JP7362416B2 - コイル部品及びその製造方法 - Google Patents
コイル部品及びその製造方法 Download PDFInfo
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- JP7362416B2 JP7362416B2 JP2019192946A JP2019192946A JP7362416B2 JP 7362416 B2 JP7362416 B2 JP 7362416B2 JP 2019192946 A JP2019192946 A JP 2019192946A JP 2019192946 A JP2019192946 A JP 2019192946A JP 7362416 B2 JP7362416 B2 JP 7362416B2
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- interlayer insulating
- insulating film
- protrusion
- coil
- coil pattern
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- 238000004519 manufacturing process Methods 0.000 title claims description 38
- 239000011229 interlayer Substances 0.000 claims description 97
- 239000012762 magnetic filler Substances 0.000 claims description 8
- 229920005989 resin Polymers 0.000 claims description 6
- 239000011347 resin Substances 0.000 claims description 6
- 239000011230 binding agent Substances 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 85
- 238000000034 method Methods 0.000 description 71
- 239000010410 layer Substances 0.000 description 46
- 239000004020 conductor Substances 0.000 description 38
- 238000010586 diagram Methods 0.000 description 31
- 239000002184 metal Substances 0.000 description 23
- 229910052751 metal Inorganic materials 0.000 description 23
- 239000011888 foil Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 9
- 230000006866 deterioration Effects 0.000 description 6
- 239000010949 copper Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000004380 ashing Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/29—Terminals; Tapping arrangements for signal inductances
- H01F27/292—Surface mounted devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0013—Printed inductances with stacked layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/04—Fixed inductances of the signal type with magnetic core
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/32—Insulating of coils, windings, or parts thereof
- H01F27/323—Insulation between winding turns, between winding layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/32—Insulating of coils, windings, or parts thereof
- H01F27/324—Insulation between coil and core, between different winding sections, around the coil; Other insulation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/0073—Printed inductances with a special conductive pattern, e.g. flat spiral
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Coils Or Transformers For Communication (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
Description
10,20,30 導体層
11,12,21,22,31,32 電極パターン
41~44 層間絶縁膜
41A,44A 突出部
41B,44B 角部
41C 厚い領域
41D 薄い領域
42a 開口部
51~58 ビア導体
60 支持体
61 基材
62~65 金属箔
63a 突起部
70 支持体
C コイル部
CP1~CP3 コイルパターン
E1,E2 外部端子
M1~M3 磁性素体
R1~R4 レジストパターン
S 空間
S1~S4 シード層
SL スリット
VP1~VP3 犠牲パターン
Claims (5)
- スパイラル状に巻回されたコイルパターンと、
前記コイルパターンを軸方向における一方側から覆う第1の層間絶縁膜と、
前記コイルパターンを前記軸方向における他方側から覆う第2の層間絶縁膜と、
前記コイルパターンの内径領域に埋め込まれた第1の部分と、前記第1の層間絶縁膜を介して前記コイルパターンを前記軸方向における前記一方側から覆う第2の部分と、前記第2の層間絶縁膜を介して前記コイルパターンを前記軸方向における前記他方側から覆う第3の部分とを含む磁性素体と、
前記第2の層間絶縁膜に設けられた開口部を介して、それぞれ前記コイルパターンの一端及び他端に接続された第1及び第2の外部端子と、を備え、
前記第1の層間絶縁膜は、前記第2の層間絶縁膜よりも膜厚が薄く、
前記第1の層間絶縁膜は、前記内径領域に向かって径方向に突出した第1の突出部を有し、
前記第1の突出部は、前記軸方向における前記他方側に向かって湾曲していることを特徴とするコイル部品。 - 前記第2の層間絶縁膜は、前記内径領域に向かって径方向に突出した第2の突出部を有し、
前記第2の突出部は、前記軸方向における前記一方側に向かって湾曲していることを特徴とする請求項1に記載のコイル部品。 - 前記第1の突出部は、前記第2の突出部よりも大きく湾曲していることを特徴とする請求項2に記載のコイル部品。
- スパイラル状に巻回されたコイルパターンと、
前記コイルパターンを軸方向における一方側から覆う第1の層間絶縁膜と、
前記コイルパターンの内径領域に埋め込まれた第1の部分と、前記第1の層間絶縁膜を介して前記コイルパターンを前記軸方向における前記一方側から覆う第2の部分を含む磁性素体と、を備え、
前記第1の層間絶縁膜は、前記内径領域に向かって径方向に突出した第1の突出部を有し、
前記第1の突出部は、前記軸方向における他方側に向かって湾曲しており、
前記磁性素体は、磁性フィラーと樹脂バインダーを含む複合部材であり、
前記第1の突出部の突出量は、前記磁性フィラーの最大径よりも小さいことを特徴とするコイル部品。 - スパイラル状に巻回され、軸方向における一方側が層間絶縁膜で覆われたコイルパターンを形成する第1の工程と、
前記層間絶縁膜に、前記コイルパターンの内径領域に向かって径方向に突出した突出部を形成する第2の工程と、
磁性素体を前記コイルパターンの前記内径領域に埋め込むとともに、前記層間絶縁膜を介して前記コイルパターンを前記軸方向における前記一方側から磁性素体で覆う第3の工程と、を備え、
前記第1の工程は、前記軸方向から見て前記コイルパターンの前記内径領域と重なる部分に膜厚の厚い領域と薄い領域が含まれるよう、前記層間絶縁膜を形成する工程を含み、
前記第2の工程は、前記層間絶縁膜の膜厚を全体的に減少させることにより前記膜厚の薄い領域を除去し、これによって前記突出部を形成し、
前記第3の工程においては、前記突出部が前記軸方向における他方側に向かって湾曲するよう、前記磁性素体を前記軸方向における前記他方側に押圧することを特徴とするコイル部品の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019192946A JP7362416B2 (ja) | 2019-10-23 | 2019-10-23 | コイル部品及びその製造方法 |
CN202080073429.7A CN114568034A (zh) | 2019-10-23 | 2020-09-29 | 线圈部件及其制造方法 |
US17/767,226 US20220375679A1 (en) | 2019-10-23 | 2020-09-29 | Coil component and manufacturing method therefor |
PCT/JP2020/036858 WO2021079697A1 (ja) | 2019-10-23 | 2020-09-29 | コイル部品及びその製造方法 |
JP2023172443A JP2023168523A (ja) | 2019-10-23 | 2023-10-04 | コイル部品 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019192946A JP7362416B2 (ja) | 2019-10-23 | 2019-10-23 | コイル部品及びその製造方法 |
Related Child Applications (1)
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JP2023172443A Division JP2023168523A (ja) | 2019-10-23 | 2023-10-04 | コイル部品 |
Publications (2)
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JP2021068805A JP2021068805A (ja) | 2021-04-30 |
JP7362416B2 true JP7362416B2 (ja) | 2023-10-17 |
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JP2019192946A Active JP7362416B2 (ja) | 2019-10-23 | 2019-10-23 | コイル部品及びその製造方法 |
JP2023172443A Pending JP2023168523A (ja) | 2019-10-23 | 2023-10-04 | コイル部品 |
Family Applications After (1)
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JP2023172443A Pending JP2023168523A (ja) | 2019-10-23 | 2023-10-04 | コイル部品 |
Country Status (4)
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US (1) | US20220375679A1 (ja) |
JP (2) | JP7362416B2 (ja) |
CN (1) | CN114568034A (ja) |
WO (1) | WO2021079697A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US11935678B2 (en) * | 2020-12-10 | 2024-03-19 | GLOBALFOUNDARIES Singapore Pte. Ltd. | Inductive devices and methods of fabricating inductive devices |
JP2022152043A (ja) * | 2021-03-29 | 2022-10-12 | Tdk株式会社 | コイル部品及びその製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016208305A1 (ja) | 2015-06-24 | 2016-12-29 | 株式会社村田製作所 | コイル部品の製造方法 |
JP2017107971A (ja) | 2015-12-09 | 2017-06-15 | 株式会社村田製作所 | インダクタ部品 |
WO2019044459A1 (ja) | 2017-08-28 | 2019-03-07 | Tdk株式会社 | コイル部品及びその製造方法 |
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2019
- 2019-10-23 JP JP2019192946A patent/JP7362416B2/ja active Active
-
2020
- 2020-09-29 WO PCT/JP2020/036858 patent/WO2021079697A1/ja active Application Filing
- 2020-09-29 US US17/767,226 patent/US20220375679A1/en active Pending
- 2020-09-29 CN CN202080073429.7A patent/CN114568034A/zh active Pending
-
2023
- 2023-10-04 JP JP2023172443A patent/JP2023168523A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016208305A1 (ja) | 2015-06-24 | 2016-12-29 | 株式会社村田製作所 | コイル部品の製造方法 |
JP2017107971A (ja) | 2015-12-09 | 2017-06-15 | 株式会社村田製作所 | インダクタ部品 |
WO2019044459A1 (ja) | 2017-08-28 | 2019-03-07 | Tdk株式会社 | コイル部品及びその製造方法 |
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Publication number | Publication date |
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JP2021068805A (ja) | 2021-04-30 |
WO2021079697A1 (ja) | 2021-04-29 |
JP2023168523A (ja) | 2023-11-24 |
CN114568034A (zh) | 2022-05-31 |
US20220375679A1 (en) | 2022-11-24 |
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