JP7372352B2 - 有機ルテニウム化合物からなる化学蒸着用原料及び該化学蒸着用原料を用いた化学蒸着法 - Google Patents
有機ルテニウム化合物からなる化学蒸着用原料及び該化学蒸着用原料を用いた化学蒸着法 Download PDFInfo
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- JP7372352B2 JP7372352B2 JP2021574085A JP2021574085A JP7372352B2 JP 7372352 B2 JP7372352 B2 JP 7372352B2 JP 2021574085 A JP2021574085 A JP 2021574085A JP 2021574085 A JP2021574085 A JP 2021574085A JP 7372352 B2 JP7372352 B2 JP 7372352B2
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- 150000003304 ruthenium compounds Chemical class 0.000 title claims description 106
- 238000005229 chemical vapour deposition Methods 0.000 title claims description 61
- 239000002994 raw material Substances 0.000 title claims description 58
- 238000000034 method Methods 0.000 title claims description 26
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 74
- 229910052707 ruthenium Inorganic materials 0.000 claims description 72
- 239000003446 ligand Substances 0.000 claims description 63
- 239000010409 thin film Substances 0.000 claims description 61
- 239000007789 gas Substances 0.000 claims description 48
- 239000010408 film Substances 0.000 claims description 45
- 125000004432 carbon atom Chemical group C* 0.000 claims description 38
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 28
- 125000001424 substituent group Chemical group 0.000 claims description 25
- 239000001257 hydrogen Substances 0.000 claims description 22
- 229910052739 hydrogen Inorganic materials 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 22
- 239000012495 reaction gas Substances 0.000 claims description 18
- 230000008016 vaporization Effects 0.000 claims description 18
- 239000000126 substance Substances 0.000 claims description 16
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 10
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 claims description 10
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 8
- 125000000217 alkyl group Chemical group 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 claims description 6
- 125000003342 alkenyl group Chemical group 0.000 claims description 5
- 125000000304 alkynyl group Chemical group 0.000 claims description 5
- 125000003118 aryl group Chemical group 0.000 claims description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 4
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 125000006165 cyclic alkyl group Chemical group 0.000 claims description 4
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 claims description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 4
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 4
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 4
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 4
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims description 4
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 3
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 claims description 3
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 claims description 3
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 claims description 2
- 229910021529 ammonia Inorganic materials 0.000 claims description 2
- 235000019253 formic acid Nutrition 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 26
- 239000001301 oxygen Substances 0.000 description 26
- 229910052760 oxygen Inorganic materials 0.000 description 26
- 230000015572 biosynthetic process Effects 0.000 description 24
- 238000000354 decomposition reaction Methods 0.000 description 23
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 22
- 230000000052 comparative effect Effects 0.000 description 19
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 18
- 150000001875 compounds Chemical class 0.000 description 18
- 238000009834 vaporization Methods 0.000 description 17
- 238000000113 differential scanning calorimetry Methods 0.000 description 14
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 12
- 230000009257 reactivity Effects 0.000 description 12
- 150000002430 hydrocarbons Chemical group 0.000 description 11
- 238000005259 measurement Methods 0.000 description 11
- 239000002904 solvent Substances 0.000 description 11
- 238000003786 synthesis reaction Methods 0.000 description 11
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 11
- MGNZXYYWBUKAII-UHFFFAOYSA-N cyclohexa-1,3-diene Chemical compound C1CC=CC=C1 MGNZXYYWBUKAII-UHFFFAOYSA-N 0.000 description 10
- 230000008018 melting Effects 0.000 description 10
- 238000002844 melting Methods 0.000 description 10
- 239000007788 liquid Substances 0.000 description 9
- -1 1,1-dimethylbutyl Chemical group 0.000 description 7
- 239000012159 carrier gas Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 125000004430 oxygen atom Chemical group O* 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 5
- HGCIXCUEYOPUTN-UHFFFAOYSA-N cis-cyclohexene Natural products C1CCC=CC1 HGCIXCUEYOPUTN-UHFFFAOYSA-N 0.000 description 5
- 238000004821 distillation Methods 0.000 description 5
- 229910052749 magnesium Inorganic materials 0.000 description 5
- 239000011777 magnesium Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 230000001590 oxidative effect Effects 0.000 description 5
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 5
- 239000011541 reaction mixture Substances 0.000 description 5
- 238000001878 scanning electron micrograph Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 230000000704 physical effect Effects 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 125000003277 amino group Chemical group 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 125000004491 isohexyl group Chemical group C(CCC(C)C)* 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 125000003548 sec-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 125000001973 tert-pentyl group Chemical group [H]C([H])([H])C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- HCKPSFIKUKYMIG-UHFFFAOYSA-N 1-chloro-2-(chloromethyl)-5-methylhex-2-ene Chemical compound CC(C)CC=C(CCl)CCl HCKPSFIKUKYMIG-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- 125000005595 acetylacetonate group Chemical group 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical compound [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 125000003678 cyclohexadienyl group Chemical group C1(=CC=CCC1)* 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000004210 cyclohexylmethyl group Chemical group [H]C([H])(*)C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C1([H])[H] 0.000 description 1
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- ZSWFCLXCOIISFI-UHFFFAOYSA-N endo-cyclopentadiene Natural products C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- VLTZUJBHIUUHIK-UHFFFAOYSA-N ethylcyclopentane;ruthenium Chemical compound [Ru].CC[C]1[CH][CH][CH][CH]1.CC[C]1[CH][CH][CH][CH]1 VLTZUJBHIUUHIK-UHFFFAOYSA-N 0.000 description 1
- 238000001506 fluorescence spectroscopy Methods 0.000 description 1
- AHAREKHAZNPPMI-UHFFFAOYSA-N hexa-1,3-diene Chemical compound CCC=CC=C AHAREKHAZNPPMI-UHFFFAOYSA-N 0.000 description 1
- VLKZOEOYAKHREP-UHFFFAOYSA-N hexane Substances CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 1
- 125000005244 neohexyl group Chemical group [H]C([H])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 238000002076 thermal analysis method Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F15/00—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table
- C07F15/0006—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table compounds of the platinum group
- C07F15/0046—Ruthenium compounds
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/16—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal carbonyl compounds
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28568—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising transition metals
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Description
本発明で適用する有機ルテニウム化合物は、配位子としてトリメチレンメタン系配位子(L1)を適用することを特徴とする。
そして、本発明で適用する有機ルテニウム化合物では、トリメチレンメタン系配位子(L1)と共にルテニウムに配位する配位として、3つのカルボニル配位子を適用する。カルボニル配位子もルテニウムとの結合力が良好であり、錯体全体の熱安定性を向上することができる。また、カルボニル配位子も低分子量の配位子であり、化合物の気化特性を良好にすることができる。
本発明に係る化学蒸着用原料を構成する有機ルテニウム化合物の好適な具体例は、下記化8の式で示されるような化合物が挙げられるが、本発明はこれらに限定されない。
実施例1:(η4-メチレン-1,3-プロパンジイル)トリカルボニルルテニウムの合成
トリカルボニル-ジクロロルテニウムダイマー50.0g(97.5mmol)をテトラヒドロフラン1400mlに懸濁し、3-クロロ-2-(クロロメチル)-1-プロペン 27.0g(214.5mmol)のテトラヒドロフラン溶液300mlを加えた。削状マグネシウム12.0g(479mmol)をゆっくりと加え、その後室温で8時間撹拌した。反応混合物にメタノール10mLを加えクエンチし、溶媒を減圧留去した。得られた残渣をペンタン500mLで1回、次いで250mLで2回抽出し、溶媒を減圧留去した。得られたオイルを蒸留精製することで、目的物として無色液体17.0g(71.1mmol)を得た(収率36%)。合成反応は、下記のとおりである。
トリカルボニル-ジクロロルテニウムダイマー12.2g(24.0mmol)をテトラヒドロフラン420mlに懸濁し、1-クロロ-2-(クロロメチル)-2-ペンテン82.0g(53.6mmol)のテトラヒドロフラン溶液100mlを加えた。削状マグネシウム4.4g(192mmol)をゆっくりと加え、その後室温で3時間撹拌した。反応混合物にメタノール12mLを加えクエンチし、溶媒を減圧留去した。得られた残渣をペンタン30mLで3回抽出し、溶媒を減圧留去した。得られたオイルを蒸留精製することで、目的物として無色液体4.84g(18.1mmol)を得た(収率38%)。本実施例における合成反応は、下記のとおりである。
トリカルボニル-ジクロロルテニウムダイマー6.12g(12.0mmol)をテトラヒドロフラン200mlに懸濁し、1-クロロ-2-(クロロメチル)-2-ヘキセン4.81g(28.8mmol)のテトラヒドロフラン溶液50mlを加えた。削状マグネシウム22.7g(96.0mmol)をゆっくりと加え、その後室温で3時間撹拌した。反応混合物にメタノール6mLを加えクエンチし、溶媒を減圧留去した。得られた残渣をペンタン30mLで3回抽出し、溶媒を減圧留去した。得られたオイルを蒸留精製することで、目的物として無色液体27.9g(9.92mmol)を得た(収率41%)。本実施例における合成反応は、下記のとおりである。
トリカルボニル-ジクロロルテニウムダイマー6.12g(12.0mmol)をテトラヒドロフラン200mlに懸濁し、1-クロロ-2-(クロロメチル)-5-メチル-2-ヘキセン5.21g(28.8mmol)のテトラヒドロフラン溶液50mlを加えた。削状マグネシウム2.2g(96.0mmol)をゆっくりと加え、その後室温で3時間撹拌した。反応混合物にメタノール6mLを加えクエンチし、溶媒を減圧留去した。得られた残渣をペンタン30mLで3回抽出し、溶媒を減圧留去した。得られたオイルを蒸留精製することで、目的物として無色液体2.12g(7.18mmol)を得た(収率30%)。本実施例における合成反応は、下記のとおりである。
トリカルボニル-ジクロロルテニウムダイマー6.12g(12.0mmol)をテトラヒドロフラン200mlに懸濁し、1-クロロ-2-(クロロメチル)-2-ウンデセン6.83g(28.8mmol)のテトラヒドロフラン溶液50mlを加えた。削状マグネシウム2.2g(96.0mmol)をゆっくりと加え、その後室温で3時間撹拌した。反応混合物にメタノール6mLを加えクエンチし、溶媒を減圧留去した。得られた残渣をペンタン30mLで3回抽出し、溶媒を減圧留去した。得られたオイルを蒸留精製することで、目的物として3.37g(9.60mmol)を得た(収率40%)。本実施例における合成反応は、下記のとおりである。
本実施形態で合成した有機ルテニウム化合物のうち、実施例1~実施例5の化合物について、各種物性(融点、分解温度、気化特性)を検討評価した。
各実施例の有機ルテニウム化合物について示差走査熱量測定(DSC)を行い融点と分解温度を測定した。DSCは、測定装置として、NETZSCH社製 DSC3500-ASCにて、サンプル重量1.0mg、キャリアガスを窒素として、走査速度10℃/minで測定温度範囲を-60℃~400℃として測定した。DSCは、比較のため、従来技術である(1,3-シクロヘキサジエン)トリカルボニルルテニウム(上述した化2:比較例1とする)についても行った。実施例1~実施例4及び比較例1の各有機ルテニウム化合物のDSCの結果を図1~図5に示す。
そして、DSCの分析結果から、各有機ルテニウム化合物の分解温度が測定できる。DSCによって測定された各有機ルテニウム化合物の分解温度は下記のとおりである。
次に、実施例1~実施例4の有機ルテニウム化合物について、熱重量-示唆熱分析(TG-DTA)を用いて気化特性の検討を行った。TG-DTAは、BRUKER社製TG-DTA2000SAにて、サンプル重量5mgをアルミニウム製セルに充填し、窒素雰囲気下にて、昇温速度5℃/min、測定温度範囲室温~500℃にて、熱量および重量変化を観察した。TG-DTAによる検討は、比較のため、比較例1の有機ルテニウム化合物((1,3-シクロヘキサジエン)トリカルボニルルテニウム)と、同じく従来技術であるジカルボニル-ビス(5-メチル-2,4-ヘキサンジケトナト)ルテニウム(上記の化5:比較例2とする)についての測定を行った。
本実施形態の実施例1(R=水素)、実施例3(R=プロピル基)の有機ルテニウム化合物について成膜試験を行い、ルテニウム薄膜の成膜可否について検討を行った。また、対比のため、従来の化学蒸着用原料であるジカルボニル-ビス(5-メチル-2,4-ヘキサンジケトナト)ルテニウム(化5、特許文献4)についての成膜試験も行った(比較例2)。
キャリアガス(窒素ガス):10sccm、200sccm
反応ガス(水素ガス):10sccm、200sccm
成膜圧力:30torr、50torr
成膜時間:15min、30min
成膜温度:190℃、200℃、210℃、230℃、250℃
キャリアガス(窒素ガス):10sccm、50sccm
反応ガス(酸素ガス):10sccm
成膜圧力:1torr、2torr、3torr
成膜時間:15min、30min
成膜温度:190℃、210℃、250℃
Claims (6)
- 化学蒸着法によりルテニウム薄膜又はルテニウム化合物薄膜を製造するための化学蒸着用原料において、
2価のルテニウムに、トリメチレンメタン系配位子(L1)と3つのカルボニル配位子が配位した、下記化1の式で示される有機ルテニウム化合物からなる化学蒸着用原料。
- 配位子L1の置換基Rが、メチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、イソブチル基、sec-ブチル基、tert-ブチル基、n-ペンチル基、イソペンチル基又はネオペンチル基のいずれかである請求項1記載の化学蒸着用原料。
- 有機ルテニウム化合物からなる原料を気化して原料ガスとし、前記原料ガスを反応ガスと共に基板表面に導入しつつ加熱するルテニウム薄膜又はルテニウム化合物薄膜の化学蒸着法において、
前記原料として請求項1又は請求項2記載の化学蒸着用原料を用い、前記反応ガスとして水素を用いる化学蒸着法。 - 反応ガスとして還元性ガスを適用し、
原料ガスを前記反応ガスと共に基板表面に導入して加熱する請求項3記載の化学蒸着法。 - 還元性ガスは、水素、アンモニア、ヒドラジン、ギ酸、アルコールのいずれかのガスである請求項4記載の化学蒸着法。
- 成膜温度を150℃以上350℃以下とする請求項3~請求項5のいずれかに記載の化学蒸着法。
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