JP7396913B2 - 圧力測定装置 - Google Patents
圧力測定装置 Download PDFInfo
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- JP7396913B2 JP7396913B2 JP2020013755A JP2020013755A JP7396913B2 JP 7396913 B2 JP7396913 B2 JP 7396913B2 JP 2020013755 A JP2020013755 A JP 2020013755A JP 2020013755 A JP2020013755 A JP 2020013755A JP 7396913 B2 JP7396913 B2 JP 7396913B2
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- 238000005259 measurement Methods 0.000 claims description 20
- 238000009530 blood pressure measurement Methods 0.000 claims description 11
- 230000005415 magnetization Effects 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 230000006870 function Effects 0.000 description 46
- 238000012937 correction Methods 0.000 description 13
- 230000003068 static effect Effects 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 9
- 230000008859 change Effects 0.000 description 7
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 7
- 238000005452 bending Methods 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- -1 petrochemical Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0004—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in inductance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/16—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in the magnetic properties of material resulting from the application of stress
Description
はじめに、本発明の実施の形態1に係る圧力測定装置について、図1A、図1Bを参照して説明する。
次に、本発明の実施の形態2に係る圧力測定装置について、図2A、図2Bを参照して説明する。
Claims (6)
- 圧力センサおよび圧力算出部を備え、
前記圧力センサは、
ダイアフラム層と、
前記ダイアフラム層に形成された受圧領域と、
前記受圧領域の外周部の前記ダイアフラム層に設けられ、ピエゾ抵抗効果により前記受圧領域の歪みを測定するピエゾ歪素子から構成されたピエゾ歪測定部と、
前記ダイアフラム層の前記受圧領域に設けられ、歪みによって磁化が変化する材料から構成されて前記受圧領域の歪みを測定する磁気歪素子から構成された磁気歪測定部と
を有し、
前記圧力算出部は、
前記ピエゾ歪測定部の測定結果より前記受圧領域が受けた圧力値を求めるように構成された第1算出機能部と、
前記磁気歪測定部の測定結果より前記受圧領域が受けた圧力値を求めるように構成された第2算出機能部と、
前記第1算出機能部が求めた圧力値が、設定されている閾値を超えるまでは、前記第2算出機能部が求めた圧力値を出力し、前記第1算出機能部が求めた圧力値が、前記閾値を超えると、前記第1算出機能部が求めた圧力値を出力するように構成された切替機能部と
を有することを特徴とする圧力測定装置。 - 請求項1記載の圧力測定装置において、
前記ピエゾ歪測定部および前記磁気歪測定部は、前記受圧領域の、発生する応力がピークとなる位置に配置されていることを特徴とする圧力測定装置。 - 請求項1または2記載の圧力測定装置において、
前記ピエゾ歪測定部は、前記受圧領域のピエゾ効果が発生する箇所に配置されていることを特徴とする圧力測定装置。 - 請求項1~3のいずれか1項に記載の圧力測定装置において、
前記ピエゾ歪測定部は、第1ブリッジ回路を構成する第1ピエゾ歪素子、第2ピエゾ歪素子、第3ピエゾ歪素子、および第4ピエゾ歪素子から構成され、
前記磁気歪測定部は、第2ブリッジ回路を構成する第1磁気歪素子、第2磁気歪素子、第3磁気歪素子、第4磁気歪素子から構成され、
前記磁気歪測定部は、前記ピエゾ歪測定部とは異なる箇所に配置されている
ことを特徴とする圧力測定装置。 - 請求項1~4のいずれか1項に記載の圧力測定装置において、
前記受圧領域は、平面視で円形とされていることを特徴とする圧力測定装置。 - 請求項1~4のいずれか1項に記載の圧力測定装置において、
前記受圧領域は、平面視で正方形とされていることを特徴とする圧力測定装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020013755A JP7396913B2 (ja) | 2020-01-30 | 2020-01-30 | 圧力測定装置 |
US17/158,201 US11480485B2 (en) | 2020-01-30 | 2021-01-26 | Pressure measurement device having piezostrictive and magnetostrictive measurement units |
CN202110117041.9A CN113203515B (zh) | 2020-01-30 | 2021-01-28 | 压力测定装置 |
Applications Claiming Priority (1)
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JP2020013755A JP7396913B2 (ja) | 2020-01-30 | 2020-01-30 | 圧力測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021120635A JP2021120635A (ja) | 2021-08-19 |
JP7396913B2 true JP7396913B2 (ja) | 2023-12-12 |
Family
ID=77025258
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JP2020013755A Active JP7396913B2 (ja) | 2020-01-30 | 2020-01-30 | 圧力測定装置 |
Country Status (3)
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---|---|
US (1) | US11480485B2 (ja) |
JP (1) | JP7396913B2 (ja) |
CN (1) | CN113203515B (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040154405A1 (en) | 1999-07-20 | 2004-08-12 | Ganapathi Srinivasan K. | Use of multi-layer thin films as stress sensors |
JP2010091384A (ja) | 2008-10-07 | 2010-04-22 | Yamatake Corp | 圧力センサ |
JP2014102171A (ja) | 2012-11-20 | 2014-06-05 | Toshiba Corp | 圧力センサ、マイクロフォン、血圧センサ、およびタッチパネル |
JP2018021923A (ja) | 2017-09-12 | 2018-02-08 | 株式会社東芝 | 圧力センサ、マイクロフォン及び音響処理システム |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102004032484B3 (de) * | 2004-07-05 | 2005-11-24 | Infineon Technologies Ag | Sensor und Verfahren zum Herstellen eines Sensors |
JP5156671B2 (ja) * | 2009-02-27 | 2013-03-06 | 株式会社日立製作所 | 磁界検出装置および計測装置 |
CN102472678B (zh) * | 2009-07-24 | 2014-04-23 | 罗姆股份有限公司 | 半导体压力传感器、压力传感器装置、电子设备以及半导体压力传感器的制造方法 |
JP5443421B2 (ja) * | 2011-03-24 | 2014-03-19 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッドジンバルアッセンブリ、及び、磁気記録再生装置 |
US9534972B2 (en) * | 2012-02-16 | 2017-01-03 | 7-Sigma Inc. | Pressure sensor with a deformable electrically resistive membrane |
EP2662675A1 (de) * | 2012-05-07 | 2013-11-13 | Melexis Technologies NV | Verfahren für die Bestimmung eines Stresswertes für isotropen Stress und Verfahren für die Bestimmung eines Magnetfeldes und Stresssensor und Hallsensor |
JP6113581B2 (ja) * | 2013-06-12 | 2017-04-12 | 株式会社東芝 | 圧力センサ、音響マイク、血圧センサ及びタッチパネル |
JP6275549B2 (ja) * | 2014-05-26 | 2018-02-07 | 株式会社東芝 | 圧力センサ、マイクロフォン、超音波センサ、血圧センサ及びタッチパネル |
JP6212000B2 (ja) * | 2014-07-02 | 2017-10-11 | 株式会社東芝 | 圧力センサ、並びに圧力センサを用いたマイクロフォン、血圧センサ、及びタッチパネル |
KR20160088111A (ko) * | 2015-01-15 | 2016-07-25 | 삼성전기주식회사 | 복합 센서와 이를 구비하는 패키지 및 그 제조 방법 |
JP6421101B2 (ja) * | 2015-09-09 | 2018-11-07 | 株式会社東芝 | センサ、情報端末、マイクロフォン、血圧センサ及びタッチパネル |
JP6595422B2 (ja) * | 2016-08-24 | 2019-10-23 | 株式会社東芝 | センサ及び電子機器 |
DE102017104547A1 (de) * | 2017-03-03 | 2018-09-06 | Trafag Ag | Drucksensor sowie Druckmessverfahren |
-
2020
- 2020-01-30 JP JP2020013755A patent/JP7396913B2/ja active Active
-
2021
- 2021-01-26 US US17/158,201 patent/US11480485B2/en active Active
- 2021-01-28 CN CN202110117041.9A patent/CN113203515B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040154405A1 (en) | 1999-07-20 | 2004-08-12 | Ganapathi Srinivasan K. | Use of multi-layer thin films as stress sensors |
JP2010091384A (ja) | 2008-10-07 | 2010-04-22 | Yamatake Corp | 圧力センサ |
JP2014102171A (ja) | 2012-11-20 | 2014-06-05 | Toshiba Corp | 圧力センサ、マイクロフォン、血圧センサ、およびタッチパネル |
JP2018021923A (ja) | 2017-09-12 | 2018-02-08 | 株式会社東芝 | 圧力センサ、マイクロフォン及び音響処理システム |
Also Published As
Publication number | Publication date |
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CN113203515B (zh) | 2022-11-08 |
US20210239554A1 (en) | 2021-08-05 |
US11480485B2 (en) | 2022-10-25 |
CN113203515A (zh) | 2021-08-03 |
JP2021120635A (ja) | 2021-08-19 |
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