JP7458332B2 - 半導体発光装置 - Google Patents
半導体発光装置 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 91
- 239000013078 crystal Substances 0.000 claims description 107
- 230000004888 barrier function Effects 0.000 claims description 80
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 60
- 239000000758 substrate Substances 0.000 claims description 60
- 239000000203 mixture Substances 0.000 claims description 34
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 28
- 229910052760 oxygen Inorganic materials 0.000 claims description 28
- 239000001301 oxygen Substances 0.000 claims description 28
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 24
- 238000005253 cladding Methods 0.000 description 25
- 150000001875 compounds Chemical class 0.000 description 20
- 230000003287 optical effect Effects 0.000 description 10
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000002441 X-ray diffraction Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 4
- 238000003917 TEM image Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910018516 Al—O Inorganic materials 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- ZSBXGIUJOOQZMP-JLNYLFASSA-N Matrine Chemical compound C1CC[C@H]2CN3C(=O)CCC[C@@H]3[C@@H]3[C@H]2N1CCC3 ZSBXGIUJOOQZMP-JLNYLFASSA-N 0.000 description 1
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
- H01L33/145—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure with a current-blocking structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/025—Physical imperfections, e.g. particular concentration or distribution of impurities
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
- Semiconductor Lasers (AREA)
Description
量子井戸層103aは、例えば、組成式In0.2Ga0.8Asで表されるInGaAs混晶を含む。障壁層103bは、例えば、組成式GaAs0.9P0.1で表されるGaAsP混晶を含む。
半導体発光装置1は、障壁層103bの層厚dbarを、9.1nm、20nmおよび30nmと変化させた歪補償型MQW構造を含む。
図3(b)および(c)は、高速フーリエ変換マッピング(Fast Fourier Transform Mapping:FFTM)を用いて可視化した格子間隔を表すヒートマップである。図3(b)および(c)に示す格子間隔は、図3(a)の断面TEM像を基にフーリエ変換解析を行うことにより得られたものである。この例に示す発光層103は、層厚dbar=30nmの障壁層103bを含む。
ここで、化合物半導体混晶の弾性定数と格子変形量の関係は次式により表される。
ここで、asは、GaAs基板101の格子定数である。△aは、格子変形の無い化合物半導体混晶の格子定数と、GaAs基板の格子定数asとの差である。△a⊥は、格子変形した化合物半導体混晶の積層方向における格子間隔と、GaAs基板101の格子定数asとの差である。Cijは、弾性スチフネス定数である。
化合物半導体結晶中の積層方向における歪量は、例えば、歪率εと層厚の積で表される。例えば、量子井戸層103aにおける歪率をεwellとし、障壁層103bにおける歪率をεbarとすると、量子井戸層103aと障壁層103bとの間の歪量のバランスは、次式により定義される。
ここで、dwellは、量子井戸層103aの層厚であり、dbarは、障壁層103bの層厚である。例えば、量子井戸層103aにおいて、発光波長~950nmを得るためにIn0.2Ga0.8As混晶の層厚dwellを5.8nmとすると、歪バランス下におけるGaAs0.9P0.1混晶(障壁層103b)の層厚dbarは、22.8nmとなる。
図7に示すように、半導体発光装置1は、メサ型発光体110と、n側電極601とp側電極602とを備える。
Claims (5)
- 半導体基板と、
前記半導体基板上に設けられた発光層であって、
前記半導体基板から前記発光層に向かう第1方向に交互に積層され、互いに接する量子井戸層と障壁層とを含み、
前記量子井戸層は、前記半導体基板の格子定数よりも大きい格子定数を有する第1半導体混晶を含み、前記第1方向の第1層厚を有し、前記第1方向における前記第1半導体混晶の格子間隔と前記半導体基板の前記格子定数との差の絶対値を前記第1半導体混晶の前記格子間隔で除した第1歪率と、前記第1層厚と、の積である第1歪量を有し、
前記障壁層は、前記半導体基板の前記格子定数よりも小さい格子定数を有する第2半導体混晶を含み、前記第1方向の第2層厚を有し、前記第1方向における前記第2半導体混晶の格子間隔と前記半導体基板の前記格子定数との差の絶対値を前記第2半導体混晶の前記格子間隔で除した第2歪率と、前記第2層厚と、の積である第2歪量を有し、
前記量子井戸層および前記障壁層は、前記第1歪量が前記第2歪量よりも大きくなるように設けられる、前記発光層と、
を備え、
前記第1方向における前記量子井戸層の格子間隔は、前記第1方向における前記半導体基板の格子間隔よりも広く、
前記第1方向における前記障壁層の格子間隔は、前記第1方向における前記半導体基板の前記格子間隔よりも狭く、
前記第1方向と垂直にある第2方向における前記量子井戸層の格子間隔と、前記第2方向における前記障壁層の格子間隔と、の差は、前記第1方向における前記量子井戸層の前記格子間隔と、前記第1方向における前記半導体基板の前記格子間隔と、の差よりも小さく、且つ、前記第1方向における前記障壁層の前記格子間隔と、前記第1方向における前記半導体基板の前記格子間隔と、の差よりも小さく、
前記第1半導体混晶および前記第2半導体混晶は、酸素を含み、
前記酸素の濃度は、2.5×1015cm-3よりも高く、1.0×1017cm-3以下である半導体発光ダイオード。 - 前記第1半導体混晶は、組成式InXGa1-XAs(0<X<1)で表されるInGaAs混晶であり、
前記第2半導体混晶は、組成式GaAs1-YPY(0<Y<1)で表されるGaAsP混晶および組成式AlZGa1-ZAs1-YPY(0<Y<1、0<Z<1)で表されるAlGaAsP混晶のいずれかであり、
前記第2方向における前記量子井戸層の格子間隔と、前記第2方向における前記障壁層の格子間隔と、前記第2方向における前記半導体基板の格子間隔と、は整合している請求項1記載の半導体発光ダイオード。 - 前記障壁層の前記第2層厚は、前記第1歪量を前記第2歪率で除した値の0.53~1.0倍の範囲にある請求項1または2に記載の半導体発光ダイオード。
- 前記量子井戸層は、前記発光層から放出される光の波長が900nmよりも長く、1000nmよりも短くなるように設けられる前記第1半導体混晶および前記第1層厚を有する請求項1~3のいずれか1つに記載の半導体発光ダイオード。
- 前記半導体基板は、前記発光層から放出される光を透過する請求項1~4のいずれか1つに記載の半導体発光ダイオード。
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CN202110811090.2A CN114765236A (zh) | 2021-01-15 | 2021-07-19 | 半导体发光装置 |
US17/461,874 US11728458B2 (en) | 2021-01-15 | 2021-08-30 | Semiconductor light-emitting device |
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JP4554526B2 (ja) | 2006-01-25 | 2010-09-29 | アンリツ株式会社 | 半導体発光素子 |
JP2010118454A (ja) * | 2008-11-12 | 2010-05-27 | Sumitomo Electric Device Innovations Inc | 半導体レーザ |
JP2010258134A (ja) | 2009-04-23 | 2010-11-11 | Sumitomo Electric Ind Ltd | 量子井戸構造、半導体レーザ、化合物半導体層を製造する方法及びmbe装置の状態を管理する方法 |
JP6213729B2 (ja) | 2013-10-18 | 2017-10-18 | 富士ゼロックス株式会社 | 面発光型半導体レーザ、面発光型半導体レーザ装置および光伝送装置 |
KR101916587B1 (ko) * | 2017-05-12 | 2018-11-08 | 광전자 주식회사 | 변형 보정 층을 가지는 적외선 발광 다이오드 및 그 제조 방법 |
US11984535B2 (en) * | 2018-11-05 | 2024-05-14 | Dowa Electronics Materials Co., Ltd. | III-nitride semiconductor light-emitting device comprising barrier layers and well layers and method of producing the same |
JP2021034497A (ja) | 2019-08-22 | 2021-03-01 | 株式会社東芝 | 半導体発光デバイス |
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