KR102627062B1 - 비정상 장비 트레이스 검출 및 분류 - Google Patents

비정상 장비 트레이스 검출 및 분류 Download PDF

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KR102627062B1
KR102627062B1 KR1020227014543A KR20227014543A KR102627062B1 KR 102627062 B1 KR102627062 B1 KR 102627062B1 KR 1020227014543 A KR1020227014543 A KR 1020227014543A KR 20227014543 A KR20227014543 A KR 20227014543A KR 102627062 B1 KR102627062 B1 KR 102627062B1
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trace
traces
modified
processor
abnormalities
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KR20220070302A (ko
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리차드 버치
제프리 디. 데이비드
칭 주
토모노리 혼다
린 리 청
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피디에프 솔루션즈, 인코포레이티드
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/079—Root cause analysis, i.e. error or fault diagnosis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0706—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation the processing taking place on a specific hardware platform or in a specific software environment
    • G06F11/0736—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation the processing taking place on a specific hardware platform or in a specific software environment in functional embedded systems, i.e. in a data processing system designed as a combination of hardware and software dedicated to performing a certain function
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0751—Error or fault detection not based on redundancy
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/07—Responding to the occurrence of a fault, e.g. fault tolerance
    • G06F11/0703—Error or fault processing not based on redundancy, i.e. by taking additional measures to deal with the error or fault not making use of redundancy in operation, in hardware, or in data representation
    • G06F11/0766—Error or fault reporting or storing
    • G06F11/0778—Dumping, i.e. gathering error/state information after a fault for later diagnosis
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/21—Design or setup of recognition systems or techniques; Extraction of features in feature space; Blind source separation
    • G06F18/211—Selection of the most significant subset of features
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/40—Software arrangements specially adapted for pattern recognition, e.g. user interfaces or toolboxes therefor
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/045—Combinations of networks
    • G06N3/0455—Auto-encoder networks; Encoder-decoder networks
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/0464—Convolutional networks [CNN, ConvNet]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G06N3/0895—Weakly supervised learning, e.g. semi-supervised or self-supervised learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G06N3/09—Supervised learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G06N3/091—Active learning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
    • G06F3/0481—Interaction techniques based on graphical user interfaces [GUI] based on specific properties of the displayed interaction object or a metaphor-based environment, e.g. interaction with desktop elements like windows or icons, or assisted by a cursor's changing behaviour or appearance
    • G06F3/0482—Interaction with lists of selectable items, e.g. menus
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N7/00—Computing arrangements based on specific mathematical models
    • G06N7/01—Probabilistic graphical models, e.g. probabilistic networks

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • Data Mining & Analysis (AREA)
  • Software Systems (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Mathematical Physics (AREA)
  • Computing Systems (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Biophysics (AREA)
  • Computational Linguistics (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Medical Informatics (AREA)
  • Evolutionary Biology (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Human Computer Interaction (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Debugging And Monitoring (AREA)
KR1020227014543A 2019-10-06 2020-10-06 비정상 장비 트레이스 검출 및 분류 Active KR102627062B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962911346P 2019-10-06 2019-10-06
US62/911,346 2019-10-06
PCT/US2020/054431 WO2021071854A1 (en) 2019-10-06 2020-10-06 Anomalous equipment trace detection and classification

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KR20220070302A KR20220070302A (ko) 2022-05-30
KR102627062B1 true KR102627062B1 (ko) 2024-01-18

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US (1) US11609812B2 (enExample)
JP (1) JP7470784B2 (enExample)
KR (1) KR102627062B1 (enExample)
CN (1) CN114600087A (enExample)
TW (1) TWI841793B (enExample)
WO (1) WO2021071854A1 (enExample)

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CN113516174B (zh) * 2021-06-03 2022-04-19 清华大学 调用链异常检测方法、计算机设备以及可读存储介质
CN113807441B (zh) * 2021-09-17 2023-10-27 长鑫存储技术有限公司 半导体结构制备中的异常传感器监测方法及其装置
CN114519225B (zh) * 2022-01-20 2024-08-30 南水北调中线干线工程建设管理局 一种鲁棒的暗渠结构应力异常识别方法及系统
US11961030B2 (en) 2022-01-27 2024-04-16 Applied Materials, Inc. Diagnostic tool to tool matching methods for manufacturing equipment
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US12298748B2 (en) 2022-01-27 2025-05-13 Applied Materials, Inc. Diagnostic tool to tool matching and full-trace drill-down analysis methods for manufacturing equipment
KR102705022B1 (ko) * 2022-11-28 2024-09-09 (주)위세아이텍 빅데이터 플랫폼의 지속학습을 이용한 유지보수 장치 및 방법
KR102723094B1 (ko) * 2023-05-11 2024-10-31 (주)빅아이 제품 검사장치
US12462369B2 (en) * 2023-08-16 2025-11-04 Applied Materials, Inc. Method for image-based sensor trace analysis

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Publication number Publication date
KR20220070302A (ko) 2022-05-30
TW202139033A (zh) 2021-10-16
US11609812B2 (en) 2023-03-21
JP7470784B2 (ja) 2024-04-18
WO2021071854A1 (en) 2021-04-15
US20210103489A1 (en) 2021-04-08
TWI841793B (zh) 2024-05-11
JP2023501062A (ja) 2023-01-18
CN114600087A (zh) 2022-06-07

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