JP7370069B2 - Workpiece inspection device - Google Patents

Description

The present disclosure relates to a workpiece inspection device that tests the electrical characteristics of a chip-type electronic component (hereinafter also referred to as a workpiece).

2. Description of the Related Art Workpiece inspection apparatuses have been known that inspect electrical characteristics such as resistance and capacitance of chip-type electronic components (hereinafter also referred to as "workpieces").

This workpiece inspection device includes an index table having a workpiece storage hole in which a workpiece is stored, and an inspection section, and the inspection section includes a probe that comes into contact with the workpiece in the workpiece storage hole.

Japanese Patent Application Publication No. 2000-105258

By the way, in the above-mentioned workpiece inspection apparatus, the probe moves up and down from below the workpiece and comes into contact with the workpiece in the workpiece storage hole of the index table, and at this time, the electrical characteristics of the workpiece are inspected by the probe.

However, when the probe is moved up and down to contact the workpiece, the workpiece may be damaged and the probe may also be rubbed. Particularly, noise is generated when the workpiece and the probe come into contact.

The present disclosure has been made in consideration of these points, and aims to provide a workpiece inspection device that suppresses damage to the workpiece, has relatively little wear on the probe, and does not generate noise. .

The present disclosure provides a base, an index table that is rotatably provided on the base and has a plurality of workpiece storage holes formed on the outer periphery for storing workpieces, and an index table that is provided on the outer periphery of the index table and is located at an inspection position. a pair of probes that are provided on the base and perform an electrical test on the workpiece by contacting the workpiece in the workpiece storage hole at the test position; a vacuum path provided in the base to suction the workpiece in the workpiece storage hole at the inspection position and bring it into contact with the pair of probes, the workpiece having a workpiece body and an electrode; The workpiece inspection device is such that the workpiece body or the electrode is made of a magnetic material, and each probe has a probe body and an auxiliary magnetic pole plate with a magnet provided on the probe body.

In the present disclosure, the pair of probes are fixed in the vertical direction, and the workpiece in the workpiece storage hole at the inspection position is in contact with the pair of probes, and the workpiece is in a lateral direction relative to the workpiece. In this workpiece inspection device, the electrode is rubbed by the pair of moving probes, thereby breaking the oxide film and making it easier to conduct.

The present disclosure is a workpiece inspection device in which the pair of probes includes an inner probe located radially inward and an outer probe located radially outward.

The present disclosure is a workpiece inspection device in which each probe is inclined toward the inspection position of the inspection section and arranged in a figure-eight shape when viewed from the side.

The present disclosure is a workpiece inspection apparatus, wherein the inspection section includes an inspection section cover that covers the workpiece in the workpiece storage hole at the inspection position and includes a communication port that communicates with the workpiece storage hole.

The present disclosure is a workpiece inspection device, wherein the vacuum path is formed between the pair of probes.

As described above, according to the present disclosure, when electrically inspecting a workpiece, damage to the workpiece can be suppressed, wear of the probe is relatively small, and noise generation can be suppressed.

FIG. 1 is an enlarged side sectional view of the inspection section of the workpiece inspection apparatus according to the present embodiment. FIG. 2 is a side view showing the entire workpiece processing system incorporating the workpiece inspection device. FIG. 3 is a schematic diagram showing the entire workpiece processing system incorporating the workpiece inspection device.

First, the entire workpiece processing system incorporating the workpiece inspection device 30A will be described with reference to FIGS. 2 and 3.

As shown in FIGS. 2 and 3, the workpiece processing system 1A includes a parts feeder 1 that aligns the supplied workpieces W (see FIG. 1) in the same direction, and a parts feeder 1 that receives the aligned workpieces from the parts feeder 1 and arranges them in a line. A linear feeder 2 having a conveying function is installed horizontally in a circular shape and receives a workpiece W from the linear feeder 2, and by the action of a power source (not shown), it rotates around a vertical rotation axis 5 as indicated by the arrow in FIG. The index table 3 is provided with an index table 3 that rotates intermittently in the direction. Further, the index table 3 has a workpiece storage hole 3a opened outward on its outer circumference, and the workpieces W conveyed by the linear feeder 2 are individually stored in this workpiece storage hole 3a. (see Figure 1). Further, between the linear feeder 2 and the index table 3, a separation supply section 4 having a function of transferring the work W from the linear feeder 2 to the work storage hole 3a of the index table 3 is provided.

Further, on the outer periphery of the index table 3, there is an inspection section 30 for electrically inspecting the workpiece W in the workpiece storage hole 3a of the index table 3, and a tester 30 for electrically testing the workpiece W in the workpiece storage hole 3a of the index table 3. A workpiece insertion section 6 for transferring is provided.

The carrier tape 7 is made entirely of paper, and by punching the paper carrier tape 7, a cavity 13 (not shown) is formed on the carrier tape 7.

The carrier tape 7 having such a configuration is supplied from the supply reel 8 and reaches the workpiece insertion section 6. Then, in the workpiece insertion section 6, the workpiece W is transferred and stored in the cavity of the carrier tape 7 as described above. The carrier tape 7 with the workpiece W accommodated in the cavity is then conveyed to the downstream side (FIGS. 2 and 3).

Next, a synthetic resin top tape 17 is supplied from the top tape supply section 17A via the guide roller 17B to the carrier tape 7 with the workpiece W stored in the cavity, and the carrier tape 7 with the workpiece W stored in the cavity A top tape 17 is thermocompression bonded to the tape 7 by a carrier tape thermocompression bonding device 20 .

Next, the carrier tape 7 to which the top tape 17 is thermocompression bonded by the carrier tape thermocompression bonding device 20 is then sent to an ARC (auto reel changer) 10.

In addition, in FIGS. 2 and 3, a tape feed gear 9 for guiding the carrier tape 7 is provided directly below the workpiece insertion section 6.

As described above, in FIGS. 2 and 3, the index table 3 having the workpiece storage hole 3a for storing the workpiece W in the outer circumference is rotatably provided. In this case, the index table 3 is rotatably arranged on the base 3A.

The base 3A, the index table 3 disposed on the base 3A, and the inspection section 30 disposed on the outer periphery of the index table 3 constitute a workpiece inspection apparatus 30A according to the present embodiment.

Next, the workpiece inspection apparatus 30A according to this embodiment will be described in detail with reference to FIG.

As described above, the workpiece inspection device 30A includes the base 3A, the index table 3 which is rotatably arranged on the base 3A and has a plurality of workpiece storage holes 3a formed in the outer circumference for storing the workpieces W, and an index An inspection section 30 is provided on the outer periphery of the table 3 and performs an electrical inspection on the workpiece W in the workpiece storage hole 3a.

Further, as shown in FIG. 1, an index guide 3D is arranged on the outer periphery of the index table 3, surrounding the index table 3, and this index guide 3D is supported by a base 3A.

Further, an index cover 3B is arranged above the index table 3 and index guide 3D so as to cover the index table 3 and index guide 3D from above.

FIG. 1 is an enlarged side cross-sectional view of the inspection section 30 provided on the outer periphery of the index table 3, viewed from the tangential direction of the index table 3. In FIG. 1, the left side is radially inward of the index table 3, and the right side is radially outward of the index table 3.

The index guide 3D shown in FIG. 1 has a ring shape and is arranged to surround the index table 3 from the outer periphery.

Further, the index cover 3B that covers the index table 3 and the index guide 3D has a disk shape as a whole.

The index guide 3D and index cover 3B shown in FIG. 1 are removed in FIGS. 2 and 3 for convenience.

Further, as shown in FIG. 1, the index cover 3B is partially removed in the inspection section 30 to form a space 3E, and an inspection section cover 40 made of sapphire glass is fitted into the space 3E of the index cover 3B.

The center of the inspection section 30 is an inspection position 30a, and the index table 3 rotates intermittently. When the work storage hole 3a of the index table 3 reaches the inspection position 30a of the inspection section 30, the rotation of the index table 3 is stopped.

Further, an inspection section cover 40 disposed in the inspection section 30 is formed with a communication port 41 that communicates the workpiece storage hole 3a located at the inspection position 30a with the outside.

Next, the inspection section 30 of the workpiece inspection device 30A will be further described with reference to FIG. The inspection section 30 has the inspection position 30a as described above. The inspection unit 30 is provided with a pair of probes 31 and 32 that are provided on the base 3A and perform an electrical test such as a resistance value test on the workpiece W by coming into contact with the workpiece W in the workpiece storage hole 3a that comes to the test position 30a. and a vacuum path 35 that is provided on the base 3A and that sucks the workpiece in the workpiece storage hole 3a and brings it into contact with the pair of probes 31 and 32.

Here, the workpiece W includes a workpiece main body W0 made of a magnetic material and a pair of electrodes W1 and W2, and is a chip-type electronic component having the characteristics of a magnetic material as a whole. The pair of probes 31 and 32 includes an inner probe 31 located radially inward and in contact with one electrode W1, and an outer probe 32 located radially outward and in contact with the other electrode W2. Further, the electrodes W1 and W2 of the workpiece W are made of nickel and tin plating.

Among these, the inner probe 31 is provided with a probe body 31a made of high-speed steel or wear-resistant carbide and an outer surface of the probe body 31a in order to withstand the friction caused by the workpiece W at the tip of the probe and the temperature rise due to energization. It has an auxiliary magnetic pole plate 31b with a neodymium magnet. Further, the probe main body 31a is entirely made of a magnetic material. Furthermore, the inner probe 31 has a carbide tip 33 at the tip that contacts the electrode W1.

At the same time, the outer probe 32 has a probe body 32a made of high-speed steel or wear-resistant carbide, and is provided on the outer surface of the probe body 32a in order to withstand the friction caused by the workpiece W at the tip of the probe and the temperature rise due to energization. It has an auxiliary magnetic pole plate 32b with a neodymium magnet. Further, the probe main body 32a is entirely made of a magnetic material. Furthermore, the outer probe 32 has a carbide tip 34 at the tip that contacts the electrode W2.

As shown in FIG. 1, the pair of probes 31 and 32 are each inclined at an angle of about 5 to 10 degrees with respect to a vertical line passing through the inspection position 30a of the inspection section 30, which makes the index table 3, the pair of probes 31 and 32 are arranged in a figure-eight shape.

Further, the carbide tips 33 and 34 provided at the tips of the pair of probes 31 and 32 are tapered toward the workpiece W with a taper angle of 40° to 110°.

Further, a vacuum path 35 provided on the base 3A is formed between a pair of probes 31 and 32, and this vacuum path 35 is connected to a vacuum pump 37 via a connection line 36. When the workpiece storage hole 3a reaches the inspection position 30a, the workpiece W in the workpiece storage hole 3a is first attracted by the magnetic force from the pair of probes 31 and 32, and the electrodes of the workpiece W are attached to the tips of the probes 31 and 32. W1 and W2 come into contact. Next, in addition to the magnetic force from the probes 31 and 32, the workpiece W is pushed toward the pair of probes 31 and 32 by the suction force from the vacuum path 35, increasing the contact pressure between the workpiece W and the pair of probes 31 and 32. can be done.

In FIG. 1, of the pair of probes 31 and 32, the inner probe 31 is a N-pole probe, and the outer probe 32 is a S-pole probe.

Next, the operation of this embodiment having such a configuration will be explained.

As shown in FIGS. 2 and 3, the workpieces W supplied to the parts feeder 1 are aligned in the same direction by the action of the parts feeder 1, and then transferred to the linear feeder 2. Then, by the action of the linear feeder 2, they are conveyed in a line and reach the index table 3. Furthermore, the workpieces W are individually accommodated in the workpiece storage holes 3a provided in the index table 3 by the action of the separation supply section 4.

The workpiece W accommodated in the workpiece storage hole 3a is sent to the inspection section 30 by the index table 3 intermittently rotating in the direction of the arrow in FIG. Then, the workpiece W in the workpiece storage hole 3a comes into contact with the probes 31 and 32, and the workpiece W is electrically inspected. A workpiece W determined to be defective as a result of the electrical inspection is ejected from the workpiece storage hole 3a by an ejection function (not shown). As a result of the electrical inspection, the workpiece W determined to be a good product reaches the workpiece insertion part 6 by the intermittent rotation of the index table 3 while being accommodated in the workpiece storage hole 3a.

During this time, the carrier tape 7 wound around the supply reel 8 is sent to the ARC 10 side from the tape feed gear 9 installed directly below the workpiece insertion section 6.

Due to the intermittent rotation of the tape feed gear 9, the carrier tape 7 reaches the workpiece insertion section 6 and stops, and when the workpiece can be transferred, the workpiece W in the workpiece storage hole 3a of the index table 3 is transferred to the carrier tape 7. It is transferred to a cavity (not shown).

Next, the top tape 17 is supplied to the carrier tape 7, and the top tape 17 is thermocompression bonded to the carrier tape 7 by a carrier tape thermocompression bonding device 20. The carrier tape 7 with the top tape 17 bonded by thermocompression is then sent to the ARC 10 side.

The method of electrically inspecting the workpiece W in the inspection section 30 during this period will be described in detail below.

A pair of probes 31 and 32 provided on the base 3A each have auxiliary magnetic pole plates 31b and 32b with neodymium magnets, with the inner probe 31 serving as a N-pole probe and the outer probe 32 serving as a S-pole probe. Further, the workpiece W is entirely made of a magnetic material. As shown in FIG. 1, when the workpiece W in the workpiece storage hole 3a provided on the outer periphery of the index table 3 reaches the inspection position 30a of the inspection section 30, the pair of probes 31 and 32 and the workpiece W create a magnetic circuit. can be configured. The workpiece W is attracted to the pair of probes 31 and 32 by the magnetic force of the pair of probes 31 and 32, and the electrodes W1 and W2 of the workpiece W are brought into contact with the tips of the pair of probes 31 and 32.

During this time, the workpiece W in the workpiece storage hole 3a is sucked toward the pair of probes 31 and 32 provided on the base 3A through the vacuum passage 35, which is maintained in a vacuum state by the vacuum pump 37. In this case, the vacuum path 35 is constantly maintained in a vacuum state by the vacuum pump 37. In addition, the inspection section cover 40 provided in the inspection section 30 has a communication port 41 that communicates the workpiece storage hole 3a at the inspection position 30a with the outside, so that the workpiece W in the workpiece storage hole 3a at the inspection position is passed through the vacuum path. 35, the suction can be reliably sucked toward the pair of probes 31 and 32. Therefore, in addition to the attraction by the magnetic force from the probes 31 and 32, the vacuum suction force by the vacuum path 35 pushes the workpiece W toward the pair of probes 31 and 32, and the workpiece W and the pair of probes 31 and 32 are contact pressure can be increased.

In this case, the inner probe 31 is in contact with the electrode W1 of the workpiece W, the outer probe 32 is in contact with the electrode W2 of the workpiece W, and the pair of probes 31 and 32 are used to determine the electrical characteristics of the workpiece W, such as resistance value and capacitance. Electrical characteristics such as those are measured (inspected).

Further, the pair of probes 31 and 32 of the inspection section 30 are fixed and do not move in the vertical direction, and only the workpiece W is affected by the magnetic force action by the pair of probes 31 and 32 and the vacuum suction action by the vacuum path 35. As a result, it is attracted toward the pair of probes 31 and 32 and moves downward. In this case, the pair of probes 31 and 32 come into contact with the electrodes W1 and W2 of the workpiece W, respectively. Then, the tip portions of the pair of probes 31 and 32 that move laterally (horizontally) relative to the workpiece W in the workpiece storage hole 3a break the oxide coatings of the electrodes W1 and W2, resulting in conduction. The pair of probes 31 and 32 can normally contact each electrode W1 and W2.

When the electrical inspection in the inspection section 30 is completed, the index table 3 rotates, and the workpiece W stored in the workpiece storage hole 3a of the index table 3 is sent to the workpiece insertion section 6 for the next process, where it is subjected to the above-mentioned process. The workpiece is transferred into the cavity of the carrier tape 7 in the workpiece insertion section 6 as shown in FIG.

As described above, according to the present embodiment, in the inspection section 30, the pair of probes 31 and 32 are fixed and do not move in the vertical direction, and only the workpiece W is attracted to and abuts on the pair of probes 31 and 32. .

Therefore, the contact pressure between the probes 31, 32 and the workpiece W can be reduced compared to the case where the probes 31, 32 move up and down and come into contact with the workpiece W. Therefore, the workpiece W is not damaged, the probe has relatively little wear, and no noise is generated. This allows the probe maintenance interval to be extended.

Further, when the probes 31 and 32 move up and down and come into contact with the workpiece W, in addition to the upward movement time of the probes 31 and 32, the workpiece W becomes violent due to the contact of the probes 31 and 32 with the workpiece W. Although it is necessary to stabilize the workpiece W until the electrical characteristics of the workpiece W are inspected, according to the present embodiment, the probes 31 and 32 do not move up and down, and the inspection time can be shortened. can.

Furthermore, according to this embodiment, there is no need to provide a mechanism for moving the probes 31, 32 up and down, and there is no need to connect flexible transmission lines to the probes 31, 32, so characteristic impedance is taken into account. It is also possible to measure high-frequency components.

Furthermore, since there is no need to move the probes 31 and 32 up and down, the contact force applied from the probes 31 and 32 to the workpiece W can be reduced, and measurement marks formed on the electrodes W1 and W2 of the workpiece W can be reduced. I can do it. Therefore, measurement marks are generated on the electrodes W1 and W2 of the workpiece W, and the nickel inside the electrodes W1 and W2 is not oxidized, which hinders the soldering action when soldering the workpiece W in a later process. will not occur.

1A Workpiece processing system 3 Index table 3a Workpiece storage hole 3A Base 3B Index cover 3D Index guide 30 Inspection section 30A Workpiece inspection device 30a Inspection position 31 Inner probe 31a Probe body 31b Auxiliary magnetic pole plate with neodymium magnet 32 Outer probe 32a Probe body 32b Auxiliary magnetic pole plate with neodymium magnet 35 Vacuum path 36 Connection line 37 Vacuum pump 40 Inspection section cover 41 Communication port W Work W0 Work body W1 Electrode W2 Electrode

Claims (5)

The base and
an index table that is rotatably provided on the base and has a plurality of workpiece storage holes formed in its outer periphery for storing workpieces;
an inspection section provided on the outer periphery of the index table and having an inspection position;
The inspection unit is provided on the base, and includes a pair of probes that contact the workpiece in the workpiece storage hole at the inspection position to conduct an electrical test on the workpiece;
a vacuum path provided in the base to suction the workpiece in the workpiece storage hole at the inspection position and bring it into contact with the pair of probes;
The workpiece has a workpiece body and an electrode, the workpiece body or the electrode is made of a magnetic material, and each probe has a probe body and an auxiliary magnetic pole plate with a magnet provided on the outer surface of the probe body. ,
The pair of probes includes an inner probe located radially inward and an outer probe located radially outward,
The pair of probes are arranged in a figure-eight shape, tilting upward toward the inspection position of the inspection unit when viewed from the tangential direction of the index table,
The workpiece inspection device is characterized in that the vacuum path is formed by the pair of probes arranged in a figure eight shape to extend from below to above . Each probe has a carbide tip at its distal end that contacts the corresponding electrode, and the carbide tip is tapered toward the workpiece with a taper angle of 40° to 110°, and the carbide tip is tapered toward the workpiece. 2. The workpiece inspection apparatus according to claim 1, wherein the electrode is rubbed by the carbide tip of each probe that moves relatively horizontally, thereby breaking the oxide film and making it easier to conduct. 3. The workpiece inspection apparatus according to claim 1, wherein the pair of probes are fixed in the vertical direction, and the workpiece in the workpiece storage hole at the inspection position abuts against the pair of probes. The workpiece inspection apparatus according to any one of claims 1 to 3, wherein each probe is inclined at an angle of 5° to 10° with respect to a vertical line passing through the inspection position of the inspection section. The workpiece inspection device according to any one of claims 1 to 4, wherein the inspection section includes an inspection cover that covers the workpiece in the workpiece storage hole at the inspection position and includes a communication port that communicates with the workpiece storage hole. .