JP7245033B2 - Surface measuring device, surface measuring method, and surface measuring method for object having circular surface to be measured - Google Patents

Description

The present invention relates to a surface measurement technique for non-contact measurement of the state of a surface to be measured using a light beam.

Conventionally, in the technique described in Patent Document 1, by irradiating a laser beam onto a galvanomirror, the laser beam is reflected at an arbitrary position on the parabolic mirror, and the reflected laser beam is further reflected in the same direction by the parabolic surface of the parabolic mirror. A technique for measuring the distance between a laser light source and a measurement surface by irradiating a distance measurement object surface and measuring the reflected light from the measurement point is disclosed.

Japanese Unexamined Patent Application Publication No. 2008-190883

However, with a parabolic mirror, the reflected spot light has different curvatures in the two-dimensional directions of XY depending on the reflection location. For this reason, the spot light reflected by the parabolic mirror converges or diverges two-dimensionally, making it extremely difficult to correct the shape of the spot light. If the measurement is performed with insufficient correction, the distance measurement accuracy becomes unstable. I was afraid.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a surface measurement technique capable of improving distance measurement accuracy.

In order to achieve the above object, in the present invention, the reflected light from the first mirror that reflects the light beam from the light source is reflected by the second mirror, the light beam is irradiated to the object to be measured, and the first mirror or the second mirror reflects the light beam. The mirror is moved in the irradiation direction of the light beam from the light source to relatively move the first mirror and the second mirror, and the light beam reflected by the second mirror is directed in the same direction and moved with respect to the object to be measured. The distance between the light source and the irradiation portion of the object to be measured is measured by measuring the light beam reflected from the object to be measured.

That is, the first mirror and the second mirror are relatively moved, and the light beam reflected by the second mirror is directed in the same direction and moved with respect to the object to be measured, so that the shape of the spot light can be stabilized. It is possible to improve the distance measurement accuracy.

1 is a perspective view showing a brake master cylinder provided with a seal surface, which is an object to be measured in Embodiment 1. FIG. FIG. 3 is a block diagram showing the manufacturing process of the device under test according to the first embodiment; 1 is a schematic diagram showing a surface measuring device used in the measurement processing of Embodiment 1; FIG. FIG. 2 is a schematic diagram showing an irradiation method and an irradiation trajectory when the surface measuring apparatus of Embodiment 1 irradiates light onto a measurement surface; 1 is a cross-sectional view showing a surface measuring device of Example 1. FIG. FIG. 4 is a block diagram showing an inspection measurement flow in surface measurement processing using the surface measurement apparatus of embodiment 1; 4 is a front photograph showing a sealing surface measured by the surface measuring device of Example 1. FIG. FIG. 8 is a schematic diagram showing a flaw and an irradiation trajectory in the photograph shown in FIG. 7; FIG. 9 is a graph in which the irradiation locus (single-stroke spiral locus) shown in FIG. 8 is linearly extended, and the relationship with the measured distance at each position is plotted. FIG. 10 is a model diagram showing an example of specifying the relative relationship between the irradiation spot movement distance of the irradiation trajectory and the position on the seal surface based on the relationship between the radius and the rotation angle; FIG. 10 is a schematic diagram showing an irradiation method and an irradiation trajectory when a surface measuring device of a comparative example irradiates a measurement surface with light; FIG. 8 is a schematic diagram showing an irradiation method and an irradiation trajectory when the surface measuring device of Embodiment 2 irradiates light onto the measurement surface. FIG. 11 is a schematic diagram showing an irradiation method when the surface measuring device of Embodiment 3 irradiates light onto a measurement surface; FIG. 11 is a schematic diagram showing a shape change of a spot light on the sealing surface of Embodiment 3; FIG. 12 is a diagram showing surface state measurement processing of the crown surface of the piston according to the fourth embodiment; 10 is a graph plotting the relationship between the measured distance at each position and the irradiation trajectory (single-stroke spiral trajectory) on the crown surface of the piston according to Embodiment 4, which is linearly extended.

[Embodiment 1]
FIG. 1 is a perspective view showing a brake master cylinder provided with a sealing surface, which is an object to be measured in Embodiment 1. FIG. The brake master cylinder 1 is an automotive part that applies hydraulic pressure to a brake pad when the brake pad presses a brake rotor that rotates together with a vehicle tire to generate a braking force. The brake master cylinder 1 is formed by casting. A brake pipe is connected to the brake master cylinder 1 for supplying a brake hydraulic pressure supplied from a hydraulic pressure source (not shown) to a cylinder chamber formed in the brake master cylinder 1 .

A connection port where the brake master cylinder 1 and the brake pipe are connected is provided with a sealing surface 2 . The sealing surface 2 is machined into a tapered cross-section around the opening of the brake fluid passage by cutting with a milling machine. An O-ring is arranged on the seal surface 2 to provide a liquid-tight connection with the seal surface formed on the brake pipe. After casting the brake master cylinder 1, the seal surface 2 is formed with high surface precision by post-machining. Here, the brake fluid pressure is extremely high, and it is necessary to maintain a stable contact state between the O-ring and the seal surface 2. In order to measure the quality, we use a light beam to measure the surface condition and stabilize the quality.

FIG. 2 is a block diagram showing the manufacturing process of the device under test according to the first embodiment.
In step S1, a casting process or a forging process is performed. This forms a rough outer shape. In the case of the brake master cylinder 1, the housing of the brake master cylinder 1 is formed.
In step S2, an edge cutting process is performed. For example, runners and burrs at the time of casting are removed, and the sealing surface 2 is formed.

(Surface measurement processing)
In step S3, a machined part inspection step is performed. Specifically, a surface measurement process is performed to measure the machining accuracy of the machined surface using a light beam. Incidentally, the surface measurement processing will be described later.
In step S4, it is determined whether or not the result of inspection of the machined portion ensures the required accuracy. and put it into a blast furnace, etc., and reuse the material.

FIG. 3 is a schematic diagram showing a surface measuring device used in the measurement process of Embodiment 1. FIG.
The surface measuring device comprises a distance sensor 10 for receiving reflected light, a hollow rotary motor 11 formed so that a light beam can pass through, and a hollow rotary motor 11 that rotates integrally with the hollow rotary motor 11 so that the light beam can pass through the inside. A hollow inner cylindrical member 12, a hollow outer cylindrical member 13 which meshes with splines formed on the outer periphery of the hollow inner cylindrical member 12 via balls, and the hollow outer cylindrical member 13 is rotatable around the light beam axis. and a linear motion motor 14 that supports and is movable in the direction of the light beam axis.

The hollow inner cylindrical member 12 includes a first mirror support member 12a extending in the direction of the light beam axis, and a first mirror 12b attached to the first mirror support member 12a and having an inclination angle of 45 degrees with respect to the light beam axis. have The 1st mirror 12b of Embodiment 1 is a plane mirror. The hollow outer cylindrical member 13 has a second mirror support member 14a extending in the direction of the light beam axis, and a second mirror 14b attached to the second mirror support member 14a and having an inclination angle parallel to the first mirror 12a. . The second mirror 14b of Embodiment 1 is a plane mirror.

When the light beam is output from the reflected light receiving type distance sensor 10, it is irradiated to the first mirror 12b, and the irradiated light is reflected at right angles to the light beam axis to irradiate the second mirror 14b. The irradiation light applied to the second mirror 14b is further reflected at right angles by the second mirror 14b, reflected in a direction parallel to the light beam axis, and applied to the measurement surface. Hereinafter, the path from the reflected light receiving type distance sensor 10 to the measurement surface is referred to as a light projection path. The irradiation light irradiated to the measurement surface is reflected by the measurement surface, traces the light projection path, and is reflected to the reflected light receiving type distance sensor 10 . At this time, the reflected light-receiving distance sensor 10 receives the reflected light reflected by the measurement surface with the same optical axis or an optical axis having a divergence angle, thereby Measure distance. The optical axis for projecting light will be referred to as the light projecting axis, and the optical axis for taking the course will be referred to as the light receiving axis.

A triangulation type laser sensor is known as a reflected light receiving type distance sensor in which a light projecting axis and a light receiving axis are different from each other. Types in which the light projecting axis and the light receiving axis are coaxial include a white confocal sensor type, an FMCW (Frequency Modulated Continuous Wave) type, a laser pulse type, an optical comb type, and the like.

4A and 4B are schematic diagrams showing an irradiation method and an irradiation trajectory when the surface measuring apparatus according to the first embodiment irradiates the measurement surface with light. When the distance is measured by the above method, the hollow rotary motor 11 is rotated, and the linear motion motor 14 moves the hollow outer cylinder member 13 in the axial direction. The rotation of the hollow rotary motor 11 rotates both the first mirror 12b and the second mirror 14b, thereby moving the light beam in the circumferential direction of the measurement surface. The radial position at which the light beam reflected by the mirror 12b is reflected by the second mirror 14b is moved to the inner diameter side. By combining this rotational motion and linear motion, the irradiation trajectory of the light beam is helically irradiated onto the measurement surface as shown in the schematic front view of the measurement surface in FIG. By combining the rotation speed of the hollow rotary motor 11 and the axial movement speed of the direct-acting motor 14, the density of the helical irradiation trajectory can be adjusted, and the distance on the measurement surface can be measured with the density according to the required accuracy. . In addition, on the spiral irradiation locus, the diameter of the light spot of the light beam is always constant on the measurement surface, and by stabilizing the irradiation intensity distribution in the light spot, high measurement accuracy can be obtained.

In addition, in the measurement method of the first embodiment, the central area of the measurement plane is a non-detectable area. This is because the light beam of the reflected light receiving type distance sensor 10 is blocked by the first mirror 12a, forming an unmeasurable area. However, if the measuring surface is annularly formed like the sealing surface 2 of the first embodiment, there is no particular problem because the central area does not need to be detected in the first place.

(Example 1)
FIG. 5 is a sectional view showing a surface measuring device of Example 1 to which the invention of Embodiment 1 is applied. In Example 1, a triangulation type laser range sensor 101 is provided as the reflected light receiving type range sensor 10 . The triangulation type laser distance sensor 101 includes a light projecting portion 101a that projects a laser beam, a light receiving portion 101b that is arranged at a position different from the light projecting portion 101a and receives reflected light, and a laser beam that is incident from the light receiving portion 101b. and a line sensor 101c that reads light. The laser light projection axis of the laser light projected from the light projection part 101a is inclined with respect to the rotation axis of the hollow rotary motor 11, and the laser light reflected from the seal surface 2, which is the object to be measured, reaches the first mirror. The laser light receiving axis when reflected by 12 b and proceeding to the light receiving portion 101 b is also inclined with respect to the rotating shaft of the hollow rotary motor 11 .

When the distance between the light projecting part 101a and the sealing surface 2 changes, the position where the reflected light is reflected on the line sensor 101c according to the change in distance moves vertically in the case of FIG. The state of the seal surface 2 is measured based on this amount of movement. Incidentally, when the hollow rotary motor 11 rotates, the second mirror support member 14a also rotates together. At this time, since the second mirror 14b is radially spaced apart from the rotating shaft of the hollow rotary motor 11, a balancer or the like may be attached to the second mirror supporting member 14a in order to balance the rotation.

FIG. 6 is a block diagram showing an inspection measurement flow in surface measurement processing using the surface measurement apparatus of the first embodiment.
In step S31, the product is carried in and registered in the inspection and measurement POS. The inspection and measurement POS is a system for registering product serial numbers, etc., and attaching strings to data obtained by measurement.
In step S32, the product is measurably fixed.
In step S33, the measurement head attached to the tip of the robot hand is installed in the vicinity of the measurement section, and movement of the robot hand is prohibited. The measuring head is a box-shaped device in which a surface measuring device is built and which can be fixed to the tip of the robot hand.
In step S34, the reflected light receiving type distance sensor 10 starts spot irradiation on the seal surface 2, which is the target surface.
In step S35, the rotation of the first mirror 12b and the second mirror 12b is started.
In step S36, the rotation of the first mirror 12b and the second mirror 12b is continued up to the rotation angle threshold.
At step S37, the rotation of the first mirror 12b and the second mirror 12b is stopped.

In step S38, distance measurement by the reflected light receiving distance sensor 10 is started simultaneously with the rotation in step S35.
In step S39, the measured values obtained by the reflected light receiving type distance sensor 10 are stored at predetermined intervals.
In step S40, the distance measurement by the reflected light receiving type distance sensor 10 is stopped.

In step S41, translational movement of the second mirror 12b is started simultaneously with the rotation in step S35.
In step S42, the linear motion position of the second mirror 12b is moved to a predetermined position.
In step S43, the linear movement of the second mirror 12b is stopped and moved to the initial position.
In step S44, the measurement head of the robot hand is withdrawn from the vicinity of the measurement section.

In step S30, the information from steps S36, S39, and S42 is accumulated, and the rotational position information of the first mirror 12b and the second mirror 12b, the linear motion position information of the second mirror 12b, and the measured distance information are obtained. Link and acquire stereoscopic 3D data.

In step S45, the product is unfixed, and in step S4, it is determined whether or not the result of the inspection of the machined portion ensures the required accuracy. The process is performed, and if NG, the process proceeds to step S6, where the material is put into a blast furnace or the like, and the material is reused.

FIG. 7 is a front photograph showing the sealing surface measured by the surface measuring device of Example 1. FIG. This is a case in which a circular concave defect shown in FIG. 7A and a streaky concave defect shown in FIG. FIG. 8 is a schematic diagram showing the wound and the irradiation trajectory of the photograph shown in FIG. 7, and FIG. 9 shows the relationship between the measured distance at each position by extending the irradiation trajectory (single-stroke spiral trajectory) shown in FIG. The plotted graph, FIG. 10, is a model diagram showing an example of specifying the relative relationship between the irradiation spot movement distance of the irradiation trajectory and the position on the sealing surface by the relationship between the radius and the rotation angle.

The measured distance in FIG. 9 shows the irradiation position set in the upper part of the graph, and the surface position of the sealing surface 2 from the irradiation position as the measured distance. The dotted line indicates the irradiation surface reference set based on the specifications at the time of manufacture, and the dashed-dotted line indicates the convex judgment threshold value and the concave judgment threshold value offset by a preset tolerance from the irradiation surface reference. The measurement distance of is shown in bold practice.
Description will be made in order from the left side of the irradiation spot moving distance axis. Even if there are some dents on the outer peripheral side, it is determined that there is no effect on the sealing performance as long as it does not exceed the dent determination threshold value. Also, the defect shape is specified using the width of the concave portion in the moving distance direction. If the movement distance direction width of the concave portion is less than the concave determination threshold value, it is determined that the sealing property is not affected.

Next, in the portion shown in FIG. 8A, the depth of the concave portion is deeper than the concave determination threshold value, and three concave portions occur periodically. As shown in FIG. 8A, this means that the irradiation trajectory passes through the circular concave portion three times. Therefore, the position on the seal surface 2 is specified from the irradiation spot movement distance, the radial position R of the irradiation locus shown in FIG. can grasp.
Next, in the portion shown in FIG. 8B, the depth of the concave portion is deeper than the concave determination threshold value, the concave portion does not occur periodically, and the width in the moving distance direction is wide. As shown in FIG. 8B, this indicates that the irradiation trajectory passes along the inside of the streak-shaped concave portion. Therefore, the defect shape of the recess can be grasped based on the information of FIG.

Advantageous effects of the first embodiment will now be described. FIG. 11 is a schematic diagram showing an irradiation method and an irradiation trajectory when the surface measuring apparatus of the comparative example irradiates the measurement surface with light. In the comparative example, as the second mirror, a second mirror 14x having a concave curved surface around the entire circumference and a concave curved surface shape of a radial cross section passing through the light beam axis having a parabolic shape is adopted. It shows a case where the irradiation locus of the light beam on the measurement plane is formed in a spiral by rotating the beam axis and changing the tilt angle of the first mirror 12b.

In the case of the comparative example, the diameter of the light spot of the light beam on the spiral irradiation locus is significantly different between the central portion and the outer peripheral portion. Specifically, the closer to the outer periphery, the larger the diameter of the spot light. The machined surface of the seal face 2 is formed with fine grooves in the circumferential direction during machining with a cutting tool. At this time, there is a problem that the number of grooves of the processing marks on the measurement surface that traverses the spot light changes, and is affected by the unevenness of the processing marks. A certain spot light position has a large number of fine grooves, and another spot light position has a small number of fine grooves, making it difficult to stabilize the measurement accuracy.

On the other hand, in the surface measuring apparatus of Example 1, as shown in FIG. 4, the diameter of the spot light is the same at any radial position. Therefore, the number of fine grooves included in the spot light can be stabilized, and the measurement accuracy can be stabilized.

[Effect of Embodiment 1]
Hereinafter, in the first embodiment, the following effects are obtained.
(1) a reflected light receiving distance sensor 10 which is a light source for generating a light beam;
a first mirror 12b that reflects the light beam from the reflected light receiving type distance sensor 10;
a second mirror 14b that reflects the reflected light from the first mirror 12b and irradiates the light beam onto the seal surface 2, which is the object to be measured;
The second mirror 14b is moved in the irradiation direction of the light beam from the light source to move the first mirror 12b and the second mirror 14b relative to each other, and the light beam reflected by the second mirror 14b is oriented in the same direction while sealing. A straight motor 14 (first moving mechanism) that moves with respect to the surface 2;
a reflected light-receiving distance sensor 10 (distance measuring means) for measuring the distance between the reflected light-receiving distance sensor 10 and the irradiated portion of the sealing surface 2 by measuring the light beam reflected from the sealing surface 2;
provided.
Therefore, the shape of the spot light irradiated to the sealing surface 2 can be stabilized, and the measurement accuracy can be improved.

(2) It has a hollow rotating motor 11 (second moving mechanism) that rotates the first mirror 12b and the second mirror 14b about the irradiation direction of the light beam from the reflected light receiving type distance sensor 10 as an axis.
Therefore, the sealing surface 2 can be scanned without moving the measuring device, and the scanning accuracy can be improved.
(3) the first mirror 12b and the second mirror 14b are plane mirrors;
The reflected light from the first mirror 12b is reflected in the same direction as the light beam from the reflected light receiving type distance sensor 10 side.
Therefore, the diameter of the spot light with respect to the seal surface 2 is the same at any position, and the measurement accuracy can be stabilized.
(4) a first mirror support member 12a (first housing) that supports the first mirror 12b;
a second mirror support member 14a (second housing) that supports the second mirror 14b;
has
The first mirror support member 12a and the second mirror support member 14a are coupled so as to be movable in the same direction as the light beam from the reflected light receiving type distance sensor 10,
The first mirror support member 12a and the second mirror support member 14a are integrally supported so as to be rotatable around the light beam from the reflected light receiving distance sensor 10 as an axis.
Therefore, the position of the spot light on the sealing surface 2 can be moved with a simple structure.
(5) When the reflected light receiving type distance sensor 10 is a triangulation type distance sensor, it is possible to measure a change in unevenness of the seal surface 2 from a change in irradiation position due to a change in the angle of light, thereby improving measurement accuracy. .
(6) When the reflected light receiving type distance sensor 10 is a reflected light receiving type distance sensor, the light beam and the sensor can be integrally configured, and the configuration can be simplified.

(Embodiment 2)
Next, Embodiment 2 will be described. Since the basic configuration is the same as that of the first embodiment, only different points will be described. 12A and 12B are schematic diagrams showing an irradiation method and an irradiation trajectory when the surface measuring apparatus according to the second embodiment irradiates the measurement surface with light. In the first embodiment, the second mirror 14b, which is a plane mirror, is provided and is rotated by the hollow rotary motor 11 together with the first mirror 12b. On the other hand, in Embodiment 2, the second mirror 141b having a 45° conical shape is provided, only the first mirror 12b is rotated by the hollow rotating motor 11, and the second mirror 141b is rotated by the direct-acting motor 14 without being rotated. It was decided to move in the directional movement. By combining this rotational motion and linear motion, the irradiation trajectory of the light beam is helically irradiated onto the measurement surface as shown in the schematic front view of the measurement surface in FIG. 12 .

By combining the rotation speed of the hollow rotary motor 11 and the axial movement speed of the direct-acting motor 14, the density of the helical irradiation trajectory can be adjusted, and the distance on the measurement surface can be measured with the density according to the required accuracy. . Further, on the spiral irradiation trajectory, the shape of the light spot of the light beam is narrow in the inner diameter side area and wide in the outer diameter side area. However, the radial length of the spot light is the same throughout the region, and only the circumferential length is different. Therefore, it is possible to stabilize the measurement accuracy while eliminating the need for a mechanism for rotating the second mirror 141b.

(Embodiment 3)
Next, Embodiment 3 will be described. Since the basic configuration is the same as that of the second embodiment, only different points will be described. 13A and 13B are schematic diagrams showing an irradiation method when the surface measuring apparatus according to Embodiment 3 irradiates the measurement surface with light. In the second embodiment, only the first mirror 12b, which is a plane mirror, is rotated by the hollow rotary motor 11, and the second mirror 141b is axially moved by the linear motion motor 14 without rotating. On the other hand, in Embodiment 3, the surface of the first mirror 121b is a convex (cylindrical) or concave convex mirror, and the shape of the light spot of the light beam on the spiral irradiation trajectory is approximately in the radial direction. The difference is that the intermediate region is formed to be a perfect circle.

14A and 14B are schematic diagrams showing the shape change of the spot light on the sealing surface of the third embodiment. As shown in FIG. 14, since the shape of the light spot at the radial center portion is a perfect circle, it is possible to suppress the amount of change in the circumferential length of the light spot on the radial inner diameter side or the radial outer diameter side. can. In other words, compared with the case where the shape of the spot light is a perfect circle on the radially inner side, the amount of deformation on the radially outer side can be suppressed. Therefore, it is possible to stabilize the measurement accuracy while eliminating the need for a mechanism for rotating the second mirror 141b.

(Embodiment 4)
Next, Embodiment 4 will be described. 15A and 15B are diagrams showing the surface state measurement processing of the crown surface of the piston according to the fourth embodiment. In the first embodiment, the sealing surface of the brake master cylinder 1 is measured, but in the fourth embodiment, an example of measuring the piston crown surface of the engine is shown.
In step S101, a molten metal, which is a raw material for a piston, is put into a mold and cast into a rough piston shape.
In step S102, the casting surface of the crown surface of the piston is cut with a cutting tool. In the cutting step, the piston is fixed to a lathe, and while the piston is being rotated by the lathe, the surface of the crown face is shaved with a cutting tool to form the piston crown face P2. Spiral fine cutting traces are formed on the piston crown surface P2. Also in this case, the surface measuring apparatus can stabilize the measurement accuracy by stabilizing the radial size of the spot light.

In step S103, the process advances to the piston crown surface inspection step to detect the presence or absence of processing defects such as blowholes, scratches, and burrs. Specifically, a surface measurement process is performed to measure the machining accuracy of the machined surface using a light beam. Here, the object to be measured is particularly the outer peripheral region of the crown surface of the piston. This is because if the crown surface of the piston is scratched near the inner wall of the cylinder, the engine performance may be affected. Incidentally, the surface measurement processing will be described later.
In step S104, whether the piston crown surface P2 is good or bad is determined, and in either case, the measurement result is stored in the database, and the process proceeds to step S105.
In step S105, in the conveying process, those determined as non-defective products are carried out to the next process after step S106, and those determined as defective products are carried out as defective products in step S107.

FIG. 16 is a graph in which the irradiation trajectory (single-stroke spiral trajectory) on the piston crown surface P2 of Embodiment 4 is linearly extended, and the relationship with the measured distance at each position is plotted. The upper row is the profile when it is used as a reference, and the middle row is the profile when actually measured. The lower row is the difference between the upper and middle profiles. In the lower part, a convex determination threshold value is set in the positive direction, and a concave determination threshold value is set in the negative direction. If a convex portion or concave portion is detected exceeding the judgment threshold value, respectively, it is judged that there is a defect. Moreover, the width value of the convex portion and the concave portion can be detected to detect the state of the defect.

Conventionally, in detecting the state of the piston crown surface P2, there is a method of inspecting using a captured image. , it is difficult to determine the extent of the scratch in the depth direction. On the other hand, in Embodiment 4, the depth direction of the flaw can be measured using the light beam, and the spiral trajectory is set as the irradiation trajectory, so the width direction of the flaw can also be measured.

(Other embodiments)
As described above, the present invention has been described by taking the measurement of the sealing surface and the piston crown surface as specific examples in each of Embodiments 1 to 4, but the measurement object can be appropriately used for the machined surface of other machined parts. However, since the detection non-detectable region is formed by the first mirror, it is effective to apply the configuration having a portion that does not require measurement in the center.

1 Brake master cylinder 2 Seal surface 10 Reflected light receiving type distance sensor 11 Hollow rotary motor 12 Hollow inner cylinder member 12a First mirror support member 12b First mirror 13 Hollow outer cylinder member 14 Linear motion motor 14a Second mirror support member 14b 2nd mirror 121b 1st mirror (semi-cylindrical type)
141b second mirror (conical shape)
P2 piston crown

Claims (6)

a light source for generating a beam of light;
a first mirror that reflects the light beam from the light source;
a second mirror that reflects the reflected light from the first mirror and irradiates the object to be measured with a light beam;
moving the first mirror or the second mirror in the irradiation direction of the light beam from the light source to move the first mirror and the second mirror relative to each other; a first moving mechanism that moves the object to be measured while directing it in a direction;
a second movement mechanism that rotates the first mirror and/or the second mirror about the irradiation direction of the light beam from the light source;
distance measuring means for measuring a distance between a light source and an irradiated portion of the object to be measured by measuring a light beam reflected from the object to be measured;
The first mirror and the second mirror are plane mirrors,
The surface measuring apparatus, wherein the second mirror reflects the reflected light from the first mirror in the same direction as the light beam from the light source. In the surface measuring device according to claim 1,
a first housing supporting the first mirror;
a second housing that supports the second mirror;
has
the first housing and the second housing are coupled to be movable in the same direction as the light beam from the light source;
A surface measuring apparatus, wherein the first housing and the second housing are integrally supported so as to be rotatable about the light beam from the light source. In the surface measuring device according to claim 2,
The surface measuring device, wherein the distance measuring means is a triangulation type distance sensor. In the surface measuring device according to claim 2,
The surface measuring device, wherein the distance measuring means is a reflective light receiving type distance sensor. A surface measuring method in which a surface measuring device measures a surface of an object to be measured having a surface to be measured,
The surface measuring device
a light source for generating a beam of light;
a first mirror that is a plane mirror that reflects the light beam from the light source;
a second mirror, which is a plane mirror that reflects the reflected light from the first mirror in the same direction as the light beam from the light source to irradiate the object to be measured with the light beam;
with
While relatively moving the first mirror and the second mirror in the irradiation direction of the light beam from the light source, the first mirror and/or the second mirror are moved around the irradiation direction of the light beam from the light source. a step of rotating and moving the irradiation position with respect to the surface to be measured while directing the light beam reflected by the second mirror in the same direction;
measuring a distance between a light source and an irradiated portion of the object to be measured by measuring a light beam reflected from the object to be measured;
a step of identifying the unevenness of the surface to be measured from the distance between the light source and the plurality of irradiated portions of the object to be measured;
surface measurement method with A surface measuring method in which a surface measuring device measures a surface of an object having a circular surface to be measured,
The surface measuring device
a light source for generating a beam of light;
a first mirror that is a plane mirror that reflects the light beam from the light source;
a second mirror, which is a plane mirror that reflects the reflected light from the first mirror in the same direction as the light beam from the light source to irradiate the object to be measured with the light beam;
with
The object to be measured has a double circular surface to be measured,
rotating the first mirror and/or the second mirror about the direction of irradiation of the light beam while relatively moving the first mirror and the second mirror in the direction of irradiation of the light beam from the light source; rotating the irradiation position along the circular shape of the surface to be measured while directing the light beam reflected by the second mirror in the same direction;
measuring the distance between the light source and the irradiated portion of the surface to be measured by measuring reflected light from the surface to be measured irradiated with the light beam;
a step of identifying unevenness of the surface to be measured from the distance between the light source and a plurality of irradiated portions of the object to be measured;
A method for measuring the surface of an object having a circular surface to be measured.

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