TWI791930B - 用於分類半導體樣本中的缺陷的系統、方法及電腦可讀取媒體 - Google Patents

用於分類半導體樣本中的缺陷的系統、方法及電腦可讀取媒體 Download PDF

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TWI791930B
TWI791930B TW108146199A TW108146199A TWI791930B TW I791930 B TWI791930 B TW I791930B TW 108146199 A TW108146199 A TW 108146199A TW 108146199 A TW108146199 A TW 108146199A TW I791930 B TWI791930 B TW I791930B
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defects
defect
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TW108146199A
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TW202038110A (zh
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阿賽夫 艾斯拜格
寶茲 扣漢
胥倫 甘奧
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以色列商應用材料以色列公司
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TW108146199A 2018-12-20 2019-12-17 用於分類半導體樣本中的缺陷的系統、方法及電腦可讀取媒體 TWI791930B (zh)

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US16/228,676 2018-12-20
US16/228,676 US11321633B2 (en) 2018-12-20 2018-12-20 Method of classifying defects in a specimen semiconductor examination and system thereof

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TW202038110A TW202038110A (zh) 2020-10-16
TWI791930B true TWI791930B (zh) 2023-02-11

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US (1) US11321633B2 (https=)
JP (1) JP7254921B2 (https=)
KR (1) KR102530950B1 (https=)
CN (1) CN112805719B (https=)
TW (1) TWI791930B (https=)
WO (1) WO2020129041A1 (https=)

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CN110286279B (zh) * 2019-06-05 2021-03-16 武汉大学 基于极端树与堆栈式稀疏自编码算法的电力电子电路故障诊断方法
US11379969B2 (en) * 2019-08-01 2022-07-05 Kla Corporation Method for process monitoring with optical inspections
US11568317B2 (en) 2020-05-21 2023-01-31 Paypal, Inc. Enhanced gradient boosting tree for risk and fraud modeling
TWI770817B (zh) * 2021-02-09 2022-07-11 鴻海精密工業股份有限公司 瑕疵檢測方法、電子裝置及存儲介質
CN119359475A (zh) * 2024-12-23 2025-01-24 济南农智信息科技有限公司 一种边坡土壤肥力预测方法

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TW201830464A (zh) * 2016-11-29 2018-08-16 台灣積體電路製造股份有限公司 預測晶圓缺陷的方法

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US7756320B2 (en) 2003-03-12 2010-07-13 Hitachi High-Technologies Corporation Defect classification using a logical equation for high stage classification
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US20150088791A1 (en) * 2013-09-24 2015-03-26 International Business Machines Corporation Generating data from imbalanced training data sets
CN104458755A (zh) * 2014-11-26 2015-03-25 吴晓军 一种基于机器视觉的多类型材质表面缺陷检测方法
TW201636907A (zh) * 2014-12-31 2016-10-16 應用材料以色列公司 用於自動分類之參數的調諧
TW201823986A (zh) * 2016-09-19 2018-07-01 美商應用材料股份有限公司 使用k最近鄰域及邏輯式迴歸方法的時間序列故障偵測、故障分類及轉變分析
TW201830464A (zh) * 2016-11-29 2018-08-16 台灣積體電路製造股份有限公司 預測晶圓缺陷的方法

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CN112805719A (zh) 2021-05-14
JP2022512292A (ja) 2022-02-03
KR20210105335A (ko) 2021-08-26
CN112805719B (zh) 2024-12-17
US20200202252A1 (en) 2020-06-25
WO2020129041A1 (en) 2020-06-25
TW202038110A (zh) 2020-10-16
KR102530950B1 (ko) 2023-05-11
JP7254921B2 (ja) 2023-04-10
US11321633B2 (en) 2022-05-03

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