JP7469677B2 - 窒化物半導体素子 - Google Patents

窒化物半導体素子 Download PDF

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Publication number
JP7469677B2
JP7469677B2 JP2021561451A JP2021561451A JP7469677B2 JP 7469677 B2 JP7469677 B2 JP 7469677B2 JP 2021561451 A JP2021561451 A JP 2021561451A JP 2021561451 A JP2021561451 A JP 2021561451A JP 7469677 B2 JP7469677 B2 JP 7469677B2
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layer
nitride semiconductor
intermediate layer
light
light emitting
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Japanese (ja)
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JPWO2021106928A1 (enExample
Inventor
宏樹 近藤
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Nichia Corp
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Nichia Corp
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/822—Materials of the light-emitting regions
    • H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/018—Bonding of wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/032—Manufacture or treatment of electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/83—Electrodes
    • H10H20/831—Electrodes characterised by their shape

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  • Led Devices (AREA)
  • Semiconductor Lasers (AREA)
JP2021561451A 2019-11-26 2020-11-25 窒化物半導体素子 Active JP7469677B2 (ja)

Priority Applications (1)

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JP2024007974A JP7659213B2 (ja) 2019-11-26 2024-01-23 窒化物半導体素子

Applications Claiming Priority (5)

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JP2019213474 2019-11-26
JP2019213474 2019-11-26
JP2020123823 2020-07-20
JP2020123823 2020-07-20
PCT/JP2020/043810 WO2021106928A1 (ja) 2019-11-26 2020-11-25 窒化物半導体素子

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JPWO2021106928A1 JPWO2021106928A1 (enExample) 2021-06-03
JP7469677B2 true JP7469677B2 (ja) 2024-04-17

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JP2024007974A Active JP7659213B2 (ja) 2019-11-26 2024-01-23 窒化物半導体素子

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US (1) US20220271199A1 (enExample)
JP (2) JP7469677B2 (enExample)
CN (1) CN114730818B (enExample)
WO (1) WO2021106928A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4250380B1 (en) 2022-02-16 2025-07-30 Nichia Corporation Light emitting element

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WO2003103062A1 (en) 2002-06-04 2003-12-11 Nitride Semiconductors Co.,Ltd. Gallium nitride compound semiconductor device and manufacturing method
JP2005507155A (ja) 2001-05-30 2005-03-10 クリー　インコーポレイテッド 量子井戸と超格子とを有するｉｉｉ族窒化物系発光ダイオード構造
JP2007123878A (ja) 2005-10-25 2007-05-17 Samsung Electro Mech Co Ltd 窒化物半導体発光素子
JP2008103711A (ja) 2006-10-20 2008-05-01 Samsung Electronics Co Ltd 半導体発光素子
JP2010541223A (ja) 2007-09-26 2010-12-24 オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング 多重量子井戸構造を有するオプトエレクトロニクス半導体チップ
WO2011058682A1 (ja) 2009-11-12 2011-05-19 パナソニック株式会社 窒化ガリウム系化合物半導体発光素子
US20110187294A1 (en) 2010-02-03 2011-08-04 Michael John Bergmann Group iii nitride based light emitting diode structures with multiple quantum well structures having varying well thicknesses
JP2011198859A (ja) 2010-03-17 2011-10-06 Toshiba Corp 半導体発光素子、ウェーハ、半導体発光素子の製造方法及びウェーハの製造方法
JP2012119481A (ja) 2010-11-30 2012-06-21 Mitsubishi Chemicals Corp 半導体発光素子および半導体発光素子の製造方法
JP2013012684A (ja) 2011-06-30 2013-01-17 Sharp Corp 窒化物半導体発光素子
JP2013038394A (ja) 2011-07-14 2013-02-21 Rohm Co Ltd 半導体レーザ素子
JP2013041930A (ja) 2011-08-12 2013-02-28 Sharp Corp 窒化物半導体発光素子およびその製造方法
JP2013065630A (ja) 2011-09-15 2013-04-11 Toshiba Corp 半導体発光素子、ウェーハ、半導体発光素子の製造方法及びウェーハの製造方法
JP2015177025A (ja) 2014-03-14 2015-10-05 株式会社東芝 光半導体素子
US20160087142A1 (en) 2013-04-29 2016-03-24 Osram Opto Semiconductors Gmbh Semiconductor layer sequence and method for operating an optoelectronic component
JP2016219547A (ja) 2015-05-18 2016-12-22 ローム株式会社 半導体発光素子
CN108321280A (zh) 2018-03-21 2018-07-24 华南理工大学 一种非极性紫外led及其制备方法
WO2019168273A1 (ko) 2018-02-28 2019-09-06 주식회사 에스비케이머티리얼즈 자외선 발광 소자

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JPH07170022A (ja) * 1993-12-16 1995-07-04 Mitsubishi Electric Corp 半導体レーザ装置
JP4629178B2 (ja) * 1998-10-06 2011-02-09 日亜化学工業株式会社 窒化物半導体素子
JP3912043B2 (ja) 2001-04-25 2007-05-09 豊田合成株式会社 Ｉｉｉ族窒化物系化合物半導体発光素子
JP2006324685A (ja) * 2002-07-08 2006-11-30 Nichia Chem Ind Ltd 窒化物半導体素子の製造方法及び窒化物半導体素子
JP4960465B2 (ja) 2010-02-16 2012-06-27 株式会社東芝 半導体発光素子
JP5417307B2 (ja) * 2010-12-02 2014-02-12 株式会社東芝 半導体発光素子
KR20120072568A (ko) * 2010-12-24 2012-07-04 엘지디스플레이 주식회사 질화물 반도체 발광소자
US10134948B2 (en) 2011-02-25 2018-11-20 Sensor Electronic Technology, Inc. Light emitting diode with polarization control
KR20130069157A (ko) * 2011-12-16 2013-06-26 서울옵토디바이스주식회사 발광소자
CN103460411A (zh) * 2012-03-05 2013-12-18 松下电器产业株式会社 氮化物半导体发光元件、光源及其制造方法
CN104272477B (zh) * 2012-10-19 2017-11-10 夏普株式会社 氮化物半导体发光元件
US9124071B2 (en) * 2012-11-27 2015-09-01 Nichia Corporation Nitride semiconductor laser element
JP5800252B2 (ja) 2013-03-25 2015-10-28 ウシオ電機株式会社 Ｌｅｄ素子
KR102317473B1 (ko) * 2015-03-19 2021-10-27 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 자외선 발광소자 및 조명시스템
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Publication number Priority date Publication date Assignee Title
JP2003520453A (ja) 2000-01-24 2003-07-02 ルミレッズ ライティング ユーエス リミテッドライアビリティ カンパニー チャーピングされた多層井戸活性領域ｌｅｄ
JP2005507155A (ja) 2001-05-30 2005-03-10 クリー　インコーポレイテッド 量子井戸と超格子とを有するｉｉｉ族窒化物系発光ダイオード構造
WO2003103062A1 (en) 2002-06-04 2003-12-11 Nitride Semiconductors Co.,Ltd. Gallium nitride compound semiconductor device and manufacturing method
JP2007123878A (ja) 2005-10-25 2007-05-17 Samsung Electro Mech Co Ltd 窒化物半導体発光素子
JP2008103711A (ja) 2006-10-20 2008-05-01 Samsung Electronics Co Ltd 半導体発光素子
JP2010541223A (ja) 2007-09-26 2010-12-24 オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング 多重量子井戸構造を有するオプトエレクトロニクス半導体チップ
WO2011058682A1 (ja) 2009-11-12 2011-05-19 パナソニック株式会社 窒化ガリウム系化合物半導体発光素子
US20110187294A1 (en) 2010-02-03 2011-08-04 Michael John Bergmann Group iii nitride based light emitting diode structures with multiple quantum well structures having varying well thicknesses
JP2011198859A (ja) 2010-03-17 2011-10-06 Toshiba Corp 半導体発光素子、ウェーハ、半導体発光素子の製造方法及びウェーハの製造方法
JP2012119481A (ja) 2010-11-30 2012-06-21 Mitsubishi Chemicals Corp 半導体発光素子および半導体発光素子の製造方法
JP2013012684A (ja) 2011-06-30 2013-01-17 Sharp Corp 窒化物半導体発光素子
JP2013038394A (ja) 2011-07-14 2013-02-21 Rohm Co Ltd 半導体レーザ素子
JP2013041930A (ja) 2011-08-12 2013-02-28 Sharp Corp 窒化物半導体発光素子およびその製造方法
JP2013065630A (ja) 2011-09-15 2013-04-11 Toshiba Corp 半導体発光素子、ウェーハ、半導体発光素子の製造方法及びウェーハの製造方法
US20160087142A1 (en) 2013-04-29 2016-03-24 Osram Opto Semiconductors Gmbh Semiconductor layer sequence and method for operating an optoelectronic component
JP2015177025A (ja) 2014-03-14 2015-10-05 株式会社東芝 光半導体素子
JP2016219547A (ja) 2015-05-18 2016-12-22 ローム株式会社 半導体発光素子
WO2019168273A1 (ko) 2018-02-28 2019-09-06 주식회사 에스비케이머티리얼즈 자외선 발광 소자
CN108321280A (zh) 2018-03-21 2018-07-24 华南理工大学 一种非极性紫外led及其制备方法

Also Published As

Publication number Publication date
CN114730818B (zh) 2025-07-15
CN114730818A (zh) 2022-07-08
JPWO2021106928A1 (enExample) 2021-06-03
US20220271199A1 (en) 2022-08-25
JP2024042006A (ja) 2024-03-27
JP7659213B2 (ja) 2025-04-09
WO2021106928A1 (ja) 2021-06-03

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