JP7425443B2 - wrap tools - Google Patents
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- JP7425443B2 JP7425443B2 JP2020106357A JP2020106357A JP7425443B2 JP 7425443 B2 JP7425443 B2 JP 7425443B2 JP 2020106357 A JP2020106357 A JP 2020106357A JP 2020106357 A JP2020106357 A JP 2020106357A JP 7425443 B2 JP7425443 B2 JP 7425443B2
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- 229910001018 Cast iron Inorganic materials 0.000 claims description 151
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 116
- 229910002804 graphite Inorganic materials 0.000 claims description 86
- 239000010439 graphite Substances 0.000 claims description 86
- 239000011572 manganese Substances 0.000 claims description 46
- 239000011777 magnesium Substances 0.000 claims description 37
- 229910052710 silicon Inorganic materials 0.000 claims description 34
- 229910052748 manganese Inorganic materials 0.000 claims description 33
- 229910052717 sulfur Inorganic materials 0.000 claims description 31
- 239000010949 copper Substances 0.000 claims description 30
- 229910052698 phosphorus Inorganic materials 0.000 claims description 29
- 229910052799 carbon Inorganic materials 0.000 claims description 26
- 239000010703 silicon Substances 0.000 claims description 25
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 24
- 239000011593 sulfur Substances 0.000 claims description 24
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 23
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 22
- 229910052802 copper Inorganic materials 0.000 claims description 22
- 229910052749 magnesium Inorganic materials 0.000 claims description 22
- 239000011574 phosphorus Substances 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 17
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 15
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 15
- 238000005260 corrosion Methods 0.000 claims description 7
- 230000007797 corrosion Effects 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 239000011651 chromium Substances 0.000 claims description 5
- 239000000654 additive Substances 0.000 claims description 4
- 230000000996 additive effect Effects 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 238000005498 polishing Methods 0.000 description 69
- 239000006061 abrasive grain Substances 0.000 description 34
- 230000000052 comparative effect Effects 0.000 description 25
- 230000003746 surface roughness Effects 0.000 description 14
- 238000001000 micrograph Methods 0.000 description 12
- 239000003795 chemical substances by application Substances 0.000 description 11
- 239000000203 mixture Substances 0.000 description 10
- 229910052594 sapphire Inorganic materials 0.000 description 10
- 239000010980 sapphire Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 239000002054 inoculum Substances 0.000 description 9
- 239000002245 particle Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 7
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000013016 damping Methods 0.000 description 3
- 238000005087 graphitization Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910001060 Gray iron Inorganic materials 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910001562 pearlite Inorganic materials 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910001141 Ductile iron Inorganic materials 0.000 description 1
- 229910000805 Pig iron Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000004154 testing of material Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Description
本発明は、ＦＣＶ鋳鉄製のラップ工具に関するものである。尚、本明細書において、「ＦＣＶ鋳鉄」とは、芋虫形状の黒鉛組織を含有する引張強度が３００ＭＰａ以上のコンパクティッド・バーミキュラ鋳鉄をいう。 The present invention relates to a lap tool made of FCV cast iron. In this specification, "FCV cast iron" refers to compacted vermicular cast iron containing a caterpillar-shaped graphite structure and having a tensile strength of 300 MPa or more.
近年、電子機器の高機能化と省エネの観点からパワー半導体の普及が期待されており、ラッピング及びポリシングの研磨が行われている。ラッピングは、ポリシングの前加工として、直径が１０μｍ程度の砥粒を用いて行われる。ラッピングには、乾式ラッピングと湿式ラッピングがある。 In recent years, power semiconductors are expected to become popular from the viewpoint of increasing the functionality of electronic devices and saving energy, and lapping and polishing are being performed. Lapping is performed as a pre-polishing process using abrasive grains with a diameter of about 10 μm. There are two types of wrapping: dry wrapping and wet wrapping.
乾式ラッピングは、砥粒を工具上に配置して工具に埋め込んで行われる。湿式ラッピングは、水中に分散させた砥粒を用いて行われるので砥粒の分散性が良く、工業的によく用いられている。 Dry lapping is performed by placing abrasive grains on the tool and embedding it in the tool. Wet lapping is performed using abrasive grains dispersed in water, so the dispersibility of the abrasive grains is good, and it is often used industrially.
そして、ラッピング工具として、従来から鋳鉄製のラップ工具が用いられており、そのうち７割程度が球状の黒鉛を晶出させた黒鉛鋳鉄（以下「ＦＣＤ鋳鉄」と言う）製のラップ工具であり、その他は線片状の黒鉛組織を有する安価なねずみ鋳鉄（以下「ＦＣ鋳鉄」と言う）製のラップ工具である。 As lapping tools, cast iron lapping tools have traditionally been used, and about 70% of them are lapping tools made of graphite cast iron (hereinafter referred to as "FCD cast iron") made by crystallizing spherical graphite. The others are lap tools made of inexpensive gray cast iron (hereinafter referred to as "FC cast iron") having a flaky graphite structure.
殊に、ＦＣＤ鋳鉄製のラップ工具は、引張強度が４００ＭＰａ以上と高く、ＦＣ鋳鉄製のラップ工具よりも耐摩耗性に優れており、被加工材を非常に高精度な加工面に仕上げる場合などに用いられており（特許文献１）、ＦＣ鋳鉄製のラップ工具の引張強度は約４００ＭＰａ未満であるが、反面、成形が容易なことから、レンズの球面の光学部品等のラッピングによく用いられている。 In particular, lap tools made of FCD cast iron have a high tensile strength of over 400 MPa, and have superior wear resistance than lap tools made of FC cast iron, making them ideal for finishing workpieces with extremely high-precision machined surfaces. (Patent Document 1), and the tensile strength of FC cast iron wrapping tools is less than about 400 MPa, but on the other hand, because it is easy to mold, it is often used for wrapping spherical optical components such as lenses. ing.
ところで、湿式ラッピングは工具と被加工材との間で砥粒が転動して研磨を行うものであり、工具にひっかかった砥粒が多ければ多いほど、工具との滑りがなくなるため除去量が増えるという現象が生じる。 By the way, in wet lapping, abrasive grains roll between the tool and the workpiece to perform polishing, and the more abrasive grains are caught on the tool, the less it will slip between the tool and the amount removed. A phenomenon of increase occurs.
ＦＣ鋳鉄製のラップ工具は、ＦＣＤ鋳鉄製のラップ工具より研磨能率が高いが耐摩耗性が低く、それに対してＦＣＤ鋳鉄製のラップ工具は、耐摩耗性は高いが研磨能率が低い、という特徴がある。 FC cast iron lap tools have higher polishing efficiency but lower wear resistance than FCD cast iron lap tools, whereas FCD cast iron lap tools have higher wear resistance but lower polishing efficiency. There is.
そのため、ＬＥＤ基板に使用されるサファイアやパワー半導体に使用されるＳｉＣやＧａＮ等のような難削材をラッピングする場合、上記従来のＦＣ鋳鉄製やＦＣＤ鋳鉄製のラップ工具では、ラッピングに時間がかかるか、あるいは耐摩耗性が低いため、コスト高の原因となっていた。 Therefore, when lapping difficult-to-cut materials such as sapphire used in LED boards and SiC and GaN used in power semiconductors, it takes a long time to wrap with the conventional lapping tools made of FC cast iron and FCD cast iron. This or the low abrasion resistance caused high costs.
本発明は、上記事情に鑑みてなされたものであり、ＬＥＤ基板に使用されるサファイアやパワー半導体に使用されるＳｉＣやＧａＮ等のような難削材をラッピングするのに適する、研磨能率が高く且つ耐摩耗性に優れたラップ工具を提供することを課題とする。 The present invention has been made in view of the above circumstances, and has high polishing efficiency and is suitable for lapping difficult-to-cut materials such as sapphire used in LED substrates and SiC and GaN used in power semiconductors. It is an object of the present invention to provide a lapping tool that also has excellent wear resistance.
前記課題を解決するためになされた本発明のラップ工具は、黒鉛を含有する引張強度が３００ＭＰａ以上のＦＣＶ鋳鉄製のラップ工具であって、前記黒鉛が６～８０μｍの幅及び２０～５００μｍの長さを有し、８０個／ｍｍ2以上の密度で含有されることを特徴とする。一般に引張強度と硬度は相対的に正の相関を有するが、硬度が高くなると靭性が減り耐摩耗性が劣化するので、硬度はビッカース硬度で２００以下であることが望ましい。 The wrap tool of the present invention, which was made to solve the above problems, is a wrap tool made of FCV cast iron containing graphite and having a tensile strength of 300 MPa or more, wherein the graphite has a width of 6 to 80 μm and a length of 20 to 500 μm. It is characterized by having a density of 80 pieces/mm 2 or more. Generally, tensile strength and hardness have a relatively positive correlation, but as hardness increases, toughness decreases and wear resistance deteriorates, so it is desirable that the hardness is 200 or less on the Vickers scale.
また、本発明において、前記ＦＣＶ鋳鉄は、質量％で、３．０％以上４．０％以下のＣ［炭素］、２．０％以上３．０％以下のＳｉ［ケイ素］、１．０％未満のＭｎ［マンガン］、０．１０％以下のＰ［リン］、０．０１％以上０．０２％以下のＳ［硫黄］、１．０％以下のＣｕ［銅］、０．０１％以上０．０２％以下のＭｇ［マグネシウム］及び０．０３％以上０．０８％以下のＲＥ［希土類元素］を含有し、残部がＦｅ［鉄］及び不可避不純物である、と好ましい。 Further, in the present invention, the FCV cast iron includes C [carbon] of 3.0% to 4.0%, Si [silicon] of 2.0% to 3.0%, and 1.0% by mass. % Mn [manganese], 0.10% or less P [phosphorus], 0.01% or more and 0.02% or less S [sulfur], 1.0% or less Cu [copper], 0.01% It is preferable that it contains 0.02% or more of Mg [magnesium] and 0.03% or more and 0.08% or less of RE [rare earth element], and the balance is Fe [iron] and inevitable impurities.
更に、本発明において、前記ＦＣＶ鋳鉄が、Ｃｒ［クロム］、Ｎｉ［ニッケル］、及びＭｏ［モリブデン］からなる群からなる選択される少なくとも一種を含む金属または合金である耐食性向上添加剤を含有する場合には耐食性の向上を図ることができる。 Furthermore, in the present invention, the FCV cast iron contains a corrosion resistance improving additive that is a metal or alloy containing at least one selected from the group consisting of Cr [chromium], Ni [nickel], and Mo [molybdenum]. In some cases, corrosion resistance can be improved.
本発明により、研磨能率が高く且つ耐摩耗性に優れたラップ工具を提供することが可能となる。殊に、基本的には球状黒鉛がなるべく少なく、芋虫状黒鉛が多いほど研磨特性は向上し、また、ＦＣＶ鋳鉄はＦＣＤ鋳鉄よりも熱伝導率が高いために研磨中に生じる加工熱を早く除去して形状精度の高い研磨が可能になるばかりか、振動減衰性が高いために、研磨中に生じる振動を抑えるので仕上げ面粗さがよくなる傾向にあり、更に、ＦＣＶ鋳鉄はＦＣ鋳鉄よりも耐摩耗性が良いため、レンズ等の光学部品の研磨に使用した場合、工具の摩耗による形状が劣化した工具の形状修正を行う頻度が下がり、生産性を向上させることも期待できる。 According to the present invention, it is possible to provide a lapping tool with high polishing efficiency and excellent wear resistance. In particular, basically, the less spheroidal graphite is contained and the more caterpillar graphite is contained, the better the polishing properties will be.Also, since FCV cast iron has higher thermal conductivity than FCD cast iron, processing heat generated during polishing can be removed faster. Not only does it enable polishing with high shape accuracy, but its high vibration damping properties suppress the vibrations generated during polishing, which tends to improve the finished surface roughness.Furthermore, FCV cast iron is more durable than FC cast iron. Because of its good abrasion resistance, when used for polishing optical parts such as lenses, it is expected that productivity will be improved by reducing the frequency of correction of the shape of tools whose shape has deteriorated due to tool wear.
本発明は、黒鉛を含有する引張強度が３００ＭＰａ以上のＦＣＶ（コンパクティッド・バーミキュラ）鋳鉄製のラップ工具であって、前記黒鉛は、６～８０μｍの幅及び２０～５００μｍの長さを有し、前記ＦＣＶ鋳鉄に８０個／ｍｍ2以上の密度で含有される、ラップ工具である。ＦＣＶ鋳鉄は、ＣＶ黒鉛鋳鉄ともいう。 The present invention is a wrap tool made of FCV (compact vermicular) cast iron containing graphite and having a tensile strength of 300 MPa or more, wherein the graphite has a width of 6 to 80 μm and a length of 20 to 500 μm, The wrap tool is contained in the FCV cast iron at a density of 80 pieces/mm 2 or more. FCV cast iron is also called CV graphite cast iron.
本発明のラップ工具を構成するＦＣＶ鋳鉄は、芋虫状の黒鉛組織を有し、ＦＣ鋳鉄（ねずみ鋳鉄）の優れた鋳造性、機械加工性、熱伝導性、及び減衰能と、ＦＣＤ鋳鉄（球状黒鉛鋳鉄）の高強度及びヤング率とを兼ね備えた材料特性を有する。 The FCV cast iron that constitutes the wrap tool of the present invention has a caterpillar-like graphite structure, and has the excellent castability, machinability, thermal conductivity, and damping ability of FC cast iron (gray cast iron), and the excellent castability, machinability, thermal conductivity, and damping ability of FCD cast iron (spheroidal It has material properties that combine the high strength and Young's modulus of graphite cast iron.
図１乃至図３にそれぞれ、本発明のラップ工具を構成するＦＣＶ鋳鉄、従来のＦＣ鋳鉄、及び従来のＦＣＤ鋳鉄の表面の金属顕微鏡写真を示す。 FIGS. 1 to 3 show metallographic micrographs of the surfaces of FCV cast iron, conventional FC cast iron, and conventional FCD cast iron, respectively, which constitute the lap tool of the present invention.
黒鉛が抜け落ちた部分に砥粒が保持され、その保持された砥粒がラップ工具上を転動している他の砥粒の動きを妨げることにより、単位時間当たりの除去量である研磨能率が向上する。 The abrasive grains are retained in the area where the graphite has fallen off, and by blocking the movement of other abrasive grains rolling on the lapping tool, the polishing efficiency, which is the amount removed per unit time, increases. improves.
本発明のラップ工具はＦＣＶ鋳鉄製であり、ラッピングに直接寄与するラップ工具の本体が実質的にＦＣＶ鋳鉄からなり、好ましくはラップ工具の全体がＦＣＶ鋳鉄からなる。 The lapping tool of the present invention is made of FCV cast iron, with the body of the lapping tool that directly contributes to lapping consisting essentially of FCV cast iron, and preferably the entire lapping tool consisting of FCV cast iron.
本発明のラップ工具を構成するＦＣＶ鋳鉄は、芋虫形状の黒鉛組織を含有する引張強度が３００ＭＰａ以上のコンパクティッド・バーミキュラ鋳鉄である点で従来の一般的なＦＣＶ鋳鉄と共通するが、本発明のラップ工具を構成するＦＣＶ鋳鉄に含有される黒鉛は、６～８０μｍの幅及び２０～５００μｍの長さを有する。黒鉛の幅は、好ましくは８～６０μｍ、より好ましくは１０～５０μｍ、さらに好ましくは１２～４０μｍである。黒鉛の長さは、好ましくは２５～３００μｍ、より好ましくは３０～１７５μｍ、さらに好ましくは１００～１５０μｍである。黒鉛は、好ましくは３０～６５％の球状化率を有する。球状化率は、ＪＩＳ Ｇ５５０５によって算出される。 The FCV cast iron constituting the wrap tool of the present invention is similar to conventional general FCV cast iron in that it is compacted vermicular cast iron containing a caterpillar-shaped graphite structure and having a tensile strength of 300 MPa or more. The graphite contained in the FCV cast iron constituting the lap tool has a width of 6 to 80 μm and a length of 20 to 500 μm. The width of the graphite is preferably 8 to 60 μm, more preferably 10 to 50 μm, and still more preferably 12 to 40 μm. The length of the graphite is preferably 25 to 300 μm, more preferably 30 to 175 μm, even more preferably 100 to 150 μm. Graphite preferably has a spheroidization rate of 30-65%. The spheroidization rate is calculated according to JIS G5505.
黒鉛が上記範囲の幅及び長さを有することにより、ラップ工具上を転動している他の砥粒の動きを妨げやすくなり、砥粒と被加工材との相対速度が大きくすることができ、高い研磨能率が得られる。上記黒鉛の幅はＦＣ鋳鉄の黒鉛の幅よりも広く、本発明のＦＣＶ鋳鉄製のラップ工具は、ＦＣ鋳鉄製のラップ工具と比べて同等以上の研磨能率を示す。黒鉛が上記好ましい範囲の幅及び長さを有することにより、より高い研磨能率が得られる。尚、研磨能率とは、被加工材をラッピングするときの単位時間あたりの減少する厚みである。 When the graphite has a width and length within the above range, it becomes easier to block the movement of other abrasive grains rolling on the lapping tool, and the relative speed between the abrasive grains and the workpiece can be increased. , high polishing efficiency can be obtained. The width of the graphite is wider than the width of the graphite of FC cast iron, and the lap tool made of FCV cast iron of the present invention exhibits a polishing efficiency equal to or higher than that of the lap tool made of FC cast iron. When the graphite has a width and length within the above preferred range, higher polishing efficiency can be obtained. Note that the polishing efficiency is the decrease in thickness per unit time when lapping a workpiece.
黒鉛の幅及び長さは、ラップ工具の表面を金属顕微鏡で５０倍の倍率で１．０ｍｍ×１．２ｍｍの視野範囲について観察し、金属顕微鏡写真を母相の金属組織と黒鉛とに画像処理（二値化処理）して測定される。芋虫状の黒鉛の長さは、黒鉛の最大径での円の面積と対象となる黒鉛の面積比で求められる。 The width and length of the graphite can be determined by observing the surface of the lap tool with a metallurgical microscope at 50x magnification in a field of view of 1.0 mm x 1.2 mm, and processing the metallurgical micrograph to distinguish between the metal structure of the matrix and the graphite. (binary processing). The length of the caterpillar-shaped graphite is determined by the ratio of the area of a circle at the maximum diameter of the graphite to the area of the target graphite.
黒鉛の幅は、好ましくは、ラッピングを行う際に使用する砥粒の平均粒径の２～５倍である。黒鉛の長さは、好ましくは、ラッピングを行う際に使用する砥粒の平均粒径の５～２０倍である。砥粒の平均粒径に対する黒鉛の幅及び長さが上記範囲にあることにより、研磨能率がより向上する。ラッピングを行う際に使用する砥粒の平均粒径は、好ましくは２～３０μｍ、より好ましくは５～２０μｍである。砥粒の平均粒径とは、沈降試験法によって測定される累積高さ５０％（ｄ－５０価）の値であり、粒の大きなものと小さなものを並べていったときに、双方が等量となる境目の径を表すものである。 The width of the graphite is preferably 2 to 5 times the average particle size of the abrasive grains used for lapping. The length of the graphite is preferably 5 to 20 times the average particle size of the abrasive grains used for lapping. When the width and length of the graphite relative to the average particle diameter of the abrasive grains are within the above range, polishing efficiency is further improved. The average particle size of the abrasive grains used for lapping is preferably 2 to 30 μm, more preferably 5 to 20 μm. The average grain size of abrasive grains is the value of 50% of the cumulative height (d-50 value) measured by the sedimentation test method, and when large grains and small grains are placed side by side, they are equal in size. It represents the diameter of the boundary.
ラッピングを行う際に本発明のラップ工具とともに用いる砥粒は特に限定されないが、ＧＣ、Ｂ4Ｃ、アルミナ等、従来ラッピングで用いられている砥粒を用いることができる。 The abrasive grains used with the lapping tool of the present invention when performing lapping are not particularly limited, but abrasive grains conventionally used in lapping, such as GC, B 4 C, and alumina, can be used.
また、黒鉛は、８０個／ｍｍ2以上、好ましくは１１０個／ｍｍ2以上、より好ましくは１５０個／ｍｍ2以上、さらに好ましくは２３０個／ｍｍ2以上の密度で、ＦＣＶ鋳鉄に含有されている。黒鉛の密度が高いほど研磨能率の観点で好ましいが、上記幅及び長さを有する黒鉛形状を得る観点で、黒鉛の体積割合は好ましくは９体積％以下であり、黒鉛の密度の上限は好ましくは３５０個／ｍｍ2以下でもよい。 Furthermore, graphite is contained in FCV cast iron at a density of 80 pieces/mm 2 or more, preferably 110 pieces/mm 2 or more, more preferably 150 pieces/mm 2 or more, and even more preferably 230 pieces/mm 2 or more. There is. The higher the density of graphite, the more preferable it is from the viewpoint of polishing efficiency, but from the viewpoint of obtaining a graphite shape having the above width and length, the volume ratio of graphite is preferably 9% by volume or less, and the upper limit of the density of graphite is preferably The number may be 350 pieces/mm 2 or less.
更に、黒鉛の密度は、ラップ工具の表面を金属顕微鏡で５０倍の倍率で１．０ｍｍ×１．２ｍｍの視野範囲について観察し、金属顕微鏡写真を母相の金属組織と黒鉛とに画像処理（二値化処理）して測定される。 Furthermore, the density of graphite was determined by observing the surface of the lap tool with a metallurgical microscope at 50x magnification in a field of view of 1.0 mm x 1.2 mm, and performing image processing ( (binarization processing).
ラップ工具を構成するＦＣＶ鋳鉄の引張強度は、３００ＭＰａ以上、好ましくは４００ＭＰａ以上である。 The tensile strength of the FCV cast iron constituting the lap tool is 300 MPa or more, preferably 400 MPa or more.
３００ＭＰａ以上４００ＭＰａ未満の引張強度を有するＦＣＶ鋳鉄は、比較的成形し易いため、３００ＭＰａ以上４００ＭＰａ未満の引張強度を有するＦＣＶ鋳鉄製のラップ工具は、レンズ等の球面の光学部品のラッピングに好適に用いられ、従来のＦＣ鋳鉄製のラップ工具に代えて用いられ得る。 Since FCV cast iron having a tensile strength of 300 MPa or more and less than 400 MPa is relatively easy to shape, a wrapping tool made of FCV cast iron having a tensile strength of 300 MPa or more and less than 400 MPa is suitably used for wrapping spherical optical parts such as lenses. and can be used in place of conventional FC cast iron lap tools.
４００ＭＰａ以上の引張強度を有するＦＣＶ鋳鉄は、耐摩耗性に優れているので一般用途として用いられる。４００ＭＰａ以上の引張強度を有するＦＣＶ鋳鉄は、研磨時間が長くなっても研磨能率の低下が抑制され、研磨能率を実質的に維持することができる。４００ＭＰａ以上の引張強度を有するＦＣＶ鋳鉄製のラップ工具は、従来の球状黒鉛鋳鉄製のラップ工具に代えて用いられる。ＦＣＶ鋳鉄の引張強度の上限は特に限定されないが、実質的に６００ＭＰａ程度である。 FCV cast iron, which has a tensile strength of 400 MPa or more, has excellent wear resistance and is therefore used for general purposes. FCV cast iron having a tensile strength of 400 MPa or more suppresses a decrease in polishing efficiency even if the polishing time becomes long, and can substantially maintain polishing efficiency. A wrap tool made of FCV cast iron having a tensile strength of 400 MPa or more is used in place of a conventional wrap tool made of spheroidal graphite cast iron. The upper limit of the tensile strength of FCV cast iron is not particularly limited, but is substantially about 600 MPa.
また、本発明において、前記ＦＣＶ鋳鉄は、質量％で、３．０％以上４．０％以下のＣ［炭素］、２．０％以上３．０％以下のＳｉ［ケイ素］、１．０％未満のＭｎ［マンガン］、０．１０％以下のＰ［リン］、０．０１％以上０．０２％以下のＳ［硫黄］、１．０％以下のＣｕ［銅］、０．０１％以上０．０２％以下のＭｇ［マグネシウム］及び０．０３％以上０．０８％以下のＲＥ［希土類元素］を含有し、残部がＦｅ［鉄］及び不可避不純物である、と好ましい。 Further, in the present invention, the FCV cast iron includes C [carbon] of 3.0% to 4.0%, Si [silicon] of 2.0% to 3.0%, and 1.0% by mass. % Mn [manganese], 0.10% or less P [phosphorus], 0.01% or more and 0.02% or less S [sulfur], 1.0% or less Cu [copper], 0.01% It is preferable that it contains 0.02% or more of Mg [magnesium] and 0.03% or more and 0.08% or less of RE [rare earth element], and the balance is Fe [iron] and inevitable impurities.
以下の説明において、各元素の含有量を表す「％」は特に断りがない限り質量％を意味する。 In the following description, "%" representing the content of each element means mass % unless otherwise specified.
（３．０％以上４．０％以下のＣ［炭素］）について
本発明に用いられる前記ＦＣＶ鋳鉄において、Ｃ［炭素］は、適宜な黒鉛形状を保障するために必要である。３００ＭＰａ以上の引張強度を得て、且つ十分な量の黒鉛を晶出させるために、３．０％以上のＣを含有することが好ましい。上記形状の黒鉛をより安定して得る観点から、Ｃ含有量の上限は好ましくは４．０％以下である。Ｃ［炭素］含有量の下限値は、より好ましくは３．１％以上、さらに好ましくは３．２％以上である。Ｃ［炭素］含有量の上限は、より好ましくは３．９％以下、より好ましくは３．８％以下である。尚、Ｃ［炭素］、Ｓｉ［ケイ素］の組成の割合や、Ｃｕ［銅］、Ｓｎ［錫］などを添加し基地組織をパーライト化させることで引張強度を調整する。
(C [carbon] of 3.0% or more and 4.0% or less) In the FCV cast iron used in the present invention, C [carbon] is necessary to ensure an appropriate graphite shape. In order to obtain a tensile strength of 300 MPa or more and to crystallize a sufficient amount of graphite, it is preferable to contain 3.0% or more of C. From the viewpoint of more stably obtaining graphite having the above shape, the upper limit of the C content is preferably 4.0% or less. The lower limit of the C [carbon] content is more preferably 3.1% or more, still more preferably 3.2% or more. The upper limit of the C [carbon] content is more preferably 3.9% or less, more preferably 3.8% or less. Note that the tensile strength is adjusted by changing the composition ratio of C [carbon] and Si [silicon], and by adding Cu [copper], Sn [tin], etc. to make the base structure pearlite.
（２．０％以上３．０％以下のＳｉ［ケイ素］）について
本発明に用いられる前記ＦＣＶ鋳鉄において、Ｓｉ［ケイ素］は黒鉛化促進元素である。Ｃ［炭素］を黒鉛化させるために、２．０％以上のＳｉを含有することが好ましい。Ｃ［炭素］の黒鉛化量をより増やすために、Ｓｉ［ケイ素］含有量の下限値は、より好ましくは２．１％以上、さらに好ましくは２．２％以上である。上記形状の黒鉛をより安定して得る観点から 、Ｓｉ［ケイ素］含有量の上限は好ましくは３．０％以下である。Ｓｉ［ケイ素］含有量の上限は、より好ましくは２．９％以下、さらに好ましくは２．８％以下である。
(Si [silicon] of 2.0% or more and 3.0% or less) In the FCV cast iron used in the present invention, Si [silicon] is an element that promotes graphitization. In order to graphitize C [carbon], it is preferable to contain 2.0% or more of Si. In order to further increase the graphitization amount of C [carbon], the lower limit of the Si [silicon] content is more preferably 2.1% or more, and still more preferably 2.2% or more. From the viewpoint of more stably obtaining graphite having the above shape, the upper limit of the Si content is preferably 3.0% or less. The upper limit of the Si [silicon] content is more preferably 2.9% or less, still more preferably 2.8% or less.
（１．０％未満のＭｎ［マンガン］）について
本発明に用いられる前記ＦＣＶ鋳鉄において、Ｍｎ［マンガン］は、原料の銑鉄等から混入し得る成分で、フェライトの析出を抑制し、パーライト化を促進させる観点で、Ｍｎ［マンガン］含有量の上限は好ましくは１．０％未満である。また、Ｍｎ［マンガン］含有量の下限値は０．２％以上でもよい。
(Mn [manganese] less than 1.0%) In the FCV cast iron used in the present invention, Mn [manganese] is a component that can be mixed in from the raw material pig iron, etc., and suppresses the precipitation of ferrite and promotes pearlite formation. From the viewpoint of promotion, the upper limit of the Mn [manganese] content is preferably less than 1.0%. Further, the lower limit of the Mn [manganese] content may be 0.2% or more.
（０．１０％以下のＰ［リン］）について
本発明に用いられる前記ＦＣＶ鋳鉄において、Ｐ［リン］は過剰に含有すると靭性及び伸びが低下する。したがって、Ｐ含有量の上限を好ましくは０．１０％以下とする。また、Ｐ［リン］含有量の下限値は０．０２％以上でもよい。
Regarding (0.10% or less of P [phosphorus]) In the FCV cast iron used in the present invention, if P [phosphorus] is contained in excess, the toughness and elongation will decrease. Therefore, the upper limit of the P content is preferably 0.10% or less. Further, the lower limit of the P [phosphorus] content may be 0.02% or more.
（０．０１％以上０．０２％以下のＳ［硫黄］）について
Ｓ［硫黄］は上記形状の黒鉛を得る観点からＳ含有量の上限は０．０２％以下であるが、安定して黒鉛を析出する観点から、Ｓ［硫黄］含有量の下限値は０．０１％以上である。
(S [sulfur] of 0.01% to 0.02%) The upper limit of the S content of S [sulfur] is 0.02% or less from the viewpoint of obtaining graphite of the above shape. From the viewpoint of precipitating S [sulfur] content, the lower limit of the S [sulfur] content is 0.01% or more.
（１．０％以下のＣｕ［銅］）について
本発明に用いられる前記ＦＣＶ鋳鉄において、Ｃｕ［銅］は、フェライトの析出を抑制し、パーライト化を促進させる観点で、Ｃｕ［銅］含有量の上限は好ましくは１．０％以下である。また、パーライト化を促進させる観点で、Ｃｕ［銅］含有量の下限は、０％超（不可避不純物を含む）である。
(1.0% or less of Cu [copper]) In the FCV cast iron used in the present invention, Cu [copper] is used to suppress the precipitation of ferrite and promote pearlitization. The upper limit of is preferably 1.0% or less. Further, from the viewpoint of promoting pearlitization, the lower limit of the Cu [copper] content is more than 0% (including unavoidable impurities).
（０．０１％以上０．０２％以下のＭｇ［マグネシウム］）について
本発明に用いられる前記ＦＣＶ鋳鉄において、Ｍｇ［マグネシウム］は黒鉛球状化元素である。上記形状の黒鉛を得る観点からＭｇ含有量の上限は好ましくは０．０２％以下である。上記形状の黒鉛をより安定して得る観点から、Ｍｇ［マグネシウム］含有量の下限値は好ましくは０．０１％以上である。
(Mg [magnesium] of 0.01% or more and 0.02% or less) In the FCV cast iron used in the present invention, Mg [magnesium] is a graphite nodularizing element. From the viewpoint of obtaining graphite having the above shape, the upper limit of the Mg content is preferably 0.02% or less. From the viewpoint of more stably obtaining graphite having the above shape, the lower limit of the Mg [magnesium] content is preferably 0.01% or more.
（０．０３％以上０．０８％以下のＲＥ［希土類元素］）について
本発明に用いられる前記ＦＣＶ鋳鉄において、ＲＥ［希土類元素］は、上記形状の黒鉛を維持する効果を有する。上記形状の黒鉛を維持する観点からＲＥ［希土類元素］含有量の下限値は好ましくは０．０３％以上である。上記黒鉛を安定して維持する観点から、ＲＥ［希土類元素］含有量の上限は好ましくは０．０８％以下である。ＲＥ［希土類元素］としては、Ｃｅ［セリウム］、Ｌａ［ランタン］などが挙げられる。
(RE [Rare Earth Element] of 0.03% to 0.08%) In the FCV cast iron used in the present invention, RE [Rare Earth Element] has the effect of maintaining graphite in the above shape. From the viewpoint of maintaining graphite in the above-mentioned shape, the lower limit of the RE [rare earth element] content is preferably 0.03% or more. From the viewpoint of stably maintaining the graphite, the upper limit of the RE [rare earth element] content is preferably 0.08% or less. Examples of RE [rare earth element] include Ce [cerium] and La [lanthanum].
また、本発明に用いられるラップ工具を構成するＦＣＶ鋳鉄は、好ましくはＣｒ、Ｎｉ、及びＭｏからなる群から選択される少なくとも一種を含む金属または合金である耐食性向上添加剤をさらに含有する。 Further, the FCV cast iron constituting the lap tool used in the present invention further contains a corrosion resistance improving additive, which is preferably a metal or alloy containing at least one selected from the group consisting of Cr, Ni, and Mo.
一般的に、水を用いてラッピングを行うと、鉄製のラップ工具は表面に錆びが発生する。錆びにより研磨能率が低下するため、錆びを取り除く必要がある。 Generally, when lapping is performed using water, rust occurs on the surface of iron lapping tools. Rust reduces polishing efficiency, so it is necessary to remove rust.
上記耐食性向上添加剤を含有することにより、ラップ工具の耐食性を向上することができる。耐食性を向上することにより錆びの発生を抑制することができるので、研磨能率の向上及び錆を取り除く作業時間を低減または無くすことができる。 By containing the above corrosion resistance improving additive, the corrosion resistance of the lap tool can be improved. Since the occurrence of rust can be suppressed by improving the corrosion resistance, polishing efficiency can be improved and the working time for removing rust can be reduced or eliminated.
本発明であるラップ工具は、従来と同様に好ましくはラップ定盤である。ラップ定盤は、好ましくは１～５００ｍｍ、より好ましくは５～２５０ｍｍ、さらに好ましくは１０～１００ｍｍの厚みを有する。ラップ定盤は、好ましくは１ｍｍ～３ｍ、より好ましくは１００ｍｍ～２．５ｍ、さらに好ましくは２００ｍｍ～２ｍの直径を有する。このような厚み及び／または直径を有するラップ定盤は、光学部品の研磨に特に好適に用いられる。 The lapping tool of the present invention is preferably a lapping surface plate as in the conventional one. The lap platen preferably has a thickness of 1 to 500 mm, more preferably 5 to 250 mm, and still more preferably 10 to 100 mm. The lap platen preferably has a diameter of 1 mm to 3 m, more preferably 100 mm to 2.5 m, even more preferably 200 mm to 2 m. A lapping plate having such a thickness and/or diameter is particularly suitable for polishing optical components.
本発明のラップ工具を構成するＦＣＶ鋳鉄は、従来のＦＣＶ鋳鉄の製造方法に対して、黒鉛生成に影響する元素であるＳ［硫黄］を０．０１～０．０２質量％、及びＭｇ［マグネシウム］を０．０１～０．０２質量％として、より黒鉛が生成しやすい条件下で注湯直前に接種剤を添加することで製造される。これにより、黒鉛粒数を増加させ、組織を均一化させることができ、上記形状の黒鉛を含有する３００ＭＰａ以上の引張強度を有するＦＣＶ鋳鉄を得ることができる。接種剤としては、従来より用いられているものでもできるが、好ましくは黒鉛化をより促進させるＣａ［カルシウム］、Ｂａ［バリウム］、Ｚｒ［ジルコニウム］などを含有する接種剤が挙げられる。 The FCV cast iron constituting the lap tool of the present invention contains 0.01 to 0.02% by mass of S [sulfur], an element that affects graphite formation, and Mg [magnesium], compared to the conventional manufacturing method of FCV cast iron. ] is set at 0.01 to 0.02% by mass, and an inoculant is added immediately before pouring under conditions that facilitate the formation of graphite. Thereby, the number of graphite grains can be increased and the structure can be made uniform, and FCV cast iron containing graphite in the above shape and having a tensile strength of 300 MPa or more can be obtained. As the inoculant, conventionally used ones can be used, but preferably those containing Ca [calcium], Ba [barium], Zr [zirconium], etc., which promote graphitization, are used.
従来のＦＣＶ鋳鉄は、質量％で３．０％以上４．０％以下のＣ［炭素］、２．０％以上３．０％以下のＳｉ［ケイ素］、１．０％未満のＭｎ［マンガン］、０．１０％以下のＰ［リン］、０．０１％以上０．０２％以下のＳ［硫黄］、１．０％以下のＣｕ［銅］、０．０１％以上０．０２％以下のＭｇ［マグネシウム］及び０．０３％以上０．０８％以下のＲＥ［希土類元素］を含有し、残部がＦｅ［鉄］及び不可避不純物からなる。図４に、従来の一般的なＦＣＶ鋳鉄の表面の金属顕微鏡写真を示す。 Conventional FCV cast iron contains C [carbon] of 3.0% to 4.0% by mass, Si [silicon] of 2.0% to 3.0%, and Mn [manganese] of less than 1.0%. ], 0.10% or less P [phosphorus], 0.01% or more and 0.02% or less S [sulfur], 1.0% or less Cu [copper], 0.01% or more and 0.02% or less of Mg [magnesium] and 0.03% or more and 0.08% or less of RE [rare earth element], and the remainder consists of Fe [iron] and inevitable impurities. FIG. 4 shows a metallurgical micrograph of the surface of conventional general FCV cast iron.
Ｍｇは黒鉛の球状化に影響する元素であり、ＦＣＶ鋳鉄においては、黒鉛形状を芋虫状にするためＭｇ添加量はＦＣＤ鋳鉄より少ない。ＲＥについては、芋虫状の黒鉛を維持させるため、添加量はＦＣＤ鋳鉄より多い。これをＣＶ化剤と呼ぶ。 Mg is an element that affects the spheroidization of graphite, and in FCV cast iron, the amount of Mg added is smaller than in FCD cast iron in order to make the graphite shape caterpillar-like. Regarding RE, in order to maintain caterpillar-like graphite, the amount added is greater than that of FCD cast iron. This is called a CV agent.
本発明のラップ工具を構成するＦＣＶ鋳鉄は、単にＦＣＤ鋳鉄の球状化率が低いものとも異なる。Ｍｇ含有量を少なくすることでＦＣＤ鋳鉄の球状化率の低いものを得ることができるが、この場合、黒鉛形状は、球状のもの、芋虫状のもの、及び片状のものが混在したものとなり、本発明のラップ工具を構成するＦＣＶ鋳鉄とは異なる。図５に、Ｍｇ含有量を少なくすることで単に球状化率を小さくしたＦＣＤ鋳鉄の表面の金属顕微鏡写真を示す。 The FCV cast iron constituting the lap tool of the present invention is also different from FCD cast iron, which simply has a low spheroidization rate. By reducing the Mg content, it is possible to obtain FCD cast iron with a low spheroidization rate, but in this case, the graphite shape will be a mixture of spherical, caterpillar-shaped, and flake-shaped graphite. , is different from the FCV cast iron that constitutes the lap tool of the present invention. FIG. 5 shows a metallurgical micrograph of the surface of FCD cast iron whose spheroidization rate was simply reduced by reducing the Mg content.
本発明のラップ工具を構成するＦＣＶ鋳鉄の製造に用いるＣＶ化剤は、好ましくはＣ［炭素］、Ｓｉ［ケイ素］、Ｍｎ［マンガン］、Ｐ［リン］、Ｓ［硫黄］を調整したＦＣＶ鋳鉄の元湯を注湯用取鍋に移し替え時に添加する。ＣＶ化剤の組成は、好ましくはＳｉ［ケイ素］：４５．０質量％、Ｍｇ［マグネシウム］：２．０～３．０質量％、ＲＥ［希土類元素］：３．０～１０．０質量％、残部Ｆｅ［鉄］及び不可避不純物である。ＦＣＶ鋳鉄の製造に用いるＣＶ化剤の添加量は、主原料１００に対して、好ましくは０．８５～０．９５質量％である。上記量のＭｇを含むＣＶ化剤を主原料に含有させることで、ＦＣＶ鋳鉄中に上記幅及び長さの芋虫状の黒鉛形状を形成することができる。上記添加量のＲＥは、黒鉛の球状化率を低下させた芋虫状の黒鉛形状を維持させる効果を有する。 The CV agent used for manufacturing the FCV cast iron constituting the wrap tool of the present invention is preferably an FCV cast iron with adjusted C [carbon], Si [silicon], Mn [manganese], P [phosphorus], and S [sulfur]. Add this when transferring the original hot water to the pouring ladle. The composition of the CV agent is preferably Si [silicon]: 45.0 mass%, Mg [magnesium]: 2.0 to 3.0 mass%, RE [rare earth element]: 3.0 to 10.0 mass%. , the remainder is Fe [iron] and unavoidable impurities. The amount of the CV agent used in producing FCV cast iron is preferably 0.85 to 0.95% by mass based on 100% of the main raw material. By including the CV agent containing Mg in the above amount in the main raw material, a caterpillar-like graphite shape having the above width and length can be formed in the FCV cast iron. The above addition amount of RE has the effect of maintaining the caterpillar-like graphite shape with a reduced spheroidization rate of graphite.
（実施例１）
Ｃ［炭素］、Ｓｉ［ケイ素］、Ｍｎ［マンガン］、Ｐ［リン］、及びＳ［硫黄］を調整したＦＣＶ鋳鉄の元湯に、ＣＶ化剤及び各種接種剤を添加し、鋳型に注湯した。溶湯成分はＣ［炭素］：３．７５％、Ｓｉ［ケイ素］：２．５１％、Ｍｎ［マンガン］：０．２３％、Ｐ［リン］：０．０２０％、Ｓ［硫黄］：０．０１１％、Ｃｕ［銅］：０．２６％、Ｍｇ［マグネシウム］：０．０１１％、及びＲＥ［希土類元素］：０．０３１％であった。
(Example 1)
A CV agent and various inoculants are added to the base water of FCV cast iron in which C [carbon], Si [silicon], Mn [manganese], P [phosphorus], and S [sulfur] have been adjusted, and the mixture is poured into a mold. did. Molten metal components are C [carbon]: 3.75%, Si [silicon]: 2.51%, Mn [manganese]: 0.23%, P [phosphorus]: 0.020%, S [sulfur]: 0. 011%, Cu [copper]: 0.26%, Mg [magnesium]: 0.011%, and RE [rare earth element]: 0.031%.
初期の溶湯温度は１４０２℃で注湯し、注湯完了後から２４時間後に解枠して、直径が２１０ｍｍ及び厚みが３５ｍｍのＦＣＶ鋳鉄製のラップ定盤粗材を作製した。 The molten metal was poured at an initial temperature of 1402° C., and 24 hours after the completion of pouring, the frame was dismantled to produce a lap surface plate rough material made of FCV cast iron with a diameter of 210 mm and a thickness of 35 mm.
作製したラップ定盤には、幅が１５μｍであり黒鉛長さが４０μｍの黒鉛が１００個／ｍｍ2の密度で含有されていた。ラップ定盤の引張強度は４００ＭＰａであった。黒鉛の球状化率は５０％であった。黒鉛の幅、長さ、及び密度は、ラップ定盤の表面を金属顕微鏡で観察し、観察画像を金属組織と黒鉛とに二値化処理して測定した。引張強度は万能材料試験機で測定した。黒鉛の球状化率はＪＩＳ Ｇ５５０５にしたがって測定した。図１に、ラップ工具表面の金属顕微鏡写真を示す。 The produced lap surface plate contained graphite having a width of 15 μm and a graphite length of 40 μm at a density of 100 pieces/mm 2 . The tensile strength of the lap platen was 400 MPa. The spheroidization rate of graphite was 50%. The width, length, and density of graphite were measured by observing the surface of the lap surface plate with a metallurgical microscope and binarizing the observed image into metal structure and graphite. Tensile strength was measured with a universal material testing machine. The spheroidization rate of graphite was measured according to JIS G5505. Figure 1 shows a metallurgical micrograph of the surface of a lap tool.
（比較例３）
Ｃ［炭素］、Ｓｉ［ケイ素］、Ｍｎ［マンガン］、Ｐ［リン］及びＳ［硫黄］を調整したＦＣ鋳鉄の元湯に、各種接種剤を添加し、鋳型に注湯した。溶湯成分はＣ［炭素］：３．２１％、Ｓｉ［ケイ素］：１．９６％、Ｍｎ［マンガン］：０．６６％、Ｐ［リン］：０．０２９％、Ｓ［硫黄］：０．０８５％、及びＣｕ［銅］：０．８２％であった。初期の溶湯温度は１４１０℃で注湯した。上記以外は実施例１と同様に、幅が７．５μｍ、長さが１７５μｍ、及び黒鉛が２５０個／ｍｍ2の密度で含有される引張強度が３５４ＭＰａのＦＣ鋳鉄製のラップ定盤を作製した。
(Comparative example 3)
Various inoculants were added to the base water of FC cast iron in which C [carbon], Si [silicon], Mn [manganese], P [phosphorus], and S [sulfur] were adjusted, and the mixture was poured into a mold. Molten metal components are C [carbon]: 3.21%, Si [silicon]: 1.96%, Mn [manganese]: 0.66%, P [phosphorus]: 0.029%, S [sulfur]: 0. 085%, and Cu [copper]: 0.82%. The molten metal was poured at an initial temperature of 1410°C. Except for the above, a lap surface plate made of FC cast iron with a width of 7.5 μm, a length of 175 μm, and a tensile strength of 354 MPa containing graphite at a density of 250 pieces/mm 2 was produced in the same manner as in Example 1. .
（実施例２）
Ｃ［炭素］、Ｓｉ［ケイ素］、Ｍｎ［マンガン］、Ｐ［リン］及びＳ［硫黄］を調整したＦＣＶ鋳鉄の元湯に、ＣＶ化剤及び各種接種剤を添加し、鋳型に注湯した。溶湯成分はＣ［炭素］：３．６５％、Ｓｉ［ケイ素］：２．５１％、Ｍｎ［マンガン］：０．２３％、Ｐ［リン］：０．０２０％、Ｓ［硫黄］：０．０１１％、Ｃｕ［銅］：０．２６４％、Ｍｇ［マグネシウム］：０．０１１％、及びＲＥ［希土類元素］：０．０４１％であった。初期の溶湯温度は１４０２℃で注湯した。上記以外は実施例１と同様に、幅が１５μｍ、長さが１２５μｍ、及び球状化率が４６％の黒鉛が１０３個／ｍｍ2の密度で含有される引張強度が４３２ＭＰａのＦＣＶ鋳鉄製のラップ定盤を作製した。
(Example 2)
A CV agent and various inoculants were added to the base water of FCV cast iron in which C [carbon], Si [silicon], Mn [manganese], P [phosphorus] and S [sulfur] were adjusted, and the mixture was poured into a mold. . Molten metal components are C [carbon]: 3.65%, Si [silicon]: 2.51%, Mn [manganese]: 0.23%, P [phosphorus]: 0.020%, S [sulfur]: 0. 011%, Cu [copper]: 0.264%, Mg [magnesium]: 0.011%, and RE [rare earth element]: 0.041%. The initial molten metal temperature was 1402°C. Other than the above, the wrap was made of FCV cast iron having a width of 15 μm, a length of 125 μm, and a tensile strength of 432 MPa, containing graphite at a density of 103 pieces/mm 2 with a spheroidization rate of 46%. A surface plate was made.
（比較例４）
Ｃ［炭素］、Ｓｉ［ケイ素］、Ｍｎ［マンガン］、Ｐ［リン］及びＳ［硫黄］を調整したＦＣＤ鋳鉄の元湯に、球状化剤及び各種接種剤を添加し、鋳型に注湯した。溶湯成分はＣ［炭素］：３．５５％、Ｓｉ［ケイ素］：２．４７％、Ｍｎ［マンガン］：０．２６％、Ｐ［リン］：０．０１８％、Ｓ［硫黄］：０．０１０％、Ｃｕ［銅］：０．０２４％、Ｍｇ［マグネシウム］：０．０３６％、及びＲＥ［希土類元素］：０．０１０％であった。初期の溶湯温度は１３９６℃で注湯した。上記以外は実施例１と同様に、幅が２７．５μｍ、長さが２７．５μｍ、及び球状化率が８８％の黒鉛が１５０個／ｍｍ2の密度で含有される引張強度が４９１ＭＰａのＦＣＤ鋳鉄製のラップ定盤を作製した。
(Comparative example 4)
A spheroidizing agent and various inoculants were added to the base water of FCD cast iron in which C [carbon], Si [silicon], Mn [manganese], P [phosphorus] and S [sulfur] were adjusted, and the mixture was poured into a mold. . Molten metal components are C [carbon]: 3.55%, Si [silicon]: 2.47%, Mn [manganese]: 0.26%, P [phosphorus]: 0.018%, S [sulfur]: 0. 010%, Cu [copper]: 0.024%, Mg [magnesium]: 0.036%, and RE [rare earth element]: 0.010%. The initial molten metal temperature was 1396°C. Except for the above, the FCD is the same as Example 1, with a width of 27.5 μm, a length of 27.5 μm, and a tensile strength of 491 MPa containing graphite with a spheroidization rate of 88% at a density of 150 pieces/mm 2 A cast iron lap surface plate was manufactured.
（実施例３）
Ｃ［炭素］、Ｓｉ［ケイ素］、Ｍｎ［マンガン］、Ｐ［リン］及びＳ［硫黄］を調整したＦＣＶ鋳鉄の元湯に、ＣＶ化剤及び各種接種剤を添加し、鋳型に注湯した。溶湯成分はＣ［炭素］：３．３７％、Ｓｉ［ケイ素］：２．６６％、Ｍｎ［マンガン］：０．３０％、Ｐ［リン］：０．０３０％、Ｓ［硫黄］：０．０１３％、Ｃｕ［銅］：０．２９２％、Ｍｇ［マグネシウム］：０．０１１％、及びＲＥ［希土類元素］：０．０５３％であった。初期の溶湯温度は１３４０℃で注湯した。上記以外は実施例１と同様に、幅が１４μｍ、長さが３７μｍ、及び球状化率が５２％の黒鉛が１１０個／ｍｍ2の密度で含有される引張強度が４３１ＭＰａのＦＣＶ鋳鉄製のラップ定盤を作製した。
(Example 3)
A CV agent and various inoculants were added to the base water of FCV cast iron in which C [carbon], Si [silicon], Mn [manganese], P [phosphorus] and S [sulfur] were adjusted, and the mixture was poured into a mold. . Molten metal components are C [carbon]: 3.37%, Si [silicon]: 2.66%, Mn [manganese]: 0.30%, P [phosphorus]: 0.030%, S [sulfur]: 0. 013%, Cu [copper]: 0.292%, Mg [magnesium]: 0.011%, and RE [rare earth element]: 0.053%. The initial molten metal temperature was 1340°C. Other than the above, the wrap was made of FCV cast iron having a width of 14 μm, a length of 37 μm, and a tensile strength of 431 MPa and containing graphite at a density of 110 pieces/mm 2 with a spheroidization rate of 52%. A surface plate was made.
（実施例４）
Ｃ［炭素］、Ｓｉ［ケイ素］、Ｍｎ［マンガン］、Ｐ［リン］及びＳ［硫黄］を調整したＦＣＶ鋳鉄の元湯に、ＣＶ化剤及び各種接種剤を添加し、鋳型に注湯した。溶湯成分はＣ［炭素］：３．６１％、Ｓｉ［ケイ素］：２．６１％、Ｍｎ［マンガン］：０．２７％、Ｐ［リン］：０．０２３％、Ｓ［硫黄］：０．０１２％、Ｃｕ［銅］：０．０２２％、Ｍｇ［マグネシウム］：０．００８％、及びＲＥ［希土類元素］：０．０２４％であった。初期の溶湯温度は１３５７℃で注湯した。上記以外は実施例１と同様に、幅が１３μｍ、長さが３４μｍ、及び球状化率が５６％の黒鉛が２３０個／ｍｍ2の密度で含有される引張強度が３８９ＭＰａのＦＣＶ鋳鉄製のラップ定盤を作製した。
(Example 4)
A CV agent and various inoculants were added to the base water of FCV cast iron in which C [carbon], Si [silicon], Mn [manganese], P [phosphorus] and S [sulfur] were adjusted, and the mixture was poured into a mold. . Molten metal components are C [carbon]: 3.61%, Si [silicon]: 2.61%, Mn [manganese]: 0.27%, P [phosphorus]: 0.023%, S [sulfur]: 0. 012%, Cu [copper]: 0.022%, Mg [magnesium]: 0.008%, and RE [rare earth element]: 0.024%. The initial molten metal temperature was 1357°C. Other than the above, the wrap was made of FCV cast iron having a width of 13 μm, a length of 34 μm, and a tensile strength of 389 MPa and containing graphite at a density of 230 pieces/mm 2 with a spheroidization rate of 56%. A surface plate was made.
（実施例５）
Ｃ［炭素］、Ｓｉ［ケイ素］、Ｍｎ［マンガン］、Ｐ［リン］及びＳ［硫黄］を調整したＦＣＶ鋳鉄の元湯に、ＣＶ化剤及び各種接種剤を添加し、鋳型に注湯した。溶湯成分はＣ［炭素］：３．５３％、Ｓｉ［ケイ素］：２．６７％、Ｍｎ［マンガン］：０．３２％、Ｐ［リン］：０．０２６％、Ｓ［硫黄］：０．０１２％、Ｃｕ［銅］：０．４００％、Ｍｇ［マグネシウム］：０．００８％、及びＲＥ［希土類元素］：０．０２５％であった。初期の溶湯温度は１３６７℃で注湯した。上記以外は実施例１と同様に、幅が１２μｍ、長さが３５μｍ、及び球状化率が５７％の黒鉛が２８４個／ｍｍ2の密度で含有される引張強度が４７３ＭＰａのＦＣＶ鋳鉄製のラップ定盤を作製した。
(Example 5)
A CV agent and various inoculants were added to the base water of FCV cast iron in which C [carbon], Si [silicon], Mn [manganese], P [phosphorus] and S [sulfur] were adjusted, and the mixture was poured into a mold. . Molten metal components are C [carbon]: 3.53%, Si [silicon]: 2.67%, Mn [manganese]: 0.32%, P [phosphorus]: 0.026%, S [sulfur]: 0. 012%, Cu [copper]: 0.400%, Mg [magnesium]: 0.008%, and RE [rare earth element]: 0.025%. The initial molten metal temperature was 1367°C. Other than the above, the wrap was made of FCV cast iron having a width of 12 μm, a length of 35 μm, and a tensile strength of 473 MPa and containing graphite with a spheroidization rate of 57% at a density of 284 pieces/mm 2 . A surface plate was made.
（比較例１）
黒鉛の長さが１００～２００μｍ及び幅が１０～１５μｍのＦＣ鋳鉄製のラップ定盤（洲崎鋳工(株)社製、ＦＣ３５０、直径２００ｍｍ、厚み３０ｍｍ）を用意した。図２に、ラップ定盤表面の金属顕微鏡写真を示す。
(Comparative example 1)
An FC cast iron lap surface plate (manufactured by Susaki Casting Co., Ltd., FC350,
（比較例２）
黒鉛の平均粒径が２８μｍのＦＣＤ製のラップ定盤（日立造船株式会社社製、ＦＣＤ４５０、直径２００ｍｍ、厚み３０ｍｍ）を用意した。図３に、ラップ定盤表面の金属顕微鏡写真を示す。
(Comparative example 2)
An FCD lap surface plate (manufactured by Hitachi Zosen Corporation, FCD450,
（本発明のＦＣＶ鋳鉄及び従来のＦＣＤ鋳鉄と砥粒径との関係評価）
図６に、本発明のＦＣＶ鋳鉄（実施例１）及び従来のＦＣＤ鋳鉄（比較例２）のラップ工具を用いて、サファイア基板を湿式ラッピングしたときの研磨能率及び仕上げ面粗さを示す。仕上げ面粗さは算術平均粗さ（Ｒａ）である。湿式ラッピングに用いた砥粒は、Ｂ4Ｃであり、平均粒径が１７．３μｍの番手Ｆ５００、平均粒径が６．５μｍの番手Ｆ８００、及び平均粒径が３．０μｍの番手Ｆ１２００である。
(Evaluation of the relationship between the FCV cast iron of the present invention and conventional FCD cast iron and abrasive grain size)
FIG. 6 shows the polishing efficiency and finished surface roughness when a sapphire substrate was wet lapped using the lapping tools of the FCV cast iron of the present invention (Example 1) and the conventional FCD cast iron (Comparative Example 2). The finished surface roughness is the arithmetic mean roughness (Ra). The abrasive grains used for wet lapping were B4C , and they were F500 with an average particle size of 17.3 μm, F800 with an average particle size of 6.5 μm, and F1200 with an average particle size of 3.0 μm. .
ラッピングの結果、いずれの砥粒番手においても、本発明のＦＣＶ鋳鉄製のラップ工具は従来のＦＣＤ鋳鉄製のラップ工具よりも優れた研磨能率を示した。仕上げ面粗さについては、いずれの砥粒番手においても、本発明のＦＣＶ鋳鉄製のラップ工具は従来のＦＣＤ鋳鉄製のラップ工具と同等以上であった。 As a result of lapping, the lap tool made of FCV cast iron of the present invention showed superior polishing efficiency than the conventional lap tool made of FCD cast iron at any abrasive grain count. Regarding the finished surface roughness, the lap tool made of FCV cast iron of the present invention was equivalent to or better than the lap tool made of conventional FCD cast iron at any abrasive grain count.
（本発明のＦＣＶ鋳鉄、従来のＦＣ鋳鉄、及び従来のＦＣＤ鋳鉄による研磨時間と研磨能率評価）
図７に、♯６００のＧＣを用いてドレッシングを行い、次いで本発明のＦＣＶ鋳鉄（実施例１）、従来のＦＣＤ鋳鉄（比較例２）、及び従来のＦＣ鋳鉄（比較例１）のラップ工具と♯２０００のＧＣとを用いて湿式ラッピングを行ったときの、ラッピング（研磨）時間と研磨能率の関係を示す。
(Evaluation of polishing time and polishing efficiency using FCV cast iron of the present invention, conventional FC cast iron, and conventional FCD cast iron)
Fig. 7 shows dressing using #600 GC and then lapping tools for FCV cast iron of the present invention (Example 1), conventional FCD cast iron (Comparative example 2), and conventional FC cast iron (Comparative example 1). The relationship between lapping (polishing) time and polishing efficiency when wet lapping is performed using GC and #2000 is shown.
従来のＦＣ鋳鉄（比較例１）は、研磨初期における研磨能率は比較的高いが研磨時間に応じて大幅に研磨能率が低下した。従来のＦＣＤ鋳鉄（比較例２）は、研磨時間によらず研磨能率はあまり変わらないが、研磨初期から研磨能率は低かった。本発明のＦＣＶ鋳鉄（実施例１）は、研磨初期から研磨能率が高く、研磨時間によらず研磨能率がほぼ一定であることが確認された。 Conventional FC cast iron (Comparative Example 1) had relatively high polishing efficiency at the initial stage of polishing, but the polishing efficiency significantly decreased as the polishing time increased. For conventional FCD cast iron (Comparative Example 2), the polishing efficiency did not change much regardless of the polishing time, but the polishing efficiency was low from the initial stage of polishing. It was confirmed that the FCV cast iron of the present invention (Example 1) had high polishing efficiency from the initial stage of polishing, and that the polishing efficiency was almost constant regardless of the polishing time.
（本発明のＦＣＶ鋳鉄、従来のＦＣ鋳鉄、及び従来のＦＣＤ鋳鉄と砥粒濃度との関係評価）
図８に、湿式ラッピングで用いる♯２０００のＧＣの砥粒濃度を１質量％、３質量％、及び５質量％としたときの本発明のＦＣＶ鋳鉄（実施例１）、従来のＦＣ鋳鉄（比較例２）、及び従来のＦＣＤ鋳鉄（比較例１）のそれぞれのラップ工具の研磨能率及び仕上げ面粗さを示す。棒グラフが研磨能率を示し、丸印のプロットが仕上げ面粗さを示す。
(Evaluation of the relationship between the FCV cast iron of the present invention, conventional FC cast iron, and conventional FCD cast iron and abrasive grain concentration)
Figure 8 shows the FCV cast iron of the present invention (Example 1) and the conventional FC cast iron (comparison The polishing efficiency and finished surface roughness of lap tools for example 2) and conventional FCD cast iron (comparative example 1) are shown. The bar graph shows the polishing efficiency, and the circle plot shows the finished surface roughness.
図８によると、いずれの砥粒濃度においても、本発明のＦＣＶ鋳鉄を用いたラップ工具（実施例１）は、従来の従来のＦＣ鋳鉄（比較例２）、及び従来のＦＣＤ鋳鉄（比較例１）を用いたラップ工具よりも研磨能率が優れていた。特に低砥粒濃度で、本発明のＦＣＶ鋳鉄を用いたラップ工具と従来のＦＣＤ鋳鉄及びＦＣ鋳鉄を用いたラップ工具との研磨能率の差が顕著であった。本発明のＦＣＶ鋳鉄を用いたラップ工具の場合、砥粒濃度が３質量％の場合が最も高い研磨能率を示した。仕上げ面粗さは研磨能率が高いほど大きくなる傾向はあるが、研磨能率が大きくても仕上げ面粗さの劣化は同等またはわずかであった。 According to FIG. 8, at any abrasive grain concentration, the lap tool using the FCV cast iron of the present invention (Example 1) is superior to the conventional FC cast iron (Comparative example 2) and the conventional FCD cast iron (Comparative example The polishing efficiency was superior to that of the lap tool using method 1). Particularly at low abrasive grain concentrations, the difference in polishing efficiency between the lap tool using the FCV cast iron of the present invention and the lap tools using conventional FCD cast iron and FC cast iron was remarkable. In the case of the lap tool using FCV cast iron of the present invention, the highest polishing efficiency was shown when the abrasive grain concentration was 3% by mass. Although the finished surface roughness tends to increase as the polishing efficiency increases, the deterioration of the finished surface roughness was the same or slight even when the polishing efficiency was high.
（本発明のＦＣＶ鋳鉄、従来のＦＣ鋳鉄、及び従来のＦＣＤ鋳鉄と砥粒径との関係評価）
図９に、本発明のＦＣＶ鋳鉄を用いたラップ工具（実施例１）、従来の従来のＦＣ鋳鉄（比較例２）、及び従来のＦＣＤ鋳鉄（比較例１）を用いたラップ工具の、湿式ラッピングで用いるＧＣの番手を、♯６００、♯１０００、及び♯２０００としたときの研磨能率及び仕上げ面粗さの結果を示す。砥粒濃度は３質量％であった。棒グラフが研磨能率を示し、丸印のプロットが仕上げ面粗さを示す。
(Evaluation of the relationship between the FCV cast iron of the present invention, conventional FC cast iron, and conventional FCD cast iron and abrasive grain size)
Fig. 9 shows wet-type lap tools using FCV cast iron of the present invention (Example 1), conventional FC cast iron (Comparative Example 2), and conventional FCD cast iron (Comparative Example 1). The results of polishing efficiency and finished surface roughness when the GC counts used in lapping are #600, #1000, and #2000 are shown. The abrasive grain concentration was 3% by mass. The bar graph shows the polishing efficiency, and the circle plot shows the finished surface roughness.
図９によると、いずれの番手においても、本発明のＦＣＶ鋳鉄を用いたラップ工具は、従来のＦＣＤ鋳鉄及びＦＣ鋳鉄を用いたラップ工具よりも研磨能率が優れており、仕上げ面粗さは同等であることが確認できる。 According to Fig. 9, the lap tool using FCV cast iron of the present invention has better polishing efficiency than the lap tool using conventional FCD cast iron and FC cast iron, and the finished surface roughness is the same for all counts. It can be confirmed that
（黒鉛幅と研磨能率の関係評価）
図１０に、黒鉛幅が７．５μｍ、１５μｍ、及び２７．５μｍの比較例３、実施例２、及び比較例４で作製したラップ定盤を用いてサファイア基板を湿式ラッピングしたときの研磨能率を示す。湿式ラッピングに用いた砥粒は、ＧＣ♯１０００であり、砥粒濃度は３質量％であった。黒鉛幅が７．５～２７．５μｍの範囲で黒鉛幅が１５μｍのラップ定盤が最も高い研磨能率を示した。
(Evaluation of the relationship between graphite width and polishing efficiency)
Figure 10 shows the polishing efficiency when wet lapping a sapphire substrate using the lapping platen prepared in Comparative Example 3, Example 2, and Comparative Example 4 with graphite widths of 7.5 μm, 15 μm, and 27.5 μm. show. The abrasive grains used for wet lapping were GC#1000, and the abrasive grain concentration was 3% by mass. In the graphite width range of 7.5 to 27.5 μm, the lapping surface plate with a graphite width of 15 μm showed the highest polishing efficiency.
（黒鉛長さと研磨能率の関係評価）
図１１に、黒鉛長さが１７５μｍ、１２５μｍ、及び２７．５μｍの比較例３、実施例２、及び比較例４で作製したラップ定盤を用いてサファイア基板を湿式ラッピングしたときの研磨能率を示す。湿式ラッピングに用いた砥粒はＧＣ♯１０００であり、砥粒濃度は３質量％であった。黒鉛長さが２７．５～１７５μｍの範囲で黒鉛長さが１２５μｍのラップ定盤が最も高い研磨能率を示した。
(Evaluation of the relationship between graphite length and polishing efficiency)
Figure 11 shows the polishing efficiency when wet lapping a sapphire substrate using the lapping platen prepared in Comparative Example 3, Example 2, and Comparative Example 4 with graphite lengths of 175 μm, 125 μm, and 27.5 μm. . The abrasive grains used for wet lapping were GC#1000, and the abrasive grain concentration was 3% by mass. In the graphite length range of 27.5 to 175 μm, the lapping surface plate with graphite length of 125 μm showed the highest polishing efficiency.
（黒鉛密度と研磨能率の関係評価）
図１２に、黒鉛密度が１１０個／ｍｍ2、２３０個／ｍｍ2、及び２８４個／ｍｍ2の実施例３～５で作製したラップ定盤を用いてサファイア基板を湿式ラッピングしたときの研磨能率を示す。湿式ラッピングに用いた砥粒はＧＣ♯１０００であり、砥粒濃度は３質量％であった。黒鉛密度が大きいほど高い研磨能率を示した。
(Evaluation of the relationship between graphite density and polishing efficiency)
Figure 12 shows the polishing efficiency when wet lapping a sapphire substrate using the lapping plates prepared in Examples 3 to 5 with graphite densities of 110 pieces/mm 2 , 230 pieces/mm 2 , and 284 pieces/mm 2 . shows. The abrasive grains used for wet lapping were GC#1000, and the abrasive grain concentration was 3% by mass. The higher the graphite density, the higher the polishing efficiency.
Claims (3)
前記黒鉛が６～８０μｍの幅及び２０～５００μｍの長さを有し、８０個／ｍｍ2以上の密度で含有されることを特徴とするラップ工具。 A wrap tool made of FCV cast iron containing graphite and having a tensile strength of 300 MPa or more,
A lap tool characterized in that the graphite has a width of 6 to 80 μm and a length of 20 to 500 μm, and is contained at a density of 80 pieces/mm 2 or more.
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