CN112805719B - 分类半导体样本中的缺陷 - Google Patents

分类半导体样本中的缺陷 Download PDF

Info

Publication number
CN112805719B
CN112805719B CN201980065723.0A CN201980065723A CN112805719B CN 112805719 B CN112805719 B CN 112805719B CN 201980065723 A CN201980065723 A CN 201980065723A CN 112805719 B CN112805719 B CN 112805719B
Authority
CN
China
Prior art keywords
defects
categories
minority
category
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201980065723.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN112805719A (zh
Inventor
A·阿斯巴格
B·科恩
S·甘-奥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Israel Ltd
Original Assignee
Applied Materials Israel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Israel Ltd filed Critical Applied Materials Israel Ltd
Publication of CN112805719A publication Critical patent/CN112805719A/zh
Application granted granted Critical
Publication of CN112805719B publication Critical patent/CN112805719B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F16/00—Information retrieval; Database structures therefor; File system structures therefor
    • G06F16/20—Information retrieval; Database structures therefor; File system structures therefor of structured data, e.g. relational data
    • G06F16/28—Databases characterised by their database models, e.g. relational or object models
    • G06F16/284—Relational databases
    • G06F16/285—Clustering or classification
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G06N20/20—Ensemble learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
    • G06N5/01—Dynamic search techniques; Heuristics; Dynamic trees; Branch-and-bound
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N7/00—Computing arrangements based on specific mathematical models
    • G06N7/01—Probabilistic graphical models, e.g. probabilistic networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Data Mining & Analysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Software Systems (AREA)
  • Evolutionary Computation (AREA)
  • Artificial Intelligence (AREA)
  • Computing Systems (AREA)
  • Mathematical Physics (AREA)
  • Databases & Information Systems (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Medical Informatics (AREA)
  • Computational Mathematics (AREA)
  • Pure & Applied Mathematics (AREA)
  • Mathematical Optimization (AREA)
  • Mathematical Analysis (AREA)
  • Computational Linguistics (AREA)
  • Probability & Statistics with Applications (AREA)
  • Algebra (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Evolutionary Biology (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Analysis (AREA)
  • Image Processing (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN201980065723.0A 2018-12-20 2019-11-24 分类半导体样本中的缺陷 Active CN112805719B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/228,676 2018-12-20
US16/228,676 US11321633B2 (en) 2018-12-20 2018-12-20 Method of classifying defects in a specimen semiconductor examination and system thereof
PCT/IL2019/051284 WO2020129041A1 (en) 2018-12-20 2019-11-24 Classifying defects in a semiconductor specimen

Publications (2)

Publication Number Publication Date
CN112805719A CN112805719A (zh) 2021-05-14
CN112805719B true CN112805719B (zh) 2024-12-17

Family

ID=71097693

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980065723.0A Active CN112805719B (zh) 2018-12-20 2019-11-24 分类半导体样本中的缺陷

Country Status (6)

Country Link
US (1) US11321633B2 (https=)
JP (1) JP7254921B2 (https=)
KR (1) KR102530950B1 (https=)
CN (1) CN112805719B (https=)
TW (1) TWI791930B (https=)
WO (1) WO2020129041A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110286279B (zh) * 2019-06-05 2021-03-16 武汉大学 基于极端树与堆栈式稀疏自编码算法的电力电子电路故障诊断方法
US11379969B2 (en) * 2019-08-01 2022-07-05 Kla Corporation Method for process monitoring with optical inspections
US11568317B2 (en) 2020-05-21 2023-01-31 Paypal, Inc. Enhanced gradient boosting tree for risk and fraud modeling
TWI770817B (zh) * 2021-02-09 2022-07-11 鴻海精密工業股份有限公司 瑕疵檢測方法、電子裝置及存儲介質
CN119359475A (zh) * 2024-12-23 2025-01-24 济南农智信息科技有限公司 一种边坡土壤肥力预测方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101981683A (zh) * 2008-03-27 2011-02-23 东京毅力科创株式会社 缺陷分类方法、计算机存储介质以及缺陷分类装置
CN102095731A (zh) * 2010-12-02 2011-06-15 山东轻工业学院 在纸张缺陷视觉检测中识别不同缺陷类型的系统及方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030204507A1 (en) 2002-04-25 2003-10-30 Li Jonathan Qiang Classification of rare events with high reliability
JP4118703B2 (ja) * 2002-05-23 2008-07-16 株式会社日立ハイテクノロジーズ 欠陥分類装置及び欠陥自動分類方法並びに欠陥検査方法及び処理装置
US7756320B2 (en) 2003-03-12 2010-07-13 Hitachi High-Technologies Corporation Defect classification using a logical equation for high stage classification
JP4443270B2 (ja) 2003-03-12 2010-03-31 株式会社日立ハイテクノロジーズ 欠陥分類方法
US20090097741A1 (en) * 2006-03-30 2009-04-16 Mantao Xu Smote algorithm with locally linear embedding
TWI574136B (zh) * 2012-02-03 2017-03-11 應用材料以色列公司 基於設計之缺陷分類之方法及系統
US9224104B2 (en) * 2013-09-24 2015-12-29 International Business Machines Corporation Generating data from imbalanced training data sets
US9489599B2 (en) * 2013-11-03 2016-11-08 Kla-Tencor Corp. Decision tree construction for automatic classification of defects on semiconductor wafers
US9286675B1 (en) * 2014-10-23 2016-03-15 Applied Materials Israel Ltd. Iterative defect filtering process
CN104458755B (zh) * 2014-11-26 2017-02-22 吴晓军 一种基于机器视觉的多类型材质表面缺陷检测方法
US20160189055A1 (en) * 2014-12-31 2016-06-30 Applied Materials Israel Ltd. Tuning of parameters for automatic classification
US9898811B2 (en) 2015-05-08 2018-02-20 Kla-Tencor Corporation Method and system for defect classification
US10436720B2 (en) * 2015-09-18 2019-10-08 KLA-Tenfor Corp. Adaptive automatic defect classification
CN105677564A (zh) * 2016-01-04 2016-06-15 中国石油大学(华东) 基于改进的Adaboost软件缺陷不平衡数据分类方法
US10565513B2 (en) * 2016-09-19 2020-02-18 Applied Materials, Inc. Time-series fault detection, fault classification, and transition analysis using a K-nearest-neighbor and logistic regression approach
US10031997B1 (en) * 2016-11-29 2018-07-24 Taiwan Semiconductor Manufacturing Co., Ltd. Forecasting wafer defects using frequency domain analysis
CN106778853A (zh) * 2016-12-07 2017-05-31 中南大学 基于权重聚类和欠抽样的不平衡数据分类方法
US11416979B2 (en) 2017-01-18 2022-08-16 Asml Netherlands B.V. Defect displaying method
CN108596199A (zh) * 2017-12-29 2018-09-28 北京交通大学 基于EasyEnsemble算法和SMOTE算法的不均衡数据分类方法
CN108470187A (zh) * 2018-02-26 2018-08-31 华南理工大学 一种基于扩充训练数据集的类别不平衡问题分类方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101981683A (zh) * 2008-03-27 2011-02-23 东京毅力科创株式会社 缺陷分类方法、计算机存储介质以及缺陷分类装置
CN102095731A (zh) * 2010-12-02 2011-06-15 山东轻工业学院 在纸张缺陷视觉检测中识别不同缺陷类型的系统及方法

Also Published As

Publication number Publication date
TWI791930B (zh) 2023-02-11
CN112805719A (zh) 2021-05-14
JP2022512292A (ja) 2022-02-03
KR20210105335A (ko) 2021-08-26
US20200202252A1 (en) 2020-06-25
WO2020129041A1 (en) 2020-06-25
TW202038110A (zh) 2020-10-16
KR102530950B1 (ko) 2023-05-11
JP7254921B2 (ja) 2023-04-10
US11321633B2 (en) 2022-05-03

Similar Documents

Publication Publication Date Title
JP7286290B2 (ja) 半導体試料の欠陥を分類する方法およびそのシステム
US11526979B2 (en) Method of defect classification and system thereof
CN112805719B (zh) 分类半导体样本中的缺陷
CN118196555B (zh) 生成可用于检查半导体样本的训练数据
US10803575B2 (en) System, method and computer program product for generating a training set for a classifier
CN111444934B (zh) 对半导体样本中的缺陷进行分类的方法及其系统
KR20190037161A (ko) 복수의 아이템들을 분류하기 위한 시스템, 방법 및 컴퓨터 프로그램 제품
CN109285791B (zh) 设计布局为主的快速在线缺陷诊断、分类及取样方法及系统
US11940390B2 (en) Selecting a representative subset of potential defects to improve defect classifier training and estimation of expected defects of interest
KR20190098271A (ko) 광학 도구에 의해 캡처되는 결함 및 분류기를 위한 진단 방법
KR20200088012A (ko) 반도체 제조 공정에서 특징 선택 기법에 따른 멀티 분류기를 활용한 불량 패턴 예측 장치 및 방법
CN116091379A (zh) 自动缺陷分类系统及其训练和分类的方法
KR20220012217A (ko) 반도체 시편에서의 결함들의 기계 학습 기반 분류

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant