JP7332391B2 - 基板搬送装置および基板処理装置 - Google Patents

基板搬送装置および基板処理装置 Download PDF

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Publication number
JP7332391B2
JP7332391B2 JP2019153346A JP2019153346A JP7332391B2 JP 7332391 B2 JP7332391 B2 JP 7332391B2 JP 2019153346 A JP2019153346 A JP 2019153346A JP 2019153346 A JP2019153346 A JP 2019153346A JP 7332391 B2 JP7332391 B2 JP 7332391B2
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Prior art keywords
substrate
transport
roller
shaft
top roller
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JP2019153346A
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JP2021011383A (ja
JP2021011383A5 (enExample
Inventor
圭悟 大森
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority to CN201910892149.8A priority Critical patent/CN110970337A/zh
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Publication of JP2021011383A5 publication Critical patent/JP2021011383A5/ja
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2019153346A 2018-09-28 2019-08-26 基板搬送装置および基板処理装置 Active JP7332391B2 (ja)

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CN201910892149.8A CN110970337A (zh) 2018-09-28 2019-09-20 基板输送装置以及基板处理装置

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2018185327 2018-09-28
JP2018185327 2018-09-28
JP2019115089 2019-06-21
JP2019115089 2019-06-21
JP2019133261 2019-07-19
JP2019133261 2019-07-19

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JP2021011383A JP2021011383A (ja) 2021-02-04
JP2021011383A5 JP2021011383A5 (enExample) 2022-05-17
JP7332391B2 true JP7332391B2 (ja) 2023-08-23

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113148657B (zh) * 2021-05-08 2023-07-04 深圳市华星光电半导体显示技术有限公司 一种基板传送装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002009041A (ja) 2000-06-23 2002-01-11 Nec Kagoshima Ltd ウェット処理装置
JP2003051529A (ja) 2001-05-30 2003-02-21 Tokyo Electron Ltd 搬送装置
JP2006306596A (ja) 2005-04-28 2006-11-09 Shibaura Mechatronics Corp 基板の搬送装置
KR100672964B1 (ko) 2005-08-22 2007-01-22 주식회사 케이씨텍 대면적 기판 이송장치
KR101131181B1 (ko) 2009-02-24 2012-03-28 (유)에스엔티 기판이송장치
US20180105367A1 (en) 2016-10-19 2018-04-19 Boe Technology Group Co., Ltd. Roller train and substrate conveying device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6381075U (enExample) * 1986-11-15 1988-05-28

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002009041A (ja) 2000-06-23 2002-01-11 Nec Kagoshima Ltd ウェット処理装置
JP2003051529A (ja) 2001-05-30 2003-02-21 Tokyo Electron Ltd 搬送装置
JP2006306596A (ja) 2005-04-28 2006-11-09 Shibaura Mechatronics Corp 基板の搬送装置
KR100672964B1 (ko) 2005-08-22 2007-01-22 주식회사 케이씨텍 대면적 기판 이송장치
KR101131181B1 (ko) 2009-02-24 2012-03-28 (유)에스엔티 기판이송장치
US20180105367A1 (en) 2016-10-19 2018-04-19 Boe Technology Group Co., Ltd. Roller train and substrate conveying device

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