JP7373999B2 - センサの活性表面を使用するための構造体及び方法 - Google Patents
センサの活性表面を使用するための構造体及び方法 Download PDFInfo
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Description
Claims (20)
- 支持構造体と、
ダイと、
前記ダイ上のセンサであって、活性表面を有する当該センサと、
一対のコラムであって、各コラムが前記支持構造体上で前記ダイと前記センサの両側に位置しているとともに前記支持構造体の頂面に対するコラム高を有し、このコラム高は前記支持構造体の頂面に対する前記センサの活性表面の高さよりも高くなり、各コラムは前記センサの前記活性表面上には配置されない、当該一対のコラムと、
前記一対のコラム上及び前記活性表面の上方にある蓋用の層であって、この蓋用の層はその両端で前記一対のコラムにより支持されている当該蓋用の層とを具える装置において、
前記ダイと前記センサは前記支持構造体上に設けられ、
前記センサの活性表面と、前記蓋用の層と、前記一対のコラムとが、前記センサの活性表面の少なくとも半分よりも多くの上方に開口部を形成しており、前記支持構造体と、前記センサと、前記蓋用の層と、前記一対のコラムとが相俟ってフローセルを形成しているようにした装置。 - 請求項1に記載の装置において、前記一対のコラムの各コラムが、
前記センサの両側における底部コラム部分と、
これら底部コラム部分の各々の上方の頂部コラム部分とを具えている装置。 - 請求項2に記載の装置において、前記一対のコラムが少なくとも1種類の充填材料を有している装置。
- 請求項3に記載の装置において、前記少なくとも1種類の充填材料がエポキシ及びプラスチックの少なくとも一方の成型化合物を有している装置。
- 請求項1に記載の装置において、前記蓋用の層がガラスを有している装置。
- 請求項5に記載の装置において、前記蓋用の層がアルミノケイ酸ガラス及びフラットパネルディスプレイガラスの少なくとも一方を有している装置。
- 請求項1に記載の装置において、前記支持構造体が1つ以上の誘電体層を有し、この1つ以上の誘電体層の各々がその中に1つ以上の導電性経路を有している装置。
- 請求項1に記載の装置において、前記センサが1種類以上の半導体材料を有している装置。
- 請求項7に記載の装置において、前記センサが、相補型金属酸化物半導体(CMOS)技術を用いて製造したイメージセンサを有している装置。
- 請求項1に記載の装置において、前記センサの活性表面上の保護層が複数のチャネルを有している装置。
- 請求項1に記載の装置において、この装置が生物学的分析及び化学的分析の少なくとも一方に対するカートリッジの一部となっている装置。
- フローセルの形成処理を有する方法であって、この形成処理が、
ダイと、活性表面を有するセンサを支持構造体上に配置して、前記センサが前記ダイ上に設けられるようにするステップと、
前記ダイと前記センサの両側に各コラムが存在する一対のコラムを形成するステップであって、各コラムが前記支持構造体の頂面に対するコラム高を有し、このコラム高は前記支持構造体の頂面に対する前記センサの活性表面の高さよりも高く、各コラムは前記センサの前記活性表面上には配置されないステップと、
前記一対のコラムの頂面上に蓋用の層を配置して、この蓋用の層と前記一対のコラムとが前記センサの活性表面の少なくとも半分の上方にスペースを形成するようにするステップとを有するようにする方法。 - 請求項12に記載の方法において、前記センサを支持構造体上に配置するステップがCMOS技術を用いて製造したイメージセンサを配置するステップを有するようにする方法。
- 請求項12に記載の方法において、前記一対のコラムを形成するステップが、
前記センサの両側に底部コラム部分を形成するステップと、
各底部コラム部分の上方に頂部コラム部分を形成するステップとを有するようにする方法。 - 請求項12に記載の方法において、前記支持構造体が1つ以上の誘電体層を有し、この1つ以上の誘電体層の各々がその中に1つ以上の導電性経路を有するようにする方法。
- 請求項12に記載の方法において、この方法が更に、前記フローセルと、生物学的分析及び化学的分析の少なくとも一方に対するカートリッジとを結合するステップを有するようにする方法。
- 請求項12に記載の方法において、この方法が更に、シーケンシングのために前記フローセルを用いるステップを有するようにする方法。
- 請求項12に記載の方法において、この方法が更に、遺伝子型判定のために前記フローセルを用いるステップを有するようにする方法。
- 請求項12に記載の方法において、前記一対のコラムが少なくとも1種類の充填材料を有するようにする方法。
- 請求項19に記載の方法において、前記少なくとも1種類の充填材料がエポキシ及びプラスチックの少なくとも一方の成型化合物を有するようにする方法。
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US (2) | US11519846B2 (ja) |
EP (1) | EP3746770A4 (ja) |
JP (2) | JP7373999B2 (ja) |
KR (1) | KR102266773B1 (ja) |
CN (2) | CN115931729A (ja) |
AU (1) | AU2019214867B2 (ja) |
BR (1) | BR112019027631B1 (ja) |
CA (1) | CA3066737C (ja) |
CL (1) | CL2019003776A1 (ja) |
CO (1) | CO2019014475A2 (ja) |
CR (1) | CR20200001A (ja) |
IL (1) | IL271317A (ja) |
MX (1) | MX2019015833A (ja) |
NZ (1) | NZ759860A (ja) |
PE (1) | PE20200978A1 (ja) |
RU (1) | RU2732315C1 (ja) |
SG (1) | SG11201911649UA (ja) |
TW (1) | TWI685960B (ja) |
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EP3973273A4 (en) | 2019-05-21 | 2023-06-14 | Illumina Inc | SENSORS WITH AN ACTIVE SURFACE |
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AU2019214867A1 (en) | 2020-01-02 |
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US20230076887A1 (en) | 2023-03-09 |
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EP3746770A4 (en) | 2021-06-09 |
BR112019027631A2 (pt) | 2020-07-07 |
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