JP7297568B2 - レーザ加工方法 - Google Patents

レーザ加工方法 Download PDF

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Publication number
JP7297568B2
JP7297568B2 JP2019127138A JP2019127138A JP7297568B2 JP 7297568 B2 JP7297568 B2 JP 7297568B2 JP 2019127138 A JP2019127138 A JP 2019127138A JP 2019127138 A JP2019127138 A JP 2019127138A JP 7297568 B2 JP7297568 B2 JP 7297568B2
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JP
Japan
Prior art keywords
laser
hole
protective layer
metal layer
processing method
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Active
Application number
JP2019127138A
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English (en)
Japanese (ja)
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JP2021010932A5 (enExample
JP2021010932A (ja
Inventor
真之 呉屋
実 団野
聖 形部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
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Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP2019127138A priority Critical patent/JP7297568B2/ja
Priority to CA3071748A priority patent/CA3071748A1/en
Priority to EP20156312.9A priority patent/EP3763471A1/en
Priority to US16/786,071 priority patent/US20210008668A1/en
Priority to CN202010086674.3A priority patent/CN112192054A/zh
Publication of JP2021010932A publication Critical patent/JP2021010932A/ja
Publication of JP2021010932A5 publication Critical patent/JP2021010932A5/ja
Application granted granted Critical
Publication of JP7297568B2 publication Critical patent/JP7297568B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/001—Turbines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/18—Sheet panels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/34—Coated articles, e.g. plated or painted; Surface treated articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/16—Composite materials, e.g. fibre reinforced
    • B23K2103/166—Multilayered materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
JP2019127138A 2019-07-08 2019-07-08 レーザ加工方法 Active JP7297568B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2019127138A JP7297568B2 (ja) 2019-07-08 2019-07-08 レーザ加工方法
CA3071748A CA3071748A1 (en) 2019-07-08 2020-02-07 Laser processing method
EP20156312.9A EP3763471A1 (en) 2019-07-08 2020-02-10 Laser processing method
US16/786,071 US20210008668A1 (en) 2019-07-08 2020-02-10 Laser processing method
CN202010086674.3A CN112192054A (zh) 2019-07-08 2020-02-11 激光加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019127138A JP7297568B2 (ja) 2019-07-08 2019-07-08 レーザ加工方法

Publications (3)

Publication Number Publication Date
JP2021010932A JP2021010932A (ja) 2021-02-04
JP2021010932A5 JP2021010932A5 (enExample) 2022-06-28
JP7297568B2 true JP7297568B2 (ja) 2023-06-26

Family

ID=69528691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019127138A Active JP7297568B2 (ja) 2019-07-08 2019-07-08 レーザ加工方法

Country Status (5)

Country Link
US (1) US20210008668A1 (enExample)
EP (1) EP3763471A1 (enExample)
JP (1) JP7297568B2 (enExample)
CN (1) CN112192054A (enExample)
CA (1) CA3071748A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11235359B2 (en) * 2019-02-11 2022-02-01 The Boeing Company Robotic laser and vacuum cleaning for environmental gains
JP7252306B1 (ja) * 2021-12-21 2023-04-04 住友金属鉱山株式会社 金属ロールの製造方法
US20240391028A1 (en) * 2023-05-24 2024-11-28 General Electric Company Method and apparatus for ablating holes in an article
US20240391027A1 (en) * 2023-05-24 2024-11-28 General Electric Company Method and apparatus for ablating holes in an article
US20240399508A1 (en) * 2023-06-05 2024-12-05 Rohr, Inc. System and method for laser perforating an acoustic panel skin
CN119703343A (zh) * 2025-02-18 2025-03-28 天门市金兴达汽车零部件有限公司 一种用于汽车零件激光切割用工装夹具

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216808A (en) 1990-11-13 1993-06-08 General Electric Company Method for making or repairing a gas turbine engine component
EP0826457A1 (en) 1996-08-14 1998-03-04 ROLLS-ROYCE plc A method of drilling a hole in a workpiece
JP2017225994A (ja) 2016-06-22 2017-12-28 三菱重工業株式会社 レーザ加工装置およびレーザ加工方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5908009B2 (ja) * 2013-08-20 2016-04-26 三菱重工業株式会社 レーザ加工方法及びレーザ加工装置
WO2015072259A1 (ja) * 2013-11-14 2015-05-21 三菱電機株式会社 レーザ加工方法およびレーザ加工装置
CN106312333A (zh) * 2016-10-09 2017-01-11 中国航空工业集团公司北京航空制造工程研究所 一种激光加工孔的方法以及系统
DE102016220251A1 (de) * 2016-10-17 2018-04-19 Siemens Aktiengesellschaft Dreistufiger Prozess zur Kühlluftbohrerzeugung mittels Nanosekunden- und Millisekundenlaser und Bauteil
JP2019127138A (ja) 2018-01-24 2019-08-01 トヨタ自動車株式会社 車両用表示装置及び車両

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216808A (en) 1990-11-13 1993-06-08 General Electric Company Method for making or repairing a gas turbine engine component
EP0826457A1 (en) 1996-08-14 1998-03-04 ROLLS-ROYCE plc A method of drilling a hole in a workpiece
JP2017225994A (ja) 2016-06-22 2017-12-28 三菱重工業株式会社 レーザ加工装置およびレーザ加工方法

Also Published As

Publication number Publication date
CN112192054A (zh) 2021-01-08
US20210008668A1 (en) 2021-01-14
JP2021010932A (ja) 2021-02-04
CA3071748A1 (en) 2021-01-08
EP3763471A1 (en) 2021-01-13

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