JP7254921B2 - 半導体試料の欠陥の分類 - Google Patents

半導体試料の欠陥の分類 Download PDF

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JP7254921B2
JP7254921B2 JP2021524054A JP2021524054A JP7254921B2 JP 7254921 B2 JP7254921 B2 JP 7254921B2 JP 2021524054 A JP2021524054 A JP 2021524054A JP 2021524054 A JP2021524054 A JP 2021524054A JP 7254921 B2 JP7254921 B2 JP 7254921B2
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JP2022512292A (ja
JPWO2020129041A5 (https=
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アッサフ アズバッグ
ボアズ コーエン
シラン ガン－オール
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アプライド マテリアルズ イスラエル リミテッド
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    • G06F18/24—Classification techniques
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    • G06F16/28—Databases characterised by their database models, e.g. relational or object models
    • G06F16/284—Relational databases
    • G06F16/285—Clustering or classification
    • G—PHYSICS
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    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
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JP2021524054A 2018-12-20 2019-11-24 半導体試料の欠陥の分類 Active JP7254921B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/228,676 2018-12-20
US16/228,676 US11321633B2 (en) 2018-12-20 2018-12-20 Method of classifying defects in a specimen semiconductor examination and system thereof
PCT/IL2019/051284 WO2020129041A1 (en) 2018-12-20 2019-11-24 Classifying defects in a semiconductor specimen

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JP2022512292A JP2022512292A (ja) 2022-02-03
JPWO2020129041A5 JPWO2020129041A5 (https=) 2022-08-30
JP2022512292A5 JP2022512292A5 (https=) 2022-08-30
JP7254921B2 true JP7254921B2 (ja) 2023-04-10

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US (1) US11321633B2 (https=)
JP (1) JP7254921B2 (https=)
KR (1) KR102530950B1 (https=)
CN (1) CN112805719B (https=)
TW (1) TWI791930B (https=)
WO (1) WO2020129041A1 (https=)

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CN110286279B (zh) * 2019-06-05 2021-03-16 武汉大学 基于极端树与堆栈式稀疏自编码算法的电力电子电路故障诊断方法
US11379969B2 (en) * 2019-08-01 2022-07-05 Kla Corporation Method for process monitoring with optical inspections
US11568317B2 (en) 2020-05-21 2023-01-31 Paypal, Inc. Enhanced gradient boosting tree for risk and fraud modeling
TWI770817B (zh) * 2021-02-09 2022-07-11 鴻海精密工業股份有限公司 瑕疵檢測方法、電子裝置及存儲介質
CN119359475A (zh) * 2024-12-23 2025-01-24 济南农智信息科技有限公司 一种边坡土壤肥力预测方法

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JP2003331253A (ja) 2002-04-25 2003-11-21 Agilent Technol Inc 信頼性の高い希少事象のクラシファイア
JP2004295879A (ja) 2003-03-12 2004-10-21 Hitachi High-Technologies Corp 欠陥分類方法
US20150088791A1 (en) 2013-09-24 2015-03-26 International Business Machines Corporation Generating data from imbalanced training data sets
US20160328837A1 (en) 2015-05-08 2016-11-10 Kla-Tencor Corporation Method and System for Defect Classification
WO2018134290A1 (en) 2017-01-18 2018-07-26 Asml Netherlands B.V. Defect displaying method

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JP4118703B2 (ja) * 2002-05-23 2008-07-16 株式会社日立ハイテクノロジーズ 欠陥分類装置及び欠陥自動分類方法並びに欠陥検査方法及び処理装置
US7756320B2 (en) 2003-03-12 2010-07-13 Hitachi High-Technologies Corporation Defect classification using a logical equation for high stage classification
US20090097741A1 (en) * 2006-03-30 2009-04-16 Mantao Xu Smote algorithm with locally linear embedding
JP5156452B2 (ja) * 2008-03-27 2013-03-06 東京エレクトロン株式会社 欠陥分類方法、プログラム、コンピュータ記憶媒体及び欠陥分類装置
CN102095731A (zh) * 2010-12-02 2011-06-15 山东轻工业学院 在纸张缺陷视觉检测中识别不同缺陷类型的系统及方法
TWI574136B (zh) * 2012-02-03 2017-03-11 應用材料以色列公司 基於設計之缺陷分類之方法及系統
US9489599B2 (en) * 2013-11-03 2016-11-08 Kla-Tencor Corp. Decision tree construction for automatic classification of defects on semiconductor wafers
US9286675B1 (en) * 2014-10-23 2016-03-15 Applied Materials Israel Ltd. Iterative defect filtering process
CN104458755B (zh) * 2014-11-26 2017-02-22 吴晓军 一种基于机器视觉的多类型材质表面缺陷检测方法
US20160189055A1 (en) * 2014-12-31 2016-06-30 Applied Materials Israel Ltd. Tuning of parameters for automatic classification
US10436720B2 (en) * 2015-09-18 2019-10-08 KLA-Tenfor Corp. Adaptive automatic defect classification
CN105677564A (zh) * 2016-01-04 2016-06-15 中国石油大学(华东) 基于改进的Adaboost软件缺陷不平衡数据分类方法
US10565513B2 (en) * 2016-09-19 2020-02-18 Applied Materials, Inc. Time-series fault detection, fault classification, and transition analysis using a K-nearest-neighbor and logistic regression approach
US10031997B1 (en) * 2016-11-29 2018-07-24 Taiwan Semiconductor Manufacturing Co., Ltd. Forecasting wafer defects using frequency domain analysis
CN106778853A (zh) * 2016-12-07 2017-05-31 中南大学 基于权重聚类和欠抽样的不平衡数据分类方法
CN108596199A (zh) * 2017-12-29 2018-09-28 北京交通大学 基于EasyEnsemble算法和SMOTE算法的不均衡数据分类方法
CN108470187A (zh) * 2018-02-26 2018-08-31 华南理工大学 一种基于扩充训练数据集的类别不平衡问题分类方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003331253A (ja) 2002-04-25 2003-11-21 Agilent Technol Inc 信頼性の高い希少事象のクラシファイア
JP2004295879A (ja) 2003-03-12 2004-10-21 Hitachi High-Technologies Corp 欠陥分類方法
US20150088791A1 (en) 2013-09-24 2015-03-26 International Business Machines Corporation Generating data from imbalanced training data sets
US20160328837A1 (en) 2015-05-08 2016-11-10 Kla-Tencor Corporation Method and System for Defect Classification
WO2018134290A1 (en) 2017-01-18 2018-07-26 Asml Netherlands B.V. Defect displaying method

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Publication number Publication date
TWI791930B (zh) 2023-02-11
CN112805719A (zh) 2021-05-14
JP2022512292A (ja) 2022-02-03
KR20210105335A (ko) 2021-08-26
CN112805719B (zh) 2024-12-17
US20200202252A1 (en) 2020-06-25
WO2020129041A1 (en) 2020-06-25
TW202038110A (zh) 2020-10-16
KR102530950B1 (ko) 2023-05-11
US11321633B2 (en) 2022-05-03

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