JP7292889B2 - Peeling device and peeling method - Google Patents

Description

The present invention relates to a peeling device and a peeling method.

2. Description of the Related Art Conventionally, there has been known a peeling device for peeling a resin film or the like attached to a work such as a substrate.
As such a peeling device, for example, a technique is used in which a film is adhered to an adhesive tape, and the film is peeled from the work by reversing the film from the end portion with respect to the conveying direction of the work.
A technique related to the peeling device is described in Patent Literature 1, for example.

JP 2018-150146 A

However, when a film is adhered to an adhesive tape and the film is peeled off from a work, an inappropriate force may act on the work depending on the direction in which the film is peeled from the sticking surface of the work. In addition, when peeling the film from multiple workpieces continuously, the consumption of the adhesive tape that adheres the film may increase, and the amount of peeled film will also be large. Processing is also an issue. Furthermore, depending on the method of continuously peeling the film from a plurality of works, the apparatus may become large and complicated.
That is, there is room for improvement in the function of the conventional peeling device for peeling the film from the work.

SUMMARY OF THE INVENTION An object of the present invention is to improve the function of a peeling device for peeling a film from a work.

In order to solve the above problems, a peeling device according to an embodiment of the present invention includes:
a stage on which the work to which the film is attached is placed;
Adhesive member supply means for supplying a continuous body of adhesive members to be adhered to the film;
Adhesive means for adhering the adhesive member to one end of the film attached to the work;
stage moving means for moving the stage in a direction along the surface of the work to which the film is attached;
The film in which the one end is adhered to the adhesive member and is peeled off, the adhesive surface of the film being peeled first and held by the adhesive member, and at least the adhesive member A release film processing means for processing so as to stick to either;
characterized by comprising

ADVANTAGE OF THE INVENTION According to this invention, the function of the peeling apparatus which peels a film from a workpiece|work can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the structure of the peeling apparatus 1 whole which concerns on this invention. 6 is a schematic diagram showing the configuration of a supply roller 60. FIG. 3 is a schematic diagram showing the configuration of a take-up roller 70. FIG. 3 is a block diagram showing a functional configuration formed in a control unit 80; FIG. 4 is a flow chart showing the operation of the peeling device 1; It is a schematic diagram which shows the state of the peeling apparatus 1 in a workpiece|work installation process. FIG. 4 is a schematic diagram showing the state of the peeling device 1 in the peeling preparation step. It is a schematic diagram which shows the state of the peeling apparatus 1 in a tape adhesion process. It is a schematic diagram which shows the state of the peeling apparatus 1 in a film peeling process. It is a schematic diagram which shows the state of the peeling apparatus 1 in a pressing process. FIG. 4 is a schematic diagram showing the state of the peeling device 1 in the work removing process; 2 is a schematic diagram showing a state of a film 110 accommodated in a tape 200; FIG. 3 is a schematic diagram showing another configuration example of the peeling device 1. FIG.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[composition]
FIG. 1 is a schematic diagram showing the configuration of the entire peeling device 1 according to the present invention.
The peeling device 1 is a device for peeling off a film 110 attached to a work 100 . One end of the film 110 is adhered to an adhesive tape 200 (a continuous body of adhesive members), and the film 110 is peeled off by reciprocating motion of the work 100 . is peeled off.
In addition, the peeling device 1 utilizes the adhesiveness of the peeled film 110 to adhere the film 110 peeled by the tape 200 to the previously peeled film 110, so that the film 110 is integrated with the tape 200 to be wound. The film 110 after peeling is accommodated.
In the following description, the member referred to as the film 110 includes various items attached to the workpiece 100, including attached materials referred to as films, stickers, sheets, webs, and the like.

As shown in FIG. 1, the peeling apparatus 1 includes a stage 10, a guide rail 20, a moving base 30, a handling section 40, an adhesive processing section 50, a supply roller 60, a winding roller 70, a control a portion 80;

The stage 10 accommodates a work 100 (such as a substrate on which an electronic circuit is formed) to which a film 110 is attached, and holds the work 100 when the film 110 is peeled off. When holding the work 100, means such as suction from the back surface of the work 100, support from the side of the work 100, or support by fitting can be used. The shape of the workpiece 100 in this embodiment can be various shapes such as a circle or a square.

Further, the stage 10 is provided with a fixing claw 11 to prevent the edge of the workpiece 100 from being lifted up by a peeling force when the film 110 is peeled off. The claw 11 is provided with an electric lock mechanism or the like, so that the workpiece 100 is released when the workpiece 100 is removed from the stage 10 .
Further, the stage 10 is installed on the upper surface of the movable base 30 and moves along the guide rails 20 integrally with the movable base 30 .

The guide rail 20 engages and supports an engaging portion having a bearing or the like of the movable base 30 and guides the movable base 30 in a direction along the guide rail 20 .
The movable base 30 is moved along the guide rails 20 by a built-in actuator or an externally installed actuator. Movement of the movable base 30 is controlled by the controller 80 .

Further, the movable base 30 includes a pressing roller 31 , a support portion 32 and an elevating portion 33 .
The pressure roller 31 is vertically moved by the lifting unit 33, and the upward movement moves the peeled film 110 to the downstream side of the tape 200 (downstream side of the winding from the portion adhered to one end of the film 110). press to. At this time, the pressure roller 31 presses the non-adhesive surface of the film 110 (the surface not adhered to the workpiece 100 ) to bring the adhesive surface of the film 110 into contact with the downstream side of the tape 200 . As a result, the peeled film 110 can be accommodated on the downstream side of the tape 200 using its adhesive surface.

The support portion 32 rotatably supports the pressing roller 31 and is vertically moved by the elevating portion 33 .
The elevating section 33 has an expansion mechanism such as an air cylinder, and moves the pressing roller 31 and the support section 32 in the vertical direction. The elevating operation of the elevating unit 33 is controlled by the control unit 80 .
By sucking the work 100 , the handling unit 40 places the work 100 with the film 110 attached on the stage 10 or removes the work 100 with the film 110 peeled off from the stage 10 .
A film detection unit 41 for detecting whether or not the film 110 is stuck to the workpiece 100 is installed in the handling unit 40 .

The film detection unit 41 is composed of a color sensor, a length measuring machine, or the like. For example, when the film detection unit 41 is configured by a color sensor, the color of the work 100 is stored in advance, and whether or not the film 110 is attached to the work 100 is detected based on the color matching rate on the surface of the work 100. can. In addition, when the film detection unit 41 is configured by a length measuring device, a laser range finder can be used as the length measuring device. can be detected whether or not is attached. Furthermore, when the film detection unit 41 is configured by a length measuring machine, a contact sensor can be used as the length measuring machine. It can be detected whether or not the film 110 is attached to 100 .
The film detection unit 41 confirms that the film 110 is attached to the workpiece 100 placed on the stage 10 to be peeled off, and confirms whether the film 110 is attached to the workpiece 100 whose peeling has been completed. You can check that it is not.

The adhesive processing section 50 causes the tape 200 supplied from the supply roller 60 to adhere to one end of the film 110 attached to the work 100 .
Specifically, the adhesive processing section 50 includes a compression roller 51 , a support section 52 , and an elevating section 53 .
The pressure roller 51 is wound with the tape 200 supplied from the supply roller 60 and wound on the take-up roller 70 . Note that the roller surface of the pressure roller 51 is in contact with the non-adhesive surface of the tape 200 . The pressing roller 51 is vertically moved by the elevating unit 53 to bring the adhesive surface of the tape 200 into contact with the surface of the workpiece 100 to which the film 110 is attached (that is, the film 110) at the lower end position. This causes tape 200 to stick to one area of film 110 .

The support portion 52 rotatably supports the pressure roller 51 and is vertically moved by the elevating portion 53 .
The elevating section 53 has an expansion mechanism such as an air cylinder, and moves the pressing roller 51 and the supporting section 52 in the vertical direction. The elevating operation of the elevating unit 53 is controlled by the control unit 80 .
The supply roller 60 is driven by the tension of the tape 200 to feed the tape 200 .

FIG. 2 is a schematic diagram showing the structure of the supply roller 60. As shown in FIG.
As shown in FIG. 2, the supply roller 60 has a clutch 61 connected to a rotating shaft. The clutch 61 has one end connected to the rotating shaft of the supply roller 60 and the other end fixed.
The fastening force of the clutch 61 is controlled by the control unit 80, and adjusted so that the tension set in the tape 200 is generated when the tape 200 is fed. Also, when the tape 200 is not fed (eg, when the tape 200 is adhered to the film 110 ), the clutch 61 reduces the torque required for rotating the supply roller 60 to relieve the tension of the tape 200 . In addition, the clutch 61 can be configured by a clutch whose fastening force can be adjusted to an arbitrary value, a clutch whose fastening state is turned ON/OFF, or the like.

The take-up roller 70 is rotated about its rotating shaft by an actuator, and takes up the tape 200 delivered from the supply roller 60 together with the peeled film 110 . In addition, the take-up roller 70 is offset from the pressure roller 51 toward the handling unit 40 (the position where the workpiece 100 is placed), and the tape 200 is located downstream of the pressure roller 51 . is inclined in the direction facing the work 100. As shown in FIG. That is, when the pressure roller 31 is raised in a predetermined direction (for example, vertically upward), the film 110 is pushed up from the non-adhesive side of the film 110 , and the adhesive side of the film 110 is pressed against the tape 200 .
As a result, the peeled film 110 can be held by the tape 200 with a simple operation.

FIG. 3 is a schematic diagram showing the configuration of the take-up roller 70. As shown in FIG.
As shown in FIG. 3 , the take-up roller 70 includes an actuator 71 that drives a rotating shaft, and a clutch 72 connected between the actuator 71 and the take-up roller 70 .
The actuator 71 is controlled by the controller 80 to rotate the output shaft at a set speed.

The clutch 72 has one end connected to the output shaft of the actuator 71 and the other end connected to the rotation shaft of the take-up roller 70 . Also, the clutch 72 is controlled by the control unit 80 , and when feeding the tape 200 , the torque for winding the tape 200 with constant tension is transmitted from the actuator 71 to the winding roller 70 .

Returning to FIG. 1, the control unit 80 is configured by a device having a control function such as a PLC (Programmable Logic Controller) or a PC (Personal Computer), and controls the operation of the peeling apparatus 1 as a whole. For example, the control unit 80 moves the movable base 30 along the guide rails 20, controls the lifting operation of the lifting unit 33 and the lifting unit 53, and controls the rotation of the supply roller 60 and the winding roller 70. or

FIG. 4 is a block diagram showing a functional configuration formed in the control section 80. As shown in FIG.
When the control unit 80 executes a program for controlling the peeling device 1, the functional configuration includes a movement control unit 81, a pressure roller elevation control unit 82, a pressure roller elevation control unit 83, and a supply roller control unit. 84, a take-up roller control section 85, and a handling control section 86 are formed.
The movement control unit 81 moves the movable base 30 to a predetermined position according to the peeling process of the film 110 in the peeling device 1 .
For example, in the process of setting the work 100 on the stage 10 and the process of removing the work 100 from the stage 10, the movement control unit 81 moves the movement base 30 to the work positioned at one end side of the guide rail 20 (the right end side in FIG. 1). Move to installation position P1 and stop.

Further, in the step of adhering the tape 200 to one end of the film 110 attached to the workpiece 100, the movement control unit 81 moves the movement base 30 to the other end of the guide rail 20 (the left end in FIG. 1). Move to sticking position P2 and stop.
Further, in the step of peeling the film 110 from the workpiece 100, the movement control unit 81 moves the movable base 30 from the tape adhesion position P2 to the workpiece setting position P1 at a set speed (speed suitable for peeling the film 110). and stop at a roller pressing position P3 where the film 110 adheres to the other end of the work 100 by a predetermined amount. At this time, the amount of the film 110 to be adhered to the other end of the work 100 (amount left unpeeled) is such that the film 110 is kept in a state of being stretched between the tape 200 (pressure roller 51) and the work 100. selected for However, the film 110 does not have to be stretched between the tape 200 (pressure roller 51 ) and the workpiece 100 , and it is sufficient if the pressure roller 31 can press the peeled film 110 against the tape 200 .

After stopping the movable base 30 at the roller pressing position P3, the movement control unit 81 waits for completion of the process of pressing the film 110 toward the downstream side of the tape 200 by the pressing roller 31, and then moves to the workpiece installation position P1. Let At this time, the film 110 is stuck to the other end of the work 100 by a predetermined amount (a state of being stretched between the tape 200 and the work 100), and the pressure roller 31 presses the film 110 in this state. By pushing upward, the film 110 can be easily handled from the non-adhesive side.
When the movement control unit 81 stops the movable base 30 at the tape adhesion position P<b>2 , the pressure roller elevation control unit 82 lowers the pressure roller 51 by the elevation unit 53 so that the tape 200 is placed on the surface of the workpiece 100 . It is made to stick to the attached film 110 . Then, when the film 110 adheres to the tape 200 , the pressure roller elevation control section 82 raises the pressure roller 51 to the set height by the elevation section 53 .

When the movement control unit 81 stops the movable base 30 at the roller pressing position P3, the pressure roller elevation control unit 83 raises the pressure roller 31 by the elevation unit 33 to lift the film 110 from the non-adhesive surface side. Pushing (ie, pushing up) forces the sticky side of the film 110 to the downstream side of the tape 200 .
When feeding the tape 200 , the supply roller control unit 84 adjusts the fastening force of the clutch 61 so that the tension set in the tape 200 is generated. Further, when the tape 200 is not fed (when the tape 200 is adhered to the film 110, etc.), the supply roller control unit 84 engages the clutch 61 so that the torque required for rotating the take-up roller 70 is reduced. generate power.

The take-up roller control section 85 rotates the output shaft of the actuator 71 at the set speed. Further, when the tape 200 is fed, the winding roller control unit 85 controls the fastening force of the clutch 72 so that the torque for winding the tape 200 with a constant tension is transmitted from the actuator 71 to the winding roller 70 . generate
When the movement control unit 81 stops the movable base 30 at the work installation position P1, the handling control unit 86 controls the handling unit 40 to install the work 100 for peeling the film 110 on the stage 10, or For example, the work 100 from which the 110 has been peeled off is removed from the stage 10 .

[motion]
Next, the operation of the peeling device 1 will be described.
FIG. 5 is a flow chart showing the operation of the peeling device 1. As shown in FIG.
6 to 11 are schematic diagrams showing the state of the peeling apparatus 1 in each step.
When the peeling device 1 performs the peeling operation of the film 110, in step S1, the control unit 80 stops the movable base 30 at the work installation position P1, and installs the work 100 to which the film 110 is stuck on the stage 10 ( workpiece setting process).
As shown in FIG. 6, in the work setting process, the movable base 30 is stopped at the work setting position P1, and the handling section 40 sucks the work 100 from which the film 110 is to be peeled off and sets it on the stage 10 .

In step S2, the control unit 80 moves the movable base 30 to stop the workpiece 100 to which the film 110 is attached at the tape adhesion position P2 (peeling preparation step).
As shown in FIG. 7, in the separation preparation step, the movable base 30 is moved and stopped so that one end (the right end in FIG. 7) of the film 110 is positioned directly below the pressure roller 51 .

In step S3, the control unit 80 lowers the pressure roller 51 by the elevating unit 53, and causes the pressure roller 51 to adhere to the surface of the workpiece 100 to which the film 110 is attached (that is, the film 110) at the lower end position (tape adhesion). process).
As shown in FIG. 8, in the tape adhering step, the elevating unit 53 lowers the pressure roller 51 and the support 52, and when the film 110 adheres to the tape 200, the pressure roller 51 and the support 52 stop moving down.

In step S4, the control unit 80 raises the elevating unit 53 to a set height, moves the movable base 30 at a set speed in the direction of the work installation position P1, and moves the film 110 to the other end of the work 100. The film is stopped at a roller pressing position P3 where a predetermined amount of adhesion has been applied to the film (film peeling step).
As shown in FIG. 9, in the film peeling process, the lifting section 53 lifts the pressing roller 51 and the supporting section 52 to a set height h. This height h is set in consideration of the action of the force applied to the workpiece 100 when the film 110 is peeled off. That is, the peeling angle can be adjusted by changing the height h. For example, when the height h is set low, the peel approaches 180 degrees, and the force applied to the surface of the work 100 in the peeling of the film 110 in the direction perpendicular to the surface becomes weak. The peeling angle can be adjusted according to the thickness of the workpiece W and the adhesive strength of the film 110 .
Further, as shown in FIG. 9, in the film peeling process, after the pressing roller 51 is raised to the height h, the movable base 30 moves at a set speed (a speed suitable for peeling the film 110) to the work installation position P1. and is stopped in a state where the film 110 adheres to the other end of the work 100 by a predetermined amount.

In step S5, the control unit 80 raises the pressing roller 31 by the lifting unit 33 to press the film 110 from the non-adhesive side of the film 110 (pressing step).
As shown in FIG. 10, in the pressing step, the elevating unit 33 raises the pressing roller 31 and the supporting unit 32, and the tape 200 and the work 100 are stretched between the tape 200 and the workpiece 100 by the film peeling step. The non-adhesive surface of the film 110 is pressed from below (that is, pushed up) to press the adhesive surface of the film 110 toward the downstream side of the tape 200 . As a result, in the pressing step, the film 110 after peeling is adhered to and held downstream of the tape 200 (downstream of the portion adhered to one end of the film 110 ). As a result, the peeled film 110 can be accommodated on the downstream side of the tape 200 using its adhesive surface.

In step S6, the control unit 80 moves the movable base 30, stops the workpiece 100 from which the film 110 has been peeled off, at the workpiece setting position P1, and removes the workpiece 100 from the stage 10 (work removing step).
As shown in FIG. 11, in the work removal process, the movable base 30 is stopped at the work installation position P1, and the handling unit 40 sucks the work 100 from which the film 110 has been peeled off and removes it from the stage 10.
Subsequently, when peeling the film 110 from another work 100, the above steps are repeated.

As a result, the film 110 is folded back from the one end adhered to the tape 200 , and adhered to the downstream side of the tape 200 by the adhesive surface of the film 110 and housed.
FIG. 12 is a schematic diagram showing the state of the film 110 accommodated in the tape 200. As shown in FIG.
As shown in FIG. 12, one end of the film 110 adhered to the tape 200 when peeled is adhered using the adhesive surface of the tape 200, while the portion of the film 110 folded back from the one end is attached to the tape 200. The adhesive surface is used to adhere to the film 110 that has been peeled off in advance.
As a result, it becomes possible to peel off and store the film 110 while suppressing the consumption of the tape 200 .

As described above, the peeling apparatus 1 installs the workpiece 100 to which the film 110 is attached on the stage 10 at the workpiece installation position P1, moves the movable base 30 to the tape adhesion position P2, and One end of the film 110 is adhered to the tape 200 by lowering the pressure roller 51 . Then, the pressure roller 51 is lifted by the elevating unit 53, and the movable base 30 is moved in the direction of the work installation position P1. 30 is stopped. Further, the peeling device 1 raises the pressing roller 31 by the elevating unit 33 to push up the non-adhesive surface of the film 110 from below, thereby adhering the adhesive surface of the film 110 to the tape 200 . After that, the peeling device 1 returns the movable base 30 to the work installation position P1, and the work 100 from which the film 110 has been peeled off is removed.

Therefore, in the peeling device 1, after the film 110 is adhered to the tape 200, the force acting on the surface of the workpiece 100 when peeling the film 110 is adjusted by changing the height at which the pressure roller 51 is lifted. becomes possible.
In addition, since the adhesive surface of the peeled film 110 can be used to adhere a plurality of peeled films 110 to the tape 200, the consumption of the tape 200 required for peeling the film 110 can be suppressed. .
Moreover, since the peeled film 110 is housed integrally with the tape 200, the peeled film 110 can be easily handled.
Furthermore, since the peeling device 1 completes the peeling and recovery of the film 110 by reciprocating the movable base 30, the device can be made compact, and the film 110 can be peeled in a simple operation. .
Therefore, according to the peeling device 1, the function of the conventional peeling device for peeling the film 110 from the workpiece 100 can be improved.

[Modification 1]
In the above-described embodiment, the surface of the workpiece W to which the film 110 is attached is arranged as the upper surface, and the configuration in which the peeled film 110 is pressed against the tape 200 arranged above the workpiece W has been described as an example. , but not limited to this. For example, as another configuration example, the surface of the work W to which the film 110 is attached may be arranged as the lower surface, and the peeled film 110 may be pressed against the tape 200 arranged below the work W.
FIG. 13 is a schematic diagram showing another configuration example of the peeling device 1. As shown in FIG.
In the configuration example shown in FIG. 13, the main components of the peeling apparatus 1 shown in FIG. 1 are upside down.
However, in the configuration example shown in FIG. 13, the pressing roller 31, the support section 32, and the lifting section 33 are different from the configuration shown in FIG. Specifically, instead of the elevating unit 33, a rotating unit 33a for rotating the supporting unit 32 is provided. The non-adhesive surface of the film 110 is pressed by rotating operation.
In this case, in the film peeling process, the film 110 is completely peeled off from the workpiece 100 and the film 110 is pressed against the tape 200 by the pressure roller 31 .
Even with such a configuration example, the function of the conventional peeling device for peeling the film 110 from the workpiece 100 can be improved.
In addition, in the configuration example shown in FIG. 13, the configuration of the pressure roller 31, the support section 32, and the lifting section 33 may be the same as in the case of FIG. In this case, in the film peeling process, the film 110 is suspended between the tape 200 and the workpiece 100, and in this state, the non-adhesive surface of the peeled film 110 is pressed from above (that is, pushed down). , the sticky side of the film 110 can be pressed downstream of the tape 200 .

The above-described embodiment is an example of the embodiment of the present invention, and various embodiments for realizing the functions of the present invention are included in the scope of the present invention.
For example, in the above-described embodiment, the handling unit 40 has been described as one that attaches and removes the workpiece 100 by suction, but the present invention is not limited to this. For example, the handling unit 40 may be configured with a robot hand or the like to have a function of more flexibly installing and removing the workpiece 100 . In this case, installation and removal of the workpiece 100 can be automated to a higher degree, and processing can be performed in more appropriate cooperation with upstream or downstream processes of the process of peeling the film 110 from the workpiece 100 .

In the above-described embodiment, the operation of the pressing roller 31 pressing the peeled film 110 toward the downstream side of the tape 200 includes moving the pressing roller 31 directly upward, obliquely upward, It is good also as drawing a curve and moving upwards. Furthermore, in addition to pressing with a roller, one end of the peeled film 110 may be gripped and folded back, or the peeled film 110 may be pressed downstream of the tape 200 by air or other means. good.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments. Moreover, the effects described in the present embodiment are merely enumerations of the most suitable effects resulting from the present invention, and the effects of the present invention are not limited to those described in the present embodiment.

1 Peeling Device 10 Stage 11 Claw 20 Guide Rail 30 Moving Base 31 Pressure Roller 32, 52 Supporting Part 33, 53 Lifting Part 33a Rotating Part 40 Handling Part 41 Film Detection Part 50 Adhesion Processing unit 51 pressure roller 60 supply roller 61, 72 clutch 70 take-up roller 71 actuator 80 control unit 81 movement control unit 82 pressure roller elevation control unit 83 pressure roller elevation control unit 84 supply roller Control Unit 85 Winding Roller Control Unit 86 Handling Control Unit 100 Work 110 Film 200 Tape

Claims (5)

a stage on which the work to which the film is attached is placed;
Adhesive member supply means for supplying a continuous body of adhesive members to be adhered to the film;
Adhesive means for adhering the adhesive member to one end of the film attached to the work;
stage moving means for moving the stage in a direction along the surface of the work to which the film is attached and stopping the stage in a state where the other end of the film is adhered to the work ;
pressing the non-adhesive surface of the film bridged between the adhesive means and the work in a state where the one end is adhered to the adhesive member and peeled off to press the adhesive surface of the film against the adhesive member; and peeling film processing means for treating the adhesive surface of the film to stick to at least one of the film that has been peeled off and held by the adhesive member and the adhesive member;
A peeling device comprising: The adhesive means moves one end of the film adhered to the adhesive member to a set distance from the surface of the workpiece,
3. The stage moving means separates the film, the one end of which is held by the adhesive means, at a set distance from the surface of the workpiece by moving the stage in the plane direction. 1. The peeling device according to 1. The adhesive member is arranged with an adhesive surface on the downstream side of the position of the adhesive means inclined in a direction facing the work,
3. The release film processing means presses the adhesive surface of the film against the adhesive member by pushing the non-adhesive surface of the film in one direction from the work side. The peeling device according to item 1. 4. The film according to any one of claims 1 to 3 , wherein the film is folded back from the one end adhered to the adhesive member, and is adhered and held downstream of the adhesive member by the adhesive surface of the film. The peeling device according to item 1. an installation process of installing the work to which the film is attached on the stage;
an adhesive member supply step of supplying a continuous body of adhesive members to be adhered to the film;
an adhering step of adhering the adhesive member to one end of the film attached to the work by an adhesive means;
a stage moving step of moving the stage in a direction along the surface of the work to which the film is attached and stopping the stage while the other end of the film is adhered to the work ;
pressing the non-adhesive surface of the film bridged between the adhesive means and the work in a state where the one end is adhered to the adhesive member and peeled off to press the adhesive surface of the film against the adhesive member; a peeling film treatment step in which the adhesive surface of the film is treated to adhere to at least one of the film that has been peeled off and held by the adhesive member in advance and the adhesive member;
A peeling method comprising:

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