JP7271323B2 - リニアモータ、搬送装置、及び生産装置 - Google Patents

リニアモータ、搬送装置、及び生産装置 Download PDF

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Publication number
JP7271323B2
JP7271323B2 JP2019107411A JP2019107411A JP7271323B2 JP 7271323 B2 JP7271323 B2 JP 7271323B2 JP 2019107411 A JP2019107411 A JP 2019107411A JP 2019107411 A JP2019107411 A JP 2019107411A JP 7271323 B2 JP7271323 B2 JP 7271323B2
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Japan
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core
excitation
transfer module
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action
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JP2019107411A
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English (en)
Japanese (ja)
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JP2019216591A (ja
JP2019216591A5 (enrdf_load_stackoverflow
Inventor
正治 中
紀博 鈴木
哲 出口
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Canon Inc
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Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to PCT/JP2019/023109 priority Critical patent/WO2019240132A1/ja
Priority to KR1020207035227A priority patent/KR102593127B1/ko
Priority to CN201980039278.0A priority patent/CN112262522B/zh
Publication of JP2019216591A publication Critical patent/JP2019216591A/ja
Priority to US17/119,209 priority patent/US11843300B2/en
Publication of JP2019216591A5 publication Critical patent/JP2019216591A5/ja
Application granted granted Critical
Publication of JP7271323B2 publication Critical patent/JP7271323B2/ja
Priority to US18/496,000 priority patent/US20240055970A1/en
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H02P25/064—Linear motors of the synchronous type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/006—Controlling linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
    • H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/22—Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
JP2019107411A 2018-06-12 2019-06-07 リニアモータ、搬送装置、及び生産装置 Active JP7271323B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
PCT/JP2019/023109 WO2019240132A1 (ja) 2018-06-12 2019-06-11 リニアモータ、搬送装置、及び生産装置
KR1020207035227A KR102593127B1 (ko) 2018-06-12 2019-06-11 리니어 모터 및 생산장치
CN201980039278.0A CN112262522B (zh) 2018-06-12 2019-06-11 线性电动机、运输设备和生产设备
US17/119,209 US11843300B2 (en) 2018-06-12 2020-12-11 Linear motor, transport apparatus, and production apparatus
US18/496,000 US20240055970A1 (en) 2018-06-12 2023-10-27 Linear motor, transport apparatus, and production apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018112135 2018-06-12
JP2018112135 2018-06-12

Publications (3)

Publication Number Publication Date
JP2019216591A JP2019216591A (ja) 2019-12-19
JP2019216591A5 JP2019216591A5 (enrdf_load_stackoverflow) 2022-06-09
JP7271323B2 true JP7271323B2 (ja) 2023-05-11

Family

ID=68919716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019107411A Active JP7271323B2 (ja) 2018-06-12 2019-06-07 リニアモータ、搬送装置、及び生産装置

Country Status (4)

Country Link
US (1) US11843300B2 (enrdf_load_stackoverflow)
JP (1) JP7271323B2 (enrdf_load_stackoverflow)
KR (1) KR102593127B1 (enrdf_load_stackoverflow)
CN (1) CN112262522B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113001563A (zh) * 2021-03-10 2021-06-22 北京华能新锐控制技术有限公司 感应式电磁驱动巡检机器人
CN218829567U (zh) * 2022-11-29 2023-04-07 瑞声科技（南京）有限公司 多动子直驱传输系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003224961A (ja) 2002-01-28 2003-08-08 Canon Inc リニアモータ、ステージ装置、露光装置及びデバイス製造方法
JP2015213394A (ja) 2014-05-02 2015-11-26 キヤノン株式会社 搬送システム

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62203550A (ja) * 1986-02-28 1987-09-08 Toshiro Higuchi リニアステツプモ−タ
JP3818342B2 (ja) * 1997-10-06 2006-09-06 株式会社安川電機 リニアモータ
JP3945149B2 (ja) 2000-11-06 2007-07-18 株式会社日立製作所 リニアモータとその製造方法
JP2004146492A (ja) * 2002-10-23 2004-05-20 Canon Inc Ｅｕｖ露光装置
US7719152B2 (en) * 2005-03-18 2010-05-18 Rigaku Corporation Magnetic levitation actuator
JP2009005516A (ja) 2007-06-22 2009-01-08 Mitsubishi Electric Corp ブレーキ装置
JP2012023792A (ja) * 2010-07-12 2012-02-02 Sinfonia Technology Co Ltd 可動鉄心型リニアアクチュエータ
KR101798548B1 (ko) * 2011-03-08 2017-12-12 주식회사 코베리 선형 전동기
JP5678025B2 (ja) * 2012-11-19 2015-02-25 株式会社日立製作所 推力発生機構
KR101531656B1 (ko) * 2013-10-16 2015-06-25 한국전기연구원 자기 부상 이송 장치
KR102192244B1 (ko) * 2013-12-30 2020-12-17 삼성디스플레이 주식회사 기판 이송장치
JP6028013B2 (ja) * 2014-12-25 2016-11-16 Thk株式会社 リニアモータ
JP6740088B2 (ja) * 2016-11-07 2020-08-12 キヤノン株式会社 リニアモータ
DE102019211986B4 (de) * 2019-08-09 2025-07-31 Physik Instrumente (PI) SE & Co KG Magnetische Führungsvorrichtung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003224961A (ja) 2002-01-28 2003-08-08 Canon Inc リニアモータ、ステージ装置、露光装置及びデバイス製造方法
JP2015213394A (ja) 2014-05-02 2015-11-26 キヤノン株式会社 搬送システム

Also Published As

Publication number Publication date
KR102593127B1 (ko) 2023-10-24
JP2019216591A (ja) 2019-12-19
KR20210008041A (ko) 2021-01-20
US20210099067A1 (en) 2021-04-01
CN112262522B (zh) 2024-05-07
US11843300B2 (en) 2023-12-12
CN112262522A (zh) 2021-01-22

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