JP7383441B2 - 表面処理装置、表面処理方法及びパドル - Google Patents
表面処理装置、表面処理方法及びパドル Download PDFInfo
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- 238000004381 surface treatment Methods 0.000 title claims description 159
- 238000000034 method Methods 0.000 title claims description 27
- 239000007788 liquid Substances 0.000 claims description 157
- 238000003756 stirring Methods 0.000 claims description 58
- 238000007747 plating Methods 0.000 description 38
- 238000010586 diagram Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 230000005587 bubbling Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
- C23C18/1628—Specific elements or parts of the apparatus
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/10—Agitating of electrolytes; Moving of racks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
- B01F31/44—Mixers with shaking, oscillating, or vibrating mechanisms with stirrers performing an oscillatory, vibratory or shaking movement
- B01F31/441—Mixers with shaking, oscillating, or vibrating mechanisms with stirrers performing an oscillatory, vibratory or shaking movement performing a rectilinear reciprocating movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
- B01F31/44—Mixers with shaking, oscillating, or vibrating mechanisms with stirrers performing an oscillatory, vibratory or shaking movement
- B01F31/449—Stirrers constructions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/30—Driving arrangements; Transmissions; Couplings; Brakes
- B01F35/32—Driving arrangements
- B01F35/325—Driving reciprocating or oscillating stirrers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C3/00—Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material
- B05C3/02—Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material the work being immersed in the liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C3/00—Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material
- B05C3/02—Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material the work being immersed in the liquid or other fluent material
- B05C3/04—Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material the work being immersed in the liquid or other fluent material with special provision for agitating the work or the liquid or other fluent material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1655—Process features
- C23C18/1664—Process features with additional means during the plating process
- C23C18/1669—Agitation, e.g. air introduction
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/1683—Control of electrolyte composition, e.g. measurement, adjustment
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/02—Tanks; Installations therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Electroplating Methods And Accessories (AREA)
- Chemically Coating (AREA)
Description
1.表面処理装置
2.パドル
3.表面処理方法
本発明の一実施形態に係る表面処理装置100は、図1に示すように、被めっき物10に対し、矢印Cのように表面処理槽30の長手方向(X方向)に往復移動させ、上記被めっき物10近傍の表面処理液20を撹拌するための少なくとも1つ以上の板状のパドル50を表面処理槽30に備える。そして、上記パドルは、上記被めっき物に沿って上記表面処理液の深さ方向又は水平方向に設けられた複数の角棒が一定の間隔で一体に形成されており、上記パドル50の端部の少なくとも1辺に、液を切るための液切り部58が設けられていることを特徴とする。以下詳細に説明する。
次に本発明の一実施形態に係る表面処理装置100に用いられるパドル50について説明する。本発明の一実施形態に係るパドル50は、被めっき物10に対し往復移動させ、上記被めっき物10近傍の表面処理液を撹拌するための板状のパドルである。図3(A)(B)(C)に示すように、上記パドル50は、一方向に設けられた複数の角棒が一定の間隔で一体に形成されており、上記パドル50の端部の少なくとも1辺に、液を切るための液切り部58が設けられていることを特徴とする。
次に、本発明の一実施形態に係る表面処理方法について説明する。本発明の一実施形態に係る表面処理方法は、被めっき物に対し往復移動させ、前記被めっき物近傍の表面処理液を撹拌するための少なくとも1以上の板状のパドルを用いた方法である。
50 150 250 パドル、50R パドルの右端部、50B パドルの下端部、50L パドルの左端部、50U パドルの上端部、
51 52 53 54 55 56 57 57’角棒、58 液切り部、60 動力手段、70 軸受、80 アノード、90 フレーム、100 表面処理装置
Claims (9)
- 被めっき物に対し往復移動させ、前記被めっき物近傍の表面処理液を撹拌するための少なくとも1つ以上の板状のパドルを表面処理槽に備えた表面処理装置であって、
前記パドルは、前記被めっき物に沿って前記表面処理液の深さ方向又は水平方向に設けられた複数の棒が一定の間隔で一体に形成されており、
前記パドルの端部の少なくとも1辺に、液を切るための液切り部が設けられ、
前記液切り部の形状は、該液切り部の厚み方向の断面において、先細り形状又は半円形状であり、
前記棒は、該棒の厚み方向の断面において、四角形の一頂点に、凹状の曲線が前記被めっき物に対向して設けられており、
前記曲線は、R3~10mmであることを特徴とする表面処理装置。 - 前記曲線は、前記被めっき物に対し、左向き及び右向きが交互に設けられていることを特徴とする請求項1に記載の表面処理装置。
- 前記間隔は、10~30mmに形成されていることを特徴とする請求項1又は2に記載の表面処理装置。
- 前記棒の厚み方向の断面において、前期曲線が形成されていない2辺はそれぞれ5~10mmであることを特徴とする請求項1~3の何れか1項に記載の表面処理装置。
- 前記パドルと前記被めっき物との距離が10~30mmであることを特徴とする請求項1~4の何れか1項に記載の表面処理装置。
- 移動速度が35~600mm/s、ストロークが50~200mmで前記パドルを往復移動させる動力手段をさらに備えることを特徴とする請求項1~5の何れか1項に記載の表面処理装置。
- 前記パドルは、被めっき物の両側に設けられていることを特徴とする請求項1~6の何れか1項に記載の表面処理装置。
- 被めっき物に対し往復移動させ、前記被めっき物近傍の表面処理液を撹拌するための少なくとも1以上の板状のパドルを用いた表面処理方法であって、
前記パドルは、前記被めっき物に沿って前記表面処理液の深さ方向又は水平方向に設けられた複数の棒が一定の間隔で一体に形成されており、
前記パドルの端部の少なくとも1辺に、液を切るための液切り部が設けられ、
前記液切り部の形状は、該液切り部の厚み方向の断面において、先細り形状又は半円形状であり、
前記棒は、該棒の厚み方向の断面において、四角形の一頂点に、凹状の曲線が前記被めっき物に対向して設けられており、
前記曲線は、R3~10mmであることを特徴とする表面処理方法。 - 被めっき物に対し往復移動させ、前記被めっき物近傍の表面処理液を撹拌するための板状のパドルであって、
前記パドルは、鉛直方向又は水平方向に設けられた複数の棒が一定の間隔で一体に形成されており、
前記パドルの端部の少なくとも1辺に、液を切るための液切り部が設けられ、
前記液切り部の形状は、該液切り部の厚み方向の断面において、先細り形状又は半円形状であり、
前記棒は、該棒の厚み方向の断面において、四角形の一頂点に、凹状の曲線が前記被めっき物に対向して設けられており、
前記曲線は、R3~10mmであることを特徴とするパドル。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019184437A JP7383441B2 (ja) | 2019-10-07 | 2019-10-07 | 表面処理装置、表面処理方法及びパドル |
CN202011040171.9A CN112626601A (zh) | 2019-10-07 | 2020-09-28 | 表面处理装置、表面处理方法以及桨叶 |
KR1020200126997A KR20210041506A (ko) | 2019-10-07 | 2020-09-29 | 표면 처리 장치, 표면 처리 방법 및 패들 |
SG10202009674TA SG10202009674TA (en) | 2019-10-07 | 2020-09-29 | Surface treatment device, surface treatment method and paddle |
US17/063,256 US11891698B2 (en) | 2019-10-07 | 2020-10-05 | Turbulence-reducing device for stirring a surface treatment solution |
TW109134348A TW202115285A (zh) | 2019-10-07 | 2020-10-05 | 表面處理裝置、表面處理方法及攪拌板 |
Applications Claiming Priority (1)
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JP2019184437A JP7383441B2 (ja) | 2019-10-07 | 2019-10-07 | 表面処理装置、表面処理方法及びパドル |
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JP2021059751A JP2021059751A (ja) | 2021-04-15 |
JP7383441B2 true JP7383441B2 (ja) | 2023-11-20 |
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US (1) | US11891698B2 (ja) |
JP (1) | JP7383441B2 (ja) |
KR (1) | KR20210041506A (ja) |
CN (1) | CN112626601A (ja) |
SG (1) | SG10202009674TA (ja) |
TW (1) | TW202115285A (ja) |
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JP6890528B2 (ja) * | 2017-12-15 | 2021-06-18 | 株式会社荏原製作所 | パドルに取り付け可能な消波部材および消波部材を備えるめっき装置 |
CN111441073B (zh) * | 2020-05-11 | 2022-03-25 | 西北工业大学 | 能够提高中空件内壁Ni-SiC复合镀层均匀性的镀腔 |
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- 2020-09-28 CN CN202011040171.9A patent/CN112626601A/zh active Pending
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- 2020-09-29 KR KR1020200126997A patent/KR20210041506A/ko active Search and Examination
- 2020-10-05 TW TW109134348A patent/TW202115285A/zh unknown
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JP2010255028A (ja) | 2009-04-22 | 2010-11-11 | Ebara Corp | めっき方法及びめっき装置 |
JP2015518520A (ja) | 2012-04-11 | 2015-07-02 | ティーイーエル ネックス,インコーポレイテッド | 試料を流体処理するための方法および機器 |
JP2018127649A (ja) | 2017-02-06 | 2018-08-16 | 株式会社荏原製作所 | パドル、該パドルを備えためっき装置、およびめっき方法 |
JP2019081932A (ja) | 2017-10-31 | 2019-05-30 | 株式会社荏原製作所 | めっき装置及びめっき方法 |
JP2019108568A (ja) | 2017-12-15 | 2019-07-04 | 株式会社荏原製作所 | パドルに取り付け可能な消波部材および消波部材を備えるめっき装置 |
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US11891698B2 (en) | 2024-02-06 |
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KR20210041506A (ko) | 2021-04-15 |
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