JP7336914B2 - processing equipment - Google Patents

Description

The present invention relates to a processing apparatus having a function of inspecting processing traces formed on a line to be divided.

A cutting device using a cutting blade and a laser processing device using a laser beam are used to divide various plate-shaped workpieces such as semiconductor wafers, ceramics, resin package substrates, SiC wafers, and sapphire wafers into individual chips. With these devices, after the operator puts the work piece into the device, the device takes an image of the work piece, automatically detects the position of the line to be divided by auto-alignment using the image recognition function, and starts processing. do. If there is no particular problem during processing, the processing ends. A so-called kerf check function is used to automatically check whether the machining marks (cutting grooves and laser processing marks) are within the line to be divided and whether there are no large chips during processing. (See Patent Document 1).

JP 2016-197702 A

If the apparatus recognizes, for example, that there is a chipping larger than a threshold value by the kerf check, it is judged to be rejected and an error occurs, and the operator is called with an error call. At this time, if a large chipping actually occurs, the operator follows a predetermined rule, for example, replaces the cutting blade, and processes the remaining lines to be divided. On the other hand, if a large chipping does not actually occur and, for example, a TEG (Test Element Group) on the street is erroneously recognized as a large chipping, the operator cancels the error call and continues processing. In any case, the processing apparatus stops due to the occurrence of an error, but if such a large chipping is erroneously recognized, an extremely useless apparatus stop occurs.

In recent years, there has also been a problem that there is an increasing need to collect data on the occurrence of errors due to kerf checks for the purpose of verifying and improving processing processes and disclosing them to device sales destinations.

The present invention has been made in view of such problems, and its object is to provide a processing apparatus capable of acquiring data that enables verification, improvement, and disclosure of the processing process regarding the occurrence of errors due to kerf checks. to provide.

In order to solve the above-described problems and achieve the object, the processing apparatus of the present invention includes a chuck table for holding a workpiece having a plurality of planned dividing lines; a processing unit that processes along a line to be divided, wherein the processing unit is formed from a camera that captures an image of the workpiece held on the chuck table; and an image that is captured by the line to be divided. An inspection unit that detects the processed traces and inspects the state of the processed traces with a predetermined inspection item, a recording unit that records the image taken by the camera, and a control unit that controls each component, The control unit causes the inspection unit to inspect the state of the processing marks at an arbitrary timing from the start of processing to the end of processing of one workpiece, and the inspection unit determines the state of the processing marks to be rejected. If it is determined as such, inspect the state of the processing marks on the scheduled dividing line that was processed before the scheduled dividing line with the processing marks determined to be disqualified, and check the inspection result and the image used in the inspection. When the position of the edge of the machining mark is shifted from a predetermined threshold value, when the width of the machining mark is too narrow, and when the chipping size is larger than the set threshold value, In the case of at least one or more, the state of the machining marks is determined to be unacceptable .

The control unit may inspect the scheduled division line processed before the scheduled division line having the inspected processing trace until the inspection unit determines that the state of the processing trace is acceptable. good.

The control unit inspects the processing marks at different positions on the same scheduled division line as the processing marks determined to be rejected, and the processing marks on the scheduled division line processed immediately before the unacceptable scheduled division line. However, if the inspection results of both machining traces are acceptable, machining by the machining unit may be continued.

The processing marks may be grooves cut by a cutting blade or laser processing marks by a laser beam.

The present invention can obtain data that allows verification, improvement, and disclosure of the machining process regarding the occurrence of errors due to kerf checks.

FIG. 1 is a perspective view showing a configuration example of a processing apparatus according to Embodiment 1. FIG. FIG. 2 is a diagram showing an example of a kerf check setting screen in the processing apparatus according to the first embodiment. FIG. 3 is a diagram showing an example of inspection items for a kerf check in the processing apparatus according to the first embodiment. FIG. 4 is a diagram showing an example of a kerf check inspection screen in the processing apparatus according to the first embodiment. FIG. 5 is a diagram showing another example of a kerf check inspection screen in the processing apparatus according to the first embodiment. FIG. 6 is a diagram showing another example of a kerf check inspection screen in the processing apparatus according to the first embodiment. 7 is a flowchart showing an example of the operation of the processing apparatus according to Embodiment 1. FIG. FIG. 8 is a top view showing an example of inspection points of the kerf check in the operation of FIG. FIG. 9 is a flow chart showing an example of the operation of the processing device according to the second embodiment. FIG. 10 is a top view showing an example of inspection points of the kerf check in the operation of FIG.

A form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
A processing apparatus 1 according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of a processing apparatus 1 according to Embodiment 1. FIG. The processing device 1 according to the first embodiment is a cutting device that cuts a workpiece 200 and performs a so-called kerf check on a cutting groove 300 (see FIG. 2), which is a machining mark formed by cutting. A mode of performing a kerf check on the cut groove 300 formed by cutting will be described below. In the present invention, the processing apparatus 1 is not limited to this, and irradiates the workpiece 200 with a laser beam to perform laser processing on the workpiece 200, and the laser processing trace that is the processing trace formed by the laser processing. Alternatively, a laser processing apparatus that performs a so-called kerf check may be used.

In Embodiment 1, the workpiece 200 to be cut by the processing apparatus 1 is, as shown in FIG. and optical device wafers. A workpiece 200 has devices 203 formed in regions partitioned by a plurality of planned division lines 202 formed in a grid pattern on a flat surface 201 . The workpiece 200 has an adhesive tape 205 adhered to the back surface 204 on the back side of the front surface 201 , and an annular frame 206 is attached to the outer edge of the adhesive tape 205 . In the present invention, the workpiece 200 is not limited to this, and may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

The processing apparatus 1 includes a chuck table 10, a processing unit 20 that performs cutting, a camera 30, an inspection section 40, a recording section 50, and a control unit 60, as shown in FIG. As shown in FIG. 1, the processing apparatus 1 is a so-called facing dual type cutting apparatus having two processing units 20, that is, a two-spindle dicer.

The processing apparatus 1 further includes an X-axis movement unit 71, a Y-axis movement unit 72, and a Z-axis movement unit 73, as shown in FIG. The X-axis movement unit 71 feeds the chuck table 10 relative to the processing unit 20 along the X-axis direction, which is one horizontal direction. The Y-axis moving unit 72 index-feeds the machining unit 20 relative to the chuck table 10 along the Y-axis direction, which is another horizontal direction and is orthogonal to the X-axis direction. The Z-axis moving unit 73 cuts and feeds the machining unit 20 relative to the chuck table 10 along the Z-axis direction perpendicular to both the X-axis direction and the Y-axis direction and parallel to the vertical direction.

The chuck table 10 holds a workpiece 200 having a plurality of planned division lines 202 . The chuck table 10 has a flat holding surface 11 for holding the workpiece 200 formed on the upper surface thereof, and has a disk-shaped suction portion made of porous ceramic or the like having a large number of porous holes. It has a disk shape with a frame that is fitted into and fixed to the recess of the body. The chuck table 10 is movable by the X-axis moving unit 71 and rotatable by a rotation drive source (not shown). The chuck table 10 has a suction portion connected to a vacuum suction source (not shown) through a vacuum suction path (not shown), and sucks and holds the workpiece 200 on the entire holding surface 11 . A plurality of clamping portions 12 for clamping the annular frame 206 are provided around the chuck table 10, as shown in FIG.

The machining unit 20 forms the cutting grooves 300 by machining the workpiece 200 held on the chuck table 10 along the dividing line 202 . The processing unit 20 includes a cutting blade 21, a spindle, and a spindle housing 22. The cutting blade 21 is rotated around the Y-axis to cut the workpiece 200 held on the chuck table 10 . The spindle is provided along the Y-axis direction and supports the cutting blade 21 at its tip so as to be rotatable around the Y-axis. The spindle housing 22 accommodates the spindle so as to be rotatable around the Y axis. The machining unit 20 has a spindle housing 22 movably provided in the Y-axis direction by a Y-axis movement unit 72 with respect to the workpiece 200 held on the chuck table 10 , and a Z-axis movement by the Z-axis movement unit 73 . It is provided movably in the axial direction.

Camera 30 photographs workpiece 200 held on chuck table 10 . The camera 30 is fixed to the processing unit 20 so as to move together with the processing unit 20 in the first embodiment. The camera 30 has an imaging element that captures the dividing lines 202 of the workpiece 200 before cutting held on the chuck table 10 and the cutting grooves 300 that are machining traces of the workpiece 200 after cutting. ing. The imaging device is, for example, a CCD (Charge-Coupled Device) imaging device or a CMOS (Complementary MOS) imaging device.

The camera 30 captures an image of the workpiece 200 before cutting held on the chuck table 10, and obtains an image for performing alignment for aligning the workpiece 200 and the cutting blade 21. The resulting image is output to the control unit 60 . In addition, the camera 30 takes an image of the workpiece 200 after cutting held on the chuck table 10 to check whether the cutting groove 300 is within the dividing line 202 and whether there is a large chipping or the like. is automatically checked, i.e., an image is obtained for performing a so-called kerf check, and the obtained image is output to the control unit 60 .

The inspection unit 40 is a functional unit that detects the cutting grooves 300, which are machining marks formed by the machining unit 20, from an image of the dividing line 202, and inspects the state of the cutting grooves 300, which are machining marks, using predetermined inspection items. is. The details of the predetermined inspection items inspected by the inspection unit 40 will be described later.

The recording unit 50 is a functional unit that records an image captured by the camera 30, specifically, an image for performing the above-described alignment or an image for performing a kerf check.

The control unit 60 controls each component of the processing apparatus 1 to cause the processing apparatus 1 to perform operations related to cutting and kerf checking on the workpiece 200 .

The inspection section 40, the recording section 50 and the control unit 60 include a computer system in the first embodiment. The inspection unit 40, the recording unit 50, and the control unit 60 have an arithmetic processing unit having a microprocessor such as a CPU (central processing unit), and a memory such as a ROM (read only memory) or a RAM (random access memory). It has a storage device and an input/output interface device. The arithmetic processing unit performs arithmetic processing according to a computer program stored in the storage device, and outputs control signals for controlling the processing device 1 to each component of the processing device 1 via the input/output interface device. do.

In addition, the arithmetic processing unit notifies based on the state of each operation related to cutting and kerf check, a display unit 61 configured by a liquid crystal display device or the like for displaying the state of each operation related to cutting and kerf check, images, etc. It is connected to a notification unit 62 composed of a light emitting diode (LED) or the like, and an input unit 63 used when an operator inputs and registers information about cutting and kerf check. The input unit 63 is composed of at least one of a touch panel provided on the display unit 61 and a keyboard or the like.

The inspection unit 40 is a functional unit realized by executing a computer program stored in a storage device by an arithmetic processing unit. The recording unit 50 is implemented by a storage device. The control unit 60 is implemented by an arithmetic processing device, a storage device, and an input/output interface device. The inspection unit 40, the recording unit 50, and the control unit 60 are realized based on an integrated computer system in the first embodiment, but the present invention is not limited to this. It may also be implemented based on an independent computer system.

Further, as shown in FIG. 1 , the processing apparatus 1 includes a cassette 80 that stores workpieces 200 before and after cutting, a temporary placement unit 82 that temporarily stores the workpieces 200 before and after accommodation of the cassette 80 , a cutting A cleaning unit 90 that cleans the workpiece 200 after machining, and a transport unit 85 that transports the workpiece 200 between the chuck table 10 , the cassette 80 , the temporary placement unit 82 and the cleaning unit 90 are further provided.

In the processing apparatus 1 , the transport unit 85 takes out one workpiece 200 from the cassette 80 and places it on the holding surface 11 of the chuck table 10 . The processing apparatus 1 suction-holds the workpiece 200 on the holding surface 11 of the chuck table 10, supplies cutting water to the workpiece 200 from the machining unit 20, and rotates the X-axis movement unit 71, the rotation drive source, and the Y axis. The chuck table 10 and the machining unit 20 are relatively moved along the dividing line 202 by the axis moving unit 72 and the Z-axis moving unit 73, and the machining unit 20 cuts the dividing line 202 of the workpiece 200. to form the cut groove 300 . After cutting all the dividing lines 202 of the workpiece 200 , the processing apparatus 1 cleans the workpiece 200 with the cleaning unit 90 and stores the workpiece 200 in the cassette 80 .

In the processing apparatus 1, the control unit 60 causes the inspection unit 40 to inspect the state of the cutting groove 300, which is a processing mark, at an arbitrary timing from the start of processing of one workpiece 200 to the end of processing, so-called kerf. Carry out checks. FIG. 2 is a diagram showing an example of a kerf check setting screen 100 in the processing apparatus 1 according to the first embodiment. FIG. 3 is a diagram showing an example of inspection items 110 of the kerf check in the processing apparatus 1 according to the first embodiment. FIG. 4 is a diagram showing an inspection screen 120, which is an example of an inspection screen for a kerf check in the processing apparatus 1 according to the first embodiment. FIG. 5 is a diagram showing an inspection screen 130, which is another example of an inspection screen for kerf check in the processing apparatus 1 according to the first embodiment. FIG. 6 is a diagram showing an inspection screen 140, which is another example of an inspection screen for a kerf check in the processing apparatus 1 according to the first embodiment. Details of the kerf check performed by the processing apparatus 1 according to the first embodiment will be described below with reference to FIGS. 2 to 6. FIG.

In the following, since the kerf check for the cutting groove 300 along the X-axis direction and the kerf check for the cutting groove 300 along the Y-axis direction are the same except for the direction of the cutting groove 300, the X-axis direction Only the detailed description along the Y-axis direction is omitted. Here, the cutting grooves 300 along the Y-axis direction formed by the machining conditions set in Ch2 are specifically the cutting grooves 300 along the X-axis direction formed by the machining conditions set in Ch1. is formed, the workpiece 200 is rotated together with the chuck table 10, and the planned division line 202 for which the machining conditions are set in Ch2 is made parallel to the X-axis direction, and then cutting is performed along the X-axis direction. A kerf check is also performed in the process of forming the cut groove 300 . Therefore, even when performing a kerf check on the cut groove 300 along the Y-axis direction, the cut groove 300 is displayed on the inspection screen as if it extends along the X-axis direction.

The kerf check setting screen 100 according to the first embodiment includes, as shown in FIG. A groove width 103 indicating the width 301 of the cutting groove 300 formed by each processing unit 20, and a deviation 303 of the center 302 in the width direction of the cutting groove 300 formed by each processing unit 20 from the center 202-2 in the width direction of the planned division line 202 and a chipping size 105 indicating the length 304 from the edge of the cutting groove 300 for chipping are set and registered. A kerf check setting screen 100 is displayed on the display unit 61 and is a user interface through which the control unit 60 receives settings and registration from the input unit 63 .

In the example shown in FIG. 2, in the frequency 101, Ch1 indicates the setting regarding the kerf check for the planned division line 202 along the X-axis direction, and Ch2 indicates the setting regarding the kerf check for the planned division line 202 along the Y-axis direction. is shown. The frequency 101 is expressed by the number of planned division lines 202, which indicates how many division lines 202 are to be kerf-checked. A larger number indicates a lower frequency of kerf checks.

Also, in the example shown in FIG. 2, the amount of light 102 indicates settings for incident light and incident light in the camera 30, respectively. The amount of light 102 is set to a condition in which the cut groove 300 is clearly visualized on the surface 201 of the workpiece 200 in the captured image.

Also, in the example shown in FIG. 2, the groove width 103, the cutting position deviation 104, and the chipping size 105 are the allowable conditions for kerf check. corresponds to the cutting conditions of the machining unit 20 of . The groove width 103 indicates the difference between both the maximum allowable width 301 of the cutting groove 300 and the minimum allowable width 301 of the cutting groove 300 and the thickness of the tip of the cutting blade 21 of each processing unit 20 .

Further, in the example shown in FIG. 2, the cutting position deviation 104 and the chipping size 105 are set to a small threshold (first threshold) that is a strict allowable condition, and a large threshold (second threshold) that is a loose allowable condition. , and each setting is shown.

Inspection items 110 of the kerf check performed by the processing apparatus 1 according to the first embodiment are set with four items from high importance to low importance, as shown in FIG. In the example shown in FIG. 3, the first item with the highest degree of importance is whether or not the position of the edge of the cutting groove 300 deviates from a predetermined threshold. It is whether the width 202-1 of the planned line 202 is exceeded and the device 203 is entered. In the kerf check according to the first embodiment, if the edge of the cut groove 300 enters the device 203, it is necessary to treat the device 203 as a defective product. It is preferable to treat whether or not there is a deviation as the first item with the highest degree of importance.

In the example shown in FIG. 3, the second item having the second highest degree of importance after the first item described above is whether or not the width 301 of the cutting groove 300 is too thin. It is whether or not the groove 300 is properly cut along the dividing line 202 . In the kerf check according to the first embodiment, if the cutting groove 300 having a sufficient width 301 cannot be properly cut along the dividing line 202, it can be determined that there is a problem with the cutting itself. It is preferable to treat whether or not the width 301 of the groove 300 is too thin as the second most important item after the first item.

In the example shown in FIG. 3, the third item, which has the second highest importance next to the first and second items, depends on whether the chipping size 105 is larger than the set threshold value. More specifically, it is whether or not chipping greater than the threshold value occurs during cutting. In the kerf check according to the first embodiment, if chipping larger than the threshold value occurs during cutting, it can be determined that there is a possibility that a problem has occurred in the cutting itself, so the chipping size 105 It is preferable to handle whether or not is greater than a set threshold value as the third item having the highest degree of importance next to the first and second items.

In the example shown in FIG. 3, the fourth item, which has the highest degree of importance next to the first, second, and third items described above, that is, has the lowest degree of importance, is whether the chipping size 105 is larger than the set threshold value. More specifically, it is whether or not chipping larger than the threshold value is generated during cutting. In the kerf check according to the first embodiment, when chipping larger than the threshold value is generated during cutting, it is not so much as when chipping larger than the threshold value is generated during cutting. , it can be determined that there is a possibility that a problem has occurred in the cutting process itself. It is preferable to handle it as the fourth item with a high degree of importance.

In the example shown in FIG. 3, the control unit 60 of the processing apparatus 1 sets, for example, a degree of importance that serves as a boundary between acceptance and rejection, and instructs the inspection unit 40 to select at least one of the items higher than the degree of importance. If one item is judged to be unacceptable, the evaluation result of the kerf check is judged to be unacceptable, all items with higher importance are judged to be acceptable, and only items with lower importance are judged to be unacceptable. If it does, the evaluation result of the kerf check may be accepted. In the kerf check according to the first embodiment, the control unit 60 of the processing apparatus 1 can set a high degree of importance for all items in response to a request from an operator or the like to set a stricter standard. It is also possible to set a loose standard by setting a low importance for a predetermined item. In the present invention, the control unit 60 of the processing apparatus 1 is not limited to the kerf check items and criteria described above, and can set various kerf check items and criteria.

As shown in FIG. 4, the inspection screen 120, which is an example of a kerf check inspection screen in the processing apparatus 1 according to the first embodiment, has the cutting groove 300 within the width 202-1 of the planned dividing line 202, and the cutting Since the position of the center 302 in the width direction of the groove 300 is not shifted by more than the threshold value, the width 301 of the cut groove 300 is not too thin, and no chipping occurs, the chipping size is naturally smaller than the large threshold value. It shows a state that is not large. Therefore, in the kerf check according to the first embodiment, the control unit 60 of the processing apparatus 1 causes the inspection unit 40 to display the inspection screen 120 shown in FIG. to produce acceptable inspection results regardless of the established standards.

As shown in FIG. 5, the inspection screen 130, which is another example of the inspection screen for the kerf check in the processing apparatus 1 according to the first embodiment, is such that the positions where the cutting grooves 300 are formed are shifted from the planned dividing line 202. The cut groove 300 exceeds the width 202-1 of the planned division line 202, and the position of the center 302 of the cut groove 300 in the width direction is shifted from the threshold. Also, the inspection screen 130 shows a state in which the width 301 of the cutting groove 300 is not too thin. Also, the inspection screen 130 shows a state in which chipping has occurred and the chipping size is larger than the small threshold but not larger than the large threshold. Therefore, in the kerf check according to the first embodiment, the control unit 60 of the processing apparatus 1 causes the inspection unit 40 to determine that the inspection screen 130 shown in FIG. , to determine that the second item and the third item are acceptable, and to produce a failure inspection result regardless of the set criteria.

As shown in FIG. 6, in an inspection screen 140, which is another example of an inspection screen for the kerf check in the processing apparatus 1 according to the first embodiment, the cutting groove 300 does not fall within the width 202-1 of the planned dividing line 202. However, the position of the center 302 in the width direction of the cut groove 300 is not shifted by more than the threshold value, the width 301 of the cut groove 300 is not too thin, and chipping larger than the threshold value occurs, and only the chipped portion is scheduled to be divided. It shows a state in which the width 202-1 of the line 202 has been exceeded. For this reason, in the kerf check according to the first embodiment, the control unit 60 of the processing apparatus 1 causes the inspection unit 40 to determine that the inspection screen 140 shown in FIG. The third and fourth items described above are judged to be unsatisfactory.

As a result, in the kerf check according to the first embodiment, the control unit 60 of the processing apparatus 1 displays the inspection screen 140 shown in FIG. let out On the other hand, in the kerf check according to the first embodiment, the control unit 60 of the processing apparatus 1 outputs the inspection screen 140 shown in FIG. In addition, it is determined that there is no problem with the cutting by the processing unit 20 itself, but only the device 203 in the portion where chipping exceeding the width 202-1 of the planned dividing line 202 has occurred becomes a defective product due to a sudden cause. determine that it has been reached.

The operation of the processing device 1 according to Embodiment 1 will be described below. FIG. 7 is a flow chart showing an example of the operation of the processing device 1 according to the first embodiment. FIG. 8 is a top view showing inspection points 401, 402, 403, 404, 405, and 406, which are examples of inspection points for the kerf check in the operation of FIG. In FIG. 8 , cutting is performed by the processing unit 20 in order from the planned division lines 202 on the lower side of the page, and the six planned division lines 202 from the bottom are cut grooves 300 along the planned division lines 202 . is formed.

First, as shown in FIG. 7, the control unit 60 of the processing apparatus 1 checks the state of the cutting groove 300, which is the trace of processing, at an arbitrary timing from the start of processing of one workpiece 200 to the end of processing. The inspection section 40 is caused to perform a so-called kerf check (step ST11).

In the first embodiment, in step ST11, the control unit 60 of the processing apparatus 1 causes the inspection section 40 to perform a kerf check at the inspection location 401. FIG. Specifically, in step ST11, first, the camera 30 of the processing apparatus 1 captures the cutting image held on the chuck table 10 under the condition of the light quantity 102 for which the control unit 60 has received input and setting via the input unit 63. A portion of the inspection point 401 on the workpiece 200 after processing is photographed to acquire an image for performing a kerf check at the inspection point 401 , and the acquired image is transmitted to the control unit 60 . In addition, the control unit 60 of the processing apparatus 1 detects each planned dividing line 202 on the workpiece 200 during alignment performed before cutting the workpiece 200 by the machining unit 20, and detects the position of each division line 202. are recognized by the coordinates, the imaging area of the camera 30 can be smoothly moved to the inspection point 401 on the planned dividing line 202 on the workpiece 200 based on this.

In step ST11, next, the control unit 60 causes the inspection section 40 to perform a predetermined image analysis on the image of the portion of the inspection location 401 captured by the camera 30, thereby performing cutting at the inspection location 401. The groove 300 is detected, and the width 202-1 and the center 202-2 in the width direction of the line to be divided 202, the edge of the cut groove 300 formed along the line to be divided 202, the width 301, the center 302 in the width direction, The deviation 303 of the widthwise center 302 from the widthwise center 202-2 and the length 304 from the edge of the chipping cutting groove 300 are derived.

In step ST11, next, the control unit 60 instructs the inspection unit 40 based on the above-described parameters and the like regarding the planned division line 202 and the cutting groove 300 at the inspection location 401 derived by the inspection unit 40, as shown in FIG. It is determined whether each of the inspection items 110 of the kerf check shown is pass or fail. In step ST11, the control unit 60 instructs the inspection unit 40 to determine the kerf of the cut groove 300 at the inspection location 401 based on the determination result for each of the kerf check inspection items 110 and the set kerf check standard. Determine whether the inspection result of the check is pass or fail.

The control unit 60 of the processing apparatus 1 determines the state of the machining marks at the inspection location 401, that is, when the inspection result of the kerf check of the cutting groove 300 at the inspection location 401 performed by the inspection unit 40 is acceptable (YES in step ST12). ), the machining unit 20 continues the cutting of the workpiece 200 (step ST13), and after displaying on the display unit 61 or notifying by the notification unit 62 that the inspection result of the kerf check is acceptable, it is executed. The flow of the kerf check according to form 1 ends. On the other hand, when the inspection result of the kerf check of the cut groove 300 at the inspection point 401 performed by the inspection unit 40 is unacceptable (NO in step ST12), the control unit 60 of the processing apparatus 1 causes the processing unit 20 to perform processing. The continuation of the cutting of the object 200 is once stopped (step ST14). Thereafter, the kerf check flow according to the first embodiment is advanced to step ST15. In addition, in the kerf check according to the first embodiment, the failure notification process of displaying on the display unit 61 and notifying by the notification unit 62 that the inspection result of the kerf check is unacceptable is performed in step ST14. It may be performed at the same timing as the kerf check, or may be performed after the flow of the kerf check according to the first embodiment is completed.

The control unit 60 of the processing apparatus 1 causes the inspection unit 40 to perform a kerf check immediately before stopping the cutting of the workpiece 200 by the processing unit 20, and the cutting groove 300, which is a processing mark that is determined to be unacceptable. The inspection unit 40 inspects the cut groove 300, which is the machining trace of the planned division line 202 machined before a certain planned division line 202 (step ST15). In the first step ST15, in the first embodiment, the control unit 60 of the processing apparatus 1 detects the planned division processed immediately before the planned division line 202 on which the inspection point 401 on which the kerf check was performed in step ST11 is set. It is preferable to cause the inspection unit 40 to inspect the cut groove 300 , which is the trace of machining at the inspection point 402 set on the line 202 . The details of the inspection of the cut groove 300 in the first step ST15 are the same as in step ST11 described above, except that the inspection points 401 and 402 are different.

In the first step ST15, in the first embodiment, the control unit 60 of the processing apparatus 1 causes the inspection section 40 to inspect the cutting groove 300, which is the machining trace at the inspection location 402, but the present invention is limited to this. Any of the other inspection points 403, 404, 405, and 406 set on the planned division line 202 processed before the planned division line 202 on which the inspection point 401 for which the kerf check was performed in step ST11 was set. The inspection unit 40 may inspect the cut groove 300, which is the trace of machining.

The control unit 60 of the processing apparatus 1 determines the state of the machining marks at the inspection location 402, that is, when the inspection result of the kerf check of the cut groove 300 at the inspection location 402 performed by the inspection unit 40 is acceptable (first step YES in ST16), the inspection results of all the kerf checks performed in steps ST11 and ST15 up to this point and the images used in the inspection are recorded in the recording unit 50 (step ST17), and the flow of the kerf check according to the first embodiment is performed. exit. On the other hand, the control unit 60 of the processing apparatus 1, when the inspection result of the kerf check of the cut groove 300 at the inspection location 402 performed by the inspection unit 40 is unacceptable (NO in the first step ST16), the control unit 60 of the first embodiment kerf check flow is returned to step ST15 again (second step ST15).

After that, the control unit 60 of the processing apparatus 1 repeats steps ST15 and ST16 until the inspection unit 40 determines that the state of the processing marks is acceptable, that is, the kerf check of the cutting grooves 300, which are processing marks, passes. Until the inspection result is obtained, the inspection is performed for the planned division line 202 machined before the planned division line 202 having the cut groove 300 which is the processed trace that has been inspected. Specifically, the control unit 60 of the processing apparatus 1 sequentially sends the inspected portions 403, 404, 405, and 406 to the inspected portions 403, 404, 405, and 406 in this order until the inspected portion 40 determines that the state of the traces of processing has passed. Have a kerf check performed. Then, the control unit 60 of the processing apparatus 1 checks the inspection results of all the kerf checks performed in step ST11 and step ST15 a plurality of times until the inspection unit 40 determines that the state of the processing marks is acceptable, and the images used in the inspection. is recorded in the recording unit 50 (step ST17), and information on the inspection points 401, 402, 403, 404, 405, and 406 that have undergone kerf checks until the inspection unit 40 determines that the state of the machining marks has passed is displayed on the display unit. 61, the flow of the kerf check according to the first embodiment ends.

Since the processing apparatus 1 according to the first embodiment has the configuration as described above, the control unit 60 can detect the state of the processing marks at an arbitrary timing from the start of processing of one workpiece 200 to the end of processing. is inspected by the inspection unit 40, and when the inspection unit 40 determines that the state of the machining marks (cutting grooves 300) is unacceptable, before the planned division line 202 having the machining marks (cutting grooves 300) that is judged to be unacceptable The state of the machining marks (cutting grooves 300) of the planned division line 202 that has been machined to 202 is inspected, and the inspection result and the image used in the inspection are recorded in the recording unit 50. FIG. For this reason, the processing apparatus 1 according to the first embodiment, regarding the occurrence of an error due to a so-called kerf check, in addition to the inspection result and the image used in the inspection at the time of the error occurrence, the inspection result and the inspection image before the error occurrence Data that enables so-called traceability, which enables verification, improvement, disclosure, etc. of each processing process related to cutting, because the images used in can be acquired and stored so that they can be referenced and analyzed later. is obtained. As a result, the processing apparatus 1 according to the first embodiment has the effect that it is possible to record the cutting work that can be inspected by the kerf check or the trouble occurrence situation in the kerf check without requiring the operator's trouble.

In addition, the processing apparatus 1 according to the first embodiment controls the control unit 60 until the inspection unit 40 determines that the state of the processing marks (cutting grooves 300) is acceptable. Inspection is performed on the line to be divided 202 processed before the line 202 . For this reason, the processing apparatus 1 according to the first embodiment traces the occurrence of an error due to a so-called kerf check back to the timing of an abnormal state in which an error due to a kerf check occurs, and stores the inspection result and the image used in the inspection later. Since it can be obtained and saved so that it can be referenced from, it is said that it is possible to automatically obtain information for investigating the cause of an abnormal state in which an error due to a kerf check occurs. It works and works. In addition, the processing apparatus 1 according to the first embodiment successively inspects the scheduled dividing line 202 before the scheduled dividing line 202 for which the kerf check failed until the kerf check passes. As a result, it is possible to obtain a measure of how far the workpiece 200 can be shipped as a product.

In addition, in the processing apparatus 1 according to the first embodiment, the control unit 60 can set the importance of the inspection item 110 of the kerf check and the importance that serves as a boundary between acceptance and rejection. For this reason, the processing apparatus 1 according to the first embodiment makes it possible to stop the cutting process one by one and verify the occurrence of an error due to the kerf check by setting a strict setting as necessary. By setting looseness, it is possible to suppress useless stoppage of cutting. In addition, in the processing apparatus 1 according to the first embodiment, the control unit 60 stops the cutting processing by the processing unit 20 in response to failure of the processing marks, that is, an error due to the kerf check. However, even if an error occurs due to the kerf check, cutting by the machining unit 20 is continued without being stopped at all, and only the recording unit 50 records the inspection result and the image used in the inspection regarding the error due to the kerf check. You can do it.

[Embodiment 2]
A processing apparatus 1 according to Embodiment 2 of the present invention will be described with reference to the drawings. FIG. 9 is a flow chart showing an example of the operation of the processing device 1 according to the second embodiment. FIG. 10 is a top view showing inspection points 411 and 412, which are examples of kerf check inspection points in the operation of FIG. In FIG. 10, similarly to FIG. 8, cutting is performed by the processing unit 20 in order from the planned division lines 202 on the lower side of the paper surface, and the six planned division lines 202 from the bottom are each the planned division lines 202. shows a state in which a cut groove 300 is formed along . In FIGS. 9 and 10, the same reference numerals are given to the same parts as those of the first embodiment, and the description thereof is omitted.

The processing apparatus 1 according to the second embodiment is different from the first embodiment in that the inspection points 402, 403, 404, 405, and 406 for the second and subsequent kerf checks are changed to inspection points 411 and 412, and the apparatus configuration is as follows. It is the same.

The operation of the processing apparatus 1 according to Embodiment 2 will be described below. First, as shown in FIG. 9, the control unit 60 of the processing apparatus 1 according to the second embodiment performs steps ST11 and ST12 similar to those in the first embodiment. Step ST13 of is carried out.

In the case of NO in step ST12, the control unit 60 of the processing apparatus 1 according to the second embodiment does not immediately carry out step ST14 as in the first embodiment, but checks the inspection location which is the processing mark determined to be unacceptable. The inspection unit 40 inspects the cut grooves 300, which are machining traces formed immediately before and after the cut grooves 300 of 401 (step ST21). Specifically, in step ST21, the control unit 60 of the processing apparatus 1 according to the second embodiment detects the cutting groove 300 at a different position on the same planned division line 202 as the cutting groove 300 at the inspection point 401, that is, in FIG. The inspection unit 40 inspects the cut grooves 300 at the inspection locations 411 and 412 shown. Here, the inspection location 411 is a location on the same planned division line 202 where the cutting groove 300 is formed by processing immediately before the inspection location 401, and the inspection location 412 is a location where the cutting groove is formed immediately after the inspection location 401. 300 is formed on the same planned division line 202 .

In the second embodiment, since the inspection point 401 is near the center of the planned dividing line 202, the inspection point 411 processed immediately before the inspection point 401 is also inspected immediately after the inspection point 401. The location 412 is also set on the same scheduled division line 202, but the present invention is not limited to this, and the location processed immediately before the inspection location 401 is set on the scheduled division line 202 on which the inspection location 401 is set. It may be set on the previous scheduled division line 202 processed immediately before, and the location processed immediately after the inspection location 401 is processed immediately after the scheduled division line 202 on which the inspection location 401 is set. It may be set on the next scheduled division line 202 .

The control unit 60 of the processing apparatus 1 according to the second embodiment determines that the inspection result of the kerf check of the cutting grooves 300 formed immediately before and after the cutting grooves 300 of the inspection portion 401 inspected by the inspection unit 40 in step ST21 is If both pass (YES in step ST22), the failure of the inspection result of the kerf check of the cut groove 300 at the inspection point 401 was caused by an accidental factor in the cutting process or the kerf check, or by misidentification. (step ST23), the cutting of the workpiece 200 by the machining unit 20 is continued (step ST13) in the same manner as in the case of YES in step ST12 described above, and the flow of the kerf check according to the second embodiment is performed. finish.

The control unit 60 of the processing apparatus 1 according to the second embodiment determines that the inspection result of the kerf check of the cutting grooves 300 formed immediately before and after the cutting grooves 300 of the inspection portion 401 inspected by the inspection unit 40 in step ST21 is If neither pass, that is, if at least one fails (NO in step ST22), the fact that the inspection result of the kerf check of the cut groove 300 at the inspection point 401 fails indicates that the cutting or Since it is considered that the kerf check was not caused by a sudden factor or by misidentification, cutting of the workpiece 200 by the machining unit 20 is stopped (step ST14), as in the case of NO in step ST12 in the first embodiment. ), the flow of the kerf check according to the second embodiment ends. Note that the control unit 60 of the processing apparatus 1 according to the second embodiment preferably executes the processing after step ST14 in the kerf check flow according to the first embodiment after step ST14.

Since the processing apparatus 1 according to the second embodiment has the configuration as described above, the control unit 60 can detect the processing trace (cutting groove 300) determined to be rejected and the processing trace ( The cutting groove 300) and the machining trace (cutting groove 300) of the planned dividing line 202 machined immediately before the rejected scheduled dividing line 202 are inspected. If so, the machining by the machining unit 20 is continued. For this reason, the processing apparatus 1 according to the second embodiment performs wasteful cutting when an error in the kerf check inspection result is considered to be due to a sudden factor in the cutting process or the kerf check or due to misidentification. It is possible to prevent the machining from being stopped. As a result, the processing apparatus 1 according to the second embodiment has the effect of being able to cope with sudden erroneous recognition in the kerf check without requiring the operator's trouble.

In addition, this invention is not limited to the said embodiment. That is, various modifications can be made without departing from the gist of the present invention.

1 processing device 10 chuck table 20 processing unit 30 camera 40 inspection unit 50 recording unit 60 control unit 200 workpiece 202 planned dividing line 300 cutting groove 401, 402, 403, 404, 405, 406, 411, 412 inspection point

Claims (4)

A processing apparatus comprising: a chuck table for holding a workpiece having a plurality of planned division lines; and a machining unit for processing the workpiece held on the chuck table along the planned division lines,
a camera for photographing the workpiece held on the chuck table;
an inspection unit that detects the processing marks formed by the processing unit from an image of the line to be divided and inspects the state of the processing marks with a predetermined inspection item;
a recording unit for recording images captured by the camera;
A control unit that controls each component,
The control unit causes the inspection unit to inspect the state of the processing marks at an arbitrary timing from the start of processing to the end of processing of one workpiece, and the inspection unit determines the state of the processing marks to be rejected. If it is determined as such, inspect the state of the processing marks on the scheduled dividing line that was processed before the scheduled dividing line with the processing marks determined to be disqualified, and check the inspection result and the image used in the inspection. Record in the recording unit ,
If the position of the edge of the machining mark deviates from a predetermined threshold value, if the width of the machining mark is too thin, or if the chipping size is larger than a set threshold value, at least one of , determine the state of the processing marks as unacceptable,
processing equipment. The control unit inspects the scheduled division line processed before the scheduled division line having the inspected processing trace until the inspection unit determines that the state of the processing trace is acceptable. 2. The processing apparatus according to 1. The control unit inspects the processing marks at different positions on the same scheduled division line as the processing marks determined to be rejected, and the processing marks on the scheduled division line processed immediately before the unacceptable scheduled division line. 3. The processing apparatus according to claim 1, wherein the processing by the processing unit is continued when the inspection results of both processing traces are acceptable. 4. The processing apparatus according to any one of claims 1 to 3, wherein the processing marks are grooves cut by a cutting blade or laser processing marks by a laser beam.

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