JP7350029B2 - Transport equipment and film forming equipment - Google Patents

Description

The present invention relates to a transport device and a film forming device.

2. Description of the Related Art There is a known technique for aligning an object to be transported when processing the object. For example, Patent Document 1 discloses a technique for aligning a substrate and a mask by transporting the substrate to a preparation chamber by a robot and pre-aligning the substrate.

JP2014-70242A

In an in-line film forming apparatus, a substrate carrier holding a substrate and a mask are cyclically transported along a predetermined transport path. In an apparatus in which the transport route is determined in this manner, efficiency decreases if pre-alignment of the transport object is performed at a location away from the transport route.

The present invention provides a technique that enables positioning of an object to be transported on a transport route.

According to the invention,
a chamber forming a transfer space maintained in a vacuum;
a conveyance means for conveying the object to be conveyed in the conveyance direction within the chamber;
a first regulating means for regulating one position in the width direction of the conveyed object with respect to the conveying direction;
a second regulating means for regulating the other position of the conveyed object in the width direction;
a moving means for moving at least one of the first regulating means and the second regulating means in the width direction to position the conveyed object in the width direction ;
A plurality of the first regulating means are provided along the conveying direction,
A plurality of the second regulating means are provided along the conveyance direction,
The transportation means is
a first moving means for moving the first regulating means in the width direction;
a second moving means for moving the second regulating means in the width direction,
In the positioning of the conveyed object, one of the first regulating means and the second regulating means is fixed in position, and the other is moved in the width direction,
Of the one regulating means whose position is fixed, the regulating means located at the frontmost and rearmost in the transport direction are arranged closer to the object to be transported than the remaining regulating means,
A conveyance device is provided.

According to the present invention, it is possible to provide a technique that allows positioning of an object to be transported on a transport route.

1 is a layout diagram of a film forming apparatus according to an embodiment of the present invention. An explanatory diagram of a vapor deposition apparatus. An explanatory diagram of an alignment device. The figure which shows the example of arrangement|positioning of each roller. An explanatory diagram of a transport unit. FIG. 3 is an explanatory diagram showing structures around a carrier guide unit, a mask guide unit, a mask support unit, and a mask holding unit. (A) to (C) are operation explanatory diagrams of the conveying device. (A) to (C) are operation explanatory diagrams of the conveying device. 5 is a flowchart illustrating prealignment and alignment operation. FIG. 6 is a diagram illustrating the position of a guide roller during mask pre-alignment. (A) is an overall view of an organic EL display device, and (B) is a view showing a cross-sectional structure of one pixel.

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the claimed invention. Although a plurality of features are described in the embodiments, not all of these features are essential to the invention, and the plurality of features may be arbitrarily combined. Furthermore, in the accompanying drawings, the same or similar components are designated by the same reference numerals, and redundant description will be omitted.

<Overview of film forming equipment>
FIG. 1 is a layout diagram of a film forming apparatus 1 according to an embodiment of the present invention. In each figure, an arrow Z indicates a vertical direction (direction of gravity), and an arrow X and an arrow Y indicate a horizontal direction orthogonal to each other. The film forming apparatus 1 is an apparatus that forms a film of a vapor deposition material on a substrate G, and uses a mask M to form a thin film of the vapor deposition material in a predetermined pattern. In particular, the film forming apparatus 1 of this embodiment is an in-line film forming apparatus that can execute a film forming method in which a vapor deposition substance is vapor deposited onto the substrate G using the vapor deposition apparatus while the substrate G is being transported.

The material of the substrate G on which the film is formed in the film forming apparatus 1 can be selected from glass, resin, metal, etc., and a material in which a resin layer such as polyimide is formed on glass is preferably used. The vapor deposition substance includes organic materials, inorganic materials (metals, metal oxides, etc.), and the like. The film forming apparatus 1 is applicable to, for example, a manufacturing apparatus for manufacturing electronic devices such as display devices (flat panel displays, etc.), thin film solar cells, organic photoelectric conversion elements (organic thin film image sensors), optical members, etc. In particular, it is applicable to manufacturing equipment that manufactures organic EL panels.

The film forming apparatus 1 includes a device that transports a substrate G and a mask M using a substrate carrier 100. The substrate carrier 100 includes, for example, a mechanism for holding the substrate G and a mechanism for holding the mask M. The mechanism for holding the substrate G is, for example, an electrostatic chuck, and the mechanism for holding the mask M is, for example, a magnetic chuck. Mask M is held on substrate carrier 100 so as to overlap substrate G, and substrate G is held between substrate carrier 100 and mask M. The substrate carrier 100, the substrate G, and the mask M are plate-shaped and are transported in a horizontal position.

The mask M and the substrate carrier 100 are cyclically transported in the direction shown by the arrow in FIG. 1 and are repeatedly used for a plurality of substrates G. The substrate G is carried into the substrate carrying chamber 100 from outside the film forming apparatus 1 . The substrate G is transported from the board loading chamber 110 to the assembly chamber 111. The substrate carrier 100 is transferred from the carrier chamber 120 to the assembly chamber 111, and the substrate G is stacked on the substrate carrier 100 in the assembly chamber 111 and held. The substrate carrier 100 holding the substrate G is indicated as a substrate carrier 100G in FIG.

The substrate carrier 100G is transported to the preparation room 112. The mask M is transported from the mask chamber 121 to the preparation room 112, and the mask M and the substrate carrier 100G are arranged vertically. The substrate carrier 100G and the mask M are transported from the preparation room 112 to the alignment device 113. In the alignment device 113, the substrate 100 and the mask M are aligned in the XY direction, and the mask M is held on the substrate carrier 100G so as to overlap the substrate 100. The substrate carrier 100 holding the substrate G and the mask M is indicated as a substrate carrier 100GM in FIG.

The substrate carrier 100GM is transported from the alignment device 113 to the vapor deposition device 114A. Here, a vapor deposition material is deposited on the substrate G. Thereafter, the substrate carrier 100GM is transported to the vapor deposition apparatus 115B via the return chamber 115. Also here, the vapor deposition material is deposited on the substrate G. In the substrate carrier 100GM holding the substrate G on which the film has been formed, the mask M is vertically separated from the substrate carrier 100 in the separation chamber 116. The separated mask M is transported to the mask chamber 121 in the transport chamber 117, and the substrate carrier 100G is transported to the separation chamber 118. In the separation chamber 118 , the substrate G on which the film has been formed is separated from the substrate carrier 100 , and the substrate G is transported to the unloading chamber 119 and the substrate carrier 100 is transported to the carrier chamber 120 . The film-formed substrate G is carried out from the carrying-out chamber 119 to the outside of the film-forming apparatus 1 . By repeating the above processing, film formation processing is sequentially performed.

<Vapor deposition equipment>
FIG. 2 is an explanatory diagram of the vapor deposition apparatus 114A. Note that the vapor deposition apparatus 114B also has the same configuration as the vapor deposition apparatus A. The vapor deposition apparatus 114A includes a transport chamber 2 forming a transport space 2a in which a substrate carrier 100 holding a substrate G and a mask M is transported, and a plurality of source chambers 3. A plurality of source chambers 3 are arranged side by side in the X direction, and the transport space 2a is located above these source chambers 3.

The conveyance space 2a is maintained in a vacuum during use, and is provided with an inlet 2b at one end in the X direction and an outlet 2b at the other end. The substrate carrier 100 holding the substrate G and the mask M is carried into the transfer space 2a from the carry-in port 2b, and after processing is carried out to the outside from the carry-in port 2c. Gate valves (not shown) are provided at the carry-in port 2b and the carry-out port 2c.

A plurality of conveyance rollers 2d arranged in the X direction are provided in the conveyance space 2a. Two rows of the transport rollers 2d are arranged spaced apart in the Y direction, and support the mask M from below. Each conveyance roller 2d rotates around a rotation axis in the Y direction. The substrate carrier 100 is placed at both ends in the Y direction on two rows of transport rollers 2d, and is transported horizontally in the X direction by rotation of the transport rollers 2d.

The transport space 2a is also provided with a plurality of guide rollers 2e arranged in the X direction. The guide rollers 2e are arranged in two rows spaced apart in the Y direction, and the guide rollers 2e regulate the position of the mask M in the Y direction. The guide rollers 2e are arranged so that their circumferential surfaces face the sides of the mask M in the Y direction, and each guide roller 2e freely rotates around a rotation axis in the Z-axis direction.

Each source chamber 3a forms an internal space that is maintained in vacuum during use. The source chamber 3a has a box shape with an opening formed in the upper part, and the transport space 2a and the internal space of the source chamber 3a communicate with each other through the opening. Each source chamber 3a is provided with a deposition source 3a that discharges a deposition material upward. The vapor deposition source 3a of this embodiment is a so-called line source, and extends in the Y direction. The evaporation source 3a includes a crucible containing a raw material for the evaporation substance, a heater for heating the crucible, and the like, and heats the raw material and releases the vapor of the evaporation substance into the transport space 2a.

The evaporation apparatus 114A evaporates a evaporation substance onto the substrate G using the evaporation source 3a while transporting the substrate carrier 100 holding the substrate G and the mask M within the transport chamber 2. In this embodiment, a plurality of source chambers 3 are arranged in the transport direction of the substrate carrier 100. When different types of deposition materials are emitted from the three source chambers 3, different deposition materials can be sequentially deposited on the substrate G. Note that the number of source chambers 3 is not limited to three, and may be one or two, or four or more.

<Alignment device>
The configuration of the alignment device 113 will be explained with reference to FIGS. 3 and 4. FIG. 3 is an explanatory diagram of the alignment device 113, and FIG. 4 is a diagram showing an example of the arrangement of rollers around the mask M in the alignment device 113. FIG. 4 shows a state in which the mask M is stopped at a predetermined position in the X direction by a stopper 49. The stopper 49 is movable between a position where it contacts the mask M and a position where it does not contact the mask M.

The alignment device 113 includes a conveyance device 4, a leg portion 5, and an alignment unit 6. The transport device 4 is installed on the floor of a factory or the like via the legs 5 . The transport device 4 includes a chamber 40, a carrier transport unit 41, a mask transport unit 42, a carrier guide unit 43, a mask guide unit 44, a mask support unit 45, a lifting unit 46, a mask holding unit 47, and a lifting unit 48.

The chamber 40 is a box-shaped member that forms a transfer space 40a that is maintained in a vacuum. The substrate carrier 100 holding the substrate G is transported in the X direction by the carrier transport unit 41 within the transport space 40a, and the mask M is transported in the X direction by the mask transport unit 42 below the substrate carrier 100 within the transport space 40a. be done.

In this embodiment, the carrier conveying unit 41 is a roller conveyor. However, the carrier transport unit 41 may be another type of transport unit, such as a magnetically levitated transport unit. Two sets of carrier transport units 41 are provided spaced apart in the Y direction.

Each carrier conveyance unit 41 includes a plurality of conveyance rollers 411 arranged in the X direction, a plurality of drive shafts 412, and a plurality of drive units 413. Two sets of carrier transport units 41 have two rows of transport rollers 411 spaced apart from each other in the Y direction, and support the substrate carrier 100 from below. Each transport roller 411 is connected to a drive unit 413 via a drive shaft 412 extending in the Y direction, and the peripheral surface of each transport roller 411 contacts the bottom surface of the end of the substrate carrier 100 in the Y direction. Each drive unit 413 uses the drive shaft 412 as a rotation axis, and rotates the conveyance roller 411 around the rotation axis in the Y direction via the drive shaft 412.

In this embodiment, the mask conveyance unit 42 is a roller conveyor. However, the mask transport unit 42 may be another type of transport unit, such as a magnetically levitated transport unit. Two sets of mask transport units 42 are provided spaced apart in the Y direction.

Each mask transport unit 41 includes a plurality of transport rollers 421 arranged in the X direction, a plurality of drive shafts 422, and a plurality of drive units 423. As shown in FIG. 4, two rows of transport rollers 421 are arranged in two rows spaced apart in the Y direction by the two mask transport units 42, and support the mask M from below. Each conveyance roller 421 is connected to a drive unit 423 via a drive shaft 422 extending in the Y direction, and the circumferential surface of each conveyance roller 421 contacts the bottom surface of the end of the mask M in the Y direction. Each drive unit 423 uses the drive shaft 422 as a rotation axis, and rotates the conveyance roller 421 around the rotation axis in the Y direction via the drive shaft 422.

FIG. 5 is a detailed diagram of the drive unit 413 of the carrier transport unit 41 and the drive unit 423 of the mask transport unit 42. In this embodiment, in order to avoid interference between the transport roller 411 and the substrate carrier 100 during alignment, the transport roller 411 is configured to be movable in the Y direction. Specifically, the drive unit 413, drive shaft 412, and conveyance roller 411 are configured to be integrally movable in the Y direction by the slide mechanism 414. By this displacement, the conveyance roller 421 can change its position between the conveyance position shown by the solid line and a retracted position outside the conveyance position where interference with the substrate carrier 100 is avoided.

The drive unit 413 includes a motor 413a as its drive source, and the output shaft of the motor 413a is connected to the drive shaft 412. By arranging the drive source outside the chamber 40, generation of particles within the chamber 40 can be reduced. The conveyance roller 411 is rotated by driving the motor 413a. The drive shaft 412 passes through an opening 40d formed in the side wall of the chamber 40 and extends in and out of the chamber 40. A seal structure 413b is provided between the drive unit 413 and the side wall of the chamber 40 in order to seal the opening 40d from the atmosphere outside the chamber 40. The seal structure 413b includes a cylindrical, bellows-shaped seal member that can be expanded and contracted in the Y direction.

The drive unit 423 includes a motor 423a as its drive source, and the output shaft of the motor 423a is connected to the drive shaft 422. By arranging the drive source outside the chamber 40, generation of particles within the chamber 40 can be reduced. The conveyance roller 421 is rotated by driving the motor 423a. The drive shaft 422 passes through an opening 40e formed in the side wall of the chamber 40 and extends in and out of the chamber 40. Conveyance roller 421, unlike conveyance roller 411, does not require displacement. Therefore, the position of the drive unit 423 is a fixed position. A bush portion of the drive unit 423 is inserted into the opening 40e, and is sealed from the atmosphere outside the chamber 40.

Return to FIGS. 3 and 4. The carrier guide unit 43 guides the substrate carrier 100 transported by the carrier transport unit 41 so that the position of the substrate carrier 100 does not shift in the Y direction. In the case of this embodiment, two sets of carrier guide units 43 are provided spaced apart in the Y direction, and the width of the transport path of the substrate carrier 100 in the Y direction is defined by these two sets of carrier guide units 43. .

Each carrier guide unit 43 includes a plurality of regulation units 431 and a plurality of movement units 434. The plurality of regulation units 431 are arranged apart from each other along the X direction, and while the substrate carrier 100 is being transported, the position of the substrate carrier 100 in the width direction (in the case of this embodiment, the Y direction) with respect to the transport direction (X direction) is to regulate. In the case of this embodiment, the regulation unit 431 includes a guide roller 432 and a support member 433 that supports the guide roller 432 rotatably around an axis in the Z direction. The guide roller 432 has a circumferential surface facing the side of the substrate carrier 100, and is supported by a support member 433 so as to be freely rotatable. When the substrate carrier 100 moves obliquely, the substrate carrier 100 comes into contact with the guide roller 432, thereby regulating the position of the substrate carrier 100 in the Y direction. The guide roller 432 is located at a position shifted from the engaging portion 101 and the arm member 60 in the X direction.

If the gap between the substrate carrier 100 and the guide rollers 432 is too large, the conveyance accuracy of the substrate carrier 100 will deteriorate, and if it is too small, interference between the substrate carrier 100 and the guide rollers 432 will occur frequently and particles will be likely to be generated. . The moving unit 434 is a unit that can change the position of the regulating unit 431 by moving it in the width direction of the substrate carrier 100 (in the case of this embodiment, the Y direction). By adjusting the position of the regulating unit 431 using the moving unit 434, the gap between the guide roller 432 and the substrate carrier 100 at an appropriate position in the Y direction can be appropriately set.

The moving unit 434 of this embodiment includes a drive shaft 435 and a drive unit 436. The drive shaft 435 extends in the Y direction and connects the regulation unit 431 and the drive unit 436. The drive unit 436 includes an actuator that moves the drive shaft 435 in the Y direction together with the regulation unit 431. Details will be described later.

The mask guide unit 44 guides the mask M transported by the mask transport unit 42 so that the position of the mask M does not shift in the Y direction. In the case of this embodiment, two sets of mask guide units 44 are provided spaced apart in the Y direction, and the width of the transport path of the mask M in the Y direction is defined by these two sets of mask guide units 44.

Note that in this embodiment, after alignment, the substrate carrier 100 holding the substrate G is stacked on the mask M, and the substrate carrier 100 holds the mask M in addition to the substrate G. The stacked body of the substrate G, the mask M, and the substrate carrier 100 (see FIG. 2) is transported by the transport unit 42 in the alignment device 113, and its position in the Y direction is regulated by the mask guide unit 44.

Each mask guide unit 44 includes a plurality of regulation units 441 and a plurality of movement units 444. The plurality of regulation units 441 are arranged apart from each other along the X direction, and while the substrate carrier 100 is being transported, the position of the substrate carrier 100 in the width direction (in the case of this embodiment, the Y direction) with respect to the transport direction (X direction) is to regulate. In the case of this embodiment, the regulation unit 441 includes a guide roller 442 and a support member 443 that supports the guide roller 442 rotatably around an axis in the Z direction. The guide roller 442 has a circumferential surface facing the side of the mask M, and is supported by a support member 443 so as to be freely rotatable. As shown in FIG. 4, the guide rollers 442 are arranged in two rows along the X direction and spaced apart from each other in the Y direction. When the mask M moves obliquely, the mask M comes into contact with the guide roller 442, thereby regulating the position of the mask M in the Y direction.

If the gap between the mask M and the guide roller 442 is too large, the conveyance accuracy of the mask M will deteriorate, and if it is too small, interference between the mask M and the guide roller 442 will occur frequently, and particles will be likely to be generated. The moving unit 444 is a unit that can move the regulating unit 441 in the width direction of the mask M (in the case of this embodiment, the Y direction) and change its position. By adjusting the position of the regulating unit 441 using the moving unit 444, it is possible to appropriately set the gap between the mask M at an appropriate position in the Y direction and the guide roller 442.

Furthermore, the mobile units 444 can be independently controlled. That is, the position of each guide roller 442 relative to the side surface of the mask M can be adjusted independently. In the pre-alignment of the mask M, the regulation unit 441 is moved to position the mask M in the width direction (in the case of this embodiment, the Y direction), but at this time, the reference position of the mask M is set as shown in FIG. The frontmost and rearmost guide rollers 442-A in the X direction of the guide rollers 442 (guide rollers whose positions are fixed) in one row are separated from the remaining guide rollers 442 by a distance t (for example, more than other rollers) in the Y direction. The mask M is placed at a position close to the side surface of the mask M by a position protruding by 0.5 mm. This stabilizes the posture of the mask M when it is pressed against the reference position, which will be described later. This distance t (protrusion amount) is adjusted as appropriate depending on the size of the mask M, required precision, etc. These prealignment operations will be described later.

The moving unit 444 of this embodiment includes a drive shaft 445 and a drive unit 446. The drive shaft 445 extends in the Y direction and connects the regulation unit 441 and the drive unit 446. The drive unit 446 includes an actuator that moves the drive shaft 445 in the Y direction together with the regulation unit 441. Details will be described later.

The mask support unit 45 supports the mask M from below when the moving unit 444 moves the mask M (during pre-alignment of the mask M). The mask support unit 45 includes a rotating body 451 that is rotatable in the movement direction (Y direction) of the mask M by the moving unit 444, and a support member 452 that supports the rotating body 451 in a freely rotatable manner. In the case of this embodiment, the rotating body 451 is a roller rotatable around an axis in the Y direction. However, the rotating body 451 may be a spherical body (such as a ball roller) supported to freely rotate in any direction.

Suppressing the elastic deformation of the rotating body 451 due to the weight of the mask M when supporting the mask M is advantageous in terms of reducing the contact area between the mask M and the rotating body 451 and preventing the generation of particles. In this respect, it is advantageous if the peripheral surface of the rotating body 451 is made of a harder material than the mask M. For example, the rotating body 451 may be made of stainless steel and may be coated with DLC on its surface. The base material may be a material harder than stainless steel.

Two sets of mask support units 45 are provided spaced apart in the Y direction. In each set, one support member 452 may be provided for one rotating body 451, or one supporting member 452 may be provided for two rotating bodies 451. As shown in FIG. 4, in this embodiment, a total of four rotating bodies 451 are provided, and the four rotating bodies constitute two rows of rollers spaced apart in the X direction.

The lifting unit 46 moves the mask support unit 45 up and down between the support position and the retracted position. FIG. 3 shows the mask support unit 45 in the retracted position. Details of the elevating unit 46 will be described later.

The mask holding unit 47 holds the pre-aligned mask M during the alignment operation. The mask holding unit 47 includes a holding table 47 and a support member 472 that supports the holding table 47. The holding table 47 holds the mask M by, for example, magnetic attraction or a clamp mechanism. The lifting unit 48 raises and lowers the mask holding unit 47 between the holding position and the retracted position. FIG. 3 shows the mask holding unit 47 in the retracted position. Details of the elevating unit 48 will be described later.

Next, the alignment unit 6 aligns the substrate G held by the substrate carrier 100 and the mask M in the XY plane within the transport space 40a, and lowers the substrate carrier 100 onto the mask M. The mask M is also held by the substrate carrier 100.

The alignment unit 6 includes an elevating unit 6A that moves the substrate carrier 100 up and down within the transport space 40a, a moving unit 6B that moves the elevating unit 6A on the XY plane, and a plurality of measurement units 65. The elevating unit 6A includes a plurality of arm members 60 extending in the Z direction, an elevating table 62 that supports the plurality of arm members 60, and a drive unit 63 that moves the elevating table 62 up and down.

The plurality of arm members 60 are spaced apart in the X direction and the Y direction, and extend in and out of the chamber 40 through an opening 40b formed in the top wall of the chamber 40. A sealing structure 60a is provided between the arm member 60 and the top wall of the chamber 40 in order to seal the opening 40b from the atmosphere outside the apparatus. The seal structure 60a includes a cylindrical, bellows-shaped seal member that can be expanded and contracted in the X direction.

The arm member 60 has a claw-like engagement portion 60a at its lower end. When the engaging portion 60a contacts the engaging portion 101 formed on the side of the substrate carrier 100 from below, the substrate carrier 100 is placed on the engaging portions 60a of the plurality of arm members 60.

The drive unit 63 has, for example, a ball screw mechanism, and raises and lowers the elevating table 62 along a ball screw shaft 63a. By lifting and lowering the lifting table 62, the substrate carrier 100 placed on the engaging portions 60a of the plurality of arm members 60 can be lifted and lowered.

The moving unit 6B is connected to the drive unit 63 via a plurality of supports 64, and by displacing the drive unit 63 in the X direction, Y direction, and θ direction, the entire lifting unit 6A, that is, the substrate carrier 100, is direction, Y direction, and θ direction. The moving unit 6B is, for example, a base plate fixed to the chamber 40, a movable plate located above the base plate and having a plurality of support columns 64 erected thereon, or a movable plate disposed between the base plate and the movable plate and movable with respect to the base plate. and a plurality of actuators that displace the plate.

The plurality of measurement units 65 measure the positional deviation between the substrate G held by the substrate carrier 100 and the mask M. The measurement unit 65 of this embodiment is an imaging device (camera) that captures an image, and photographs the substrate G and mask M in the transport space 40a through a transmission section 40c formed on the top wall of the chamber 40. Alignment marks are formed on the substrate G and the mask M, respectively, and the measurement unit 65 images these alignment marks. Then, from the positions of the respective alignment marks on the substrate G and mask M, the amount of positional deviation of the substrate G and mask M in the X direction, Y direction, and θ direction can be calculated.

Note that when the substrate carrier 100 and the mask M are conveyed obliquely in the Y direction, the amount of positional deviation between the substrate G and the mask M is large, and each alignment mark does not fall within the field of view of the measurement unit 65. There are cases. However, in this embodiment, the substrate carrier 100 and the mask M are transported while their positions in the Y direction are regulated by the respective guide units 43 and 44, and the mask M is positioned by pre-alignment, which will be described later. It is possible to prevent the mask M from being conveyed obliquely in the Y direction. Therefore, even before alignment, the amount of positional deviation between the substrate G and the mask M is small, and each alignment mark can be placed within the field of view of the measurement unit 65. That is, by improving the accuracy of transporting the substrate carrier 100 holding the substrate G and the mask M, alignment accuracy can also be improved.

The alignment operation in the alignment device 113 will be explained. First, as shown in FIG. 3, with the arm member 60, the conveyance roller 411, and the regulation units 431 and 441 arranged, the substrate carrier 100 holding the substrate G and the mask M are conveyed into the conveyance space 40a and placed at a predetermined position. to stop transport. Thereafter, the mask M is positioned by pre-alignment, which will be described later, and is held on the holding table 471 of the mask holding unit 47.

The lifting unit 6A raises the arm member 60 and lifts the substrate carrier 100 from the transport roller 411. The conveyance roller 411 moves to the retracted position (FIG. 5). The lifting unit 6A lowers the arm member 60 and lowers the substrate carrier 100 to a position where the substrate G approaches the mask M.

Each alignment mark on the substrate G and mask M is measured by a plurality of measurement units 65, and the amount of positional deviation of the substrate G and mask M in the X direction, Y direction, and θ direction is calculated. The moving unit 6B is driven according to the calculation result to align the substrate G and the mask M. The lifting unit 6A lowers the arm member 60, and lowers the substrate carrier 100 so that the substrate G overlaps the mask M. Note that a recessed portion is formed in the mask M to avoid interference with the engaging portion 60a, and when the arm member 60 is lowered, the engaging portion 60a enters the recessed portion. Thereafter, the mask M is held by the substrate carrier 100.

After transferring the mask M from the mask holding table 471 to the transport roller 421, the transport roller 421 is rotated to transport the substrate carrier 100 holding the substrate G and the mask M to the outside of the alignment apparatus 113.

<Moving unit and elevating unit>
The configurations of the moving units 434 and 444 and the lifting units 46 and 48 will be explained. FIG. 6 is an explanatory diagram showing the structure around the carrier guide unit 43, mask guide unit 44, mask support unit 45, and mask holding unit 47.

A drive shaft 435 of the moving unit 434 passes through an opening 40f formed in the side wall of the chamber 40 and extends in and out of the chamber 40. A sealing structure 437 is provided between the drive shaft 435 and the side wall of the chamber 40 in order to seal the opening 40f from the atmosphere outside the chamber 40. The seal structure 437 includes a cylindrical, bellows-shaped seal member that can be expanded and contracted in the Y direction. The drive unit 436 includes an electric cylinder 436a, the rod portion of which is connected to the drive shaft 435 via a joint portion 438. By arranging the electric cylinder 436a, which is a driving source, outside the chamber 40, generation of particles within the chamber 40 can be reduced. The joint portion 438 is, for example, a floating joint, and is a joint that allows positional deviation between the rod portion and the drive shaft 435. The amount of expansion and contraction of the electric cylinder 436a can be controlled.

With the above configuration, by adjusting the position of the regulation unit 431, it is possible to appropriately set the gap between the guide roller 432 and the substrate carrier 100 located at an appropriate position in the Y direction. In addition, in this embodiment, each of the regulation units 431 on both sides in the Y direction is provided with a moving unit 434 so that their positions can be adjusted, but the regulation unit 431 on one side in the Y direction is fixed in position. Only the regulation unit 431 on the other side may be adjustable in position.

The drive shaft 445 of the moving unit 444 passes through an opening 40g formed in the side wall of the chamber 40 and extends in and out of the chamber 40. A seal structure 447 is provided between the drive shaft 445 and the side wall of the chamber 40 in order to seal the opening 40g from the atmosphere outside the chamber 40. The seal structure 447 includes a cylindrical, bellows-shaped seal member that is expandable and retractable in the Y direction. The drive unit 446 includes an electric cylinder 446a, the rod portion of which is connected to the drive shaft 445 via a joint portion 448. By arranging the electric cylinder 436a, which is a driving source, outside the chamber 40, generation of particles within the chamber 40 can be reduced. The joint portion 448 is, for example, a floating joint, and is a joint that allows misalignment between the rod portion and the drive shaft 445. The amount of expansion and contraction of the electric cylinder 446a can be controlled.

With the above configuration, by adjusting the position of the regulation unit 441, it is possible to appropriately set the gap between the mask M at an appropriate position in the Y direction and the guide roller 442. In this embodiment, each of the regulation units 441 on both sides in the Y direction is provided with a moving unit 444 so that their positions can be adjusted, but the regulation unit 441 on one side in the Y direction is fixed in position. The position of only the regulation unit 441 on the other side may be adjustable.

The elevating unit 46 moves the mask support unit 45 up and down between a retracted position (lowered position) shown by a solid line in FIG. 6 and a support position (raised position) shown by a broken line. The support position is a position where the mask M is supported at a higher position than the position on the transport roller 421, and the mask support unit 45 lifts the mask M from the transport roller 421 in the process of rising from the retracted position to the support position. Become.

The elevating unit 46 includes a drive unit 461, an elevating shaft 462, an abutting member 463 fixed to the upper end of the elevating shaft 462, and a guide member 464. The drive unit 461 includes an actuator (for example, an electric cylinder) that serves as a drive source for the lifting unit 46, and moves the lifting shaft 462 in the Z direction. By arranging the drive source of the lifting unit 46 outside the chamber 40, generation of particles within the chamber 40 can be reduced.

The lifting shaft 462 passes through an opening 40h formed in the bottom wall of the chamber 40 and extends in and out of the chamber 40. In order to seal the opening 40h from the atmosphere outside the chamber 40, a sealing structure 465 is provided between the lifting shaft 462 and the bottom wall of the chamber 40. The seal structure 465 includes a cylindrical, bellows-shaped seal member that is expandable and retractable in the Y direction.

The contact member 463 is a member that contacts the bottom surface of the support member 452, and has a hemispherical shape. Although it is possible to adopt a structure in which the lifting shaft 462 is fixed to the support member 452, a structure in which the spherical surface of the semi-circular contact member 463 only contacts the bottom surface of the support member 452 as in this embodiment, and the two are not fixed is also possible. By doing so, the support member 452 is not restrained in the horizontal direction by the lifting shaft 462. This is advantageous against deformation of the chamber 40 due to whether the interior is under vacuum or atmospheric pressure conditions. From the viewpoint of wear resistance, the contact member 463 may be made of a hard material such as hardened stainless steel, for example.

The guide member 464 is a member on a rail that is erected in the Z direction on the bottom wall within the chamber 40 . The support member 452 has an engaging portion that engages with a guide member 464, and the movement of the mask support unit 45 in the Z direction is guided.

The lifting unit 48 moves the mask holding unit 47 up and down between a retracted position (lowered position) shown by a solid line in FIG. 6 and a holding position (raised position) shown by a broken line. The holding position is a position where the mask M is held at a position slightly higher than the supporting position of the support unit 45, and the mask holding unit 47 removes the mask M from the mask support unit 45 in the process of rising from the retracted position to the holding position. It will be lifted.

The elevating unit 48 includes a drive unit 481, an elevating shaft 482, an abutting member 483 fixed to the upper end of the elevating shaft 482, and a guide member 484. The drive unit 481 includes an actuator (for example, an electric cylinder) that serves as a drive source for the lifting unit 48, and moves the lifting shaft 482 in the Z direction. By arranging the drive source of the lifting unit 48 outside the chamber 40, generation of particles within the chamber 40 can be reduced.

The lifting shaft 482 passes through an opening 40i formed in the bottom wall of the chamber 40 and extends in and out of the chamber 40. In order to seal the opening 40i from the atmosphere outside the chamber 40, a sealing structure 485 is provided between the lifting shaft 482 and the bottom wall of the chamber 40. The seal structure 485 includes a cylindrical, bellows-shaped seal member that is expandable and retractable in the Y direction.

The contact member 483 is a member that contacts the bottom surface of the support member 472, and has a hemispherical shape. Although it is possible to adopt a structure in which the elevating shaft 482 is fixed to the support member 472, a structure in which the spherical surface of the semi-circular contact member 483 only contacts the bottom surface of the support member 472 as in this embodiment, and the two are not fixed is also possible. By doing so, the support member 472 is not restrained in the horizontal direction by the elevating shaft 482. This is advantageous against deformation of the chamber 40 due to whether the interior is under vacuum or atmospheric pressure conditions.

The guide member 484 is a member on a rail that is erected in the Z direction on the bottom wall within the chamber 40 . The support member 472 has an engaging portion that engages with the guide member 484, and the movement of the mask holding unit 47 in the Z direction is guided.

<Pre-alignment>
The pre-alignment operation of the mask M will be explained with reference to FIGS. 7(A) to 8(C), FIG. 9, and FIG. 10. FIG. 9 is a flowchart showing the pre-alignment and alignment operations of the mask M, and FIG. 10 is a diagram showing an example of the arrangement of the guide rollers 442. S1 to S12 below indicate each step of the flowchart in FIG.

FIG. 7(A) shows a state in which the mask M has been transported to a predetermined position in the X direction (the position where it is stopped by the stopper 49 in FIG. 4) (S1 in FIG. 9). After that, as shown in FIG. 7B, the mask support unit 45 is raised to the support position, and the mask M is transferred from the conveyance roller 421 to the rotating body 451 (S2 in FIG. 9). The mask M is spaced apart from the conveyance roller 421.

Next, as shown in FIG. 7(C), among the regulating unit 441 and the moving unit 444 located on both sides of the mask M in the Y direction, the moving unit on one side (the left side in the example of FIG. 7(C)) 444 to move the regulation unit 441 on one side toward the mask M side. The other regulating unit 441 is arranged in the X direction and is immovable, that is, its position is fixed. The mask M is pushed in the Y direction toward the regulation unit 441 located on the right side in FIG. 7(C), and the position is adjusted. At this time, the rotating body 451 supporting the mask M rotates in the Y direction following the movement of the mask M. The rotation of the rotating body 451 can prevent the mask M from being rubbed and generation of particles due to the rubbing. The mask M is positioned in the Y direction by coming into contact with the regulation unit 441 located on the right side in FIG. 7(C), and a pre-alignment operation is performed.

At this time, the guide rollers 442 in one side row (the right row in FIG. 10) that press the mask M are moved by using the position control of the moving unit 444 to move the guide rollers 442 to the reference position of the mask M. Press. At this time, the load applied to the guide rollers 442 in the opposite row (the left row in FIG. 10) may be detected. Detection may be performed using load control (control to output force or torque) by driving the moving unit 444 of the guide roller 442 in the opposite row (left row in FIG. 10). Then, it becomes possible to determine that the mask M is pressed against the reference position so that the load reaches the target value (for example, when it exceeds the threshold value). In this case, the load applied to the guide rollers 442 in the opposite row (left row in FIG. 10) may be determined by detecting the load (force or torque) borne by the moving unit 444 using a sensor, It may also be detected from changes in the drive current.

At this time, as shown in FIG. 10, among the guide rollers 442 in one side row (the left row in FIG. 10) whose position is fixed, which is the reference position of the mask M, the guide rollers 442- When only A is adjusted to a position where it protrudes by a predetermined amount t (0.5 mm in this embodiment) in the Y direction from the other guide rollers 442, both ends of the mask M are pressed, so that the posture is stabilized. The predetermined amount t can be selected depending on the size of the mask M, etc. The load may be detected only for the guide roller 442-A.

Note that this pre-alignment operation is performed until it is confirmed that the alignment mark is within the camera field of view of the measurement unit 65 (S3 and S4 in FIG. 9).

Thereafter, as shown in FIG. 8A, the mask holding unit 47 is raised to the holding position at the same height as the rotating body 451 without moving the mask M (S5 in FIG. 9), and the mask M is moved to the rotating body. 451 and the holding table 471 of the mask holding unit 47 (S6 in FIG. 9). Subsequently, as shown in FIG. 8(B), each regulating unit 441 located on both sides of the mask M in the Y direction is moved in a direction away from the mask M by the corresponding moving unit 444 (S7 in FIG. 9). This prevents generation of particles due to rubbing between the side surface of the mask M and the regulation unit 441.

Then, as shown in FIG. 8C, the mask support unit 45 is lowered to the retracted position by the lifting unit 46, and the rotating body 451 is separated from the mask M, and the mask M is held by the holding table 471. (S8 in FIG. 9).

In this way, the pre-alignment of the mask M is completed. Thereafter, the alignment unit 6 of the alignment device 113 performs alignment between the substrate G and the mask M (S9 in FIG. 9), and the substrate G and the substrate carrier 100 are superimposed on the mask M on the holding table 471, and the mask M is held on the substrate carrier 100 (S10 in FIG. 9). The holding of the mask M by the mask holding unit 47 is released and the mask holding unit 47 is lowered to the retracted position (S11 in FIG. 9), and in the process, the mask M is transferred to the conveying roller 421. After the transfer, the transport roller 421 is rotated to transport the substrate carrier 100 holding the substrate G and mask M (S12 in FIG. 9).

As described above, in this embodiment, the positioning (pre-alignment) of the mask M can be performed on the transport path, and the positioning and transport of the mask M can be performed continuously. Therefore, work efficiency can be improved. Furthermore, since the mask M is positioned in the Y direction with the mask M separated from the transport roller 421 and supported by the rotating body 451, it is possible to avoid rubbing the mask M. .

<Other configuration examples of the transport device>
In the examples of FIGS. 3 to 8(C), the transport device 4 in the alignment device 113 has been described, but the configuration of the transport device 4 can also be applied to other devices or rooms. Further, although the mask M has been illustrated as an object to be transported to be subjected to pre-alignment, the present invention can also be applied to a substrate G.

In the examples shown in FIGS. 3 to 8(C), the position of the conveying roller 421 in the Z direction is fixed and the rotating body 451 is moved up and down in the Z direction, but conversely, the position of the rotating body 451 in the Z direction is fixed. It may be fixed, and the conveyance roller 421 may be moved up and down in the Z direction. Similarly, the position of the conveyance roller 421 in the Z direction is fixed and the mask holding table 471 is moved up and down in the Z direction, but conversely, the position of the mask holding table 471 is fixed in the Z direction and the conveyance roller 421 is It may be configured to move up and down in the Z direction.

In the examples shown in FIGS. 3 to 8(C), during pre-alignment, only one of the regulating units 441 located on both sides of the mask M in the Y direction was moved; The regulating units 441 may be moved in a direction closer to each other.

Furthermore, the number of restriction units 431 for one moving unit 434 may be one or more. In the case of a plurality of regulating units 431, the plurality of regulating units 431 are moved simultaneously by one moving unit 434. Similarly, the number of restriction units 441 for one moving unit 444 may be one or more. In the case of a plurality of regulating units 441, the plurality of regulating units 441 are simultaneously moved by one moving unit 444.

<Electronic devices>
Next, an example of an electronic device will be described. The configuration of an organic EL display device will be illustrated below as an example of an electronic device.

First, the organic EL display device to be manufactured will be explained. FIG. 11(A) is an overall view of the organic EL display device 500, and FIG. 11(B) is a view showing the cross-sectional structure of one pixel.

As shown in FIG. 11A, in the display area 51 of the organic EL display device 500, a plurality of pixels 52 each including a plurality of light emitting elements are arranged in a matrix. Although details will be explained later, each light emitting element has a structure including an organic layer sandwiched between a pair of electrodes.

Note that the pixel herein refers to the smallest unit that can display a desired color in the display area 51. In the case of a color organic EL display device, a pixel 52 is configured by a combination of a plurality of sub-pixels including a first light-emitting element 52R, a second light-emitting element 52G, and a third light-emitting element 52B that emit different light emissions. The pixel 52 is often composed of a combination of three types of subpixels: a red (R) light emitting element, a green (G) light emitting element, and a blue (B) light emitting element, but is not limited thereto. The pixel 52 only needs to include at least one type of subpixel, preferably two or more types of subpixels, and more preferably three or more types of subpixels. The subpixels constituting the pixel 52 may be, for example, a combination of four types of subpixels: a red (R) light emitting element, a green (G) light emitting element, a blue (B) light emitting element, and a yellow (Y) light emitting element.

FIG. 11(B) is a schematic partial cross-sectional view taken along line AB in FIG. 11(A). The pixel 52 includes, on a substrate 53, a first electrode (anode) 54, a hole transport layer 55, one of a red layer 56R, a green layer 56G, and a blue layer 56B, an electron transport layer 57, and a second electrode. It has a plurality of sub-pixels each made of an organic EL element including an electrode (cathode) 58. Among these, the hole transport layer 55, the red layer 56R, the green layer 56G, the blue layer 56B, and the electron transport layer 57 correspond to organic layers. The red layer 56R, the green layer 56G, and the blue layer 56B are formed in patterns corresponding to light emitting elements (sometimes referred to as organic EL elements) that emit red, green, and blue, respectively.

Further, the first electrode 54 is formed separately for each light emitting element. The hole transport layer 55, the electron transport layer 57, and the second electrode 58 may be formed in common across the plurality of light emitting elements 52R, 52G, and 52B, or may be formed for each light emitting element. That is, as shown in FIG. 11B, the hole transport layer 55 is formed as a common layer over a plurality of subpixel regions, and the red layer 56R, green layer 56G, and blue layer 56B are separated for each subpixel region. Further, an electron transport layer 57 and a second electrode 58 may be formed as a common layer over a plurality of sub-pixel regions.

Note that an insulating layer 59 is provided between the first electrodes 54 in order to prevent short circuits between adjacent first electrodes 54 . Furthermore, since the organic EL layer is degraded by moisture and oxygen, a protective layer 600 is provided to protect the organic EL element from moisture and oxygen.

In FIG. 11B, the hole transport layer 55 and the electron transport layer 57 are shown as one layer, but depending on the structure of the organic EL display element, they may be formed of multiple layers including a hole blocking layer and an electron blocking layer. may be done. Further, an energy band structure is provided between the first electrode 54 and the hole transport layer 55 so that holes can be smoothly injected from the first electrode 54 to the hole transport layer 55. Alternatively, a hole injection layer may be formed. Similarly, an electron injection layer may also be formed between the second electrode 58 and the electron transport layer 57.

Each of the red layer 56R, the green layer 56G, and the blue layer 56B may be formed of a single light emitting layer, or may be formed by laminating a plurality of layers. For example, the red layer 56R may be composed of two layers, with the upper layer being a red light-emitting layer and the lower layer being a hole transport layer or an electron blocking layer. Alternatively, the lower layer may be formed of a red light emitting layer, and the upper layer may be formed of an electron transport layer or a hole blocking layer. Providing a layer below or above the light emitting layer in this manner has the effect of improving the color purity of the light emitting element by adjusting the light emitting position in the light emitting layer and adjusting the optical path length.

Note that although an example of the red layer 56R is shown here, a similar structure may be adopted for the green layer 56G and the blue layer 56B. Further, the number of layers may be two or more. Furthermore, layers of different materials may be laminated, such as a light-emitting layer and an electronic block layer, or layers of the same material may be laminated, such as a layer of two or more light-emitting layers.

In manufacturing such an electronic device, the film forming apparatus 1 described above can be applied, and the manufacturing method includes a transport step of transporting the substrate G, and at least one of the layers on the transported substrate G by the vapor deposition apparatuses 114A and 114B. or a deposition step of depositing one layer.

The invention is not limited to the embodiments described above, and various changes and modifications can be made without departing from the spirit and scope of the invention. Therefore, the following claims are hereby appended to disclose the scope of the invention.

DESCRIPTION OF SYMBOLS 1 Film-forming apparatus, 4 Transport apparatus, 40 Chamber, 41 Carrier transport unit, 42 Mask transport unit, 431 Regulation unit, 441 Regulation unit, 434 Movement unit, 444 Movement unit

Claims (8)

a chamber forming a transfer space maintained in a vacuum;
a conveyance means for conveying the object to be conveyed in the conveyance direction within the chamber;
a first regulating means for regulating one position in the width direction of the conveyed object with respect to the conveying direction;
a second regulating means for regulating the other position of the conveyed object in the width direction;
a moving means for moving at least one of the first regulating means and the second regulating means in the width direction to position the conveyed object in the width direction ;
A plurality of the first regulating means are provided along the conveying direction,
A plurality of the second regulating means are provided along the conveyance direction,
The transportation means is
a first moving means for moving the first regulating means in the width direction;
a second moving means for moving the second regulating means in the width direction,
In the positioning of the conveyed object, one of the first regulating means and the second regulating means is fixed in position, and the other is moved in the width direction,
Of the one regulating means whose position is fixed, the regulating means located at the frontmost and rearmost in the transport direction are arranged closer to the object to be transported than the remaining regulating means,
A conveying device characterized by the following. The conveying device according to claim 1,
comprising a support means for supporting the object to be transported when the object to be transported is moved by the moving means,
The support means includes a rotary body that can freely rotate in a direction in which the conveyed object is moved by the moving means.
A conveying device characterized by the following. The conveying device according to claim 2,
The conveying means supports and conveys the object to be conveyed from below,
comprising an elevating means for elevating the conveying means or the supporting means;
A conveying device characterized by the following. The conveying device according to claim 3,
The moving means moves the at least one regulating means in the width direction while the object to be transported is lifted from the transporting means by the lifting means and supported by the supporting means.
A conveying device characterized by the following. The conveying device according to any one of claims 1 to 4 ,
The movement of the other moving regulating means is controlled so that the load that the one regulating means, whose position is fixed, receives from the conveyed object becomes a target value.
A conveying device characterized by the following. The conveying device according to any one of claims 1 to 5 ,
The moving means includes a drive source located outside the chamber,
The conveyance means includes a conveyance roller disposed within the chamber, and a drive source disposed outside the chamber.
A conveying device characterized by the following. The conveying device according to any one of claims 1 to 6 ,
The object to be transported is a mask stacked on a substrate,
The first regulating means and the second regulating means each include a guide roller having a circumferential surface facing a side of the mask.
A conveying device characterized by the following. An in-line film forming apparatus that forms a film on a substrate,
Including the conveying device according to any one of claims 1 to 7 ,
the substrate and mask are held in a substrate carrier;
The transport device transports the mask.
A film forming apparatus characterized by the following.

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