TW202406279A - Armature, linear motor and cooling unit of linear motor - Google Patents

Abstract

The present invention provides a cooling unit, an armature, and a linear motor that can suppress the influence of eddy currents to a minimum and maintain rigidity. The armature of the present invention is an armature of a linear motor, including: a plurality of coils wound around a single wire and arranged in parallel; and a first cooling unit and a second cooling unit, including a plurality of flow paths for cooling medium to circulate. The armature It is characterized in that the first cooling unit and the second cooling unit include a flat flow plate and a cover plate. The flow plate includes a plurality of grooves from one end of the flow plate toward the other end to connect with the armature. The moving direction is arranged in parallel; and a plurality of partitions are used to separate adjacent slots. A plurality of first partitions formed parallel to the moving direction of the armature are provided on the partitions of the flow path plate. The cover plate is provided with a plurality of second cutouts formed parallel to the moving direction of the armature.

Description

Armature, cooling unit and linear motor

The present invention relates to a cooling unit for cooling a coil mounted on a linear motor, an armature and a linear motor including the cooling unit.

Compared with motors with a ball screw structure, linear motors have excellent moving speed and positioning accuracy, and have less mechanical contact, so they have high responsiveness and long-term stability. Among them, coreless linear motors, which are a type of linear motor, have smaller thrust than cored linear motors but do not generate cogging. Therefore, they are used in precision machine tools and electrical discharge machines that require high-speed and high-precision operations. Driving source for transportation equipment such as semiconductor manufacturing equipment.

The coreless linear motor uses a motor having a structure in which a coreless coil on the primary side that is excited and a yoke on the secondary side in which permanent magnet pieces are arranged to form a magnetic gap can relatively move linearly. For example, there are known a movable magnet type linear motor in which the movable element side is a magnet and a fixed element side is a coil, or a movable coil type linear motor in which the movable element side is a coil and the fixed element side is a magnet. As the driving source of the conveying device, if the speed or precision of the movable element is increased, the amount of heat generated by the coil increases, and the heat from the coil is conducted to the structural members provided around the coil, causing deterioration of the motor performance and the performance of the conveying device. . Therefore, in order to suppress the heat generation of the coil, a cooling unit is provided in the coreless linear motor. [Prior art documents] [Patent Document]

[Patent Document 1] Japanese Patent No. 5859360 [Patent Document 2] Japanese Patent No. 5859361 [Patent Document 3] Japanese Patent No. 6482401 [Patent Document 4] Japanese Patent No. 3832556

[Problem to be solved by the invention]

When manufacturing an armature including a cooling unit, there is a method in which a coil is installed in a prefabricated cooling unit and the gap is filled with a mold to manufacture the armature. However, the gap filled with the mold causes a problem that the distance between the coil and the magnet increases and the cooling efficiency decreases, and the structure of the armature, the outer wall, etc. becomes complicated.

Furthermore, since part of the structural members of the cooling unit is made of metal materials such as stainless steel, when the magnetic field changes by changing the current flowing in the coil, or when the cooling unit moves within the magnetic flux of the field magnet, , there is a problem that eddy currents are generated in structural members, and the force generated by the eddy currents and the magnetic flux of the field magnet acts as viscous resistance, reducing the performance of the linear motor (Patent Document 4). The magnitude of this viscous braking force is proportional to the thickness or width of the cooling unit.

In view of the above problem, a cooling structure is known in which the structure of the cooling unit is simplified and formed thinly (Patent Document 1 to Patent Document 3). An object of the present invention is to provide an armature, a cooling unit, and a linear motor that suppress fluctuations in viscous braking force and maintain rigidity by further improving the structure of the existing cooling unit. [Technical means to solve problems]

The present disclosure is an armature of a linear motor, which includes: a plurality of coils wound around a single wire and arranged in parallel; and a first cooling unit and a second cooling unit, including a plurality of flow paths for cooling medium to circulate. The linear motor has The armature is characterized in that the first cooling unit and the second cooling unit include a flat flow path plate and a cover plate, and the flow path plate includes a plurality of grooves extending from one end of the flow path plate toward The other end is arranged parallel to the moving direction of the armature; and a plurality of partitions are used to separate adjacent slots. The flow path plate overlaps the cover plate, and is formed by the The groove and the partition plate form a plurality of flow paths parallel to the moving direction of the armature between the flow path plate and the cover plate, and the partition plate of the flow path plate is provided with A plurality of first notches formed parallel to the moving direction of the armature, the cover plate provided with a plurality of second notches formed parallel to the moving direction of the armature, and the flow path plate Or the back surface of the cover plate is tightly connected to the coil, and the coil is clamped by the first cooling unit and the second cooling unit. Furthermore, the present disclosure is a cooling unit that includes a plurality of flow paths for cooling medium to circulate and is used to cool coils of a linear motor. The cooling unit is characterized in that the cooling unit includes a flat flow path plate and a cover plate. , the flow path plate includes: a plurality of grooves, which are arranged parallel to the moving direction of the armature from one end of the flow path plate toward the other end; and a plurality of partitions used to separate the adjacent grooves. The flow path plate and the cover plate are separated, and the flow path plate and the cover plate are overlapped. The groove and the partition plate form a polygon parallel to the moving direction of the armature between the flow path plate and the cover plate. The partition plate of the flow path plate is provided with a plurality of first cutouts formed parallel to the movement direction of the armature, and the cover plate is provided with a plurality of first cuts parallel to the movement direction of the armature. A plurality of second incisions formed in parallel directions.

According to the present disclosure, since a plurality of cutouts are provided on both sides of the cooling unit, that is, the flow path plate and the cover plate, the influence of eddy currents can be suppressed to a minimum through the cutouts. Furthermore, since the cutouts are provided in the partition plate, the cooling unit can be maintained of rigidity.

The present disclosure is characterized in that the second cutout is provided at the same position as the first cutout in the up-down direction.

According to the present disclosure, since the first slit and the second slit are provided at the same position in the up-down direction, even when eddy currents are generated in the flow path plate and the cover plate, they can be insulated by the slits and properly separated. Break the eddy current between the two components.

The present disclosure is characterized by a plurality of reinforcing posts disposed in the tank.

When the cooling unit is thinned in consideration of the reduction in viscosity, there is a problem that the pressure of the cooling medium flowing in the cooling unit causes the cooling unit itself to expand and deform, and in the worst case, the armature is damaged. According to the present disclosure, by providing a plurality of reinforcing pillars in the groove, the adhesion between the flow path plate and the cover plate at the position where the cooling medium passes can be strengthened, and deformation caused by the pressure of the cooling unit can be suppressed.

The armature of the present disclosure is characterized by comprising: an upper cold-insulating member fixed to the upper part of the coil; and a lower cold-insulating member fixed to the lower part of the coil. The thickness of the upper cold-insulating member and the lower cold-insulating member The thickness of the coil is the same as that of the coil, and is fixed between the first cooling unit and the second cooling unit.

According to the present disclosure, since the circumference of the coil is fixed by the upper cooling member, the lower cooling member, the first cooling unit, and the second cooling unit, even in a state where the cooling medium flows only in the first cooling unit and the second cooling unit , it can also properly cool the entire coil.

The armature of the present disclosure is characterized in that a plurality of coils are arranged in parallel to form a first coil row and a second coil row. The armature includes a third cooling unit, and the third cooling unit is cooled by the first coil row. The second coil array is clamped and fixed in close contact with each other.

According to the present disclosure, since the armature is cooled using three sets of cooling units, even a thick member in which coils are laminated can be appropriately cooled. [Effects of the invention]

According to the present disclosure, since a plurality of cutouts are provided in the flow path plate and the cover plate of the cooling unit, the influence of eddy currents can be suppressed to a minimum. Furthermore, since the cutouts are provided in the partition plate, the rigidity of the cooling unit can be maintained.

Hereinafter, the cooling unit, the armature 10 and the linear motor 100 of the present invention will be described with reference to the drawings using drawings. In addition, in each figure, the same elements are denoted by the same symbols, and repeated descriptions are omitted.

<1. First Embodiment> (1.1. Structure of linear motor 100 and armature 10) FIG. 1 is a schematic diagram showing the linear motor 100 according to the first embodiment of the present invention, and FIG. 2 is a perspective view showing the armature 10 according to the present embodiment. FIG. 3 is a side view showing the armature 10 of the present embodiment, and FIG. 4 is an exploded view showing the armature 10 of the present embodiment.

The linear motor 100 of this embodiment includes a primary-side armature 10 having a plurality of coils 11 and a secondary-side field magnet 20 in which permanent magnets 21 are arranged in an array. If three-phase alternating current flows through the coil 11 to cause the armature 10 to generate a magnetic field, the magnetic field causes the armature 10 to be magnetically attracted and repelled by the permanent magnets 21 of the field magnet 20 in turn, so that the armature 10 as a movable element is relatively The field magnet 20 as a fixed element moves relatively linearly.

The armature 10 includes a plurality of coils 11 , a first cooling unit 15 and a second cooling unit 16 for cooling the coils 11 , an upper cooling member 12 , a lower cooling member 13 , and a mounting member 14 . The armature 10 is formed into a T-shaped cross-section as a whole.

The coil 11 is formed into a flat annular plate shape by intensively winding single wires, and a plurality of coils 11 are arranged in parallel and arranged in the armature 10 . The three coils 11 constitute three phases of U, V, and W, and are arranged in the order of U, V, and W phases along the moving direction.

The first cooling unit 15 and the second cooling unit 16 are a pair of flat cooling members sandwiching and fixing the coil 11 from both sides, between the flow passage plates 152 and 162 and the cover plates 153 and 163 A flow path 151 is formed through which a cooling medium such as cooling water flows. The coil 11 is directly tightly connected and fixed to the flow path plate 152 , which is the inner flat plate of the armature 10 , by mechanical joining such as screwing or by adhesive such as polyvinyl alcohol (PVA) resin or epoxy resin without passing through the molding resin. The back surface 152e and the back surface 162e of the flow path plate 162. The first cooling unit 15 is a cooling unit arranged on the right side of the coil 11 on the paper, and the second cooling unit 16 is a cooling unit arranged on the left side of the coil 11 on the paper ( FIG. 3 ). Each component of the first cooling unit 15 and the second cooling unit 16 is arranged symmetrically across the coil 11 . In order to minimize the distance between the permanent magnet 21 and the coil 11 provided in the field magnet 20, the thickness of the first cooling unit 15 and the second cooling unit 16 is formed to approximately 3 mm or less. As described above, the first cooling unit 15 and the second cooling unit 16 have the function of being in close contact with the coil 11 and cooling it and the function of holding the coil 11 .

The upper cooling member 12 is a member for preventing the temperature of the upper portion of the armature 10 from rising, and is formed in a block shape. The upper cooling member 12 is arranged in contact with or close to the upper portion of the coil 11 . The upper cooling member 12 has the same thickness as the coil 11 and is sandwiched between the first cooling unit 15 and the second cooling unit 16 . The upper cooling member 12 is formed of metal, ceramics or resin.

The lower cooling member 13 is a member for preventing the temperature of the lower part of the armature 10 from rising, and is formed in a block shape. The lower cooling member 13 is arranged in contact with or close to the lower part of the coil 11 . The thickness of the lower cooling member 13 is also the same as the thickness of the coil 11 like the thickness of the upper cooling member 12 , and is sandwiched between the first cooling unit 15 and the second cooling unit 16 . The upper cooling member 13 is made of metal, ceramics or resin.

The mounting member 14 is a pair of block-shaped members provided on the upper portion of the armature 10 . The mounting member 14, the first cooling unit 15, the upper cooling member 12, the second cooling unit 16, and the mounting member 14 are arranged in this order. With the coil 11 sandwiched between the first cooling unit 15 and the second cooling unit 16, Fastened with bolts from the outside. Furthermore, the mounting member 14 also functions as a movable element stand.

The field magnet 20 includes a pair of side yokes 22 arranged to face the armature 10 across a magnetic gap, a plurality of permanent magnets 21 , and a center yoke 23 . The side yokes 22 are formed in a flat plate shape, and a plurality of permanent magnets 21 arranged adjacent to each other with different polarities are arranged on opposite inner surfaces of the pair of side yokes 22 . The permanent magnet 21 is formed in a rectangular plate shape. The end edges of the side yoke 22 are connected by the center yoke 23 .

(1.2. Structure of the first cooling unit 15 and the second cooling unit 16) FIG. 5 is a front view showing the first cooling unit 15 of this embodiment, and FIG. 6 is a side view showing the first cooling unit 15 . FIG. 7 is a plan view showing the first cooling unit 15 of this embodiment, and FIG. 8 is an exploded view showing the first cooling unit 15 . FIG. 9 is an enlarged view of the A-A cross section of FIG. 5 . The armature 10 includes two sets of first cooling unit 15 and second cooling unit 16. However, the first cooling unit 15 and the second cooling unit 16 have a plane-symmetrical structure across the coil 11, so here the first cooling unit 15 is The representative description is given, and the description of the second cooling unit 16 is omitted.

The first cooling unit 15 includes a flow path plate 152, a cover plate 153, a pair of outflow and inflow members 154 through which the cooling medium flows in and out, and a pair of branch members 155. The flow path plate 152 and the cover plate 153 are flat-plate-shaped members with the same overall shape. By overlapping the flow path plate 152 and the cover plate 153, a plurality of flow paths 151 are formed (Fig. 9). The flow path plate 152 and the cover plate 153 are made of a conductive material such as metal. The flow path plate 152 and the cover plate 153 can be fixed by diffusion bonding.

FIG. 10 is a schematic diagram showing the flow path plate 152 of the first cooling unit 15 according to this embodiment, and FIG. 11 is an enlarged view of the B-B cross section of FIG. 10 . In FIG. 10 , for convenience, the region of the groove 152 a is shown as a region of multiple points. FIG. 12 is a schematic diagram showing the eddy current i generated by the first cooling unit 15 of this embodiment. The flow path plate 152 includes a groove 152a that becomes the flow path 151, a long hole 152b provided at both ends of the groove 152a and connected to the branch member 155, a partition plate 152c for separating the groove 152a and the groove 152a, and a A first cutout 152d in the center of the partition 152c. The groove 152 a is a linear recess provided on the front surface of the flow path plate 152 , and is provided from one end to the other end of the flow path plate 152 in parallel with the moving direction of the armature 10 ( FIG. 10 ). The groove 152a forms a flow path 151 by overlapping the flow path plate 152 and the cover plate 153 (Fig. 9). The groove 152a is formed by processing the flat plate by etching or the like. The width of the groove 152a is an optimal size considering the thickness and material of the flow path plate 152. For example, when the thickness of the first cooling unit 15 is 1.5 mm, it is ideal to be 12 mm or less where the influence of the pressure when the cooling medium passes is suppressed. The partition plate 152 c is a linear convex portion for separating adjacent grooves 152 a, and is provided from one end to the other end of the flow path plate 152 in parallel with the moving direction of the armature 10 ( FIG. 10 ). When the flow path plate 152 and the cover plate 153 are overlapped, the surface of the partition plate 152c on the side of the cover plate 153 comes into contact with the cover plate 153, and the partition plate 152c creates a structure in which the adjacent flow paths 151 are independent of each other, and the flow path can be made The cooling medium in the passage 151 flows from one end of the flow path plate 152 to the other end. A first cutout 152d is provided at the center of the partition 152c. The first slits 152d are elongated through holes provided parallel to the moving direction of the armature 10, and a plurality of them are provided in a straight line from one end to the other end of the flow path plate 152. The current flowing in the coil 11 changes, the magnetic field generated by the armature 10 changes, or the first cooling unit 15 moves within the magnetic flux of the field magnet 20, thereby generating an eddy current inside the flow path plate 152, and the eddy current is generated inside the flow path plate 152. The force generated by the current and the magnetic flux of the field magnet 20 acts as viscous resistance in the direction opposite to the movement of the first cooling unit 15 , causing the performance of the linear motor 100 to deteriorate. Therefore, by providing the plurality of first notches 152d in the flow path plate 152, the influence of the eddy current on the linear motor 100 is suppressed to the minimum. Furthermore, since the first cutout 152d is provided in the partition plate 152c, the flow path 151 is independent from the first cutout 152d, which does not affect the cooling performance and does not impair the rigidity of the first cooling unit 15. The first cutout 152d is formed by slit processing using a laser processing machine or the like. The elongated holes 152 b are communication ports that allow the cooling medium to flow in or out of the branch member 155 to pass, and are respectively provided at the left and right ends of the flow path plate 152 ( FIG. 10 ). The elongated hole 152b is a through hole and is formed in a linear shape along the up-down direction of the flow path plate 152. The long hole 152b has the function of connecting or branching the flow path 151 and connecting the flow path 151 and the branch member 155.

The cover plate 153 is a flat member that overlaps the flow plate 152 to cover the groove 152a of the flow plate 152 to form the flow path 151, and includes a plurality of second cutouts 153d and communication holes 153a. The second cutout 153d, like the first cutout 152d, is a long through hole provided to minimize the influence of eddy current. The second cutout 153d is provided in a straight line from one end to the other end of the cover plate 153 in parallel with the moving direction of the armature 10. The second cutouts 153d are formed in a plurality of rows along the upper and lower direction of the paper of the cover plate 153, thereby breaking the eddy current i and minimizing the influence of the eddy current i (Fig. 12). The second notch 153d is provided at the same position as the first notch 152d in the upper and lower direction of the paper (Fig. 9). Accordingly, even when the eddy current i is generated in the flow path plate 152 and the cover plate 153, they are insulated by the first cutout 152d and the second cutout 153d, and the eddy current i in both members can be appropriately separated. Furthermore, since the first cutout 152d and the second cutout 153d are provided at positions that do not overlap with the flow path 151, the rigidity is not impaired. The second cutout 153d is also formed by slit processing using a laser processing machine or the like, similarly to the first cutout 152d. The first notch 152d or the second notch 153d may be continuously provided in a straight line parallel to the moving direction of the armature 10, or may be divided into a plurality of parts. The communication hole 153a is a through hole for communicating the outflow and inflow member 154 and the flow path 151.

The pair of outflow and inflow members 154 are block-shaped members for flowing the cooling medium into and out of the flow path 151 , and include an opening 154 a provided at the upper part and a communication hole for connecting to the flow path 151 . It is important that the outflow and inflow member 154 be installed at a position where it will not become an obstacle even if the two sets of first cooling unit 15 and second cooling unit 16 are installed via the coil 11. For example, it is ideal to install it on a plate opposite to the plate on which the coil 11 is installed. That is, the upper parts of both ends of the front surface 153b of the cover plate 153.

The pair of branch members 155 is a member that branches the cooling medium flowing in from one of the outflow and inflow members 154 into the plurality of flow paths 151, and in order to connect the plurality of flow paths 151, the cooling medium is concentrated and transferred from the other outflow and inflow member. 154 discharged components. The branch member 155 uses a manifold, for example. The branch member 155 has a rectangular shape and includes a rectangular groove 155a in the center. The branch members 155 extend in the up-down direction to both ends of the back surface 152e of the flow path plate 152 on which the coil 11 is mounted, and are provided respectively. The branch member 155 is in contact with the coil 11 while sandwiching the coil 11 or is in close contact with the coil 11 via an insulating material. Furthermore, the thickness of the branch member 155 is formed to be the same as or smaller than the thickness of the coil 11 . The groove 155 a is a space that temporarily stores the cooling medium flowing in from the outflow and inflow member 154 or the cooling medium flowing out from the plurality of flow paths 151 . The cross-sectional shape of the groove 155 a in the upper and lower direction of the paper ( FIG. 8 ) is the same shape as the elongated hole 152 b of the flow passage plate 152 .

(1.3. Flow of cooling medium in the first cooling unit 15) Next, the flow of the cooling medium in the first cooling unit 15 will be described. The cooling medium flowing in from the opening 154 a of one of the outflow and inflow members 154 flows into the groove 155 a of one of the branch members 155 through the communication hole 153 a of the cover plate 153 and the elongated hole 152 b of the flow path plate 152 , and then branches to a plurality of flow paths 151 , flows from one end of the first cooling unit 15 to the other end in parallel with the moving direction of the armature 10 . Then, the cooling medium is concentrated in the groove 155a of the other branch member 155 from the plurality of flow paths 151 through the long hole 152b, and flows out from the opening 154a of the other outflow and inflow member 154 through the communication hole 153a of the cover plate 153.

(1.4. Manufacturing method of armature 10) When the armature 10 is manufactured, the upper cooling member 12 is arranged in contact with or close to the upper portion of the coil 11 arranged in parallel, and the lower cooling member 13 is arranged in contact with or close to the coil 11 in the lower portion. Then, the coil 11 is brought into close contact with the back surfaces 152e and 162e of the flow plate 152 and the flow plate 162, and the coil 11 is sandwiched between the first cooling unit 15 and the second cooling unit 16, and is arranged. When the coil 11 is sandwiched between the first cooling unit 15 and the second cooling unit 16 and arranged, the branch members 155 and 165 at both ends are in contact with or close to the ends of the coil 11 . Finally, mounting members 14 are disposed above the front surfaces 153 b and 163 b of the cover plates 153 and 163 , and the upper and lower parts are fixed at multiple locations by bolt tightening to form the armature 10 . In the manufacturing method described above, the example in which the coil 11 is in close contact with the back surfaces 152e and 162e of the flow path plate 152 and the flow path plate 162 has been described. However, the coil 11 may also be in close contact with the cover plates 153 and 163. The back side is arranged with the coil 11 sandwiched therebetween.

As described above, the surroundings of the coil 11 are fixed by the upper cooling member 12 , the lower cooling member 13 , the first cooling unit 15 and the second cooling unit 16 . Therefore, even if the cooling medium only flows into the first cooling unit 15 and the second cooling unit 16, the entire coil 11 can be cooled appropriately. Furthermore, since the coil 11 is fixed in a state sandwiched between the first cooling unit 15 and the second cooling unit 16 without using molding resin, the strength of the armature 10 can be improved compared to fixing it with molding resin. strength, thereby providing an armature 10 with excellent vibration characteristics. Furthermore, the first cooling unit 15 and the second cooling unit 16 each independently include the outflow and inflow members 154 , the outflow and inflow members 164 , the branch members 155 , and the branch members 165 . Therefore, even if the armature 10 uses two sets of cooling units, they can be used individually. The cooling unit is tested for liquid leakage, etc., and a cooling unit with excellent productivity can be provided. Furthermore, a first cutout 152d and a second cutout 153d are provided in the flow passage plate 152 and the cover plate 153 of the first cooling unit 15, and the first cutout 152d and the second cutout 153d are provided in the partition plate of the flow passage plate 152. 152c and the parts around the partition 152c have relatively high strength, so the rigidity is not compromised and the influence of the eddy current can be suppressed to a minimum.

<2. Second Embodiment> (2.1. Structure of the first cooling unit 15, the second cooling unit 16 and the third cooling unit 17) FIG. 13 is a perspective view of the armature 110 according to the second embodiment of the present invention, and FIG. 14 is a front view of the armature 110 according to the embodiment. FIG. 15 is a plan view showing the armature 110 of the embodiment. The armature 10 of the first embodiment of the present invention uses two sets of cooling units, but the armature 110 of the second embodiment of the present invention uses three sets of cooling units. The other structures are the same as those of the first embodiment. Therefore, the same structures are assigned the same symbols and descriptions are omitted.

The armature 110 of the second embodiment of the present invention includes a first coil row 111a, a second coil row 111b, a first cooling unit 15 for cooling the coil 11, a second cooling unit 16, a third cooling unit 17, a first The upper cooling member 112a, the second upper cooling member 112b, the first lower cooling member 113a, the second lower cooling member 113b, and the mounting member 14. The armature 110 is formed into a T-shaped cross-section as a whole.

The plurality of coils 11 are arranged in parallel along a predetermined direction to form a first coil row 111a and a second coil row 111b.

The first cooling unit 15 and the second cooling unit 16 are a pair of flat cooling members that sandwich and fix the coil 11 from both sides, and are the same as the first cooling unit 15 and the second cooling unit 16 of the first embodiment. structure.

The third cooling unit 17 is a cooling member ( FIG. 13 ) arranged so as to be spaced between the first coil row 111 a and the second coil row 111 b, and is mechanically joined by screws or the like or an adhesive such as PVA resin or epoxy resin. It is directly in close contact between the first coil row 111a and the second coil row 111b without passing through the molding resin. The third cooling unit 17 includes a flow path plate 172, a cover plate 173, a pair of outflow and inflow members 174 through which the cooling medium flows in and out, and a pair of branch members 175. The flow path plate 172 and the cover plate 173 are flat-plate members with the same overall shape. Similar to the first cooling unit 15 and the second cooling unit 16 , a plurality of flows are formed between the flow path plate 172 and the cover plate 173 by overlapping. road. The size of the flow path plate 172 and the cover plate 173 in the left-right direction of the paper (Fig. 14) is compared with the flow path plate 152, the flow path plate 162, the cover plate 153, and the cover plate 163 of the first cooling unit 15 and the second cooling unit 16. , are formed to be twice as large as the size of the outflow and inflow members 154 and 164 . Therefore, even if three sets of cooling units are used when manufacturing the armature 110 , the cooling unit does not depend on the thickness of the outflow and inflow member 174 and can be formed thin. Moreover, like the first cooling unit 15 and the second cooling unit 16, the flow path plate 172 of the third cooling unit 17 includes grooves serving as flow paths, partitions for separating the grooves, and A first cutout in the center of the partition, cover 173 includes a second cutout. Moreover, the flow or other structures of the cooling medium in the third cooling unit 17 are also the same as those of the first cooling unit 15 and the second cooling unit 16 .

The first upper cooling member 112 a and the second upper cooling member 112 b are block-shaped members for preventing the temperature of the upper portion of the armature 110 from rising. The first upper cooling member 112a is disposed on the upper portion of the first coil row 111a in a state of being in contact with or close to the first coil row 111a. Furthermore, the second upper cooling member 112b is arranged on the second coil row 111b in a state of contacting or approaching the second coil row 111b. The thickness of the first upper cooling member 112a is the same as the thickness of the first coil row 111a, and the thickness of the second upper cooling member 112b is the same as the thickness of the second coil row 111b. The first upper cooling member 112 a is sandwiched between the first cooling unit 15 and the third cooling unit 17 , and the second upper cooling member 112 b is sandwiched between the second cooling unit 16 and the third cooling unit 17 . The first upper cooling member 112a and the second upper cooling member 112b are made of metal, ceramics or resin.

The first lower cooling member 113a and the second lower cooling member 113b are block-shaped members for preventing the temperature of the lower part of the armature 110 from rising, and are arranged in contact with or close to the first coil row 111a and the second coil respectively. Lower part of column 111b. The thickness of the first lower cooling member 113a is the same as the thickness of the first coil row 111a, and the thickness of the second lower cooling member 113b is the same as the thickness of the second coil row 111b. The first lower cooling member 113 a is sandwiched between the first cooling unit 15 and the third cooling unit 17 , and the second lower cooling member 113 b is sandwiched between the second cooling unit 16 and the third cooling unit 17 . The first lower cooling member 113a and the second lower cooling member 113b are made of metal, ceramics or resin.

(2.2. Manufacturing method of armature 110) When manufacturing the armature 110, the third cooling unit 17 is disposed to be spaced between the first coil row 111a and the second coil row 111b, and to be in contact with or close to the upper part of the first coil row 111a. The first upper cooling member 112a is arranged, and the first lower cooling member 113a is arranged in the lower part. Similarly, the second upper cooling member 112b is arranged in contact with or close to the upper part of the second coil row 111b, and the second lower cooling member 113b is arranged in the lower part. Then, the first coil row 111a is brought into close contact with the back surface 152e of the flow path plate 152, the second coil row 111b is brought into close contact with the back surface 162e of the flow path plate 162, and the first cooling unit 15 and the second cooling unit 16 are arranged. Finally, mounting members 14 are disposed above the front surfaces 153b and 163b of the cover plates 153 and 163, and the upper and lower parts are fixed at multiple locations by bolt tightening to form the armature 110.

As described above, the armature 110 of this embodiment uses three sets of cooling units for cooling, so even a thick member in which coils are laminated can be appropriately cooled. Furthermore, each cooling unit has an independent structure. Therefore, even if the armature 110 uses three sets of cooling units, tests such as liquid leakage can be performed using the cooling units alone, and a cooling unit with excellent productivity can be provided.

<3.Third Embodiment> FIG. 16 is a perspective view showing the first coil 211 and the second coil 311 according to the third embodiment of the present invention, and FIG. 17 is a front view showing the armature 210 of the embodiment. In the first and second embodiments of the present invention, the armature 10, the coil 11 of the armature 110, the first coil row 111a, and the second coil row 111b are formed in a flat plate shape. In contrast, in the third embodiment of the present invention, The first coil 211 of the armature 210 of the second embodiment is different in that it is formed in a three-dimensional shape instead of a flat plate. Other structural components are the same as those in the first and second embodiments, so the same structures are denoted by the same symbols and Omit description.

The armature 210 of the third embodiment of the present invention includes a first coil 211, a second coil 311, a first cooling unit 115 and a second cooling unit for cooling the first coil 211 and the second coil 311.

The first coil 211 is a coil formed in a ring shape by winding a single wire, and includes a pair of flat plate portions 211a, a pair of bent portions 211b, and a bent portion connecting both ends of the adjacent flat plate portions 211a. 211b, and the hole 211c provided in the center. The curved portion 211b has a U-shape in front view and is provided upright from both ends of the flat plate portion 211a. A plurality of first coils 211 are arranged in parallel along a predetermined direction to form a third coil row 211d.

The second coil 311 is formed into a flat annular plate shape by intensively winding single wires. The second coil 311 includes a pair of flat plate portions 311 a , the flat plate portion 311 a , and a hole 311 c provided in the center of the second coil 311 . The second coils 311 are arranged in parallel along a predetermined direction to form a fourth coil row 311d.

The portion where the flat plate portions 211a of the adjacent first coils 211 are in contact with each other is inserted into the hole 311c of the fourth coil row 311d, and the portion where the flat plate portions 311a of the adjacent second coils 311 are in contact with each other is inserted into the third coil. In the hole 311c of the row 211d, the third coil row 211d and the fourth coil row 311d are stacked on the curved portion 211b, and the flat plate portions 211a and the flat plate portions 311a of the third coil row 211d and the fourth coil row 311d are connected in a planar shape. A collection of coils.

The first cooling unit 115 and the second cooling unit are a pair of flat cooling members fixed by sandwiching the third coil row 211d and the fourth coil row 311d from both sides to cool only the first coil 211 and the second coil 311 The flat plate portion 211a and the flat plate portion 311a are provided on the front and back surfaces of the flat plate portion 211a and the flat plate portion 311a. The other structures are the same as those of the first cooling unit 15 and the second cooling unit 16 of the first embodiment, and therefore the description thereof will be omitted.

As described above, even if the armature 210 uses a coil formed in a three-dimensional shape rather than a flat plate shape, the first cooling unit 115 and the second cooling unit are attached to the flat plate portions 211 a and 311 a formed in a flat plate shape. The front and back of the unit can provide a cooling unit with excellent productivity without significant structural changes.

<4. Fourth Embodiment> (4.1. Structure of flow plate 452) 18 and 19 are schematic diagrams showing the flow path plate 452 according to the fourth embodiment of the present invention. FIG. 20 is an enlarged view of the C-C cross section of FIG. 19 . The flow path plate 452 of the fourth embodiment is different in the following aspects. Other structural components are the same as those of the first embodiment. Therefore, the same structures are marked with the same symbols and descriptions are omitted: (1) A branch/merging portion 452b is provided instead of the first embodiment. The long hole 152b and the branch member 155 of the flow path plate 152 of the embodiment; (2) A plurality of reinforcing columns 452f are provided in at least any area of the groove 152a or the branch/merging portion 452b. Here, for the sake of convenience, FIGS. 18 and 19 illustrate the area through which the cooling medium passes as a multiple-point area. Furthermore, the flow passage plates include the flow passage plate 452 of the first cooling unit 15 and the flow passage plate of the second cooling unit 16. However, since they have the same structure, the description will be made with the flow passage plate 452 as a representative, and the second cooling will be omitted. Description of the manifold plate for unit 16.

The flow path plate 452 includes a groove 152a that becomes the flow path 151, branch/merging portions 452b provided at both ends of the groove 152a, a partition plate 152c for separating the grooves 152a and the grooves 152a, and a spacer provided at the center of the partition plate 152c. The first cutout 152d, and a plurality of reinforcing pillars 452f provided in at least any area of the groove 152a or the branch/merging portion 452b (Fig. 18 to Fig. 20).

Among the branch/merging portions 452b, one of the regions provided at both ends of the groove 152a branches the cooling medium flowing in from the outflow and inflow member 154 into the plurality of flow paths 151, and the other region connects the plurality of flow paths 151. The cooling medium is concentrated and discharged from the other outflow inflow member 154 area. The branch/merging portion 452b is formed in a concave shape continuously from the plurality of grooves 152a, and is elongated along the upper and lower directions of the paper (Figs. 18 and 19).

The reinforcing pillars 452f are reinforcing members formed in a convex shape from the bottom surface of the groove 152a or the branch/merging portion 452b, and a plurality of them are provided at predetermined intervals in the groove 152a or the branch/merging portion 452b. Furthermore, the reinforcing pillar 452f has a circular cross-section and a diameter of about 3 mm or less. The reinforcing pillar 452f may be provided only in the branch/merging part 452b (FIG. 18), or may be provided in the branch/merging part 452b and the groove 152a (FIG. 19). The diameter, number, spacing and position of the reinforcing columns 452f are optimal values or positions selected taking into account the pressure loss caused by arranging the reinforcing columns 452f, the flow rate of the cooling medium, the safety rate, the maximum stress and the maximum displacement. When the flow path plate 452 and the cover plate 153 are overlapped, the surface of the reinforcing column 452f on the cover plate 153 side comes into contact with the cover plate 153 and is bonded to the cover plate 153 . The groove 152a, the branch/merging portion 452b, and the reinforcing column 452f are integrally formed by processing a flat plate by etching or the like.

When the cooling unit is thinned in consideration of the reduction in viscosity, there is a problem that the pressure of the cooling medium flowing in the cooling unit causes the cooling unit itself to expand and deform, and in the worst case, the armature is damaged. Therefore, by providing a plurality of reinforcing pillars 452f in the groove 152a or the branch/merging portion 452b, the adhesion between the flow path plate 452 and the cover plate 153 at the position where the cooling medium passes can be strengthened, thereby suppressing deformation due to pressure.

(4.2. Flow of cooling medium in the first cooling unit 15) Next, the flow of the cooling medium in the first cooling unit 15 will be described. The cooling medium flowing in from one of the openings 154 a of the outflow and inflow members 154 flows into one of the branch/merging portions 452 b via the communication hole 153 a of the cover plate 153 . Then, the cooling medium branches into a plurality of flow paths 151, flows from one end to the other end of the first cooling unit 15 in parallel with the moving direction of the armature 10, and is concentrated in another branch/merging portion 452b. Then, it flows out from the opening 154a of the other outflow and inflow member 154 via the communication hole 153a of the cover plate 153.

Various embodiments of the present invention have been described above. However, these are presented as examples and do not limit the scope of the invention. The novel embodiment described above can be implemented in various other forms, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. The above-described embodiments or modifications thereof are included in the scope or gist of the invention, and are included in the invention described in the claims and their equivalent scope.

10, 110, 210: Armature 11: coil 12: Upper side cold insulation component 13: Lower side cold insulation component 14: Install components 15, 115: First cooling unit 16: Second cooling unit 17:Third cooling unit 20:Field magnet 21:Permanent magnet 22: side yoke 23:Center yoke 100: Linear motor 111a: First coil column 111b: Second coil column 112a: First upper side cold insulation component 112b: Second upper side cold insulation member 113a: First lower side cold insulation member 113b: Second lower side cold insulation member 151:Flow path 152, 162, 172, 452: Flow plate 152a, 155a: slot 152b: long hole 152c:Partition 152d: first incision 152e, 162e: Back side of flow plate 153, 163, 173: Cover plate 153a: Connecting hole 153b, 163b: front side of cover 153d: Second incision 154, 164, 174: outflow and inflow components 154a:Open your mouth 155, 165, 175: Branch components 211:First coil 211a, 311a: Flat part 211b:Bending part 211c, 311c: hole 211d: The third coil column 311: Second coil 311d: The fourth coil column 452b: Branch/Confluence 452f: Enhanced column i: eddy current

FIG. 1 is a schematic diagram showing a linear motor 100 according to the first embodiment of the present invention. FIG. 2 is a perspective view showing the armature 10 of the embodiment. FIG. 3 is a side view showing the armature 10 of the embodiment. FIG. 4 is an exploded view showing the armature 10 of the embodiment. FIG. 5 is a front view showing the first cooling unit 15 of the embodiment. FIG. 6 is a side view showing the first cooling unit 15 of the embodiment. FIG. 7 is a plan view showing the first cooling unit 15 of the embodiment. FIG. 8 is an exploded view showing the first cooling unit 15 of the embodiment. FIG. 9 is an enlarged view of the A-A cross section of FIG. 5 . FIG. 10 is a schematic diagram showing the flow path plate 152 of the first cooling unit 15 according to the embodiment. FIG. 11 is an enlarged view of the B-B cross section of FIG. 10 . FIG. 12 is a schematic diagram showing the eddy current i generated by the first cooling unit 15 of the embodiment. FIG. 13 is a perspective view showing the armature 110 according to the second embodiment of the present invention. FIG. 14 is a front view showing the armature 110 of the embodiment. FIG. 15 is a plan view showing the armature 110 of the embodiment. FIG. 16 is a perspective view showing the first coil 211 and the second coil 311 according to the third embodiment of the present invention. FIG. 17 is a front view showing the armature 210 of the embodiment. FIG. 18 is a schematic diagram showing the flow path plate 452 according to the fourth embodiment of the present invention. FIG. 19 is a schematic diagram showing another example of the flow path plate 452 of the embodiment. FIG. 20 is an enlarged view of the C-C cross section of FIG. 19 .

10: armature

12: Upper side cold insulation component

14: Install components

15:First cooling unit

16: Second cooling unit

163:Cover

163b: Front side of cover

Claims (7)

An armature, which is an armature of a linear motor, includes: A plurality of coils are wound around single wires and arranged in parallel; and the first cooling unit and the second cooling unit include a plurality of flow paths for the cooling medium to circulate, The armature is characterized by: The first cooling unit and the second cooling unit include a flat flow path plate and a cover plate, The flow path plate includes: a plurality of grooves, which are arranged parallel to the moving direction of the armature from one end to the other end of the flow path plate; and a plurality of partitions for separating the adjacent ones. Separate between slots, The flow path plate and the cover plate overlap, and the groove and the partition plate form a plurality of flows parallel to the moving direction of the armature between the flow path plate and the cover plate. road, The partition plate of the flow path plate is provided with a plurality of first cutouts formed parallel to the moving direction of the armature, and the cover plate is provided with a plurality of first cutouts formed parallel to the moving direction of the armature. A plurality of second cuts are made to tightly fix the coil on the back side of the flow path plate or the cover plate, and the coil is clamped by the first cooling unit and the second cooling unit. The armature according to claim 1, characterized in that: The second cutout is disposed at the same position as the first cutout in the up-down direction. The armature according to claim 1, characterized in that: A plurality of reinforcing columns are provided in the tank. The armature according to claim 1, characterized in that: The armature includes: an upper cold-insulating member fixed on the upper part of the coil; and a lower cold-insulating member fixed on the lower part of the coil, The upper cold insulation member and the lower cold insulation member have the same thickness as the coil, and are fixed in a state of being sandwiched between the first cooling unit and the second cooling unit. The armature according to claim 1, characterized in that: A plurality of the coils are arranged in parallel to form a first coil row and a second coil row. The armature includes a third cooling unit. The third cooling unit is cooled by the first coil row and the second coil row. The clamped state is closely connected and fixed. A linear motor, characterized by including: The armature according to any one of claims 1 to 5; and the field magnet, wherein a plurality of permanent magnets are arranged adjacently with different polarities. A cooling unit includes a plurality of flow paths for cooling medium to circulate and is used to cool coils of a linear motor, The cooling unit is characterized by: The cooling unit includes a flat flow path plate and a cover plate, The flow path plate includes: a plurality of grooves arranged parallel to the moving direction of the armature from one end to the other end of the flow path plate; and a plurality of partitions used to separate adjacent grooves. space separation, The flow path plate and the cover plate overlap, and the groove and the partition plate form a plurality of flow paths parallel to the moving direction of the armature between the flow path plate and the cover plate, The partition plate of the flow path plate is provided with a plurality of first cutouts formed parallel to the moving direction of the armature, and the cover plate is provided with a plurality of first cutouts formed parallel to the moving direction of the armature. of multiple second incisions.