JP7349540B1 - Armature, cooling unit and linear motor - Google Patents

Abstract

The present invention provides a cooling unit, an armature, and a linear motor that can minimize the effects of eddy currents and maintain the rigidity of the unit. An armature 10 of a linear motor includes a plurality of coils arranged in parallel by winding a single wire, and a first cooling unit 15 and a second cooling unit 16 each having a plurality of flow paths through which a cooling medium flows. Be prepared. The first cooling unit and the second cooling unit include a flat flow path plate and a lid plate 163, and the flow path plate is parallel to the moving direction of the armature from one end of the flow path plate to the other end. The channel plate has a plurality of grooves provided so as to be parallel to each other, and a plurality of partitions for separating adjacent grooves. The lid plate is provided with a plurality of second notches formed parallel to the direction of movement of the armature. [Selection diagram] Figure 2

Description

The present invention relates to a cooling unit for cooling a coil mounted on a linear motor, an armature equipped with the cooling unit, and a linear motor.

Linear motors have superior movement speed and positioning accuracy compared to motors with a ball screw structure, and have high responsiveness and long-term stability due to less mechanical contact. Among them, coreless linear motors, which are a type of linear motor, have a small thrust compared to linear motors with cores, but do not cause cogging, so they are used in precision machine tools, electric discharge machines, and semiconductors that require high-speed and high-precision movement. It is used as a drive source for conveyance devices such as manufacturing equipment.

The coreless linear motor has a structure in which a coreless coil on the primary side to be excited and a yoke on the secondary side in which permanent magnet pieces are arranged so as to form a magnetic gap can be relatively linearly moved. For example, there are known moving magnet type linear motors in which the mover side is a magnet and the stator side is a coil, and moving coil type linear motors in which the mover side is a coil and the stator side is a magnet.
As the movable element becomes faster and more precise as a drive source for the conveyance device, the amount of heat generated by the coil increases, and the heat from the coil is transmitted to the structural members installed around the coil, reducing the performance of the motor and the conveyance device. causing performance deterioration. Therefore, in order to suppress the heat generation of the coil, the coreless linear motor is provided with a cooling unit.

Patent No. 5859360 Patent No. 5859361 Patent No. 6482401 Patent No. 3832556

When manufacturing an armature equipped with a cooling unit, there is a method of manufacturing the armature by inserting a coil into a cooling unit created in advance and filling the gap with a mold. However, there are problems in that the gap filled with the mold increases the distance between the coil and the magnet, reducing cooling efficiency, and that the structure of the armature, outer wall, etc. is complicated.

In addition, some of the components of the cooling unit are made of metal materials such as stainless steel, so if the magnetic field changes by changing the current flowing through the coil, or if the cooling unit moves within the magnetic flux of the field. There is a problem in that eddy currents are generated in the component members, and the force generated by the eddy currents and the magnetic flux of the field acts like viscous resistance, resulting in a decrease in the performance of the linear motor (Patent Document 4). The magnitude of such viscous braking force is proportional to the thickness and width of the cooling unit.

In view of the above problems, cooling structures are known in which the structure of the cooling unit is simplified and made thinner (Patent Documents 1 to 3). An object of the present invention is to provide an armature, a cooling unit, and a linear motor that suppress fluctuations in viscous braking force and maintain rigidity by further improving the structure of the conventional cooling unit.

The present disclosure provides an armature for a linear motor that includes a plurality of coils wound with a single wire and arranged in parallel, and a first cooling unit and a second cooling unit each having a plurality of flow paths through which a cooling medium flows. , the first cooling unit and the second cooling unit include a flat flow path plate and a lid plate, and the flow path plate extends from one end of the armature toward the other end of the flow path plate. A plurality of grooves provided parallel to the moving direction and a plurality of partitions for separating adjacent grooves are provided, and the channel plate and the lid plate are overlapped to form the grooves and the partitions. A plurality of channels parallel to the direction of movement of the armature are formed between the channel plate and the lid plate, and a plurality of channels are formed in the partitions of the channel plate parallel to the direction of movement of the armature. a plurality of first notches are provided in the lid plate; a plurality of second notches are provided in the lid plate parallel to the direction of movement of the armature; The coil is tightly fixed to the cooling unit, and the coil is sandwiched between the first cooling unit and the second cooling unit.
The present disclosure also provides a cooling unit for cooling a coil of a linear motor including a plurality of channels through which a cooling medium flows, wherein the cooling unit includes a flat channel plate and a lid plate, and the cooling unit includes a flat channel plate and a lid plate. The flow path plate includes a plurality of grooves provided parallel to the moving direction of the armature from one end of the flow path plate to the other end, and a plurality of partitions for separating adjacent grooves. The flow path plate and the lid plate are overlapped to form a plurality of flow paths parallel to the moving direction of the armature between the flow path plate and the lid plate by the groove and the partition, The partition of the channel plate is provided with a plurality of first notches formed parallel to the moving direction of the armature, and the lid plate is provided with a plurality of first notches formed parallel to the moving direction of the armature. It is characterized in that a second notch is provided.

According to the present disclosure, since a plurality of notches are provided in the flow path plate and the lid plate, which are both sides of the cooling unit, the influence of eddy current can be minimized by the notches, and Since it is provided in the partition, the rigidity of the cooling unit can be maintained.

The second cut of the present disclosure is characterized in that it is provided at the same position as the first cut in the vertical direction.

According to the present disclosure, since the first notch and the second notch are provided at the same position in the vertical direction, even if an eddy current occurs in the channel plate and the lid plate, the notch provides insulation. It becomes possible to appropriately separate the eddy currents of both members.

The groove of the present disclosure is characterized in that a plurality of reinforcing columns are provided.

If the cooling unit is made thinner in consideration of reducing viscous force, the cooling unit itself expands and deforms due to the pressure of the cooling medium flowing inside the cooling unit, and in the worst case, there is a problem that the armature may be damaged. According to the present disclosure, by providing a plurality of reinforcing columns in the groove, it is possible to firmly fix the flow path plate and the lid plate at the position through which the cooling medium passes, thereby suppressing deformation due to pressure of the cooling unit. can do.

The armature of the present disclosure includes an upper cold insulating member fixed to the upper part of the coil, and a lower cold insulating member fixed to the lower part of the coil, and the thickness of the upper cold insulating member and the lower cold insulating member are as described above. It is characterized in that it has the same thickness as the coil and is fixed between the first cooling unit and the second cooling unit.

According to the present disclosure, since the coil is fixed around the coil by the upper cold insulating member, the lower cold insulating member, the first cooling unit, and the second cooling unit, the cooling medium is supplied only to the first and second cooling units. The entire coil can be appropriately cooled even in a flowing state.

In the armature of the present disclosure, a plurality of coils are arranged in parallel to form a first coil row and a second coil row, and are sandwiched between the first coil row and the second coil row and tightly attached. It is characterized by comprising a fixed third cooling unit.

According to the present disclosure, since the armature is cooled by three sets of cooling units, even a thick member with stacked coils can be appropriately cooled.

According to the present disclosure, the influence of eddy currents can be minimized because a plurality of notches are provided in the channel plate and the lid plate of the cooling unit, and the notches are further provided in the partition. Therefore, the rigidity of the cooling unit can be maintained.

FIG. 1 is a schematic diagram showing a linear motor 100 according to a first embodiment of the present invention. It is a perspective view showing armature 10 concerning the above-mentioned embodiment. It is a side view showing armature 10 concerning the above-mentioned embodiment. It is an exploded view showing armature 10 concerning the above-mentioned embodiment. FIG. 3 is a front view showing the first cooling unit 15 according to the embodiment. FIG. 3 is a side view showing the first cooling unit 15 according to the embodiment. It is a top view showing the 1st cooling unit 15 concerning the above-mentioned embodiment. FIG. 3 is an exploded view showing the first cooling unit 15 according to the embodiment. 6 is an enlarged cross-sectional view taken along line AA in FIG. 5. FIG. FIG. 3 is a schematic diagram showing a flow path plate 152 of the first cooling unit 15 according to the embodiment. 11 is an enlarged cross-sectional view taken along line BB in FIG. 10. FIG. FIG. 3 is a schematic diagram showing an eddy current i generated in the first cooling unit 15 according to the above embodiment. FIG. 3 is a perspective view showing an armature 110 according to a second embodiment of the present invention. It is a front view showing armature 110 concerning the above-mentioned embodiment. It is a top view showing armature 110 concerning the above-mentioned embodiment. FIG. 7 is a perspective view showing first and second coils 211 and 311 according to a third embodiment of the present invention. It is a front view showing armature 210 concerning the above-mentioned embodiment. It is a schematic diagram which shows the flow path plate 452 based on the 4th Embodiment of this invention. It is a schematic diagram which shows the other example of the flow path plate 452 based on the said embodiment. FIG. 20 is an enlarged cross-sectional view taken along line CC in FIG. 19;

Hereinafter, the cooling unit, armature 10, and linear motor 100 of the present invention will be described with reference to the drawings. In each figure, the same elements are designated by the same reference numerals, and redundant explanations will be omitted.

<1. First embodiment>
(1.1. Configuration of linear motor 100 and armature 10)
FIG. 1 is a schematic diagram showing a linear motor 100 according to a first embodiment of the present invention, and FIG. 2 is a perspective view showing an armature 10 according to the present embodiment. FIG. 3 is a side view showing the armature 10 according to the present embodiment, and FIG. 4 is an exploded view showing the armature 10 according to the present embodiment.

The linear motor 100 of this embodiment includes a primary armature 10 including a plurality of coils 11 and a secondary field 20 including permanent magnets 21 arranged in a row. When a three-phase alternating current is applied to the coil 11 to generate a magnetic field in the armature 10, the armature 10 is sequentially magnetically attracted to and repelled by the permanent magnet 21 of the field 20 due to this magnetic field, so that the electric machine as a mover The child 10 performs linear motion relative to the field 20 as a stator.

The armature 10 includes a plurality of coils 11 , first and second cooling units 15 and 16 for cooling the coils 11 , an upper cold insulation member 12 , a lower cold insulation member 13 , and a mounting member 14 . The armature 10 has a T-shaped cross section as a whole.

The coil 11 is formed into a flat donut plate shape by intensively winding a single wire, and a plurality of coils 11 are arranged in parallel and arranged in the armature 10. The three coils 11 constitute three phases of U, V, and W, and are arranged in the order of the U, V, and W phases in the moving direction.

The first and second cooling units 15 and 16 are a pair of flat cooling members that sandwich and fix the coil 11 from both sides, and cool water etc. A flow path 151 is formed through which a cooling medium flows. The coil 11 is directly attached to the back surfaces 152e and 162e of the flow path plates 152 and 162, which are inner flat plates of the armature 10, by mechanical bonding such as screwing or by adhesive such as PVA resin or epoxy resin without using a mold resin. It has been fixed. The first cooling unit 15 is a cooling unit placed on the right side of the coil 11 in the drawing, and the second cooling unit 16 is a cooling unit placed on the left side of the coil 11 in the drawing (FIG. 3). Each member of the first and second cooling units 15 and 16 is arranged symmetrically with respect to the coil 11. The thickness of the first and second cooling units 15 and 16 is set to about 3 mm or less in order to minimize the distance between the permanent magnet 21 provided in the field 20 and the coil 11.
In this way, the first and second cooling units 15 and 16 have the function of closely cooling the coil 11 and the function of holding the coil 11.

The upper cold insulation member 12 is a member for preventing a temperature rise in the upper part of the armature 10, and is formed in a block shape. The upper cold insulating member 12 is disposed in contact with or in close proximity to the upper portion of the coil 11 . The thickness of the upper cold insulation member 12 is the same as the thickness of the coil 11, and is installed between the first and second cooling units 15 and 16. The upper cold insulating member 12 is made of metal, ceramics, or resin.

The lower cold insulation member 13 is a member for preventing a rise in temperature at the lower part of the armature 10, and is formed in a block shape. The lower cold insulating member 13 is disposed in contact with or in close proximity to the lower portion of the coil 11 . The thickness of the lower cold insulating member 13 is similar to that of the upper cold insulating member 12 and the same as the thickness of the coil 11, and is installed between the first and second cooling units 15 and 16. The upper cold insulating member 13 is made of metal, ceramics, or resin.

The mounting members 14 are a pair of block-shaped members provided on the upper part of the armature 10. The mounting member 14, the first cooling unit 15, the upper cold insulating member 12, the second cooling unit 16, and the mounting member 14 are arranged in this order, and the coil 11 is sandwiched between the first and second cooling units 15 and 16. Connect and fix by bolting from the outside. The mounting member 14 also functions as a mover base.

The field 20 includes a pair of side yokes 22 facing the armature 10 via a magnetic gap, a plurality of permanent magnets 21, and a center yoke 23.
The side yokes 22 are formed into a flat plate shape, and a plurality of permanent magnets 21 are arranged in a row on opposing inner surfaces of the pair of side yokes 22 so that different polarities are adjacent to each other. The permanent magnet 21 is formed into a rectangular plate shape. The edges of the side yokes 22 are connected by a center yoke 23.

(1.2. Configuration of first and second cooling units 15, 16)
FIG. 5 is a front view showing the first cooling unit 15 according to the present embodiment, and FIG. 6 is a side view showing the first cooling unit 15. FIG. 7 is a plan view showing the first cooling unit 15 according to the present embodiment, and FIG. 8 is an exploded view showing the first cooling unit 15. FIG. 9 is an enlarged cross-sectional view taken along line AA in FIG. The armature 10 includes two sets of first and second cooling units 15 and 16, but since the first and second cooling units 15 and 16 have a plane-symmetric structure via the coil 11, the first and second cooling units 15 and 16 are The first cooling unit 15 will be explained as a representative, and the explanation of the second cooling unit 16 will be omitted.

The first cooling unit 15 includes a flow path plate 152, a lid plate 153, a pair of inflow/outflow members 154 through which a cooling medium flows in and out, and a pair of branching members 155.
The channel plate 152 and the lid plate 153 are flat members having the same overall shape, and a plurality of channels 151 are formed by overlapping the channel plate 152 and the lid plate 153 (FIG. 9). The flow path plate 152 and the lid plate 153 are made of a conductive material such as metal. The channel plate 152 and the lid plate 153 can be fixed together by diffusion bonding.

FIG. 10 is a schematic diagram showing the flow path plate 152 of the first cooling unit 15 according to the present embodiment, and FIG. 11 is an enlarged cross-sectional view taken along the line BB in FIG. 10. In FIG. 10, for convenience, the region of the groove 152a is shown as a region of a plurality of points. FIG. 12 is a schematic diagram showing the eddy current i generated in the first cooling unit 15 according to this embodiment.
The flow path plate 152 includes a groove 152a serving as the flow path 151, a long hole 152b provided at both ends of the groove 152a and connected to the branching member 155, a partition 152c for separating the grooves 152a, and a partition 152c. A first notch 152d is provided at the center of the cutout.
The groove 152a is a linear recess provided in the front of the flow path plate 152, and is provided so as to be parallel to the moving direction of the armature 10 from one end of the flow path plate 152 to the other end. Figure 10). The groove 152a forms a flow path 151 by overlapping the flow path plate 152 and the lid plate 153 (FIG. 9). The groove 152a is formed by processing a flat plate by etching or the like. The width of the groove 152a is selected to be an optimum size, taking into consideration the thickness and material of the channel plate 152. For example, when the thickness of the first cooling unit 15 is 1.5 mm, it is desirable that the thickness be 12 mm or less so that the influence of pressure is suppressed when the cooling medium passes through it.
The partition 152c is a linear convex portion for partitioning the adjacent grooves 152a, and is provided so as to be parallel to the moving direction of the armature 10 from one end of the channel plate 152 to the other end (see FIG. 10). When the flow path plate 152 and the lid plate 153 are overlapped, the surface of the partition 152c on the lid plate 153 side comes into contact with the lid plate 153, and the adjacent flow paths 151 become independent due to the partition 152c. The cooling medium can flow from one end of the channel plate 152 to the other end. A first notch 152d is provided at the center of the partition 152c.
The first notches 152d are elongated through holes provided parallel to the moving direction of the armature 10, and a plurality of first notches 152d are provided linearly from one end of the flow path plate 152 to the other end. When the magnetic field generated in the armature 10 changes by changing the current flowing through the coil 11, or when the first cooling unit 15 moves within the magnetic flux of the field 20, an eddy current is generated inside the flow path plate 152. The force generated by the eddy current and the magnetic flux of the field 20 acts like a viscous resistance in the direction opposite to the movement of the first cooling unit 15, causing the performance of the linear motor 100 to deteriorate. Therefore, by providing the plurality of first notches 152d in the flow path plate 152, the influence of eddy currents on the linear motor 100 is minimized. In addition, since the first notch 152d is provided in the partition 152c, the flow path 151 and the first notch 152d are independent, which does not affect the cooling performance and also reduces the rigidity of the first cooling unit 15. It won't cause any damage. The first notch 152d is formed by slitting with a laser processing machine or the like.
The elongated holes 152b are communication ports through which the cooling medium flows in or out from the branching member 155, and are provided at the left and right ends of the flow path plate 152 (FIG. 10), respectively. The elongated hole 152b is a through hole, and is formed linearly along the vertical direction of the channel plate 152. The elongated hole 152b has a function of connecting or branching the flow path 151 and connecting the flow path 151 and the branching member 155.

The lid plate 153 is a flat member that forms the flow path 151 by covering the groove 152a of the flow path plate 152 by overlapping the flow path plate 152, and has a plurality of second notches 153d and a communication hole. 153a.
The second cut 153d, like the first cut 152d, is a long through hole provided to minimize the influence of eddy currents. The second notch 153d is provided in a straight line from one end of the lid plate 153 to the other end parallel to the moving direction of the armature 10. The second notches 153d form a plurality of rows in the vertical direction of the lid plate 153 in the drawing, thereby separating the eddy current i and minimizing the influence of the eddy current i (FIG. 12).
The second notch 153d is provided at the same position as the first notch 152d in the vertical direction of the paper (FIG. 9). In this way, even if an eddy current i occurs in the channel plate 152 and the lid plate 153, the first notch 152d and the second notch 153d will insulate them, and the eddy current i in both members can be appropriately separated. becomes possible. Furthermore, since the first notch 152d and the second notch 153d are provided at positions that do not overlap the flow path 151, rigidity is not impaired. The second notch 153d is also formed by slitting with a laser processing machine or the like, similar to the first notch 152d. The first notch 152d and the second notch 153d may be continuously provided in a straight line parallel to the moving direction of the armature 10, or may be divided into a plurality of parts.
The communication hole 153a is a through hole for communicating the inflow/outflow member 154 and the flow path 151.

The pair of inflow/outflow members 154 are block-shaped members for flowing the cooling medium into and out of the flow path 151, and have an opening 154a provided at the top and a communication hole for connecting with the flow path 151. It is important to provide the inflow/outflow member 154 at a position where it will not get in the way even when the two sets of first and second cooling units 15 and 16 are attached via the coil 11, for example, facing the plate on which the coil 11 is attached. It is desirable to attach it to the top of both ends of the front face 153b of the lid plate 153, which is a plate.

The pair of branching members 155 are members that branch the cooling medium that has flowed in from one inflow/outflow member 154 into a plurality of channels 151, and also connect the plurality of channels 151 to collect the cooling medium and This is a member to be discharged from member 154. For example, a manifold is used as the branching member 155. The branch member 155 has a rectangular shape and includes a rectangular groove 155a in the center. The branch members 155 are provided at both ends of the back surface 152e of the flow path plate 152 to which the coil 11 is attached, extending in the vertical direction. The branch member 155 is in contact with the coil 11 with the coil 11 sandwiched therebetween, or is in close contact with the coil 11 via an insulating material. Further, the thickness of the branch member 155 is formed to be the same as the thickness of the coil 11 or smaller than the thickness of the coil 11.
The groove 155a is a space in which the cooling medium flowing in from the inflow/outflow member 154 or the cooling medium flowing out from the plurality of channels 151 is temporarily stored. The cross-sectional shape of the groove 155a in the vertical direction on the paper (FIG. 8) has the same shape as the elongated hole 152b of the channel plate 152.

(1.3. Flow of cooling medium in first cooling unit 15)
Next, the flow of the cooling medium within the first cooling unit 15 will be explained.
The cooling medium flowing in from the opening 154a of one of the inflow/outflow members 154 flows into the groove 155a of one of the branching members 155 via the communication hole 153a of the lid plate 153 and the elongated hole 152b of the channel plate 152, and then, It branches into a plurality of flow paths 151 and flows from one end of the first cooling unit 15 to the other end in parallel to the moving direction of the armature 10 . The cooling medium is collected from the plurality of channels 151 into the groove 155a of the other branching member 155 through the elongated hole 152b, and flows out from the opening 154a of the other inflow/outflow member 154 through the communication hole 153a of the lid plate 153. do.

(1.4. Manufacturing method of armature 10)
When manufacturing the armature 10, the upper cold insulating member 12 is placed in contact with or in close proximity to the upper part of the coils 11 arranged in parallel, and the lower cold insulating member 13 is placed in contact with or in the vicinity of the coils 11 at the bottom. . The coil 11 is brought into close contact with the back surfaces 152e and 162e of the flow path plates 152 and 162, and the coil 11 is placed between the first and second cooling units 15 and 16. When the coil 11 is placed between the first and second cooling units 15 and 16, the branch members 155 and 165 at both ends and the end of the coil 11 come into contact with or come close to each other. Finally, the mounting members 14 are placed above the front faces 153b, 163b of the lid plates 153, 163, respectively, and the armature 10 is formed by fixing the upper and lower parts at a plurality of locations by fastening bolts.
In the above manufacturing method, an example was explained in which the coil 11 was placed in close contact with the back surfaces 152e and 162e of the channel plates 152 and 162, but it is also possible to place the coil 11 in close contact with the back surfaces of the lid plates 153 and 163 with the coil 11 sandwiched therebetween. It's okay.

In this way, the coil 11 is fixed at its periphery by the upper cold insulating member 12, the lower cold insulating member 13, and the first and second cooling units 15, 16. Even when only the cooling medium is flowing, the entire coil 11 can be appropriately cooled. Furthermore, since the coil 11 is fixed between the first and second cooling units 15 and 16 without using a mold resin, the strength of the armature 10 is improved compared to fixing through a mold resin. This makes it possible to provide the armature 10 with excellent vibration characteristics.
Furthermore, since the first and second cooling units 15 and 16 each independently include inflow and outflow members 154 and 164 and branching members 155 and 165, two sets of cooling units were used for the armature 10. However, the cooling unit alone can be tested for liquid leakage, etc., and a cooling unit with excellent productivity can be provided.
A first notch 152d and a second notch 153d are provided in the flow path plate 152 and the lid plate 153 of the first cooling unit 15, and the first notch 152d and the second notch 153d is provided at the partition 152c of the flow path plate 152 and at relatively strong locations around the partition 152c, so it is possible to minimize the influence of eddy currents without impairing rigidity.

<2. Second embodiment>
(2.1. Configuration of first, second and third cooling units 15, 16, 17)
FIG. 13 is a perspective view showing the armature 110 according to the second embodiment of the present invention, and FIG. 14 is a front view showing the armature 110 according to the above embodiment. FIG. 15 is a plan view showing the armature 110 according to the above embodiment.
The armature 10 according to the first embodiment of the present invention has a configuration using two sets of cooling units, but the armature 110 according to the second embodiment of the present invention has a configuration using three sets of cooling units. This is the configuration used in this embodiment, and the other configurations are the same as those in the first embodiment, so similar configurations are denoted by the same reference numerals and description thereof will be omitted.

The armature 110 according to the second embodiment of the present invention includes a first coil row 111a, a second coil row 111b, a first cooling unit 15 for cooling the coil 11, and a second cooling unit 15 for cooling the coil 11. unit 16, third cooling unit 17, first upper cold insulation member 112a, second upper cold insulation member 112b, first lower cold insulation member 113a, second lower cold insulation member 113b, A mounting member 14 is provided. The armature 110 has a T-shaped cross section as a whole.

A plurality of coils 11 are arranged in parallel in a predetermined direction, forming a first coil row 111a and a second coil row 111b.

The first cooling unit 15 and the second cooling unit 16 are a pair of flat cooling members that sandwich and fix the coil 11 from both sides. It has the same configuration as No. 16.

The third cooling unit 17 is a cooling member disposed between the first coil row 111a and the second coil row 111b (FIG. 13), and is a cooling member arranged between the first coil row 111a and the second coil row 111b (FIG. 13). 111b, and are directly adhered to each other by mechanical connection such as screwing or adhesive such as PVA resin or epoxy resin without using a mold resin.
The third cooling unit 17 includes a flow path plate 172, a lid plate 173, a pair of inflow/outflow members 174 through which the cooling medium flows in and out, and a pair of branching members 175.
The flow path plate 172 and the lid plate 173 are flat members having the same overall shape, and like the first and second cooling units 15 and 16, by overlapping them, there is a gap between the flow path plate 172 and the lid plate 173. Form multiple channels in the
The size of the flow path plate 172 and the lid plate 173 in the left-right direction in the paper (FIG. 14) is as follows: It is formed twice as large as the size of the input members 154 and 164. Therefore, even if three sets of cooling units are used when manufacturing the armature 110, the armature 110 can be formed thin without depending on the thickness of the inflow/outflow member 174.
In addition, similar to the first and second cooling units 15 and 16, the flow path plate 172 of the third cooling unit 17 includes a groove serving as a flow path, a partition for separating the grooves, and a partition. With a centrally located first notch, the lid plate 173 has a second notch. Furthermore, the flow of the cooling medium and other structures within the third cooling unit 17 are similar to those of the first and second cooling units 15 and 16.

The first and second upper cold insulating members 112a and 112b are block-shaped members for preventing a temperature rise in the upper part of the armature 110. The first upper cold insulating member 112a is disposed above the first coil row 111a in contact with or in close proximity to the first coil row 111a. Further, the second upper cold insulating member 112b is arranged on the second coil row 111b in contact with or in close proximity to the second coil row 111b. The thickness of the first upper cold insulation member 112a is the same as the thickness of the first coil row 111a, and the thickness of the second upper cold insulation member 112b is the same as the thickness of the second coil row 111b. The first upper cold insulating member 112a is installed between the first and third cooling units 15 and 17, and the second upper cold insulating member 112b is installed between the second and third cooling units 16 and 17. It will be installed. The first and second upper cold insulating members 112a and 112b are made of metal, ceramics, or resin.

The first and second lower cold insulation members 113a and 113b are block-shaped members for preventing temperature rise at the lower part of the armature 110, and are located at the lower part of the first coil row 111a and the second coil row 111b. They are arranged in contact with each other or in close proximity to each other. The thickness of the first lower cold insulation member 113a is the same as the thickness of the first coil row 111a, and the thickness of the second lower cold insulation member 113b is the same as the thickness of the second coil row 111b. The first lower cold insulating member 113a is installed between the first and third cooling units 15, 17, and the second lower cold insulating member 113b is installed between the second and third cooling units 16, 17. It is sandwiched and installed. The first and second lower cold insulating members 113a and 113b are made of metal, ceramics, or resin.

(2.2. Manufacturing method of armature 110)
When manufacturing the armature 110, the third cooling unit 17 is arranged so as to be sandwiched between the first coil row 111a and the second coil row 111b, and is in contact with or close to the upper part of the first coil row 111a. The first upper cold insulating member 112a is disposed at the bottom, and the first lower cold insulating member 113a is disposed at the bottom. Similarly, the second upper cold insulating member 112b is arranged in contact with or in close proximity to the upper part of the second coil row 111b, and the second lower cold insulating member 113b is arranged in the lower part. Then, the first coil row 111a is brought into close contact with the back surface 152e of the flow path plate 152, the second coil row 111b is brought into close contact with the back surface 162e of the flow path plate 162, and the first and second cooling units 15 and 16 are arranged. do. Finally, the mounting members 14 are placed above the front faces 153b, 163b of the lid plates 153, 163, and the armature 110 is formed by fixing the upper and lower parts at a plurality of locations by fastening bolts.

In this way, the armature 110 of this embodiment is cooled using three sets of cooling units, so even if the coil is stacked and is a thick member, it can be appropriately cooled. Furthermore, since each cooling unit has an independent structure, even if three sets of cooling units are used in the armature 110, it is possible to test for liquid leakage etc. with the cooling unit alone, resulting in excellent productivity. A cooling unit may be provided.

<3. Third embodiment>
FIG. 16 is a perspective view showing the first and second coils 211, 311 according to the third embodiment of the present invention, and FIG. 17 is a front view showing the armature 210 according to the above embodiment.
In the armatures 10 and 110 according to the first and second embodiments of the present invention, the coil 11 and the first and second coil rows 111a and 111b are formed in a flat plate shape, whereas the armatures 10 and 110 according to the first and second embodiments of the present invention have a flat plate shape. The armature 210 according to the third embodiment is different in that the first coil 211 is formed in a three-dimensional shape rather than a flat plate shape, and other constituent members are the same as in the first and second embodiments. Therefore, similar configurations are designated by the same reference numerals and explanations will be omitted.

The armature 210 according to the third embodiment of the present invention includes a first coil 211, a second coil 311, and a first cooling unit 115 for cooling the first and second coils 211, 311. and a second cooling unit.

The first coil 211 is a donut-shaped coil formed by winding a single wire, and includes a pair of flat plate portions 211a, 211a and a pair of bent portions connecting both ends of the adjacent flat plate portions 211a. 211b, 211b, and a hole 211c provided in the center. The bent portion 211b has a U-shape when viewed from the front, and is provided upright from both ends of the flat plate portion 211a. A plurality of first coils 211 are arranged in parallel in a predetermined direction to form a third coil row 211d.

The second coil 311 is formed into a flat donut plate shape by winding a single wire in a concentrated manner. The second coil 311 includes a pair of flat plate portions 311a, 311a, and a hole 311c provided at the center of the second coil 311. The second coils 311 are arranged in parallel in a predetermined direction to form a fourth coil row 311d.

The parts where the flat plate parts 211a of the adjacent first coils 211 are in contact with each other are inserted into the holes 311c of the fourth coil row 311d, and the parts where the flat plate parts 311a of the adjacent second coils 311 are in contact with each other. is inserted into the hole 311c of the third coil row 211d, the third and fourth coil rows 211d, 311d are stacked at the bent portion 211b, and the flat plate portion of the third and fourth coil rows 211d, 311d is stacked. A collection of coils in which 211a and 311a are connected in a planar manner is formed.

The first cooling unit 115 and the second cooling unit are a pair of flat cooling members that sandwich and fix the third and fourth coil rows 211d and 311d from both sides. , 311 are provided on the front and back sides of the flat plate parts 211a, 311a so as to cool only the flat plate parts 211a, 311a. The other configurations are the same as those of the first and second cooling units 15 and 16 of the first embodiment, so description thereof will be omitted.

In this way, even if the armature 210 uses a three-dimensional coil rather than a flat plate shape, the first cooling unit 115 and the second cooling unit are connected to the flat plate part 211a formed in a flat plate shape. , 311a, it is possible to provide a cooling unit with excellent productivity without requiring major structural changes.

<4. Fourth embodiment>
(4.1. Configuration of channel plate 452)
18 and 19 are schematic diagrams showing a flow path plate 452 according to a fourth embodiment of the present invention. FIG. 20 is an enlarged cross-sectional view taken along the line CC in FIG. 19. The flow path plate 452 according to the fourth embodiment has the following points: (1) a branch/merging portion 452b is provided in place of the elongated hole 152b and the branch member 155 of the flow path plate 152 according to the first embodiment; 2) The difference is that a plurality of reinforcing columns 452f are provided in at least one region of the groove 152a or the branching/merging portion 452b, and the other constituent members are the same as in the first embodiment. Regarding the configuration, the same reference numerals are given and the explanation is omitted. Here, for convenience, FIGS. 18 and 19 show the area through which the cooling medium passes as an area of a plurality of points. Furthermore, although there are a flow path plate 452 of the first cooling unit 15 and a flow path plate of the second cooling unit 16, the flow path plate 452 will be explained as a representative because they have the same structure. , a description of the passage plate of the second cooling unit 16 will be omitted.

The flow path plate 452 includes a groove 152a serving as the flow path 151, branching/merging portions 452b provided at both ends of the groove 152a, a partition 152c for separating the grooves 152a, and a partition 152c at the center of the partition 152c. A plurality of reinforcing columns 452f are provided in at least one region of the first cut 152d, the groove 152a, or the branch/merging portion 452b (FIGS. 18 to 20).

In the branch/merging portion 452b, one region provided at both ends of the groove 152a is a region where the cooling medium flowing from the inflow/outflow member 154 is branched into a plurality of channels 151, and the other region is a region where the cooling medium flows into a plurality of channels 151. This is an area where the cooling medium is collected and discharged from the other inflow/outflow member 154. The branching/merging portion 452b is formed in a concave shape continuously from the plurality of grooves 152a, and is provided extending in the vertical direction of the paper (FIGS. 18 and 19).

The reinforcing columns 452f are reinforcing members formed to protrude from the bottom surface of the groove 152a or the branching/merging portion 452b, and are provided in plural at predetermined intervals in the groove 152a or the branching/merging portion 452b. Further, the reinforcing column 452f has a circular cross section and a diameter of about 3 mm or less. The reinforcing column 452f may be provided only at the branching/merging portion 452b (FIG. 18), or may be provided at the branching/merging portion 452b and the groove 152a (FIG. 19). The diameter of the reinforcing columns 452f, the number of the reinforcing columns, the spacing between them, and the positions of the reinforcing columns 452f are determined by taking into consideration the pressure loss caused by arranging the reinforcing columns 452f, the flow rate of the cooling medium, the safety factor, the maximum stress, and the maximum displacement. and location are selected.
When the flow path plate 452 and the lid plate 153 are overlapped, the surface of the reinforcing column 452f on the lid plate 153 side comes into contact with the lid plate 153 and is bonded to the lid plate 153. The groove 152a, the branch/merging portion 452b, and the reinforcing column 452f are integrally formed by processing a flat plate by etching or the like.

If the cooling unit is made thinner in consideration of reducing viscous force, the cooling unit itself expands and deforms due to the pressure of the cooling medium flowing inside the cooling unit, and in the worst case, there is a problem that the armature may be damaged. Therefore, by providing a plurality of reinforcing columns 452f in the groove 152a and the branch/merging portion 452b, the flow path plate 452 and the lid plate 153 are firmly fixed at the position through which the cooling medium passes, and deformation due to pressure is suppressed. be able to.

(4.2. Flow of cooling medium in first cooling unit 15)
Next, the flow of the cooling medium within the first cooling unit 15 will be explained.
The cooling medium flowing in from the opening 154a of one of the inflow/outflow members 154 flows into one of the branching/merging portions 452b via the communication hole 153a of the lid plate 153. Thereafter, the cooling medium branches into a plurality of flow paths 151, flows from one end of the first cooling unit 15 to the other end in parallel to the moving direction of the armature 10, and is collected at the other branch/merging portion 452b. Then, it flows out from the opening 154a of the other inflow/outflow member 154 via the communication hole 153a of the lid plate 153.

Although various embodiments according to the present invention have been described above, these are presented as examples and are not intended to limit the scope of the invention. The new embodiment can be implemented in various other forms, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. The embodiments and their modifications are included within the scope and gist of the invention, as well as within the scope of the invention described in the claims and its equivalents.

10,110,210 Armature 12 Upper cold insulating member 13 Lower cold insulating member 14 Mounting member 15 First cooling unit 152,162,452 Channel plate 153,163 Lid plate 154,164 Outflow/inflow member 155,165 Branch member 16 Second cooling unit 17 Third cooling unit 20 Field 100 Linear motor

Claims (7)

An armature of a linear motor comprising a plurality of coils arranged in parallel by winding a single wire, a first cooling unit and a second cooling unit each having a plurality of channels through which a cooling medium flows,
The first cooling unit and the second cooling unit include a flat channel plate and a lid plate,
The flow path plate includes a plurality of grooves provided parallel to the moving direction of the armature from one end of the flow path plate to the other end, and a plurality of grooves for separating adjacent grooves. Equipped with partitions,
The flow path plate and the lid plate are overlapped, and the plurality of flow paths parallel to the moving direction of the armature are formed between the flow path plate and the lid plate by the groove and the partition,
The partition of the channel plate is provided with a plurality of first notches formed parallel to the moving direction of the armature, and the lid plate is provided with a plurality of first notches formed parallel to the moving direction of the armature. a second notch is provided;
An armature characterized in that the coil is closely fixed to the back surface of the flow path plate or the lid plate, and the coil is sandwiched between the first cooling unit and the second cooling unit. The second notch is provided at the same position as the first notch along a linear direction perpendicular to the moving direction on a plane formed on the lid plate surface. The armature according to 1. The armature according to claim 1, wherein the groove is provided with a plurality of reinforcing columns. The armature includes an upper cold insulating member fixed to the upper part of the coil, and an upper cold insulating member fixed to the lower part of the coil when the armature is arranged with the straight line direction orthogonal to the moving direction as the vertical direction in a plane formed on the lid plate surface. Equipped with a fixed lower cold insulation member,
The thickness of the upper cold insulating member and the lower cold insulating member, whose thickness is the size in the straight line direction perpendicular to both the moving direction and the up-down direction, is the thickness in the straight line direction perpendicular to both the moving direction and the up-down direction. The armature according to claim 1 , wherein the armature has the same thickness as the coil, and is fixed between the first cooling unit and the second cooling unit. The plurality of coils are arranged in parallel to form a first coil row and a second coil row, and a third coil row is tightly fixed and sandwiched between the first coil row and the second coil row. The armature according to claim 1, further comprising a cooling unit. A cooling unit for cooling a coil of a linear motor having a plurality of channels through which a cooling medium flows,
The cooling unit includes a flat channel plate and a lid plate,
The flow path plate includes a plurality of grooves provided parallel to the moving direction of the armature from one end of the flow path plate to the other end, and a plurality of partitions for separating adjacent grooves. Equipped with
The flow path plate and the lid plate are overlapped, and a plurality of flow paths parallel to the moving direction of the armature are formed between the flow path plate and the lid plate by the groove and the partition,
The partition of the channel plate is provided with a plurality of first notches formed parallel to the moving direction of the armature, and the lid plate is provided with a plurality of first notches formed parallel to the moving direction of the armature. A cooling unit characterized in that a second notch is provided. A linear motor comprising the armature according to any one of claims 1 to 5 and a field in which a plurality of permanent magnets with different polarities are arranged in a row.

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