JP7445021B2 - 塗布処理装置、塗布処理方法及びコンピュータ記憶媒体 - Google Patents

塗布処理装置、塗布処理方法及びコンピュータ記憶媒体 Download PDF

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Publication number
JP7445021B2
JP7445021B2 JP2022575532A JP2022575532A JP7445021B2 JP 7445021 B2 JP7445021 B2 JP 7445021B2 JP 2022575532 A JP2022575532 A JP 2022575532A JP 2022575532 A JP2022575532 A JP 2022575532A JP 7445021 B2 JP7445021 B2 JP 7445021B2
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Japan
Prior art keywords
coating liquid
substrate
speed
coating
supply nozzle
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Active
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JP2022575532A
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English (en)
Japanese (ja)
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JPWO2022153887A1 (enExample
Inventor
翔吾 稲葉
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2024025683A priority Critical patent/JP7792448B2/ja
Application granted granted Critical
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B05C11/1023—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target responsive to velocity of target, e.g. to web advancement rate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0204—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to the edges of essentially flat articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
    • B05C5/0216—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP2022575532A 2021-01-12 2022-01-04 塗布処理装置、塗布処理方法及びコンピュータ記憶媒体 Active JP7445021B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024025683A JP7792448B2 (ja) 2021-01-12 2024-02-22 塗布処理方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021003100 2021-01-12
JP2021003100 2021-01-12
PCT/JP2022/000015 WO2022153887A1 (ja) 2021-01-12 2022-01-04 塗布処理装置、塗布処理方法及びコンピュータ記憶媒体

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024025683A Division JP7792448B2 (ja) 2021-01-12 2024-02-22 塗布処理方法

Publications (2)

Publication Number Publication Date
JPWO2022153887A1 JPWO2022153887A1 (enExample) 2022-07-21
JP7445021B2 true JP7445021B2 (ja) 2024-03-06

Family

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JP2022575532A Active JP7445021B2 (ja) 2021-01-12 2022-01-04 塗布処理装置、塗布処理方法及びコンピュータ記憶媒体
JP2024025683A Active JP7792448B2 (ja) 2021-01-12 2024-02-22 塗布処理方法

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JP2024025683A Active JP7792448B2 (ja) 2021-01-12 2024-02-22 塗布処理方法

Country Status (6)

Country Link
US (1) US20240050977A1 (enExample)
JP (2) JP7445021B2 (enExample)
KR (1) KR20230130032A (enExample)
CN (1) CN116723900A (enExample)
TW (2) TW202605901A (enExample)
WO (1) WO2022153887A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024127644A (ja) * 2023-03-09 2024-09-20 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020177982A (ja) 2019-04-16 2020-10-29 東京エレクトロン株式会社 塗布膜形成方法及び塗布膜形成装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5745964B2 (ja) * 2011-07-22 2015-07-08 ラピスセミコンダクタ株式会社 半導体装置の製造方法及び半導体製造装置
JP5682521B2 (ja) 2011-09-14 2015-03-11 東京エレクトロン株式会社 周縁部塗布装置、周縁部塗布方法及び記憶媒体
JP5779168B2 (ja) * 2012-12-04 2015-09-16 東京エレクトロン株式会社 周縁部塗布装置、周縁部塗布方法及び周縁部塗布用記録媒体
JP6059793B2 (ja) * 2015-12-11 2017-01-11 東京エレクトロン株式会社 塗布処理方法、コンピュータ記憶媒体及び塗布処理装置
JP6439766B2 (ja) * 2016-09-23 2018-12-19 東京エレクトロン株式会社 塗布、現像方法及び塗布、現像装置
JP6765009B2 (ja) * 2017-05-12 2020-10-07 東京エレクトロン株式会社 基板処理装置、基板処理方法及び記憶媒体
JP6899265B2 (ja) * 2017-06-27 2021-07-07 東京エレクトロン株式会社 塗布処理方法、塗布処理装置及び記憶媒体
WO2019167845A1 (ja) * 2018-02-27 2019-09-06 パナソニックＩｐマネジメント株式会社 管理装置、管理方法及び部品実装システム
JP7088810B2 (ja) * 2018-11-07 2022-06-21 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置
JP7202901B2 (ja) * 2019-01-18 2023-01-12 東京エレクトロン株式会社 塗布膜形成方法及び塗布膜形成装置
JP7202968B2 (ja) * 2019-05-09 2023-01-12 東京エレクトロン株式会社 塗布処理方法、塗布処理装置及び記憶媒体
KR102207602B1 (ko) * 2019-05-29 2021-01-26 주식회사 테토스 기판 측면부 배선 형성 방법

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020177982A (ja) 2019-04-16 2020-10-29 東京エレクトロン株式会社 塗布膜形成方法及び塗布膜形成装置

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Publication number Publication date
WO2022153887A1 (ja) 2022-07-21
JP2024059806A (ja) 2024-05-01
JP7792448B2 (ja) 2025-12-25
CN116723900A (zh) 2023-09-08
TW202605901A (zh) 2026-02-01
US20240050977A1 (en) 2024-02-15
TWI905353B (zh) 2025-11-21
KR20230130032A (ko) 2023-09-11
TW202241228A (zh) 2022-10-16
JPWO2022153887A1 (enExample) 2022-07-21

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