JP7339824B2 - Flow rate adjustment method and pressure adjustment method - Google Patents

Description

The present invention provides a flow rate adjusting method for adjusting the flow rate of fluid supplied to a supply unit such as a processing water nozzle by a fluid supply means in a processing apparatus, and a fluid supplied by a fluid supply unit to the supply unit such as a processing water nozzle in a processing apparatus. It relates to a pressure adjustment method for adjusting the supply pressure of.

In a processing apparatus that processes a workpiece using a processing tool (see, for example, Patent Document 1), a fluid supply source supplies a liquid such as a processing liquid or a cleaning liquid to a supply unit such as a nozzle of the processing apparatus, or dry air or the like. gas is supplied after adjusting the flow rate or pressure. Also, when supplying a mixed liquid (two-fluid) in which liquid and gas are mixed from the fluid supply source to the supply unit, the supply is performed after adjusting the flow rate or pressure.

In addition, recent processing apparatuses are equipped with a flow sensor for recognizing the flow rate value of the fluid supplied during processing, or a pressure sensor for recognizing the pressure value. , or the pressure value to monitor whether the fluid is being supplied. In addition, since the control means of the processing equipment recognizes the flow rate or pressure detected by the flow sensor or pressure sensor, the flow rate or pressure is displayed on the screen of the monitor or touch panel attached to the device housing of the device. It can be displayed and visually recognized by the operator. For this reason, recent processing apparatuses do not need to be equipped with an indicator (flow meter) that allows an operator to visually check the flow rate and an indicator (pressure gauge) that allows the operator to visually check the pressure, so that the size of the machining apparatus can be reduced.

JP 2015-213995 A

However, for example, when the processing equipment is installed in a clean room, etc., when adjusting the flow rate or pressure of the fluid supplied from the fluid supply source to the supply unit by the operator, the flow rate or pressure of the equipment Since the values are displayed on the screen, the operator needs to perform adjustment work while looking at the values displayed on the screen. Therefore, in the flow rate adjustment work and pressure adjustment work, the operator opens and closes the throttle valve etc. to an appropriate opening while looking at the value displayed on the screen. There is a problem that work efficiency deteriorates by doing it while doing it.

Therefore, when adjusting the flow rate or pressure of the fluid supplied from the fluid supply source to the supply unit in the processing apparatus, there is a problem of improving the work efficiency of the operator.

In order to solve the above problems, the present invention provides holding means for holding a workpiece, machining means for mounting a machining tool and machining the workpiece, and fluid supply means for supplying a fluid to the workpiece or the machining tool. and a control means for controlling the processing apparatus, a flow rate adjusting method for adjusting the flow rate of the fluid supplied by the fluid supply means, wherein the fluid supply means is a supply to which the fluid is supplied a pipe communicating between the supply unit and the fluid supply source; a throttle valve disposed in the pipe for varying the flow rate of the fluid flowing through the pipe; a flow rate sensor for detecting the flow rate of the fluid flowing through the pipe, the control means comprising a setting unit for setting a prescribed set flow rate value of the fluid, and an opening degree of the throttle valve corresponding to the set flow rate value. an energization unit that energizes a speaker according to the flow rate value detected by the flow rate sensor and causes the speaker to emit sound when changed, and changes the opening of the throttle valve and listens to the sound of the speaker and supplies the power supply. A flow rate adjustment method comprising a flow rate adjustment step of adjusting the flow rate of a fluid supplied to a part.

In the flow rate adjusting step, when the set flow rate value and the flow rate value detected by the flow rate sensor match, the energization unit causes the speaker to generate a sound under the control of the control means. It is preferable to include a flow rate matching sound generating step.

Further, the present invention for solving the above-mentioned problems includes holding means for holding a work piece, processing means for mounting a processing tool to work the work piece, and fluid for supplying a fluid to the work piece or the processing tool. A pressure adjusting method for adjusting the supply pressure of a fluid supplied by the fluid supply means in a processing apparatus comprising a supply means and a control means for controlling the processing apparatus, wherein the fluid supply means controls the fluid supplied a supply unit, a pipe communicating between the supply unit and a fluid supply source, a throttle valve disposed in the pipe for varying the pressure of the fluid flowing through the pipe, and the supply unit and the throttle valve a pressure sensor that detects the pressure in the pipe between the an energization unit that energizes the speaker according to the pressure value detected by the pressure sensor and causes the speaker to emit sound by changing the opening of the throttle valve and listens to the sound of the speaker. The pressure adjustment method includes a pressure adjustment step of adjusting the pressure of the fluid to be supplied to the supply unit.

In the pressure adjustment step, when the set pressure value and the pressure value detected by the pressure sensor match, the energization unit causes the speaker to generate a sound under the control of the control means. It is preferable to include a pressure matching sound generating step.

In the flow rate adjusting method according to the present invention, the fluid supply means of the processing apparatus includes a supply section to which the fluid is supplied, a pipe communicating between the supply section and the fluid supply source, and a fluid disposed in the pipe and flowing through the pipe. A throttle valve that varies the flow rate, and a flow rate sensor that detects the flow rate of the fluid flowing in the pipe between the supply unit and the throttle valve, and the control means is a setting unit that sets a prescribed set flow rate value of the fluid. and an energization unit that energizes a speaker according to the flow rate value detected by the flow rate sensor when the opening degree of the throttle valve is changed with respect to the set flow rate value and causes the speaker to emit sound, and the opening degree of the throttle valve By changing the sound of the speaker and adjusting the flow rate of the fluid supplied to the supply unit, the sound emitted by the speaker without the operator having to look at the flow rate displayed on the screen of the processing device By listening to , it is possible to adjust the flow rate by appropriately changing the opening of the throttle valve to match the flow rate of the fluid flowing in the pipe to the set flow rate. In other words, the operator does not have to adjust the flow rate while looking at his or her hand or the screen, and it is possible to improve work efficiency.

In the flow rate adjustment process, when the set flow rate value and the flow rate value detected by the flow rate sensor match, the energization unit causes the speaker to conduct current under the control of the control means to generate a flow rate matching sound generation step. Therefore, even if the operator does not have to look at the flow rate displayed on the screen of the processing equipment, he or she can adjust the opening of the throttle valve appropriately by listening to the sound emitted by the speaker, and set the flow rate of the fluid flowing through the pipe. It is possible to adjust the flow rate to match That is, it is no longer necessary to adjust the flow rate while looking at the hand or the screen, and it is possible to improve work efficiency.

The control means comprises a range setting unit for setting a setting range of a predetermined width including the set flow rate value, and in the flow rate adjustment process, when the flow rate value detected by the flow rate sensor enters the setting range, under the control of the control means, The energizing part energizes the speaker, performs a flow rate approximating sound generating step in which the speaker emits an intermittent sound or a sound smaller than the sound emitted from the speaker in the flow rate matching sound generating step, and the fluid is supplied to the supply unit By notifying that the flow rate is approaching the set flow rate value, the difference in the audible sound allows the operator to change the opening of the throttle valve more appropriately and efficiently. It is possible to adjust the flow rate of the fluid flowing through the pipe to the set flow rate by appropriately changing the opening of the throttle valve without looking at the displayed flow rate.

In the pressure adjustment method according to the present invention, the fluid supply means of the processing apparatus includes a supply section to which the fluid is supplied, a pipe communicating between the supply section and the fluid supply source, and a fluid disposed in the pipe and flowing through the pipe. A throttle valve that varies the pressure, and a pressure sensor that detects the pressure of fluid flowing in the pipe between the supply part and the throttle valve, and the control means sets a prescribed set pressure value in the pipe. and an energization unit that energizes a speaker according to the pressure value detected by the pressure sensor when the opening of the throttle valve is changed with respect to the set pressure value, and causes the speaker to emit sound. By providing a pressure adjustment process for adjusting the pressure of the fluid supplied to the supply unit by changing the pressure and listening to the sound of the speaker, the speaker sounds without the operator having to look at the pressure displayed on the screen of the processing device. By listening to the sound, the opening of the throttle valve can be changed appropriately to adjust the pressure of the fluid flowing through the pipe to the set pressure. In other words, the operator does not have to adjust the pressure while looking at his/her hand or the screen, and it is possible to improve work efficiency.

In the pressure adjusting step, when the set pressure value and the pressure value detected by the pressure sensor match, the energizing unit causes the speaker to energize under the control of the control means to cause the speaker to emit a sound. Therefore, even if the operator does not see the pressure displayed on the screen of the processing equipment, he or she can adjust the opening of the throttle valve appropriately by listening to the sound emitted by the speaker, and adjust the fluid flowing through the pipe to the set pressure. pressure can be adjusted to In other words, the operator does not have to adjust the pressure while looking at his/her hand or the screen, and it is possible to improve work efficiency.

The control means comprises a range setting section for setting a setting range of a predetermined width including the set pressure value, and in the pressure adjustment process, when the pressure value detected by the pressure sensor enters the setting range, under the control of the control means, The energization unit energizes the speaker to perform a pressure-approximating sound generating step in which the speaker emits an intermittent sound or a sound smaller than the sound emitted from the speaker in the pressure matching sound generating step, and the fluid supplied to the supply unit is reduced. By notifying that the pressure is approaching the set pressure value, the difference in the audible sound allows the operator to change the opening of the throttle valve more appropriately and efficiently. It is possible to adjust the pressure of the fluid flowing through the piping to the set flow pressure by appropriately changing the opening of the throttle valve without having to check the applied pressure one by one.

BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view which shows an example of the processing apparatus by which the flow control method or pressure control method which concerns on this invention is implemented.

The processing device 1 shown in FIG. 1 is a device for grinding the workpiece W held on the holding means 30 by the processing means 16, and the front (−Y direction side) of the processing device 1 on the device base 10 is , the attachment/detachment area where the workpiece W is attached/detached to/from the holding means 30 , and the rear (+Y direction side) on the device base 10 is the workpiece W held on the holding means 30 by the processing means 16 . It is a processing area where grinding processing of is performed.
It should be noted that the processing apparatus according to the present invention is not limited to a grinding apparatus in which the processing means 16 of the processing apparatus 1 is a single-axis grinding apparatus. A two-axis grinding device or the like that can position the workpiece W below each grinding means may be used. Further, the processing device may be a polishing device that polishes the workpiece W with a processing means having a polishing pad, or a cutting means having a rotating cutting blade that cuts the workpiece W into chips. It may be a cutting device that divides.

The workpiece W is, for example, a circular semiconductor wafer made of a silicon base material or the like, but is not limited to this. The back surface Wb facing the upper side (+Z direction side) of the workpiece W is the surface to be ground, and the front surface Wa, which is the opposite surface of the back surface Wb, is attached with, for example, a protective tape (not shown). protected by

As shown in FIG. 1, a box-shaped apparatus housing 11 is arranged on an apparatus base 10 of the processing apparatus 1, and the processing means 16 and the holding means 30 are arranged inside the apparatus housing 11. ing.
For example, a touch panel 12 is provided on the front side of the apparatus housing 11 in the -Y direction to allow the operator to input the processing conditions of the processing means 16 to the processing apparatus 1 . The touch panel 12 is electrically connected to a control means 9 for controlling the entire apparatus, which includes a CPU, a memory element, and the like. Send to An input screen and a display screen are displayed on the touch panel 12, and the input screen allows the operator to input various information such as processing conditions to the processing apparatus 1 for setting. It displays the processing by means and the state of each part of the device.

A first cassette mounting portion 150 and a second cassette mounting portion 151 are provided on the front side (−Y direction side) of the apparatus base 10. A first cassette 150a that accommodates the processed workpiece W is placed, and a second cassette 151a that accommodates the processed workpiece W is placed on the second cassette mounting portion 151. .

Behind the opening of the first cassette 150a, there is a robot 155 that unloads the unprocessed workpiece W from the first cassette 150a and loads the processed workpiece W into the second cassette 151a. It is A temporary placement area 152 is provided at a position adjacent to the robot 155 , and an alignment means 153 is provided in the temporary placement area 152 . The alignment means 153 aligns (centers) the workpiece W unloaded from the first cassette 150a and placed in the temporary placement area 152 at a predetermined position with a diameter-reduced alignment pin.

A loading arm 154 a that rotates while holding the workpiece W is arranged at a position adjacent to the positioning means 153 . The loading arm 154a holds the workpiece W aligned by the alignment means 153 and conveys it to the holding means 30 disposed within the processing area.

Next to the loading arm 154a, an unloading arm 154b that turns while holding the workpiece W after machining is provided. At a position adjacent to the unloading arm 154b, a single-wafer cleaning means 156 for cleaning the processed workpiece W transported by the unloading arm 154b is arranged. The cleaning means 156 holds the downward facing surface Wa of the workpiece W on a spinner table 156a, and sprays cleaning water onto the workpiece W from a cleaning nozzle 156b that moves above the held workpiece W. The back surface Wb is cleaned by jetting it to the back surface Wb. Next, for example, the workpiece W is dried by jetting air from the cleaning nozzle 156b.
The workpiece W cleaned and dried by the cleaning means 156 is carried into the second cassette 151 a by the robot 155 .

The holding means 30 for sucking and holding the workpiece W has, for example, a circular outer shape and includes a holding surface 300 made of a porous member or the like for sucking and holding the workpiece W. As shown in FIG. The holding means 30 is rotatable around a rotation axis whose axial direction is the Z-axis direction (vertical direction), and is surrounded by a cover 39. It can be reciprocated on the device base 10 in the Y-axis direction by a Y-axis direction moving means (not shown) disposed under the expandable bellows cover 39a.

A column 100 is erected on the rear side (+Y direction side) of the device base 10, and a ball screw mechanism or the like for processing and feeding the processing means 16 in the Z-axis direction (vertical direction) is mounted on the front surface of the column 100. A working feed means 17 is provided.

The processing means 16 for processing the workpiece W held by the holding means 30 rotatably supports a rotating shaft 160 whose axial direction is the Z-axis direction orthogonal to the holding surface 300 of the holding means 30 and the rotating shaft 160. a motor 162 for rotating a rotating shaft 160; a mount 163 attached to the lower end of the rotating shaft 160; and a processing tool 164 detachably connected to the mount 163. The processing tool 164 is a grinding wheel, and includes a wheel base and a plurality of grinding wheels having a substantially rectangular parallelepiped outer shape and arranged in a plurality of rings on the lower surface of the wheel base.

For example, a grinding water flow path (not shown) extending in the Z-axis direction is formed inside the rotating shaft 160, and a grinding water supply means (not shown) communicates through a grinding water supply pipe 166 inserted into the grinding water flow path. are doing. Grinding water supplied from the grinding water supply means to the rotating shaft 160 is ejected downward toward the processing tool 164 from the opening at the lower end of the grinding water flow path, and reaches the contact portion between the processing tool 164 and the workpiece W. reach.

At a position adjacent to the holding means 30 positioned below the processing means 16, for example, a thickness measuring means for measuring the thickness of the workpiece W held by the holding means 30 during grinding in a contact manner. 38 are provided.

The processing apparatus 1 includes fluid supply means 7 for supplying fluid to the workpiece W or the processing tool 164 . The fluid supply means 7 includes a supply portion 70 to which fluid is supplied, a pipe 71 that communicates between the supply portion 70 and a fluid supply source 79, and a flow rate of the fluid that is arranged in the pipe 71 and that flows through the pipe 71 is variable. and a flow rate sensor 73 for detecting the flow rate of the fluid flowing through the pipe 71 between the supply portion 70 and the throttle valve 72 .

The fluid supply source 79 in this embodiment includes, for example, at least one of a water supply source such as a pump and an air supply source such as a compressor. It is a mixed fluid of water and air. Alternatively, the fluid is water. Alternatively, the fluid is air.

One end on the upstream side of a pipe 71 made of a metal pipe, a flexible tube, or the like communicates with the fluid supply source 79 .
In this embodiment, the supply unit 70 to which the fluid is supplied from the fluid supply source 79 is, for example, a subject suction-held on the holding surface 300 from outside the outer circumference of the holding means 30 positioned below the processing means 16 . It is a grinding water injection nozzle that supplies a fluid (grinding water) to a contact portion (processing point) between the workpiece W and the processing tool 164 . The supply unit 70 is, for example, erected on the device base 10 and has a substantially inverted L-shaped outer shape when viewed from the side. The workpiece W and the processing tool 164 are held on the holding surface 300 so that water jetted from a supply port (not shown) formed at the tip of the supply part 70 and opened toward the holding means 30 forms a substantially parabola. reaches the point of contact with The other downstream end of the pipe 71 communicates with the lower end of the supply portion 70, which is a grinding water injection nozzle.

The supply unit to which the fluid is supplied from the fluid supply source 79 is not limited to the supply unit 70, which is the grinding water injection nozzle shown in FIG. It may be the grinding water supply pipe 166 communicating with the passage, or the washing nozzle 156b of the washing means 156.

Alternatively, the supply section may be the holding means 30 . For example, when it is desired to release the suction holding of the workpiece W by the holding means 30 and carry out the workpiece W from the holding means 30 , the air supplied from the fluid supply source 79 is applied to the holding surface of the holding means 30 . It erupts from 300. As a result, the vacuum attraction force remaining between the holding surface 300 and the surface of the workpiece W to be attracted can be eliminated, and the workpiece W can be detached from the holding surface 300 .

The throttle valve 72 is, for example, a valve that allows an operator to manually rotate a handle to change the degree of opening, but is not limited to such a throttle valve. The throttle valve 72 is located upstream of the flow rate sensor 73 on the pipe 71 . For example, when a handle (not shown) is turned to the right, the opening degree of the throttle valve 72 decreases and the flow rate decreases, and when it is turned to the left, the opening degree increases and the flow rate increases.

Generally, the touch panel 12 of the processing device 1 is used frequently, and is attached to the device housing 11 on the device base 10 of the processing device 1, as shown in FIG. This allows the operator to visually check whether or not the workpiece W has been appropriately processed through a window (not shown) provided in the apparatus housing 11, and also allows the touch panel to be displayed when a processing defect occurs. 12 can be used to immediately stop the apparatus. On the other hand, the throttle valve 72 is accommodated, for example, in the device base 10 of the processing device 1, and can be accessed by the operator by opening the opening door of the device base 10 (not shown). This is because the frequency of use of the throttle valve 72 is not so high, and for example, it is only used when the processing apparatus 1 is installed in a clean room or the like for the first time. Therefore, the touch panel 12 and the throttle valve 72 are generally located at separate positions, and in order for one worker to use the touch panel 12 and the throttle valve 72, the worker must move each time. .

The flow rate sensor 73 that detects the flow rate of the fluid flowing through the pipe 71 between the supply unit 70 and the throttle valve 72 is, for example, an electromagnetic flow rate sensor, an impeller type flow rate sensor, or the like, but is not limited thereto. The flow rate sensor 73 can transmit a signal proportional to the detected flow rate to the control means 9 described later via a wired or wireless communication path 98 .

The processing device 1 includes control means 9 for controlling the processing device. The control means 9 comprising a CPU or the like includes a setting unit 90 comprising a storage element such as a memory for setting a prescribed set flow rate value of the fluid flowing through the pipe 71, and an opening degree of the throttle valve 72 corresponding to the set flow rate value. is manually changed by an operator, for example, and the flow rate value detected by the flow rate sensor 73 is used to energize the speaker 99 shown in FIG.

The setting unit 90 is composed of a memory element such as a memory. , the set flow rate value is set.
Further, the control means 9 in this embodiment includes a range setting section 93 for setting a set flow rate range of a predetermined width including the set flow rate value. In addition, the set flow rate value and the set flow rate range of a predetermined width including the set flow rate value are data obtained when the work W can be appropriately ground in the past grinding experiment of the work W. etc.

The speaker 99 is, for example, a cone-shaped speaker, and is electrically connected to the conducting section 91 . By energizing the speaker 99 with the power supply unit 91, the volume of the sound generated from the speaker 99 can be amplified via an amplifier (not shown), and the sound that can be produced can be intermittently changed at predetermined intervals. Note that the speaker 99 may be, for example, a dome-shaped speaker, a horn-shaped speaker, or the like.

In the processing apparatus 1 according to the present invention, the throttle valve 72 constituting the fluid supply means 7 also plays a role of varying the pressure of the fluid flowing through the pipe 71 .
The fluid supply means 7 also includes, for example, a pressure sensor 74 that detects the pressure of the fluid flowing through the pipe 71 between the supply portion 70 and the throttle valve 72 . The pressure sensor 74 includes, for example, a stainless diaphragm or a silicon chip pressure receiving portion (silicon diaphragm). is converted into an electrical signal by a semiconductor transducer or the like attached to the diaphragm. The pressure sensor 74 is connected to the control means 9 via a wireless or wired communication path 98 . Note that the pressure sensor 74 is not limited to the example shown above.

The setting unit 90 sets the set pressure value by, for example, using the touch panel 12 by the operator to input the predetermined set pressure value of the fluid in the pipe 71 to the control unit 9 .
Further, the control means 9 in this embodiment includes a range setting section 93 for setting a set pressure range of a predetermined width including the set pressure value. It should be noted that the set pressure value and the set pressure range of a predetermined width including the set pressure value are data obtained when the workpiece W can be appropriately ground in a grinding experiment of the workpiece W performed in the past. etc.

(Flow rate adjustment method)
In the following, a process for implementing a flow rate adjustment method for adjusting the flow rate of the fluid supplied by the fluid supply means 7 in the processing apparatus 1 will be described. An example of the case where this flow rate adjustment method is implemented is, for example, the case where the processing apparatus 1 is installed in a clean room for the first time.

(1) Adjusting the flow rate of the fluid in the flow rate adjustment step First, in the processing device 1, the operator uses the touch panel 12 to input the prescribed set flow rate value F1 of the fluid in the pipe 71 to the control means 9. Thus, the set flow rate value F1 is set in the setting unit 90 . Further, in the present embodiment, in addition to the set flow rate value F1, an upper limit value F2, a set flow rate value F1, and a lower limit value F3 (hereinafter referred to as flow rate setting range F2 to F3) are also set in the setting unit 90. FIG.

Next, pressurized fluid (for example, pure water, which is grinding water) is sent out from the fluid supply source 79 and supplied to the supply section 70 through the pipe 71 . Then, the flow rate sensor 73 sequentially detects the flow rate of the fluid flowing through the pipe 71 . The flow rate sensor 73 sequentially transmits detection information about the flow rate of the fluid flowing through the pipe 71 to the control means 9 .

The control means 9 includes, for example, a detection value comparison and monitoring unit 92 shown in FIG. Successive approximation monitoring is performed to determine whether or not the flow rate setting range F2 to F3 with a predetermined width is included.

In this state, the operator manually rotates the handle (not shown) of the throttle valve 72 to change the opening of the throttle valve 72, thereby changing the flow rate of the fluid flowing through the pipe 71 steplessly.

(2) Flow rate approximation sound generation process In the flow rate adjustment process, the flow rate of the fluid flowing in the pipe 71 is changed by changing the opening degree of the throttle valve 72 as described above. When the flow rate value detected by 73 enters the flow rate setting range F2 to F3, the energizing unit 91 energizes the speaker 99 under the control of the control means 9. A smaller sound is produced than the sound produced in the flow matching sound generating step. A worker who hears this intermittent sound or a sound that is smaller than the sound produced in the flow rate matching sound generation process described later can understand that the flow rate of the fluid flowing through the pipe 71 is approaching the set flow rate value F1. can.

The operator who has grasped that the flow rate of the fluid flowing through the pipe 71 is approaching the set flow rate value F1 manually rotates the handle (not shown) of the throttle valve 72 to finely adjust the opening degree of the throttle valve 72. As a result, the flow rate of the fluid flowing through the pipe 71 is brought closer to the set flow rate value F1.

(3) Flow rate matching sound generation process In the flow rate adjustment process, for example, the flow rate approximation sound generation process is performed as described above, and the flow rate of the fluid flowing through the pipe 71 is changed by changing the opening degree of the throttle valve 72 as described above. Thus, the detected value comparison and monitoring unit 92 determines that the detected flow rate value matches the set flow rate value F1. Then, under the control of the control means 9, the energizing section 91 energizes the speaker 99 and causes the speaker 99 to emit sound. That is, the energization unit 91 amplifies the volume of the sound generated from the speaker 99 via an amplifier (not shown), for example, and continuously generates a louder sound than the sound generated by the speaker 99 in the flow approximation sound generation process. Ring. A worker who hears this continuous loud sound can determine that the flow rate of the fluid flowing through the pipe 71 matches the set flow rate value F1. Then, the operator stops rotating the handle (not shown) of the throttle valve 72 .

(4) Completion of adjusting the flow rate of fluid in the flow rate adjustment process The work of adjusting the flow rate of the fluid supplied to the supply unit 70 by changing the opening of the throttle valve 72 and listening to the sound of the speaker 99 is the same as the above. The process is completed when the flow rate of the fluid flowing through the pipe 71 matches the set flow rate value F1. When the workpiece W is actually ground, the processing apparatus 1 adjusts the flow rate from the supply unit 70, which is a grinding water injection nozzle, to an appropriate amount for the contact portion between the workpiece W and the machining tool 164. It will be in a state set so that it can supply grinding water.

As described above, in the flow rate adjustment method according to the present invention, even if the operator does not look at the flow rate displayed on the screen of the touch panel 12 of the processing apparatus 1, he or she can hear the sound emitted by the speaker 99, and the throttle valve 72 By appropriately changing the opening of , the flow rate of the fluid flowing through the pipe 71 can be adjusted to the set flow rate value F1. That is, the operator adjusts the opening degree of the throttle valve 72 to adjust the flow rate, then moves to the front of the touch panel 12, looks at the screen to grasp the flow rate, and adjusts the opening degree of the throttle valve 72 again. , need not be repeated, and work efficiency can be improved.

(Pressure adjustment method)
Below, in the above-described processing apparatus 1, a description will be given of steps in the case of implementing a pressure adjustment method for adjusting the supply pressure of the fluid supplied by the fluid supply means 7. FIG. An example of a case where this pressure adjustment method is implemented is, for example, when the processing apparatus 1 is installed in a clean room for the first time.

(1) Adjustment of fluid pressure in the pressure adjustment step First, the operator uses the touch panel 12 of the processing apparatus 1 to input the prescribed set pressure value P1 of the fluid flowing through the pipe 71 to the control means 9. Thus, the set pressure value P1 is set in the setting unit 90. As shown in FIG. Further, in the present embodiment, in addition to the set pressure value P1, an upper limit value P2, a set pressure value P1, and a lower limit value P3, which are a set range of a predetermined width including the set pressure value P1 (hereinafter referred to as a pressure set range P2 to P3) are also set in the setting unit 90. FIG.

Next, pressurized fluid (for example, grinding water) is delivered from the fluid supply source 79 and supplied to the supply section 70 through the pipe 71 . Then, the pressure sensor 74 sequentially detects the pressure in the pipe 71 through which the fluid flows between the supply portion 70 and the throttle valve 72 . The pressure sensor 74 sequentially transmits information about the detected pressure in the pipe 71 to the control means 9 .

The control means 9 includes, for example, a detection value comparison and monitoring unit 92 shown in FIG. Sequential comparison monitoring is performed to determine whether the pressure value in the pipe 71 in the state of being in the state of being within the pressure setting range P2 to P3 having a predetermined width including the setting pressure value P1.

In this state, the operator manually rotates the handle (not shown) of the throttle valve 72 to change the opening of the throttle valve 72, thereby changing the pressure of the fluid flowing through the pipe 71 steplessly. That is, by increasing the opening degree of the throttle valve 72, the flow rate in the pipe 71 on the downstream side (supply section 70 side) of the throttle valve 72 increases, and the pressure also increases. Conversely, by decreasing the opening degree of the throttle valve 72, the flow rate in the pipe 71 on the downstream side (the supply section 70 side) of the throttle valve 72 decreases, and the pressure also decreases.

(2) Pressure-approximating sound generation process In the pressure adjustment process, the pressure in the pipe 71 between the supply unit 70 and the throttle valve 72 is changed by changing the opening degree of the throttle valve 72 as described above, and the detected value is compared. When the pressure value detected by the pressure sensor 74 monitored by the monitoring unit 92 enters the pressure setting range P2 to P3, the energizing unit 91 energizes the speaker 99 under the control of the control unit 9, and the speaker 99 intermittently operates. A sound, or a sound smaller than the sound produced in the pressure matching sound generating step, which will be described later, is produced from the speaker 99 . A worker who hears this intermittent sound or a sound that is smaller than the sound produced in the pressure matching sound generating process described later recognizes that the pressure of the fluid flowing through the pipe 71 is approaching the set pressure value P1. can.

The operator who has recognized that the pressure of the fluid flowing through the pipe 71 is approaching the set pressure value P1 manually rotates the handle (not shown) of the throttle valve 72 to finely adjust the opening of the throttle valve 72. Then, the pressure of the fluid flowing through the pipe 71 is brought closer to the set pressure value P1.

(3) Pressure Matching Sound Generating Process In the pressure adjusting process, for example, the pressure approximating sound generating process is performed as described above, and the pressure of the fluid flowing in the pipe 71 changes as described above to change the opening of the throttle valve 72. As a result, the detected value comparison and monitoring unit 92 recognizes that the detected pressure value matches the set pressure value P1. Then, under the control of the control means 9, the energizing section 91 energizes the speaker 99 and causes the speaker 99 to emit sound. That is, the energization unit 91 amplifies the volume of the sound generated from the speaker 99 via an amplifier (not shown), for example, and continuously generates a louder sound than the sound generated by the speaker 99 in the pressure-approximating sound generation process. Ring. A worker who hears this continuous loud sound can know that the pressure of the fluid flowing through the pipe 71 has reached the set pressure value P1. Then, the operator stops rotating the handle (not shown) of the throttle valve 72 .

(4) Completion of fluid pressure adjustment in the pressure adjustment step The work of the operator changing the opening of the throttle valve 72 and listening to the sound of the speaker 99 to adjust the flow rate of the fluid to be supplied to the supply unit 70 is the same as that described above. The process is completed when the pressure of the fluid flowing through the pipe 71 matches the set pressure value P1. When the workpiece W is actually ground, the processing apparatus 1 adjusts the pressure from the supply unit 70, which is a grinding water injection nozzle, to the contact portion between the workpiece W and the machining tool 164 to an appropriate pressure. It will be in a state of being set so as to be able to supply the specified grinding water.

As described above, the pressure adjustment method according to the present invention allows the operator to hear the sound produced by the speaker 99 without looking at the pressure displayed on the screen of the touch panel 12 of the processing apparatus 1. By appropriately changing the opening of the pipe 71, the pressure of the fluid flowing through the pipe 71 can be adjusted to the set pressure. That is, the operator adjusts the opening of the throttle valve 72 for pressure adjustment, then moves to the front of the touch panel 12 to see the screen and grasps the pressure, and then moves again to adjust the opening of the throttle valve 72 . This eliminates the need for repetition and improves work efficiency.

The flow regulating method or pressure regulating method according to the present invention is not limited to this embodiment, nor is the configuration of the processing apparatus 1 illustrated in the accompanying drawings limited to this, and the present invention is not limited to this. It can be appropriately changed within the range where the effect of can be exhibited.

W: workpiece 1: processing device 10: device base 100: column 11: device housing 12: touch panel 150: first cassette mounting portion 150a: first cassette 151: second cassette mounting portion 151a: Second cassette 152: Temporary placement area 153: Positioning means 154a: Loading arm
154b: unloading arm 155: robot 156: washing means 156a: spinner table 156b: washing nozzle 30: holding means 300: holding surface 39: cover 39a: bellows cover 38: thickness measuring means 17: processing feeding means 16: processing means 160 : Rotating shaft 161: Housing 162: Motor 163: Mount 164: Processing tool 166: Grinding water supply pipe 7: Fluid supply means 70: Supply unit (grinding water injection nozzle) 71: Piping 72: Throttle valve
73: Flow sensor 74: Pressure sensor 79: Fluid supply source 9: Control means 90: Setting unit 91: Conducting unit 92: Detection value comparison monitoring unit 93: Range setting unit
98: Communication path 99: Speaker

Claims (4)

Holding means for holding a workpiece, machining means for mounting a machining tool to process the workpiece, fluid supply means for supplying a fluid to the workpiece or the machining tool, and control means for controlling the machining apparatus A flow rate adjustment method for adjusting the flow rate of the fluid supplied by the fluid supply means,
The fluid supply means includes a supply portion to which fluid is supplied, a pipe communicating between the supply portion and a fluid supply source, a throttle valve disposed in the pipe and configured to vary the flow rate of the fluid flowing through the pipe, a flow sensor that detects the flow rate of fluid flowing in the pipe between the supply unit and the throttle valve,
The control means includes a setting unit for setting a prescribed set flow rate value of the fluid, and a flow rate value detected by the flow sensor by changing the opening degree of the throttle valve with respect to the set flow rate value. an energization unit that energizes and causes the speaker to make a sound,
A flow rate adjusting method, comprising a flow rate adjusting step of changing the opening of the throttle valve and adjusting the flow rate of the fluid supplied to the supply unit by listening to the sound of the speaker. In the flow rate adjusting step, when the set flow rate value and the flow rate value detected by the flow rate sensor match, the energization unit causes the speaker to generate a sound under the control of the control means. 2. The flow rate adjustment method according to claim 1, further comprising a step of generating a flow rate matching sound. Holding means for holding a workpiece, machining means for mounting a machining tool to process the workpiece, fluid supply means for supplying a fluid to the workpiece or the machining tool, and control means for controlling the machining apparatus A pressure adjusting method for adjusting the supply pressure of the fluid supplied by the fluid supply means,
The fluid supply means includes a supply section to which the fluid is supplied, a pipe communicating between the supply section and the fluid supply source, a throttle valve provided in the pipe for varying the pressure of the fluid flowing in the pipe, a pressure sensor that detects the pressure in the pipe between the supply unit and the throttle valve,
The control means includes a setting unit for setting a prescribed set pressure value in the pipe, and a pressure value detected by the pressure sensor when the opening of the throttle valve is changed with respect to the set pressure value. an energization unit that energizes the speaker and causes the speaker to emit sound,
A pressure adjusting method comprising a pressure adjusting step of adjusting the pressure of the fluid supplied to the supply unit by changing the opening of the throttle valve and listening to the sound of the speaker. In the pressure adjustment step, when the set pressure value and the pressure value detected by the pressure sensor match, the energization unit causes the speaker to generate a sound under the control of the control means. 4. The method of adjusting pressure according to claim 3 , comprising a step of generating a pressure matching sound.

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