JP7248575B2 - 赤外線検出装置 - Google Patents

赤外線検出装置 Download PDF

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Publication number
JP7248575B2
JP7248575B2 JP2019534412A JP2019534412A JP7248575B2 JP 7248575 B2 JP7248575 B2 JP 7248575B2 JP 2019534412 A JP2019534412 A JP 2019534412A JP 2019534412 A JP2019534412 A JP 2019534412A JP 7248575 B2 JP7248575 B2 JP 7248575B2
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Prior art keywords
infrared
sample
infrared detector
light source
wavelength
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JP2019534412A
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Japanese (ja)
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JP2020518787A5 (https=
JP2020518787A (ja
JPWO2018115778A5 (https=
Inventor
ドゥ・ウィルド，ヤニク
ペロス，エロディ
クラクマルニコフ，バレンティーナ
カルミナーティ，レミ
ボッカラ，アルベール－クロード
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Centre National de la Recherche Scientifique CNRS
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Centre National de la Recherche Scientifique CNRS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G01J3/108—Arrangements of light sources specially adapted for spectrometry or colorimetry for measurement in the infrared range
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/026—Control of working procedures of a pyrometer, other than calibration; Bandwidth calculation; Gain control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0805—Means for chopping radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/72—Investigating presence of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0077—Imaging
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP2019534412A 2016-12-23 2017-12-21 赤外線検出装置 Active JP7248575B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1663273A FR3061289B1 (fr) 2016-12-23 2016-12-23 Dispositif de detection infrarouge.
FR1663273 2016-12-23
PCT/FR2017/053799 WO2018115778A1 (fr) 2016-12-23 2017-12-21 Dispositif de detection infrarouge

Publications (4)

Publication Number Publication Date
JP2020518787A JP2020518787A (ja) 2020-06-25
JP2020518787A5 JP2020518787A5 (https=) 2022-07-20
JPWO2018115778A5 JPWO2018115778A5 (https=) 2022-07-20
JP7248575B2 true JP7248575B2 (ja) 2023-03-29

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019534412A Active JP7248575B2 (ja) 2016-12-23 2017-12-21 赤外線検出装置

Country Status (5)

Country Link
US (1) US11499929B2 (https=)
EP (1) EP3559644B1 (https=)
JP (1) JP7248575B2 (https=)
FR (1) FR3061289B1 (https=)
WO (1) WO2018115778A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU101529B1 (de) * 2019-12-12 2021-06-15 Aim Systems Gmbh Vorrichtung und Verfahren zur Bestimmung einer Materialeigenschaft eines Prüfkörpers in einem oberflächennahen Prüfkörperbereich
FR3107118A1 (fr) * 2020-02-10 2021-08-13 Universite de Bordeaux Appareil et procédé de profilométrie par thermographie infrarouge
CN116698780A (zh) * 2023-06-16 2023-09-05 复旦大学义乌研究院 一种双波段锁相红外显微镜系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005257414A (ja) 2004-03-10 2005-09-22 Kobe Steel Ltd 光熱変換測定装置，その方法，及びセル
JP2007067423A (ja) 2006-09-29 2007-03-15 Toshiba Corp 光学式プロセスモニタ装置、光学式プロセスモニタ方法及び半導体装置の製造方法
JP2008089395A (ja) 2006-10-02 2008-04-17 Honda Instrument Service Co Ltd 光触媒計及び光能力測定方法並びにそれに用いるセンサヘッド

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4947034A (en) 1989-04-28 1990-08-07 International Business Machines Corporation Apertureless near field optical microscope
US5093580A (en) 1990-03-02 1992-03-03 Spectra-Tech, Inc. ATR objective and method for sample analyzation using an ATR crystal
JP3414122B2 (ja) * 1996-04-25 2003-06-09 横河電機株式会社 近赤外分光器
DE10228123B4 (de) 2002-06-24 2011-09-15 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren und Vorrichtungen zur Erfassung von optischen Nahfeldwechselwirkungssignalen
JP5442445B2 (ja) * 2006-11-20 2014-03-12 ルートヴィヒ‐マクシミリアンズ‐ウニヴェルジテート・ミュンヘン 高速熱光学的粒子特徴付け
US8001830B2 (en) 2007-05-15 2011-08-23 Anasys Instruments, Inc. High frequency deflection measurement of IR absorption
US7977636B2 (en) 2008-08-12 2011-07-12 Anasys Instruments, Inc. Infrared imaging using thermal radiation from a scanning probe tip
DE102010031189B4 (de) 2010-07-09 2014-04-03 Bruker Optik Gmbh ATR-Objektiv für ein IR-Mikroskop und Verfahren zu dessen Betrieb
US9220415B2 (en) * 2011-10-25 2015-12-29 Andreas Mandelis Systems and methods for frequency-domain photoacoustic phased array imaging
US9091594B2 (en) * 2011-11-25 2015-07-28 The United States Of America, As Represented By The Secretary Of The Navy Chemical mapping using thermal microscopy at the micro and nano scales
US10260953B2 (en) * 2016-08-11 2019-04-16 The Boeing Company Applique and method for thermographic inspection

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005257414A (ja) 2004-03-10 2005-09-22 Kobe Steel Ltd 光熱変換測定装置，その方法，及びセル
JP2007067423A (ja) 2006-09-29 2007-03-15 Toshiba Corp 光学式プロセスモニタ装置、光学式プロセスモニタ方法及び半導体装置の製造方法
JP2008089395A (ja) 2006-10-02 2008-04-17 Honda Instrument Service Co Ltd 光触媒計及び光能力測定方法並びにそれに用いるセンサヘッド

Also Published As

Publication number Publication date
EP3559644B1 (fr) 2022-03-02
US20210302341A1 (en) 2021-09-30
JP2020518787A (ja) 2020-06-25
EP3559644A1 (fr) 2019-10-30
WO2018115778A1 (fr) 2018-06-28
FR3061289A1 (fr) 2018-06-29
FR3061289B1 (fr) 2020-10-09
US11499929B2 (en) 2022-11-15

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