CN107241002A - The mover of vacuum linear motor - Google Patents
The mover of vacuum linear motor Download PDFInfo
- Publication number
- CN107241002A CN107241002A CN201710187015.7A CN201710187015A CN107241002A CN 107241002 A CN107241002 A CN 107241002A CN 201710187015 A CN201710187015 A CN 201710187015A CN 107241002 A CN107241002 A CN 107241002A
- Authority
- CN
- China
- Prior art keywords
- mover
- cap
- incorporating section
- linear motor
- ribs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
- Motor Or Generator Cooling System (AREA)
Abstract
The present invention provides a kind of mover of vacuum linear motor, its be can also suppress deformation using simple structure even if the thickness of slab for not increasing tank, gap between mover and stator can be reduced as much as possible and can the epoch-making vacuum linear motor with being used in atmospheric environment identical system mover.A kind of stator (2) by spread configuration magnet (1), the mover (3) of the vacuum linear motor constituted with the mover (3) moved up in the spread configuration side of the magnet (1), by storage coil and with opening portion box-like incorporating section (4), constituted with the cap (5) for the opening portion for closing the incorporating section (4), the bottom surface faced in the cap (5) with closing the opening portion of the incorporating section (4) is provided with ribs (6) on the cap (5), the ribs (6) is tightened up with the cap (5) or the incorporating section (4) by secure component.
Description
Technical field
The present invention relates to the mover of vacuum linear motor.
Background technology
All the time, in the case of utilizing linear motor in vacuum plant, such as disclosed in patent document 1 like that,
Either one in motor mover and stator (coil or magnet) generally is surrounded with metal tank (shell), is suppressed to vacuum ring
Gas discharge in border.
However, it is very difficult to air is excluded completely from tank, therefore, because the differential pressure of the retained atmosphere in vacuum and tank and draw
The stress risen, tank produces flexure, and mover and stator come in contact sometimes.
Therefore, present situation is to have to take such as inferior countermeasure：Expand the gap between mover and stator, or in order to prevent
The deformation of tank and increase the thickness of slab of tank to improve rigidity.
Patent document 1：Japanese Unexamined Patent Publication 2005-51906 publications
But, if expanding the gap between mover and stator, or increase the thickness of slab of tank, then cause motor thrust
Decline, it is necessary to which increase, the increase of driving power capacity and Security Countermeasures of coil turn etc., cause the rising of cost.
The content of the invention
The present invention solves problem as described above and can also utilized simply even if the thickness of slab for not increasing tank there is provided a kind of
Structure suppress deformation, gap between mover and stator can be reduced as much as possible and can with atmospheric environment identical system
The mover of the epoch-making vacuum linear motor used in system.
It is related to a kind of mover of vacuum linear motor, the vacuum is with linear motor by spread configuration magnet
Stator and the mover that is moved up in the spread configuration side of the magnet are constituted, the vacuum linear motor it is dynamic
Son is characterised by that the mover is as storage coil and described in the incorporating section and the closing incorporating section of the box-like with opening portion
The cap of opening portion is constituted, bottom surface or the cap that the cap with closing the opening portion in the incorporating section is faced
On be provided with ribs, the ribs is tightened up with the cap or the incorporating section by means of secure component.
The present invention is simply tied due to constituting as described above, therefore as can also be utilized even if the thickness of slab for not increasing tank
Structure suppress deformation, can reduce as much as possible gap between mover and stator epoch-making vacuum linear motor it is dynamic
Son.
Brief description of the drawings
Fig. 1 is that the present embodiment outlines stereogram.
Fig. 2 is that the incorporating section 4 of the present embodiment outlines stereogram.
Fig. 3 is that the mover 3 of the present embodiment outlines sectional view.
Fig. 4 is that the cap 5 of the present embodiment outlines top view.
Fig. 5 is the use state explanation figure of the present embodiment.
Label declaration
1：Magnet
2：Stator
3：Mover
4：Incorporating section
5：Cap
6：Ribs
7：Coreless coil
8：Moulding resin
Embodiment
The effect of the present invention is shown based on accompanying drawing, to preferred embodiment simply illustrating for the present invention.
Mover 3 is moved relative to stator 2, make the isoline of workbench 19 movement for being arranged at mover 3.
Now, under the vacuums such as vacuum plant inside in the case of use, the bottom surface due to incorporating section 4 is added
Strong rib 6 is strengthened and rigidity is improved, therefore, it is possible in the case where not thickening the bottom surface of incorporating section 4, suppress well due to mover 3
In retained atmosphere and the deformation that produces.
Therefore, even high vacuum atmosphere, also the gap between stator 2 and mover 3 can be set to required Min.,
Small-sized, light weight can be realized and the vacuum linear motor of good thrust is can obtain.
Moreover, the vacuum of coreless coil 7 is being used with centreless linear motor, by the coreless coil 7
Hollow bulb configures the structure of ribs 6, can improve intensity using the hollow bulb of coreless coil 7, it is not necessary to additionally ensures that and adds
The space of strong rib 6, also, can also improve strong in the case where the quantity for not reducing coil does not make incorporating section 4 maximize yet
Degree.Moreover, in the case where cap 5 is provided with cooling body, the ribs 6 fastened with cap 5 is also cooled down well in the lump,
By making ribs 6 be located at the hollow bulb of coreless coil 7, it can efficiently suppress the heating of coreless coil 7.
【Embodiment】
Illustrate the specific embodiment of the present invention with reference to the accompanying drawings.
As illustrated in fig. 1, the present embodiment is vacuum linear motor, by the stator of spread configuration magnet 1
2 and constituted in the mover 3 that the spread configuration side of the magnet 1 is moved up.
The mover 3 of the present embodiment is made up of such as lower component：The incorporating section 4 of such box-like illustrated in Fig. 2, it is accommodated with tool
There is the oval coreless coil 7 of hollow bulb, and with opening portion；And close the cap of the opening portion of the incorporating section 4
5, the mover 3 of the present embodiment is following structure：What the cap 5 with closing the opening portion in the incorporating section 4 was faced
Bottom surface, integrally formed with ribs 6, the ribs 6 and the cap 5 are tightened up by secure component.
In addition, ribs 6 be arranged at respectively it is respective according to the multiple coreless coils 7 for being spaced setting of regulation
Hollow bulb, each ribs 6 and the cap 5 are tightened up by the secure component respectively.Alternatively, it is also possible to be configured to
Ribs 6 is integrally provided with cap 5, is configured to fasten the bottom surface of the ribs 6 and incorporating section 4 by secure component.This
Outside, coreless coil 7 is not limited to, the coil of ribbon core can also be used.
In addition, in the present embodiment, after having the opening portion of incorporating section 4 of coreless coil 7 using the closed configuration of cap 5,
Filling moulding resin 8, is filled up around coreless coil 7 and ribs 6 with moulding resin 8, by coreless coil 7 in mover 3
It is fixedly installed to incorporating section 4, and causes in mover 3 not retained atmosphere as far as possible.
As illustrated in fig. 3, incorporating section 4 and cap 5 are fastened as the bolt 9 of secure component.Specifically, in lid
In portion 5, provided with hole 10 is inserted with the locking end difference locking with the head of bolt 9, spiral shell is provided with the upper surface of ribs 6
Close the screwed hole 11 of the afterbody of installation bolt 9.Reinforcement is installed to by will insert to screw togather in the afterbody for inserting the bolt 9 in hole 10
The screwed hole 11 of rib 6 is simultaneously fastened, so that cap 5 be tightened up with ribs 6.In addition, being configured in the present embodiment
The structure of each ribs 6 is fastened using multiple (5) secure components.
In addition, the length direction of incorporating section 4 periphery wall and cap 5 length direction periphery also respectively by it is multiple (
It is each 10 in the present embodiment) fixing bolt 12 fixes.In figs. 2 and 3, label 13 is to insert hole, and 14 be to screw togather mounting hole.
In addition, incorporating section 4 is the box-shaped body of nonmagnetic metal, bottom surface integrally formed with height be about 10mm's plus
Strong rib 6.In the present embodiment, incorporating section 4 is non-magnetic stainless steel system.And cap 5 is similarly non-magnetic stainless steel system.
In addition, incorporating section 4 and cap 5 can also be other nonmagnetic metal systems such as copper, aluminium.
The spread configuration interval of ribs 6 is identical with the spread configuration interval (coil-span) of coreless coil 7.In this implementation
In example, ribs 6 is integrally formed with incorporating section 4 by cutting.Alternatively, it is also possible to be configured to set by other means such as welding
Ribs 6 is put, but when being integrally formed by cutting, can further improve rigidity.
In addition, the thickness of the bottom surface of the incorporating section 4 of the present embodiment is about 1mm, the thickness of the cap 5 of tabular is about
20mm.Therefore, by the way that ribs 6 is anchored on into cap 5, the intensity of the cap 5 thicker than the bottom surface of incorporating section 4 can be utilized to enter
One step improves rigidity.In addition, in the case where cap 5 is more than 10 times of thickness compared with the thickness of the bottom surface of incorporating section 4, on
State rigid raising effect especially notable.
Therefore, there is retained atmosphere in mover 3, also can well suppress in the vacuums such as chamber due to
Retained atmosphere and flexure for producing etc., can reduce the gap between mover and stator as much as possible, can realize can suppress to push away
The high vacuum correspondence centreless linear motor of the decline of power.
In addition, being provided with cooling body in cap 5, the cooling body is fastened onto to the cap 5 and by secure component
The ribs 6 of the cap 5 is cooled down.Specifically, as illustrated in figure 4, in the inside of cap 5, set with the state of crawling
The refrigerant flow channel 15 as cooling body is equipped with, is constructed so that the refrigerants such as water can be circulated.In refrigerant flowing
The both ends of passage 15, provided with refrigerant entrance hole 16 and refrigerant leadout hole 17.In the present embodiment, by deep hole plus
Work, multiple straight holes are equipped with from the side of cap 5 towards inside in length and breadth in crossing manner, by by these straight holes not
Need part to block, form the refrigerant flow channel 15 of snake shape.In addition, in Fig. 4, label 22,23 is to be used to pair set
It is placed in input side terminal and outlet side terminal that the coil of incorporating section 4 is powered.
When being cooled down by cooling body to cap 5, it is bolted 9 and is anchored on the ribs 6 of cap 5 also by well
Cooling, the coreless coil 7 around the ribs 6 is also cooled down well.
In addition, the stator 2 of the present embodiment is linearly to arrange multiple permanent magnets 1 in the different mode of alternating polarity
Arrange what is be arranged in magnet fixed plate 18 and constitute.In addition, in the present embodiment, magnet 1 is provided with 2 in magnet fixed plate 18
Row.
By said structure, mover 3 due to can be bent suppress at about 10 μm~30 μm, therefore with stator 2 every
The defined gap (being in the present embodiment 1.5mm) for about 1mm~2mm is configured.In addition, constituting in the present embodiment
For in two above-mentioned movers 3 of front and rear link, workbench 19 is fixed with across the two movers 3.In addition, mover 3 can be 1
It is individual or more than 3.It (is big in chamber 20 in the present embodiment that mobile object thing is fixed with the workbench 19
Gas tank 21).In Fig. 1, label 24 is the stay bolt for workbench 19 to be fixed to cap 5.
In the present embodiment, as illustrated in fig. 5, stator 2 is fixed on the fixed body 25 of chamber 20, will
Workbench 19 is fixed on big gas tank 21, and the big gas tank 21 movably links via line slideway 26 with fixed body 25, makes
Mover 3 is moved relative to stator 2, is thus configured to make big gas tank 21 move relative to the reciprocating linear of fixed body 25.Big gas tank 21
The atmosphere zone that the vacuum area such as formation and vacuum chamber is separated.In the present embodiment, it is configured to：Make substrate supporting in big gas tank
21, evaporation source is set on fixed body 25, substrate is moved back and forth relative to evaporation source with linear motor by vacuum, thus
Film forming can be carried out.In addition it is also possible to be configured to, the big gas tank 21 that remain substrate is fixed, set in the lower section of fixed body 25
Put the track that can move the reciprocating linear of fixed body 25, the steaming for making to be arranged on fixed body 25 by vacuum linear motor
Rise and moved back and forth relative to substrate, thus, it is possible to carry out film forming.In addition, in Figure 5, label 27 is connecting piece, it will
Big gas tank 21 and workbench 19 link, for inserting such as the wire to input side terminal 22 or outlet side terminal 23.
In addition, the present invention is not limited to the present embodiment, the concrete structure of each structural element can be suitably designed.
Claims (10)
1. a kind of mover of vacuum linear motor, the vacuum with linear motor by the stator of spread configuration magnet and
The mover moved up in the spread configuration side of the magnet is constituted, the feature of the mover of the vacuum linear motor
It is,
The mover is by storage coil and the incorporating section of the box-like with opening portion and the opening portion for closing the incorporating section
Cap is constituted, and is provided with the bottom surface faced with the cap of the closing opening portion of the incorporating section or the cap
Ribs, the ribs is tightened up with the cap or the incorporating section by means of secure component.
2. a kind of mover of vacuum linear motor, the vacuum with linear motor by the stator of spread configuration magnet and
The mover moved up in the spread configuration side of the magnet is constituted, the feature of the mover of the vacuum linear motor
It is,
The mover by storage coreless coil and with opening portion box-like incorporating section and close the incorporating section the opening
The cap in portion is constituted, on the bottom surface faced with the cap of the closing opening portion of the incorporating section, integrally formed with
Ribs, the ribs is located at the hollow bulb for the coreless coil for being incorporated in the incorporating section, the ribs and the lid
Portion is tightened up by means of secure component.
3. the mover of vacuum linear motor according to claim 2, it is characterised in that
The ribs is arranged at respective hollow according to the multiple coreless coils for being spaced setting of regulation respectively
Portion, each ribs is tightened up with the cap by means respectively of the secure component.
4. the mover of the vacuum linear motor according to any one of claims 1 to 3, it is characterised in that
Cooling body is provided with the cap, the cooling body is fastened to the cap and by secure component with the cap
The ribs come is cooled down.
5. the mover of the vacuum linear motor according to any one of claims 1 to 3, it is characterised in that
The thickness of the cap is more than 10 times of the thickness of the bottom surface of the incorporating section.
6. the mover of vacuum linear motor according to claim 4, it is characterised in that
The thickness of the cap is more than 10 times of the thickness of the bottom surface of the incorporating section.
7. the mover of the vacuum linear motor according to any one of claims 1 to 3, it is characterised in that
It is being accommodated between the incorporating section of the coil and the cap, filled with moulding resin.
8. the mover of vacuum linear motor according to claim 4, it is characterised in that
It is being accommodated between the incorporating section of the coil and the cap, filled with moulding resin.
9. the mover of vacuum linear motor according to claim 5, it is characterised in that
It is being accommodated between the incorporating section of the coil and the cap, filled with moulding resin.
10. the mover of vacuum linear motor according to claim 6, it is characterised in that
It is being accommodated between the incorporating section of the coil and the cap, filled with moulding resin.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016064145A JP6734089B2 (en) | 2016-03-28 | 2016-03-28 | Vacuum linear motor mover |
| JP2016-064145 | 2016-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107241002A true CN107241002A (en) | 2017-10-10 |
Family
ID=59983055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710187015.7A Pending CN107241002A (en) | 2016-03-28 | 2017-03-27 | The mover of vacuum linear motor |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6734089B2 (en) |
| KR (1) | KR20170113274A (en) |
| CN (1) | CN107241002A (en) |
| TW (1) | TW201804712A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107803704A (en) * | 2017-10-26 | 2018-03-16 | 江西佳时特精密机械有限责任公司 | Possesses the five-axle number control machine tool of novel cooling structure |
| CN110247498A (en) * | 2019-07-03 | 2019-09-17 | 珠海格力电器股份有限公司 | Cooling component, linear motor rotor, linear motor and the lathe of linear motor rotor |
| CN111463946A (en) * | 2020-04-13 | 2020-07-28 | 苏州思铭普精密科技有限公司 | Coreless moving coil type linear motor |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102181534B1 (en) * | 2020-07-15 | 2020-11-20 | 주식회사 대곤코퍼레이션 | Linear Motor Assembly For Vacuum |
| KR102509335B1 (en) | 2022-10-11 | 2023-03-14 | 디씨티 주식회사 | vacuum linear motor |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6639333B1 (en) * | 1999-07-19 | 2003-10-28 | Canon Kabushiki Kaisha | Linear motor stage system for use in exposure apparatus |
| CN1954477A (en) * | 2004-05-18 | 2007-04-25 | 株式会社安川电机 | Armature of canned linear motor and canned linear motor |
| JP2007312470A (en) * | 2006-05-17 | 2007-11-29 | Canon Inc | Linear motor, stage device, exposure device, and device manufacturing method |
| CN101292412A (en) * | 2005-10-18 | 2008-10-22 | 株式会社安川电机 | Armature of canned linear motor and canned linear motor |
| JP2009219206A (en) * | 2008-03-07 | 2009-09-24 | Hitachi Metals Ltd | Linear motor and manufacturing method of jacket for use therein |
| JP2010074978A (en) * | 2008-09-19 | 2010-04-02 | Yaskawa Electric Corp | Canned linear motor armature and canned linear motor, and table feed apparatus using them |
| CN101841223A (en) * | 2009-03-17 | 2010-09-22 | 株式会社安川电机 | Armature of canned linear motor and canned linear motor |
| CN102136787A (en) * | 2010-01-26 | 2011-07-27 | 株式会社安川电机 | Coolant-cooled linear motor |
| JP2013027054A (en) * | 2011-07-14 | 2013-02-04 | Yaskawa Electric Corp | Coreless linear motor |
| JP5347596B2 (en) * | 2009-03-12 | 2013-11-20 | 株式会社安川電機 | Canned linear motor armature and canned linear motor |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0257280U (en) * | 1988-10-21 | 1990-04-25 | ||
| JP2842140B2 (en) * | 1993-03-17 | 1998-12-24 | 株式会社ダイフク | Method for manufacturing armature for flat motor and electromagnet for flat motor |
| JP3118131B2 (en) * | 1993-12-03 | 2000-12-18 | 日本トムソン株式会社 | DC linear motor with two movable tables |
| JP3582072B2 (en) * | 1995-03-29 | 2004-10-27 | 株式会社安川電機 | Linear motor stator |
| JP2004015908A (en) * | 2002-06-06 | 2004-01-15 | Nikon Corp | Linear motor, stage arrangement, and aligner |
-
2016
- 2016-03-28 JP JP2016064145A patent/JP6734089B2/en active Active
-
2017
- 2017-03-24 TW TW106109994A patent/TW201804712A/en unknown
- 2017-03-27 CN CN201710187015.7A patent/CN107241002A/en active Pending
- 2017-03-27 KR KR1020170038356A patent/KR20170113274A/en active Search and Examination
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6639333B1 (en) * | 1999-07-19 | 2003-10-28 | Canon Kabushiki Kaisha | Linear motor stage system for use in exposure apparatus |
| CN1954477A (en) * | 2004-05-18 | 2007-04-25 | 株式会社安川电机 | Armature of canned linear motor and canned linear motor |
| CN101292412A (en) * | 2005-10-18 | 2008-10-22 | 株式会社安川电机 | Armature of canned linear motor and canned linear motor |
| JP2007312470A (en) * | 2006-05-17 | 2007-11-29 | Canon Inc | Linear motor, stage device, exposure device, and device manufacturing method |
| JP2009219206A (en) * | 2008-03-07 | 2009-09-24 | Hitachi Metals Ltd | Linear motor and manufacturing method of jacket for use therein |
| JP2010074978A (en) * | 2008-09-19 | 2010-04-02 | Yaskawa Electric Corp | Canned linear motor armature and canned linear motor, and table feed apparatus using them |
| JP5347596B2 (en) * | 2009-03-12 | 2013-11-20 | 株式会社安川電機 | Canned linear motor armature and canned linear motor |
| CN101841223A (en) * | 2009-03-17 | 2010-09-22 | 株式会社安川电机 | Armature of canned linear motor and canned linear motor |
| CN102136787A (en) * | 2010-01-26 | 2011-07-27 | 株式会社安川电机 | Coolant-cooled linear motor |
| JP2013027054A (en) * | 2011-07-14 | 2013-02-04 | Yaskawa Electric Corp | Coreless linear motor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107803704A (en) * | 2017-10-26 | 2018-03-16 | 江西佳时特精密机械有限责任公司 | Possesses the five-axle number control machine tool of novel cooling structure |
| CN110247498A (en) * | 2019-07-03 | 2019-09-17 | 珠海格力电器股份有限公司 | Cooling component, linear motor rotor, linear motor and the lathe of linear motor rotor |
| CN111463946A (en) * | 2020-04-13 | 2020-07-28 | 苏州思铭普精密科技有限公司 | Coreless moving coil type linear motor |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201804712A (en) | 2018-02-01 |
| JP6734089B2 (en) | 2020-08-05 |
| KR20170113274A (en) | 2017-10-12 |
| JP2017184324A (en) | 2017-10-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107241002A (en) | The mover of vacuum linear motor | |
| US9178401B2 (en) | Linear motor | |
| CN101243597B (en) | Rotor cover and electric motor | |
| US9515529B2 (en) | Method and apparatus for permanent magnet attachment in an electromechanical machine | |
| JP6166926B2 (en) | Linear motor | |
| JP2010088287A (en) | Vehicle drive motor | |
| US20140318408A1 (en) | Drive Apparatus for a Magnetic Levitation Transport System | |
| US10879767B2 (en) | Linear motor cooling system | |
| JP2013021915A (en) | Cooling system and method for electric machine | |
| JP2013103506A (en) | Cooler for vehicle control device | |
| US20050281691A1 (en) | Compressor | |
| US20150326091A1 (en) | Explosion-Protected Housing | |
| EP2731236A2 (en) | Motor | |
| US20040219026A1 (en) | Electromagnetic pump | |
| US20130154399A1 (en) | Linear drive for a machine tool and method for moving a tool carriage | |
| US9966817B2 (en) | Electromechanical transducer | |
| CN204978222U (en) | Power control unit module for vehicle | |
| EP2577849B1 (en) | Stator frame for a submerged linear generator | |
| CN103062063A (en) | Convection and fully-cooled type end cover structure for novel roots pump | |
| US6753626B2 (en) | Linear motor having an integrally formed air bearing | |
| KR20170066008A (en) | Stator assembly structure for drive motor of hybrid electric vehicle | |
| CN201869031U (en) | Water cooling structure of automobile motor | |
| CN110557855B (en) | Heating coil unit and induction heating cooker having the same | |
| CN106057419A (en) | Transformer oil tank | |
| CN1787342B (en) | Cooler for linear motor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20171010 |
|
| WD01 | Invention patent application deemed withdrawn after publication |