JP7310761B2 - 超音波デバイス - Google Patents
超音波デバイス Download PDFInfo
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- JP7310761B2 JP7310761B2 JP2020146109A JP2020146109A JP7310761B2 JP 7310761 B2 JP7310761 B2 JP 7310761B2 JP 2020146109 A JP2020146109 A JP 2020146109A JP 2020146109 A JP2020146109 A JP 2020146109A JP 7310761 B2 JP7310761 B2 JP 7310761B2
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- Prior art keywords
- piezoelectric element
- sound absorbing
- absorbing material
- main surface
- ultrasonic device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000002604 ultrasonography Methods 0.000 title claims description 7
- 239000011358 absorbing material Substances 0.000 claims description 129
- 239000000758 substrate Substances 0.000 claims description 47
- 239000000463 material Substances 0.000 claims description 39
- 238000013016 damping Methods 0.000 claims description 21
- 230000004308 accommodation Effects 0.000 claims description 11
- 239000006260 foam Substances 0.000 claims description 4
- 210000004027 cell Anatomy 0.000 description 20
- 230000000694 effects Effects 0.000 description 16
- 239000004020 conductor Substances 0.000 description 14
- 229920005989 resin Polymers 0.000 description 14
- 239000011347 resin Substances 0.000 description 14
- 238000012986 modification Methods 0.000 description 11
- 230000004048 modification Effects 0.000 description 11
- 238000007747 plating Methods 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910001369 Brass Inorganic materials 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000010951 brass Substances 0.000 description 4
- 239000012943 hotmelt Substances 0.000 description 4
- 229910000881 Cu alloy Inorganic materials 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229920002943 EPDM rubber Polymers 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 230000004323 axial length Effects 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 2
- 229920001707 polybutylene terephthalate Polymers 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 229920005992 thermoplastic resin Polymers 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000737 Duralumin Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910020276 Pb(Zr,Ti) O3 Inorganic materials 0.000 description 1
- 229910003781 PbTiO3 Inorganic materials 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 210000003850 cellular structure Anatomy 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- -1 polybutylene terephthalate Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
- B06B1/0681—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a damping structure
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/16—Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/162—Selection of materials
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
Claims (11)
- 収容空間を画成するケースと、
前記収容空間内に配置されている圧電素子と、
前記圧電素子の主面上に配置され、発泡体からなる吸音材と、
前記吸音材の周囲に配置されている防振材と、を備え、
前記吸音材は、前記主面と対向している第1対向面を有し、
前記第1対向面は、凸部及び凹部が交互に連続する凹凸形状を呈し、前記主面よりも粗い、
超音波デバイス。 - 前記第1対向面における前記凸部及び前記凹部の表面には、複数の窪みが設けられている、
請求項1に記載の超音波デバイス。 - 前記圧電素子と前記第1対向面との間には、第1空間が形成されている、
請求項1又は2に記載の超音波デバイス。 - 前記収容空間内に前記吸音材を挟んで前記圧電素子と対向して配置されており、前記圧電素子と電気的に接続されている基板を更に備え、
前記吸音材は、前記基板と対向している第2対向面を有し、
前記第2対向面は、凸部及び凹部が交互に連続する凹凸形状を呈し、前記主面よりも粗い、
請求項1~3のいずれか一項に記載の超音波デバイス。 - 前記第2対向面における前記凸部及び前記凹部の表面には、複数の窪みが設けられている、
請求項4に記載の超音波デバイス。 - 前記基板と前記第2対向面との間には、第2空間が形成されている、
請求項4又は5に記載の超音波デバイス。 - 前記第1対向面は、前記第2対向面よりも粗い、
請求項4~6のいずれか一項に記載の超音波デバイス。 - 前記主面上に配置された制振材を更に備え、
前記吸音材は、前記第1対向面における前記凸部が前記制振材と接するように配置されている、
請求項1~7のいずれか一項に記載の超音波デバイス。 - 前記圧電素子の厚さ方向から見て、前記圧電素子は、前記吸音材の外縁の内側に位置している、
請求項1~8のいずれか一項に記載の超音波デバイス。 - 前記圧電素子の厚さ方向において、前記吸音材は、前記防振材よりも前記圧電素子側に突出している、
請求項1~9のいずれか一項に記載の超音波デバイス。 - 前記圧電素子の厚さ方向から見て、前記第1対向面は、前記圧電素子の外側に位置している第1領域と、前記第1領域の内側に位置している第2領域と、を有し、
前記第2領域は、前記第1領域よりも粗い、
請求項1~10のいずれか一項に記載の超音波デバイス。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020146109A JP7310761B2 (ja) | 2020-08-31 | 2020-08-31 | 超音波デバイス |
US17/459,579 US20220062950A1 (en) | 2020-08-31 | 2021-08-27 | Ultrasonic device |
CN202111001551.6A CN114120947A (zh) | 2020-08-31 | 2021-08-30 | 超声波器件 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020146109A JP7310761B2 (ja) | 2020-08-31 | 2020-08-31 | 超音波デバイス |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022041084A JP2022041084A (ja) | 2022-03-11 |
JP7310761B2 true JP7310761B2 (ja) | 2023-07-19 |
Family
ID=80357955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020146109A Active JP7310761B2 (ja) | 2020-08-31 | 2020-08-31 | 超音波デバイス |
Country Status (3)
Country | Link |
---|---|
US (1) | US20220062950A1 (ja) |
JP (1) | JP7310761B2 (ja) |
CN (1) | CN114120947A (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050075571A1 (en) | 2003-09-18 | 2005-04-07 | Siemens Medical Solutions Usa, Inc. | Sound absorption backings for ultrasound transducers |
JP2011030062A (ja) | 2009-07-28 | 2011-02-10 | Toshiba Corp | 超音波プローブ |
JP2012010312A (ja) | 2010-05-28 | 2012-01-12 | Murata Mfg Co Ltd | 超音波センサ |
JP2012060369A (ja) | 2010-09-08 | 2012-03-22 | Murata Mfg Co Ltd | 超音波トランスジューサ |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3423428B2 (ja) * | 1994-08-11 | 2003-07-07 | 日立建機株式会社 | 超音波探触子及びその製造方法 |
-
2020
- 2020-08-31 JP JP2020146109A patent/JP7310761B2/ja active Active
-
2021
- 2021-08-27 US US17/459,579 patent/US20220062950A1/en active Pending
- 2021-08-30 CN CN202111001551.6A patent/CN114120947A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050075571A1 (en) | 2003-09-18 | 2005-04-07 | Siemens Medical Solutions Usa, Inc. | Sound absorption backings for ultrasound transducers |
JP2011030062A (ja) | 2009-07-28 | 2011-02-10 | Toshiba Corp | 超音波プローブ |
JP2012010312A (ja) | 2010-05-28 | 2012-01-12 | Murata Mfg Co Ltd | 超音波センサ |
JP2012060369A (ja) | 2010-09-08 | 2012-03-22 | Murata Mfg Co Ltd | 超音波トランスジューサ |
Also Published As
Publication number | Publication date |
---|---|
JP2022041084A (ja) | 2022-03-11 |
CN114120947A (zh) | 2022-03-01 |
US20220062950A1 (en) | 2022-03-03 |
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