JP7403150B2 - Glass workpiece surface treatment method - Google Patents

Description

The present invention relates to a method for treating the surface of a glass workpiece.

Conventionally, the common method for removing thin films formed on the surface of a workpiece is to dissolve and remove them using chemicals. The processing speed is very slow and the cost is high because different chemicals have to be used and the chemicals are expensive (sometimes it is necessary to use extremely toxic and dangerous chemicals). Various problems have arisen, such as the difficulty of disposing of used chemicals.

Therefore, in order to solve the problem of dissolution treatment using this chemical, the present applicant has developed a workpiece surface treatment method (hereinafter referred to as conventional ) is proposed.

This conventional method removes the thin film formed on the surface of the workpiece by spraying slurry, which is a mixture of liquid and water, onto the surface of the workpiece.This conventional method does not require the use of chemicals. Both methods can remove thin films, and are more effective treatment methods than the aforementioned dissolution treatment using chemicals.

Japanese Patent Application Publication No. 2005-103716

By the way, if the workpiece to be surface treated is a glass workpiece, although the thin film formed on the glass surface can be removed, the glass surface may also be treated, resulting in so-called fogging, which reduces transparency. It was confirmed.

The present applicant focused on the above-mentioned problems and, as a result of various experiments and research, developed an unprecedented and very practical method for surface treatment of glass workpieces.

The gist of the present invention will be explained with reference to the accompanying drawings.

Slurry 4, which is a mixture of liquid 2 and polygonal abrasive grains 3 with an average particle size of 0.3 to 1.0 μm, is sprayed onto the surface of a glass workpiece 1 using compressed air of 0.1 to 0.2 MPa. The present invention relates to a method for surface treatment of a glass workpiece, characterized in that the surface of the glass workpiece 1 is subjected to surface peeling treatment to a minute thickness.

Further, in the method for surface treatment of a glass workpiece according to claim 1, the abrasive grains 3 are a mixture of one or more of alumina, silicon carbide, silica, and diamond powder. The present invention relates to a workpiece surface treatment method.

In the method for surface treatment of a glass workpiece according to any one of claims 1 and 2, the slurry 4 is provided opposite to the glass workpiece 1, and the slurry 4 is applied to the glass workpiece 1 in a surface direction of the glass workpiece 1. The slurry is sprayed from a slurry spraying section 10 that moves relative to the glass workpiece 1, and the relative moving speed of the slurry spraying section 10 with respect to the glass workpiece 1 is set to 50 to 100 mm/s. This relates to a method for surface treatment of manufactured workpieces.

Further, in the method for surface treating a glass workpiece according to any one of claims 1 to 3, the liquid is water.

Since the present invention is configured as described above, the surface treatment of glass workpieces can be performed in a good manner, resulting in a very practical method for surface treatment of glass workpieces that has not been seen before.

FIG. 1 is a schematic explanatory diagram of a workpiece surface treatment apparatus according to the present embodiment. FIG. 2 is a schematic explanatory diagram of the operation of the workpiece surface treatment apparatus according to the present embodiment.

Embodiments of the present invention that are considered suitable will be briefly described by showing the effects of the present invention based on the drawings.

In the present invention, a slurry 4, which is a mixture of a liquid 2 and polygonal abrasive grains 3 having an average particle diameter of 0.3 to 1.0 μm, is compressed at a pressure of 0.1 to 0.2 Mpa on the surface of a glass workpiece 1. The surface of the glass workpiece 1 is treated by spraying with air.

In addition, since the abrasive grains 3 are carried by the liquid 2, they are less susceptible to resistance from the surrounding air (harder to decelerate), and even if the particles are fine particles with an average particle diameter of 0.3 to 1.0 μm, the surface of the glass workpiece 1 The thin film formed on the surface of the glass workpiece 1 can be sufficiently removed by colliding with force, and the surface of the glass workpiece 1 can be peeled off to a minute thickness. After the treatment, so-called clouding, which reduces transparency, does not occur.

Specific embodiments of the present invention will be described based on the drawings.

This embodiment is a method of treating the surface of a glass workpiece 1 by spraying a slurry 4, which is a mixture of a liquid 2 and abrasive grains 3, onto the surface of the glass workpiece 1. is done using. Although water is used as the liquid 2, it does not need to be water as long as it does not cause environmental problems.

Specifically, as shown in FIG. 1, this workpiece surface treatment apparatus includes a slurry storage section 7 disposed below a processing main body 6 equipped with a workpiece transfer function, and a pump device from which the slurry storage section 7 is fed. The slurry transport section 9 transports the slurry 4 into the processing main body 6 via the slurry transport section 8, and the slurry injection section 10 is disposed inside the processing main body 6 and injects the slurry 4 transported by the slurry transport section 9. The slurry 4 injected from the slurry injection part 10 is discharged from the lower opening 6a of the processing main body 6 to the slurry storage part 7 and is reused.

The slurry storage section 7 can store a predetermined amount of slurry 4, and is provided with a slurry stirring function that constantly stirs the slurry 4 stored therein.

The slurry injection unit 10 is configured to be disposed opposite to the glass workpiece 1 and move relative to the glass workpiece 1 in the surface direction of the glass workpiece 1. Specifically, as shown in FIG. A slurry injection main body 10A is provided movably in a direction (direction of arrow b in Figs. 1 and 2) perpendicular to the traveling direction of the glass workpiece 1 (direction of arrow a in Fig. 2), and a downward direction from this slurry injection main body 10A is provided. The nozzle body 10B is configured to protrude toward the nozzle body 10B.

The slurry injection main body 10A is connected to the slurry conveying section 9 described above on its side surface, and is connected to the compressed air conveying section 11 provided in a separate circuit on its top surface, so that slurry supplied from the slurry conveying section 9 is connected to the slurry injection main body 10A. 4 is accelerated by compressed air supplied from the compressed air conveyance section 11, and is configured to be jetted from the nozzle body 10B.

In this embodiment, the relative movement speed of the slurry injection unit 10 with respect to the glass workpiece 1 is set to 50 to 100 mm/s.

The nozzle body 10B is configured as a wide gun type with a rectangular nozzle opening, and this nozzle opening is set to have a width equal to or larger than the width of the glass workpiece 1. Therefore, the slurry 4 is sprayed onto the glass workpiece 1 in a width that is the same as or greater than the width of the glass workpiece 1.

Further, the slurry 4 used in this example is a mixture of the liquid 2 and the fine abrasive grains 3.

Specifically, water is used as the liquid 2, and it is preferable to mix an appropriate member to prevent the abrasive grains 3 from agglomerating.

Specifically, for example, if abrasive grains 3 with a small diameter are used as the abrasive grains 3 to be mixed with the liquid 2 (the finer the abrasive grains 3 are), the abrasive grains 3 may adhere to each other and become agglomerated. There is a concern that problems may occur, such as not being able to stably jet the abrasive grains 3, but in this regard, by mixing an appropriate member to prevent agglomeration, the abrasive grains 3 can be separated as much as possible. Since it does not agglomerate, it is possible to spray the abrasive grains 3 with this small diameter uniformly and stably. It becomes possible to maximize the benefits of using the abrasive grains 3, and extremely good surface treatment of the glass workpiece 1 is performed.

Further, as the abrasive grains 3, one or a mixture of polygonal alumina, silicon carbide, silica, and diamond powder with an average particle diameter of 1.0 to 0.3 μm is used.

In addition, the average particle diameter of the abrasive grains 3 referred to in this specification is defined by the mode diameter (the particle diameter that appears most frequently in the distribution), and its numerical value is determined using a measurement method in which particles are irradiated with laser light and measured. I am getting .

The following tests were conducted using the workpiece surface treatment apparatus having the above configuration.

A chromium layer (chromium thin film 0.1 μm) is formed on the surface of a 50 mm square glass plate by ion plating, and a gold layer (gold thin film 0.1 μm) is formed on top of that. A test piece with masking tape pasted on 2/3 of the area was prepared, and wet blasting was performed on this test piece under the following two processing conditions 1 and 2 in which the size of the abrasive grains 3 was different.

<Processing conditions 1>
Abrasive grains: Alumina #30000 (average particle size 0.3 μm)
Nozzle width...90mm
Air pressure...0.2MPa
Nozzle movement speed...50mm/s
Injection distance...100mm

The slurry injection part 10 (nozzle body 10B) is passed from one end of the test piece to the other end while injecting the slurry 4, and this is treated as one treatment.If the treatment is performed multiple times, the masking gradually becomes unmasked. The gold thin film in region P1 was removed to expose the chromium thin film, and after about 50 treatments, the gold thin film was completely removed.

Next, when the masking tape area is reduced to 1/3 and processing is continued under the same conditions (processing conditions 1), the gold thin film in the area P2 where the masking tape was gradually reduced is removed and the chromium thin film is exposed. The chromium thin film in region P1 was gradually removed to expose the glass surface, and after about 50 treatments, the gold thin film in region P2 and the chromium thin film in region P1 were completely removed.

<Processing conditions 2>
Abrasive grains: Alumina #10000 (average particle size 1.0 μm)
Nozzle width...90mm
Air pressure...0.2MPa
Nozzle movement speed...50mm/s
Injection distance...100mm

The slurry injection part 10 (nozzle body 10B) is passed from one end of the test piece to the other end while injecting the slurry 4, and this is treated as one treatment.If the treatment is performed multiple times, the masking gradually becomes unmasked. The gold thin film in region P1 was removed to expose the chromium thin film, and after about 20 treatments, the gold thin film was completely removed.

Next, when the masking tape area is reduced to 1/3 and processing is continued under the same conditions (processing conditions 1), the gold thin film in the area P2 where the masking tape was gradually reduced is removed and the chromium thin film is exposed. The chromium thin film in region P1 was gradually removed to expose the glass surface, and after about 20 treatments, the gold thin film in region P2 and the chromium thin film in region P1 were completely removed.

In both processing conditions 1 and 2 in the above test, the glass surface did not become cloudy.

Glass, which is a brittle material, becomes ductile fracture like that of metals rather than brittle fracture after a certain amount of abrasion when the amount of abrasion during processing becomes small, but the amount of abrasion that causes this ductile fracture is approximately 0.1 μm. (This is called the ductile-brittle transition point (dc value)), assuming that the maximum particle diameter of the abrasive grains 3 used in this test is 1 μm, and assuming that the amount of abrasion is 1/50 of the particle diameter, it is 0.02 μm. , which is well below this value (0.1 μm).

In other words, it was found that surface peeling treatment with a minute thickness of 0.1 μm (100 nm) is possible under the above processing condition 1.2 (high rigidity and high precision are required to achieve similar treatment by machining). (requires an ultra-precision processing machine).

However, under processing condition 2 (abrasive grain 3 with an average particle diameter of 1.0 μm), when light is applied from the back side of the specimen, a portion where light passes through the chromium thin film in area P2 can be seen, and some It was found that uneven processing occurred.

From this, it is considered that the best size for the abrasive grains 3 is an average particle diameter of 0.3 μm for good processing (if the size of the abrasive grains 3 is smaller than the average particle diameter of 0.3 μm, the amount (This is not realistic when considering processing capacity.)

In addition, regarding the compressed air injection pressure of 0.1 to 0.2 Mpa, if it is weaker than 0.1 Mpa, the number of machining operations will increase, while if it is stronger than 0.2 Mpa, the cutting force will become strong and processing control becomes difficult to do. Furthermore, this processing control is also a factor in setting the relative movement speed of the slurry injection section 10 to the glass workpiece 1 at 50 to 100 mm/s.

From the above, in the surface treatment of the glass workpiece 1, the slurry 4, which is a mixture of the liquid 2 and the polygonal abrasive grains 3 with an average particle diameter of 1.0 to 0.3 μm, is sprayed at a pressure of 0.1 to 0.2 Mpa. The relative movement speed of the slurry injection unit 10 which injects the slurry 4 with respect to the glass workpiece 1 is set to 50 to 100 mm/s.

Since this embodiment is configured as described above, it is possible to perform a good surface treatment of the glass workpiece 1 (the surface of the glass workpiece 1 can be subjected to surface peeling treatment with a minute thickness).

Further, in this embodiment, since the slurry 4 is sprayed onto the glass workpiece 1 in a width that is the same as or larger than the width of the glass workpiece 1, a uniform treated surface can be obtained.

Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

1 Glass workpiece 2 Liquid 3 Abrasive grains 4 Slurry
10 Slurry injection part

Claims (4)

A slurry, which is a mixture of a liquid and polygonal abrasive grains with an average particle diameter of 0.3 to 1.0 μm, is injected onto the surface of a glass workpiece using compressed air at a pressure of 0.1 to 0.2 MPa. A method for treating the surface of a glass workpiece, which is characterized by subjecting the surface of the workpiece to a surface peeling treatment to a minute thickness. 2. The glass workpiece surface treatment method according to claim 1, wherein the abrasive grains are a mixture of one or more of alumina, silicon carbide, silica, and diamond powder. Method. In the method for surface treatment of a glass workpiece according to any one of claims 1 and 2, the slurry is provided opposite to the glass workpiece and moves relative to the glass workpiece in a surface direction of the glass workpiece. A method for surface treating a glass workpiece, characterized in that the slurry is jetted from a slurry jetting section, and a relative movement speed of the slurry jetting section with respect to the glass workpiece is set to 50 to 100 mm/s. The method for surface treating a glass workpiece according to any one of claims 1 to 3, wherein the liquid is water.

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