JP7375656B2 - 光導波路素子とそれを用いた光変調デバイス及び光送信装置 - Google Patents
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
- G02F1/0356—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure controlled by a high-frequency electromagnetic wave component in an electric waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0316—Electrodes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
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Description
(1) 厚さ4μm以下の電気光学効果を有する強誘電体基板にリブ型光導波路を形成し、該リブ型光導波路を伝搬する光波を制御するための制御電極を該基板上に配置する光導波路素子において、該制御電極が高さ10μm以上の信号電極を含み、かつ、該信号電極の幅は、基板側の幅が狭い部分と、該信号電極の上部側の幅の広い部分を備え、該信号電極は該リブ型光導波路の上側に配置され、該信号電極の基板側の幅は、該リブ型光導波路の幅よりも狭く、1μm未満であり、該信号電極の前記狭い部分に接すると共に、該リブ型光導波路を覆うように配置され、該信号電極が倒れるのを防止する防止膜が該基板上に設けられ、該信号電極の前記狭い部分から前記広い部分に接続する位置では、該防止膜の表面が該信号電極側に突出する曲面で形成され、該曲面に沿うように該信号電極の側面が形成されていることを特徴とする。
本発明の光導波路素子は、図2及び図4乃至6に示すように、基板に光導波路を形成し、該光導波路を伝搬する光波を制御するための制御電極を該基板上に配置する光導波路素子において、該制御電極が信号電極を含み、かつ、該信号電極の幅は、基板側の幅が狭い部分と、該信号電極の上部側の幅の広い部分を備え、該信号電極の前記狭い部分に接して配置され、該信号電極が倒れるのを防止する防止膜が該基板上に設けられ、該信号電極の前記狭い部分から前記広い部分に接続する位置では、該防止膜の表面が該信号電極側に突出する曲面で形成され、該曲面に沿うように該信号電極の側面が形成されていることを特徴とする。
MD 光変調デバイス
OTA 光送信装置
Claims (6)
- 厚さ4μm以下の電気光学効果を有する強誘電体基板にリブ型光導波路を形成し、該リブ型光導波路を伝搬する光波を制御するための制御電極を該基板上に配置する光導波路素子において、
該制御電極が高さ10μm以上の信号電極を含み、かつ、該信号電極の幅は、基板側の幅が狭い部分と、該信号電極の上部側の幅の広い部分を備え、
該信号電極は該リブ型光導波路の上側に配置され、
該信号電極の基板側の幅は、該リブ型光導波路の幅よりも狭く、1μm未満であり、
該信号電極の前記狭い部分に接すると共に、該リブ型光導波路を覆うように配置され、該信号電極が倒れるのを防止する防止膜が該基板上に設けられ、
該信号電極の前記狭い部分から前記広い部分に接続する位置では、該防止膜の表面が該信号電極側に突出する曲面で形成され、該曲面に沿うように該信号電極の側面が形成されていることを特徴とする光導波路素子。 - 請求項1に記載の光導波路素子において、該防止膜は、永久レジストで構成されていることを特徴とする光導波路素子。
- 請求項1又は2に記載の光導波路素子において、該リブ型光導波路を含む該基板の上側にバッファ層が配置され、さらに該バッファ層の上側に該信号電極及び該防止膜が配置されていることを特徴とする光導波路素子。
- 請求項1乃至3のいずれかに記載の光導波路素子と、該光導波路素子を収容する筐体と、該リブ型光導波路に光波を該筐体の外部から入力又は出力する光ファイバとを有することを特徴とする光変調デバイス。
- 請求項4に記載の光変調デバイスにおいて、該光導波路素子に入力する変調信号を増幅する電子回路を該筐体の内部に有することを特徴とする光変調デバイス。
- 請求項4又は5に記載の光変調デバイスと、該光変調デバイスに変調動作を行わせる変調信号を出力する電子回路とを有することを特徴とする光送信装置。
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JP2020063303A JP7375656B2 (ja) | 2020-03-31 | 2020-03-31 | 光導波路素子とそれを用いた光変調デバイス及び光送信装置 |
US17/915,716 US20230221590A1 (en) | 2020-03-31 | 2020-12-18 | Optical waveguide element, and optical modulation device and optical transmission device using same |
PCT/JP2020/047464 WO2021199522A1 (ja) | 2020-03-31 | 2020-12-18 | 光導波路素子とそれを用いた光変調デバイス及び光送信装置 |
CN202080098579.3A CN115335759A (zh) | 2020-03-31 | 2020-12-18 | 光波导元件与使用光波导元件的光调制器件与光发送装置 |
EP20929211.9A EP4130857A4 (en) | 2020-03-31 | 2020-12-18 | OPTICAL WAVEGUIDE ELEMENT, OPTICAL MODULATION DEVICE AND OPTICAL TRANSMISSION DEVICE USING SAME |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US20130170781A1 (en) | 2011-12-28 | 2013-07-04 | Karl Kissa | Y-branch dual optical phase modulator |
JP2015061278A (ja) | 2013-09-20 | 2015-03-30 | 住友電工デバイス・イノベーション株式会社 | 信号伝送路 |
JP2015216318A (ja) | 2014-05-13 | 2015-12-03 | 住友電気工業株式会社 | 半導体光集積素子 |
JP2016161661A (ja) | 2015-02-27 | 2016-09-05 | 住友大阪セメント株式会社 | 導波路型光素子 |
US20160291352A1 (en) | 2015-04-06 | 2016-10-06 | Lumentum Operations Llc | Electrode structures for optical modulators |
WO2019039215A1 (ja) | 2017-08-24 | 2019-02-28 | Tdk株式会社 | 光変調器 |
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JPH11295675A (ja) * | 1998-04-08 | 1999-10-29 | Nippon Telegr & Teleph Corp <Ntt> | 高速光変調器 |
US9244296B2 (en) | 2013-11-15 | 2016-01-26 | Tdk Corporation | Optical modulator |
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- 2020-12-18 EP EP20929211.9A patent/EP4130857A4/en active Pending
- 2020-12-18 US US17/915,716 patent/US20230221590A1/en active Pending
- 2020-12-18 CN CN202080098579.3A patent/CN115335759A/zh active Pending
- 2020-12-18 WO PCT/JP2020/047464 patent/WO2021199522A1/ja unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130170781A1 (en) | 2011-12-28 | 2013-07-04 | Karl Kissa | Y-branch dual optical phase modulator |
JP2015061278A (ja) | 2013-09-20 | 2015-03-30 | 住友電工デバイス・イノベーション株式会社 | 信号伝送路 |
JP2015216318A (ja) | 2014-05-13 | 2015-12-03 | 住友電気工業株式会社 | 半導体光集積素子 |
JP2016161661A (ja) | 2015-02-27 | 2016-09-05 | 住友大阪セメント株式会社 | 導波路型光素子 |
US20160291352A1 (en) | 2015-04-06 | 2016-10-06 | Lumentum Operations Llc | Electrode structures for optical modulators |
WO2019039215A1 (ja) | 2017-08-24 | 2019-02-28 | Tdk株式会社 | 光変調器 |
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CN115335759A (zh) | 2022-11-11 |
EP4130857A1 (en) | 2023-02-08 |
EP4130857A4 (en) | 2024-05-01 |
JP2021162681A (ja) | 2021-10-11 |
WO2021199522A1 (ja) | 2021-10-07 |
US20230221590A1 (en) | 2023-07-13 |
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