JP5347596B2 - Canned linear motor armature and canned linear motor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a canned linear motor armature for suppressing a temperature gradation of the canned linear motor armature and improving the rigidity of the armature, and to provide the canned linear motor. <P>SOLUTION: The canned linear motor armature includes an armature winding 108 consisting of a plurality of centrally wound coils 118 formed in plane, a casing 101X formed so as to surround the armature winding 108, and a planar can 102 for seating an opening of the casing 101X. In the armature, a bridge beam 120 formed integrally with the casing 101X is provided on a gap portion between the centrally wound coils 118. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a canned linear motor armature and a canned linear motor that are used for stage driving of a semiconductor / liquid crystal manufacturing apparatus and table feed of a machine tool, are less susceptible to thermal deformation due to a temperature gradient, and have high rigidity.

  In the conventional canned linear motor armature and the canned linear motor, the armature winding is formed by covering the armature winding with a can and flowing a refrigerant through a refrigerant flow path provided between the armature winding and the can. The generated heat is recovered with a refrigerant to reduce the temperature rise on the surface of the linear motor.

FIG. 9 is an overall perspective view of a canned linear motor showing the prior art.
In the figure, 100 is a canned linear motor armature, 101 is a housing, 102 is a can, 103 is a can fixing bolt, 104 is a holding plate, 105 is a terminal block, 106 is a refrigerant supply port, 107 is a refrigerant discharge port, Reference numeral 108 is an armature winding, 200 is a field magnet, 201 is a field yoke support member, 202 is a field yoke, and 203 is a permanent magnet.
FIG. 10 is a front sectional view of a conventional canned linear motor along the line AA in FIG. 9, and FIG. 11 shows the structure inside the stator excluding the can in FIG.
10 and 11, 109 is a winding fixing frame, 110 is a refrigerant flow path, 111 is a can fixing portion O-ring, 112 is a winding fixing bolt, and 118 is a concentrated winding coil.

As shown in FIG. 9, the field 200 includes two rows of upper and lower field yokes 202 separated by a distance corresponding to the length of the field yoke support member 201, and the field yoke support members 201 are arranged at the four corners thereof. The permanent magnets 203 are attached to the opposing surfaces of the field yoke 202, respectively. The canned / linear motor armature 100 is inserted into the hollow space of the field 200, and in this case, the permanent magnet 203 is disposed so as to face the armature winding 108. The field 200 is supported by a hydrostatic bearing guide (not shown).
Further, as shown in FIG. 10, the cross-sectional shape viewed from the traveling direction of the field magnet 200 forms a mouth shape so as to sandwich the canned linear motor armature 100, and the permanent magnet 203 includes the armature 100. Are arranged via the surface of the can 102 and a magnetic gap, and are arranged so as to have different polarities alternately for each pole pitch along the moving direction of the field 200 (perpendicular to the paper surface).

As shown in FIG. 10, the armature 100 includes a mouth-shaped casing 101 having a hollow inside, and a plate-like can 102 that represents the outer shape of the casing 101 so as to cover the hollow of the casing 101. , A can fixing bolt 103 for fixing the can 102 to the housing 101, a holding plate 104 having a through hole for the can fixing bolt 103 and pressing the can with an equal load, and a hollow inside of the housing 101 A three-phase armature winding 108 disposed on the winding, a winding fixing frame 109 that fixes the armature winding 108, a refrigerant flow path 110 through which the refrigerant passes through the housing 101 and the can 102, A can fixing portion O-ring 111 that is slightly larger than the edge of the casing 101, a winding fixing frame 109, and a winding fixing bolt 112 for fixing the casing 101 are configured. The shape of the hollow portion of the housing 101 is encircled so as to surround the outer periphery of the armature winding 108. The armature windings 108 are arranged on both surfaces of a winding fixing frame 109 formed in a plate shape. A winding fixing frame 109 integrated with the armature winding 108 is disposed in the hollow of the casing 101 and is fixed to the casing 101 with winding fixing bolts 112. Circumferential grooves are provided on the front and back edges of the casing 101, and a can fixing portion O-ring 111 is disposed there. A can 102 is arranged on the front and back of the housing 101 so as to cover the housing 101. A holding plate 104 is laid from the top of the can 102 along the edge of the casing 101, and is tightened by a can fixing bolt 103 to fix the can 102 and the casing 101.
As shown in FIG. 11, the armature winding 108 is composed of a plurality of concentrated winding coils 118 and is attached to both the left and right sides of the winding fixing frame 109. Electric power is supplied to the armature winding 108 from a terminal block 105 attached to the housing 101 as shown in FIG. The terminal block 105 and the armature winding 108 are electrically connected to each other by lead wires (not shown). Further, the refrigerant is supplied from a refrigerant supply port 106 provided in the housing 101 and is discharged from a refrigerant discharge port 107. In the meantime, the refrigerant flows through the refrigerant flow path 110 between the armature winding 108 and the can 102, and cools the armature winding 108 that generates heat.

  As shown in FIG. 9, the canned linear motor configured as described above causes a predetermined current corresponding to the electrical relative position between the field magnet 200 and the canned linear motor armature 100 to flow through the armature winding 108. Thus, a thrust is generated in the field magnet 200 by acting on the magnetic field generated by the permanent magnet 203, and the field magnet 200 moves in the traveling direction indicated by the arrow. The position of the field 200 is measured by a laser interferometer (not shown) that can detect the position with high accuracy, and the field 200 is subjected to high-speed constant speed feeding and positioning. On the other hand, most of the copper loss generated in the armature winding 108 during the driving is recovered by the refrigerant flowing through the refrigerant flow path 110, so that the temperature rise on the surface of the can 102 can be suppressed.

JP 2002-027730 A (pages 3 to 5, FIG. 1) Japanese Patent Laying-Open No. 2004-312877 (pages 4-5, FIG. 1) WO2006 / 038563 (pages 10-11, FIG. 7)

In recent years, in applications where a canned linear motor is used, the mover has been moved with extremely high acceleration / deceleration. Therefore, the following problems occurred.
(1) In order to accelerate and decelerate the mover of the canned / linear motor, a larger thrust is generated than before. As the thrust increased, the current supplied to the armature winding increased, and the copper loss generated there increased. This increase in copper loss caused a temperature gradient from the refrigerant supply port to the refrigerant discharge port. When the temperature gradient occurred, the air fluctuated in the space, causing the problem of deterioration in measurement accuracy of the laser interferometer.
(2) As the thrust increases, a large reaction force acts on the canned linear motor armature. The reaction force is received by the casing of the canned linear motor armature, but the casing has a structure with a hollow interior, so that the rigidity is small. As a result, a problem has occurred that the canned linear motor armature vibrates.

  The present invention has been made to solve the above-described problem, eliminates air fluctuations that cause deterioration in measurement accuracy of a laser interferometer by suppressing a temperature gradient of a canned linear motor armature, and provides an armature. An object of the present invention is to provide a canned linear motor armature and a canned linear motor that reduce vibration by improving the rigidity of the can.

In order to solve the above-mentioned problem, the invention according to claim 1 includes an armature winding formed of a plurality of concentrated winding coils formed in a flat plate shape, a housing formed so as to surround the armature winding, In a canned linear motor armature having a flat can that seals the opening of the housing, a bridge girder formed integrally with the housing is provided in a gap between the concentrated winding coils, and the bridge girder A plurality of convex portions are provided on the can, and the plurality of convex portions are brought into close contact with the can, and are formed below the refrigerant channel inside the can facing the bridge girder in a non-contact manner.
According to a second aspect of the present invention, in the canned linear motor armature according to the first aspect, a heat conductive member is provided in an air core portion of the concentrated winding coil, and the heat conductive member and the bridge girder are closely attached to the can. It is characterized by that.
The invention of claim 3, wherein, in the canned linear motor armature 請 Motomeko 1 or 2, is characterized in that a coolant channel in the interior of the can.
According to a fourth aspect of the present invention, the canned linear motor armature according to any one of the first to third aspects and the canned linear motor armature are arranged to face each other via a magnetic gap. And a plurality of permanent magnets having different polarities alternately arranged next to each other, wherein one of the canned linear motor armature and the field is a stator and the other is a mover. It is characterized by a canned linear motor in which the magnet and the armature travel relatively.
Further, an invention according to claim 5, wherein, in the canned linear motor according to claim 4, the relationship between the magnetic pole pitch λm of the permanent magnet and the coil pitch λc representing an interval for placing the concentrated winding coil, 4/3 × It is characterized in that λm ≦ λc ≦ 2 × λm.

According to the first aspect of the present invention, since the plurality of convex portions are provided on the bridge girder formed integrally with the housing in the gap portion between the concentrated winding coils , and the plurality of convex portions are in close contact with the can , the armature winding Part of the heat generated in the wire can be conducted to the bridge girder and dissipated to the entire housing. That is, since the heat of the armature winding is diffused through the bridge girder and the casing, the temperature gradient of the entire canned linear motor armature can be suppressed. Furthermore, since the bridge girder formed integrally is provided in the housing, the rigidity of the housing can be significantly improved. Moreover, since the refrigerant flow path is formed inside the can facing the bridge girder in a non-contact manner, a part of the heat generated by the armature winding can be recovered by the refrigerant.
According to the second aspect of the present invention, the heat generated by the armature winding can be conducted from the heat conducting member provided in the air girder of the bridge girder and the concentrated winding coil to be radiated to the entire can. That is, since the heat of the armature winding is diffused to more places, the temperature gradient of the entire canned linear motor armature can be further suppressed.
According to the third aspect of the invention, since it provided a coolant flow path inside the key catcher down, some of the heat armature winding occurs can you to recover the refrigerant. Furthermore, since the refrigerant is not directly touching the armature winding and the refrigerant and the armature winding are insulated, water having a high cooling capacity can be used as the refrigerant. That is, the temperature rise can be reduced as compared with the first or second aspect , and the temperature gradient can be suppressed accordingly.
According to the invention of claim 4, the canned linear motor armature according to any one of claims 1 to 3 and the field having a permanent magnet are opposed to each other, and either the canned linear motor armature or the field is Since the stator and the other are configured as movers, a canned linear motor having the effects of claims 1 to 3 can be provided.
According to the fifth aspect of the present invention, the relationship between the coil pitch λc of the concentrated winding coil and the magnetic pole pitch λm of the permanent magnet is defined so that the number of interlinkage magnetic fluxes of the armature winding is increased. And a canned linear motor having the effect of claim 4 can be provided.

Overall perspective view of a canned linear motor common to the first to fourth embodiments of the present invention. 1 is a front sectional view taken along line AA of FIG. 1 showing a first embodiment of the present invention. 2 is a structural diagram of the inside of the armature excluding the can of FIG. 2 showing the first embodiment of the present invention. Front sectional view taken along line AA of FIG. 1 showing a second embodiment of the present invention. FIG. 4 shows the second embodiment of the present invention, the internal structure of the armature except the can of FIG. Front sectional view taken along line AA of FIG. 1 showing a third embodiment of the present invention. 6 is a structural diagram of the inside of the armature excluding the can of FIG. 6 showing a third embodiment of the present invention. The figure which shows the relationship between the coil pitch and magnetic pole pitch of this invention Overall perspective view of a conventional canned linear motor Front sectional view taken along line AA of FIG. 9 showing the prior art Structural diagram inside the armature excluding the can of FIG. 10 showing the prior art

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is an overall perspective view of a canned linear motor common to the first to third embodiments of the present invention, and FIG. 2 is a front sectional view taken along line AA of FIG. 1 showing the first embodiment. . In addition, the upper part from the CC line of FIG. 2 represents the cross section of the center part of a concentrated winding coil, and the lower part from the CC line represents the cross section between concentrated winding coils. FIG. 3 is a structural diagram inside the armature excluding the can of FIG. Hereinafter, the same components as those of the prior art will be denoted by the same reference numerals, and the description thereof will be omitted, and differences will be mainly described. In the figure, 101X is a housing, and 120 is a bridge girder.

The present invention is different from the prior art in that a gap is provided between concentrated winding coils 118 (armature windings 108) as shown in FIG. 3, and a bridge girder 120 integrally formed as a casing 101X is provided there. It is.
The shape of the casing 101X is a bridge girder, and the shape of the hollow portion is such that the concentrated winding coil 118 is just cut out. One concentrated winding coil 118 is arranged on both surfaces of the winding fixing frame 109 formed in a plate shape, and one set is arranged in the hollow portion of the housing 101X as a set. Then, it is fixed to the housing 101X by a winding fixing bolt 112. At this time, the widths of the concentrated winding coil 118 and the bridge girder 120 are adjusted so that the concentrated winding coil 118 and the bridge girder 120 are close to each other. Circumferential grooves are provided on the front and back edges of the housing 101X, and the can fixing portion O-ring 111 is disposed there. A can 102 is arranged on the front and back of the housing 101 so as to cover the housing 101. A holding plate 104 is laid from the top of the can 102 along the edge of the casing 101, and is tightened by a can fixing bolt 103 to fix the can 102 and the casing 101. Here, a material having a relative magnetic permeability close to 1 and a good thermal conductivity is desirable for the housing 101X. Therefore, austenite-based stainless steel, titanium or other metals, ceramics, and carbon fiber reinforced plastic (CFRP) are used.
Electric power is supplied to the armature winding 108 from the terminal block 105 attached to the housing 101X. The terminal block 105 and the armature winding 108 are electrically connected to each other by lead wires (not shown). Further, the refrigerant is supplied from the refrigerant supply port 106 provided in the housing 101 </ b> X and discharged from the refrigerant discharge port 107. In the meantime, the refrigerant flows through the refrigerant flow path 110 between the armature winding 108 and the can 102, and cools the armature winding 108 that generates heat.

  The field 200 is configured in exactly the same way as in the prior art. The canned linear motor acts on the magnetic field generated by the permanent magnet 203 by causing a predetermined current corresponding to the electrical relative position of the field magnet 200 and the canned linear motor armature 100 to flow through the armature winding 108. Thus, thrust can be generated in the field 200.

The canned / linear motor armature 100 configured in this manner effectively cools the armature winding 108 that generates heat by flowing into the coolant flow path 110 between the armature winding 108 and the can 102. Can do. Furthermore, a part of the heat generated in the armature winding 108 can be conducted to the bridge girder 120 and radiated to the entire casing 101X. That is, the heat of the armature winding 108 can be diffused using the casing 101X, and the temperature gradient of the entire canned / linear motor armature 100 can be suppressed.
Further, since the bridge girder 120 formed integrally is provided inside the housing 101X, the rigidity of the housing 101X can be significantly improved.

Next, a second embodiment of the present invention will be described.
FIG. 4 is a front sectional view taken along line AA of FIG. 1 showing the second embodiment. In addition, the upper part from CC line of FIG. 4 represents the cross section of the center part of a concentrated winding coil, and the lower part from CC line represents the cross section between concentrated winding coils. FIG. 5 is a structural diagram of the inside of the armature excluding the can of FIG. In the figure, 121 is a heat conducting member, 122 is a convex part, 123 is a heat conducting part O-ring, and 124 is a fastening screw.
As shown in FIG. 5, the second embodiment differs from the first embodiment in that a heat conducting member 121 is provided in the air core of the concentrated winding coil 118 (armature winding 108), and this heat conducting member 121 and the 102 is also in close contact, and the bridge girder 120 is also provided with a convex portion 122, and the bridge girder 120 and the can 102 are also in close contact with each other via this convex portion.
The heat conducting member 121 has a cylindrical shape and is disposed on the winding fixing frame 109 in the air core portion of the concentrated winding coil 118. Then, the heat conduction portion O-ring 123 is mounted on the contact surface with the can 102 and is fastened and brought into close contact with the can 102 by the fastening screw 124. Further, a cylindrical convex portion 122 is provided on the bridge girder 120, and a heat conducting portion O-ring 123 is mounted on the contact surface with the can 102. The can 102 and the fastening screw 124 are fastened and brought into close contact with each other.
As in the case 101X shown in the first embodiment, the heat conducting member 121 has a relative magnetic permeability close to 1, and is a metal having a good thermal conductivity, such as austenitic stainless steel or titanium, ceramics, carbon fiber. Reinforced plastic (CFRP) is used. Here, when ceramic or CFRP that is not a metal is used for the casing 101X or the heat conducting member 121, a helicate or bush (not shown) may be inserted into the casing 101X or the heat conducting member 121 so that it can be fastened with the fastening screw 124. . Further, a through hole may be provided and tightened with a nut on the opposite side to the can 102 to be brought into close contact with.

In the canned / linear motor armature 100 configured as described above, the heat conduction portion O-ring 123 is included in the contact surface between the heat conduction member 121 and the can 102 and the contact surface between the convex portion 122 and the can 102. The refrigerant flow path 110 formed between the child winding 108 and the can 102 is completely sealed. The refrigerant flows through the refrigerant flow path 110 between the armature winding 108 and the can 102 and can effectively cool the armature winding 108 that generates heat. Furthermore, a part of the heat generated in the armature winding 108 is not only conducted to the bridge girder 120 and radiated to the entire housing 101X, but also conducted from the heat conducting member 121 and the convex portion 122 to be radiated to the entire can 102. be able to. That is, since the heat of the armature winding 108 is diffused to the casing 101X and the can 102, the temperature gradient of the entire canned / linear motor armature 100 can be further suppressed than in the first embodiment.
Further, similarly to the first embodiment, since the bridge girder 120 formed integrally is provided inside the casing 101X, the rigidity of the casing 101X can be significantly improved.

Next, a third embodiment of the present invention will be described.
FIG. 6 is a front sectional view taken along line AA of FIG. 1 showing a third embodiment. In addition, the upper part from CC line of FIG. 6 represents the cross section of the center part of a concentrated winding coil, and the lower part from CC line represents the cross section between concentrated winding coils. FIG. 7 is a structural diagram of the inside of the armature excluding the can of FIG. In the figure, 102X is a can, 110X is a refrigerant flow path, and 125 is a can post. The third embodiment differs from the second embodiment in that a refrigerant flow path and a can column are provided inside the can as shown in FIG.
The can 102 </ b> X is provided with a refrigerant flow path 110 </ b> X therein, and is further provided with a can post 125 inside the heat conduction member 121 and the bridge girder 123. The can 102X is fastened to the heat conducting member 121 and the bridge girder 123 by a fastening screw 121 at a place where the can post 125 is provided, and is in close contact with the can 102X. Further, the casing 101X and the armature winding 108 are designed to have the same thickness so that the can 102X and the armature winding 108 are in close contact with each other. A grease (not shown) having good thermal conductivity is applied between the can 102X and the armature winding 108. In the first and second embodiments, the can fixing part O-ring 111 and the heat conduction part O-ring 123 are used, but are unnecessary because the refrigerant flow path 110X is provided inside the can 102X. .

In the canned linear motor armature 100 configured as described above, since the refrigerant flow path 110X is formed inside the can 102X, the same effect as in the second embodiment can be obtained. In addition, since the refrigerant and the armature winding are insulated without the refrigerant directly touching the armature winding, water having a high cooling capacity can be used as the refrigerant. That is, the temperature rise can be reduced as compared with the second embodiment, and the temperature gradient can be reduced.
Further, as in the first and second embodiments, since the bridge girder 120 formed integrally is provided inside the housing 101X, the rigidity of the housing 101X can be significantly improved.

Next, the relationship between the coil pitch of the concentrated winding coil of the present invention and the magnetic pole pitch of the permanent magnet will be described. The relationship shown here applies to the first to third embodiments described above.
FIGS. 8A to 8D are diagrams showing the arrangement of concentrated winding coils and permanent magnets. When the interval (coil pitch) at which the concentrated winding coil 118 of the canned linear motor armature 100 is arranged is λc and the magnetic pole pitch of the permanent magnet 203 on the field 200 side is λm, four types having different λc: λm are shown. Yes.
FIG. 8A shows a configuration in which λc: λm = 4: 3. The armature winding 108 has three phases, and the concentrated winding coils 118 are arranged in the order of U phase, W phase, V phase, U phase,... From the left. Since the electrical angle of λm is 180 degrees, the electrical angle of λc is 240 degrees.
FIG. 8B shows a configuration where λc: λm = 6: 4. The armature winding 108 has two phases, and the concentrated winding coils 118 are arranged in the order of A phase, B ′ phase, A ′ phase, B phase, A phase,. The electrical angle of λc is 270 degrees.
FIG. 8C shows a configuration where λc: λm = 5: 3. The armature winding 108 has three phases, and the concentrated winding coil 118 is arranged from the left in the order of U phase, V ′ phase, W phase, U ′ phase, V phase, W ′ phase, U phase,. Yes. The electrical angle of λc is 300 degrees.
FIG. 8D shows a configuration in which λc: λm = 2: 1. The armature winding 108 has a single phase, and all the concentrated winding coils 118 have the same phase. The electrical angle of λc is 360 degrees.
Further, in all of FIGS. 8A to 8D, a gap for the bridge beam 120 to enter is provided between the concentrated winding coils 118.

Next, the conditions under which the concentrated winding coil 118 effectively generates thrust will be described. The large thrust generated by the concentrated winding coil 118 means that the magnetic flux of the permanent magnet 203 is effectively linked. In order to increase the number of interlinkage magnetic fluxes, assuming that the center interval of the coil sides of the concentrated winding coil 118 is λa and the width of the coil sides is Wa, the size of λa is close to the magnetic pole pitch λm, and Wa must be as large as possible. I must. In other words, the former condition is to increase the so-called short turn factor, and the latter condition is to increase the number of turns. 8A to 8D, as can be seen from the drawing, are relatively suitable for the above-described conditions, the size of λa is close to the magnetic pole pitch λm, and Wa is relatively large. . In other words, when the electrical angle of λc is 240 to 360 degrees, thrust can be generated effectively, and the condition is rewritten as the relationship between the coil pitch λc and the magnetic pole pitch λm. λm ≦ λc ≦ 2 × λm
It becomes.
With the above configuration, a predetermined thrust can be generated, and the canned linear motor shown in the first to third embodiments can be provided.

  In the first to third embodiments, the shape of the field is a mouth shape, but it goes without saying that the present invention can also be realized by a concave shape or a structure in which permanent magnets are simply arranged on one side. In the second and third embodiments, the fastening screw is used to bring the heat conducting member and the bridge girder into close contact with the can. However, without using this, the screw may be fixed by adhesion or adhered using grease. good. Also, as a method of fixing the concentrated winding coil, it is not fixed to the housing but fixed to the bridge girder, or the concentrated winding coil is fixed to the heat conducting member without using the winding fixing frame, and the can It is good also as a structure to fix.

100 Canned / Linear Motor Armature 101, 101X Housing 102, 102X Can 103 Can Fixing Bolt 104 Holding Plate 105 Terminal Block 106 Refrigerant Supply Port 107 Refrigerant Discharge Port 108 Armature Winding 109 Winding Fixing Frame 110, 110X Refrigerant Flow Path 111 Can fixing part O-ring 112 Winding fixing bolt 118 Concentrated winding coil 120 Bridge girder 121 Thermal conduction member 122 Convex part 123 Thermal conduction part O-ring 124 Fastening screw 125 Can column 200 Field 201 Field yoke support member 202 Field Magnetic yoke 203 Permanent magnet

Claims (5)

An armature winding formed of a plurality of concentrated winding coils formed in a flat plate shape, a housing formed so as to surround the armature winding, and a flat can that seals an opening of the housing; In the canned linear motor armature,
Provide a bridge girder formed integrally with the housing in the gap between the concentrated winding coils ,
A plurality of convex portions are provided on the bridge girder, the plurality of convex portions are brought into close contact with the can, and a refrigerant flow path is formed inside the can facing the bridge girder in a non-contact manner. Linear motor armature.   2. The canned linear motor armature according to claim 1, wherein a heat conducting member is provided in an air core portion of the concentrated winding coil, and the heat conducting member and the bridge girder are in close contact with the can. Claim 1 or 2 canned linear motor armature according to characterized in that a coolant channel in the interior of the can. The canned / linear motor armature according to any one of claims 1 to 3, and a plurality of permanent magnets arranged opposite to each other via a magnetic air gap and alternately having different polarities. Are arranged side by side, and one of the canned and linear motor armatures and the field is used as a stator and the other is used as a mover, and the field and the canned and linear motor armatures are arranged. A canned linear motor characterized by relatively running. The relationship between the coil pitch λc representing the interval at which the concentrated winding coils are arranged and the magnetic pole pitch λm of the permanent magnet is 4/3 × λm ≦ λc ≦ 2 × λm
The canned linear motor according to claim 4, wherein

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