708A1 (en) * 2005-06-10 2006-12-14 Nec Laboratories America, Inc. System and method for detecting faults in a system
CN106104496A (zh) * 2014-03-18 2016-11-09 微软技术许可有限责任公司 用于任意时序的不受监督的异常检测
US20170109646A1 (en) * 2014-11-25 2017-04-20 Stream Mosaic, Inc. Process control techniques for semiconductor manufacturing processes
CN107440679A (zh) * 2016-05-31 2017-12-08 意法半导体股份有限公司 用于检测心电图异常的方法及对应系统
US20180032905A1 (en) * 2016-07-29 2018-02-01 Appdynamics Llc Adaptive Anomaly Grouping
US20190146032A1 (en) * 2017-09-21 2019-05-16 Pdf Solutions, Inc. Failure detection for wire bonding in semiconductors
WO2019145018A1 (en) * 2018-01-23 2019-08-01 Siemens Aktiengesellschaft System, device and method for detecting abnormal traffic events in a geographical location
US20190277913A1 (en) * 2018-03-09 2019-09-12 Streammosaic, Inc. Failure detection and classsification using sensor data and/or measurement data
US20190294538A1 (en) * 2018-03-21 2019-09-26 Sap Se Adaptive monitoring of applications

Also Published As

Publication number Publication date
KR102627062B1 (ko) 2024-01-18
KR20220070302A (ko) 2022-05-30
TW202139033A (zh) 2021-10-16
US11609812B2 (en) 2023-03-21
JP7470784B2 (ja) 2024-04-18
WO2021071854A1 (en) 2021-04-15
US20210103489A1 (en) 2021-04-08
TWI841793B (zh) 2024-05-11
JP2023501062A (ja) 2023-01-18

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