KR102530950B1 - 반도체 시편에서의 결함들의 분류 - Google Patents

반도체 시편에서의 결함들의 분류 Download PDF

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KR102530950B1
KR102530950B1 KR1020217015166A KR20217015166A KR102530950B1 KR 102530950 B1 KR102530950 B1 KR 102530950B1 KR 1020217015166 A KR1020217015166 A KR 1020217015166A KR 20217015166 A KR20217015166 A KR 20217015166A KR 102530950 B1 KR102530950 B1 KR 102530950B1
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KR20210105335A (ko
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아사프 아스바그
보아즈 코헨
쉬란 간-오르
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어플라이드 머티리얼즈 이스라엘 리미티드
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F16/00—Information retrieval; Database structures therefor; File system structures therefor
    • G06F16/20—Information retrieval; Database structures therefor; File system structures therefor of structured data, e.g. relational data
    • G06F16/28—Databases characterised by their database models, e.g. relational or object models
    • G06F16/284—Relational databases
    • G06F16/285—Clustering or classification
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G06N20/20—Ensemble learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
    • G06N5/01—Dynamic search techniques; Heuristics; Dynamic trees; Branch-and-bound
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N7/00—Computing arrangements based on specific mathematical models
    • G06N7/01—Probabilistic graphical models, e.g. probabilistic networks

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  • Databases & Information Systems (AREA)
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  • Algebra (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Evolutionary Biology (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
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  • Analysing Materials By The Use Of Radiation (AREA)
KR1020217015166A 2018-12-20 2019-11-24 반도체 시편에서의 결함들의 분류 Active KR102530950B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/228,676 2018-12-20
US16/228,676 US11321633B2 (en) 2018-12-20 2018-12-20 Method of classifying defects in a specimen semiconductor examination and system thereof
PCT/IL2019/051284 WO2020129041A1 (en) 2018-12-20 2019-11-24 Classifying defects in a semiconductor specimen

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KR20210105335A KR20210105335A (ko) 2021-08-26
KR102530950B1 true KR102530950B1 (ko) 2023-05-11

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US (1) US11321633B2 (https=)
JP (1) JP7254921B2 (https=)
KR (1) KR102530950B1 (https=)
CN (1) CN112805719B (https=)
TW (1) TWI791930B (https=)
WO (1) WO2020129041A1 (https=)

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CN110286279B (zh) * 2019-06-05 2021-03-16 武汉大学 基于极端树与堆栈式稀疏自编码算法的电力电子电路故障诊断方法
US11379969B2 (en) * 2019-08-01 2022-07-05 Kla Corporation Method for process monitoring with optical inspections
US11568317B2 (en) 2020-05-21 2023-01-31 Paypal, Inc. Enhanced gradient boosting tree for risk and fraud modeling
TWI770817B (zh) * 2021-02-09 2022-07-11 鴻海精密工業股份有限公司 瑕疵檢測方法、電子裝置及存儲介質
CN119359475A (zh) * 2024-12-23 2025-01-24 济南农智信息科技有限公司 一种边坡土壤肥力预测方法

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US20030204507A1 (en) 2002-04-25 2003-10-30 Li Jonathan Qiang Classification of rare events with high reliability
JP4118703B2 (ja) * 2002-05-23 2008-07-16 株式会社日立ハイテクノロジーズ 欠陥分類装置及び欠陥自動分類方法並びに欠陥検査方法及び処理装置
US7756320B2 (en) 2003-03-12 2010-07-13 Hitachi High-Technologies Corporation Defect classification using a logical equation for high stage classification
JP4443270B2 (ja) 2003-03-12 2010-03-31 株式会社日立ハイテクノロジーズ 欠陥分類方法
US20090097741A1 (en) * 2006-03-30 2009-04-16 Mantao Xu Smote algorithm with locally linear embedding
JP5156452B2 (ja) * 2008-03-27 2013-03-06 東京エレクトロン株式会社 欠陥分類方法、プログラム、コンピュータ記憶媒体及び欠陥分類装置
CN102095731A (zh) * 2010-12-02 2011-06-15 山东轻工业学院 在纸张缺陷视觉检测中识别不同缺陷类型的系统及方法
TWI574136B (zh) * 2012-02-03 2017-03-11 應用材料以色列公司 基於設計之缺陷分類之方法及系統
US9224104B2 (en) * 2013-09-24 2015-12-29 International Business Machines Corporation Generating data from imbalanced training data sets
US9489599B2 (en) * 2013-11-03 2016-11-08 Kla-Tencor Corp. Decision tree construction for automatic classification of defects on semiconductor wafers
US9286675B1 (en) * 2014-10-23 2016-03-15 Applied Materials Israel Ltd. Iterative defect filtering process
CN104458755B (zh) * 2014-11-26 2017-02-22 吴晓军 一种基于机器视觉的多类型材质表面缺陷检测方法
US20160189055A1 (en) * 2014-12-31 2016-06-30 Applied Materials Israel Ltd. Tuning of parameters for automatic classification
US9898811B2 (en) 2015-05-08 2018-02-20 Kla-Tencor Corporation Method and system for defect classification
US10436720B2 (en) * 2015-09-18 2019-10-08 KLA-Tenfor Corp. Adaptive automatic defect classification
CN105677564A (zh) * 2016-01-04 2016-06-15 中国石油大学(华东) 基于改进的Adaboost软件缺陷不平衡数据分类方法
US10565513B2 (en) * 2016-09-19 2020-02-18 Applied Materials, Inc. Time-series fault detection, fault classification, and transition analysis using a K-nearest-neighbor and logistic regression approach
US10031997B1 (en) * 2016-11-29 2018-07-24 Taiwan Semiconductor Manufacturing Co., Ltd. Forecasting wafer defects using frequency domain analysis
CN106778853A (zh) * 2016-12-07 2017-05-31 中南大学 基于权重聚类和欠抽样的不平衡数据分类方法
US11416979B2 (en) 2017-01-18 2022-08-16 Asml Netherlands B.V. Defect displaying method
CN108596199A (zh) * 2017-12-29 2018-09-28 北京交通大学 基于EasyEnsemble算法和SMOTE算法的不均衡数据分类方法
CN108470187A (zh) * 2018-02-26 2018-08-31 华南理工大学 一种基于扩充训练数据集的类别不平衡问题分类方法

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TWI791930B (zh) 2023-02-11
CN112805719A (zh) 2021-05-14
JP2022512292A (ja) 2022-02-03
KR20210105335A (ko) 2021-08-26
CN112805719B (zh) 2024-12-17
US20200202252A1 (en) 2020-06-25
WO2020129041A1 (en) 2020-06-25
TW202038110A (zh) 2020-10-16
JP7254921B2 (ja) 2023-04-10
US11321633B2 (en) 2022-05-03

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