JP7430902B2 - ウェハ処理装置、及び流体排出装置 - Google Patents

ウェハ処理装置、及び流体排出装置 Download PDF

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JP7430902B2
JP7430902B2 JP2020062496A JP2020062496A JP7430902B2 JP 7430902 B2 JP7430902 B2 JP 7430902B2 JP 2020062496 A JP2020062496 A JP 2020062496A JP 2020062496 A JP2020062496 A JP 2020062496A JP 7430902 B2 JP7430902 B2 JP 7430902B2
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fluid
pressure
chamber
temperature
regulating valve
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JP2021163823A5 (enExample
JP2021163823A (ja
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正晃 一二三
大輔 宮本
弘祐 兵頭
博文 関口
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Rexxam Co Ltd
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Rexxam Co Ltd
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Priority to JP2020062496A priority Critical patent/JP7430902B2/ja
Priority to PCT/JP2021/002169 priority patent/WO2021199611A1/ja
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JP2020062496A 2020-03-31 2020-03-31 ウェハ処理装置、及び流体排出装置 Active JP7430902B2 (ja)

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JP2020062496A JP7430902B2 (ja) 2020-03-31 2020-03-31 ウェハ処理装置、及び流体排出装置
PCT/JP2021/002169 WO2021199611A1 (ja) 2020-03-31 2021-01-22 ウェハ処理装置、流体排出装置、流体供給装置、及び流体供給方法

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JP2020062496A JP7430902B2 (ja) 2020-03-31 2020-03-31 ウェハ処理装置、及び流体排出装置

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JP2021163823A JP2021163823A (ja) 2021-10-11
JP2021163823A5 JP2021163823A5 (enExample) 2023-03-31
JP7430902B2 true JP7430902B2 (ja) 2024-02-14

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005142301A (ja) 2003-11-05 2005-06-02 Kobe Steel Ltd 高圧処理方法、及び高圧処理装置
JP2007152195A (ja) 2005-12-02 2007-06-21 Ryusyo Industrial Co Ltd 超臨界流体洗浄装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012049446A (ja) * 2010-08-30 2012-03-08 Toshiba Corp 超臨界乾燥方法及び超臨界乾燥システム
JP5458314B2 (ja) * 2011-06-30 2014-04-02 セメス株式会社 基板処理装置及び超臨界流体排出方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005142301A (ja) 2003-11-05 2005-06-02 Kobe Steel Ltd 高圧処理方法、及び高圧処理装置
JP2007152195A (ja) 2005-12-02 2007-06-21 Ryusyo Industrial Co Ltd 超臨界流体洗浄装置

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