JP2020085643A - Surface measurement device, surface measurement method, and surface measurement method of object including circular measurement surface - Google Patents

Abstract

To provide a surface measurement technique capable of improving distance measurement accuracy.SOLUTION: Reflection light from a first mirror for reflecting a light beam from a light source is reflected by a second mirror, so that the light beam is applied to a measurement object. The first or second mirror is moved in an irradiation direction of the light beam from the light source, so that the first and second mirrors are relatively moved, and the light beam reflected by the second mirror is moved to the measurement object while oriented to the same direction. Thus, the distance between the light source and an irradiation part of the measurement object is measured by measuring the light beam reflected by the measurement object.SELECTED DRAWING: Figure 4

Description

TECHNICAL FIELD The present invention relates to a surface measurement technique that uses a light beam to measure the state of a surface to be measured in a non-contact manner.

Conventionally, in the technique described in Patent Document 1, by irradiating a galvanometer mirror with laser light, the laser light is reflected at an arbitrary position of the parabolic mirror, and the reflected laser light is further reflected in the same direction by the parabolic surface of the parabolic mirror. Then, a technique is disclosed in which the distance measurement target surface is irradiated and the reflected light from the measurement target is measured to measure the distance between the laser light source and the measurement surface.

JP, 2008-190883, A

However, in the parabolic mirror, the reflected spot light has a different curvature in the two-dimensional XY direction depending on the reflected portion. Therefore, the spot light reflected by the parabolic mirror is condensed or diverged two-dimensionally, so it is very difficult to correct the shape of the spot light, and if the correction is insufficiently performed, the distance measurement accuracy becomes unstable. There was a fear.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a surface measurement technique capable of improving distance measurement accuracy.

In order to achieve the above-mentioned object, in the present invention, the reflected light from the first mirror that reflects the light beam from the light source is reflected by the second mirror, and the measured beam is irradiated with the light beam. The mirror is moved in the irradiation direction of the light beam from the light source to relatively move the first mirror and the second mirror, and the light beam reflected by the second mirror is directed in the same direction and moved with respect to the DUT. Then, the distance between the light source and the irradiation part of the measured object is measured by measuring the light beam reflected from the measured object.

That is, since the first mirror and the second mirror are moved relative to each other and the light beam reflected by the second mirror is directed in the same direction and moved with respect to the object to be measured, the shape of the spot light is stabilized. The distance measurement accuracy can be improved.

FIG. 3 is a perspective view showing a brake master cylinder provided with a seal surface which is an object to be measured according to the first embodiment. FIG. 3 is a block diagram showing a process of manufacturing a device under test according to the first embodiment. FIG. 3 is a schematic diagram illustrating a surface measuring device used in the measurement process of the first embodiment. 3A and 3B are schematic diagrams illustrating an irradiation method and an irradiation trajectory when the surface measuring apparatus of the first embodiment irradiates a measurement surface with light. 3 is a cross-sectional view showing the surface measuring device of Example 1. FIG. 5 is a block diagram showing an inspection measurement flow in a surface measurement process using the surface measurement apparatus of Example 1. FIG. 3 is a front view photograph showing a sealing surface measured by the surface measuring apparatus of Example 1. It is a schematic diagram showing the scratches and irradiation trajectory of the photograph shown in FIG. It is the graph which extended the irradiation locus|trajectory (one-stroke writing spiral trajectory) shown in FIG. 8 linearly, and plotted the relationship with the measurement distance in each position. It is a model figure which shows the example which pinpoints the relative relationship of the irradiation spot moving distance of an irradiation locus, and the position on a seal surface by the relationship of a radius and a rotation angle. It is the schematic which shows the irradiation method when the surface measuring apparatus of a comparative example irradiates a measurement surface with light, and an irradiation locus. FIG. 7 is a schematic diagram showing an irradiation method and an irradiation trajectory when the surface measuring apparatus of the second embodiment irradiates a measurement surface with light. FIG. 9 is a schematic diagram showing an irradiation method when the surface measuring apparatus of the third embodiment irradiates a measurement surface with light. 9A and 9B are schematic views showing changes in the shape of spot light on the seal surface according to the third embodiment. It is a figure showing the surface state measurement process of the piston crown surface of Embodiment 4. 13 is a graph in which the irradiation trajectory (one-stroke writing spiral trajectory) on the piston crown surface of the fourth embodiment is linearly extended and the relationship with the measured distance at each position is plotted.

[Embodiment 1]
FIG. 1 is a perspective view showing a brake master cylinder having a seal surface which is an object to be measured according to the first embodiment. The brake master cylinder 1 is an automobile component that applies hydraulic pressure to a brake pad when a brake rotor that rotates integrally with a tire of a vehicle is pressed by the brake pad to generate a braking force. The brake master cylinder 1 is formed by casting. The brake master cylinder 1 is connected to a brake pipe for supplying a brake hydraulic pressure supplied from a hydraulic pressure source (not shown) to a cylinder chamber formed in the brake master cylinder 1.

A seal surface 2 is formed at a connection port that connects the brake master cylinder 1 and the brake pipe. The sealing surface 2 is processed by a milling machine with a cutting tool so that the periphery of the opening of the brake fluid passage is tapered. An O-ring is arranged on the sealing surface 2 and liquid-tightly connects with the sealing surface formed on the brake pipe. The seal surface 2 is formed with high surface accuracy by post-processing after casting the brake master cylinder 1. Here, since the brake fluid pressure is extremely high and it is necessary to maintain a stable contact state between the O-ring and the seal surface 2, whether or not the smoothness of the surface of the seal surface 2 is ensured. In order to measure such, the surface condition is measured using a light beam to stabilize the quality.

FIG. 2 is a block diagram showing a process of manufacturing the DUT according to the first embodiment.
In step S1, a casting process or a forging process is performed. As a result, a rough outer shape is formed. In the case of the brake master cylinder 1, the housing of the brake master cylinder 1 is formed.
In step S2, an end cutting process is performed. For example, runners and burrs at the time of shooting are removed, and the sealing surface 2 is formed.

(Surface measurement processing)
In step S3, a cutting process inspection step is performed. Specifically, a surface measurement process of measuring the processing accuracy of the cutting surface with a light beam is performed. The surface measurement process will be described later.
In step S4, it is determined whether or not the inspection result of the cut portion secures the required accuracy. If OK, the process proceeds to step S5 to perform the assembly process of assembling other parts, and if NG, step S6. Proceed to step 1 and put it in a blast furnace, etc., and reuse the material.

FIG. 3 is a schematic diagram showing a surface measuring device used in the measurement processing of the first embodiment.
The surface measuring device includes a reflected light receiving type distance sensor 10, a hollow rotary motor 11 formed so that a light beam can pass through it, and a hollow rotary motor 11 that rotates integrally with the hollow rotary motor 11 so that a light beam can pass therethrough. The hollow inner tubular member 12, the hollow outer tubular member 13 that meshes with the spline formed on the outer periphery of the hollow inner tubular member 12 via balls, and the hollow outer tubular member 13 are rotatable about the light beam axis. A linear motion motor 14 that supports and is movable in the direction of the light beam axis.

The hollow inner cylindrical member 12 is attached to the first mirror support member 12a extending in the light beam axis direction, and the first mirror 12b attached to the first mirror support member 12a and having an inclination angle of 45 degrees with respect to the light beam axis. Have. The first mirror 12b of the first embodiment is a plane mirror. The hollow outer cylinder member 13 has a second mirror support member 14a extending in the optical beam axis direction and a second mirror 14b attached to the second mirror support member 14a and having an inclination angle parallel to the first mirror 12a. . The second mirror 14b of the first embodiment is a plane mirror.

When a light beam is output from the reflected light receiving type distance sensor 10, it is irradiated onto the first mirror 12b, and the irradiated light is reflected at a right angle to the light beam axis to irradiate the second mirror 14b. The irradiation light applied to the second mirror 14b is further reflected at a right angle by the second mirror 14b, reflected in the direction parallel to the light beam axis, and applied to the measurement surface. Hereinafter, the path from the reflected light receiving distance sensor 10 to the measurement surface will be referred to as a light projection path. The irradiation light applied to the measurement surface is reflected by the measurement surface, traces the projection path, and is reflected to the reflected light receiving type distance sensor 10. At this time, the reflected light receiving type distance sensor 10 receives the reflected light reflected on the measurement surface by the same optical axis or an optical axis having a divergence angle so that the reflected light receiving type distance sensor 10 and the measurement surface. Measure the distance. The optical axis when projecting light is described as the projecting axis, and the optical axis when taking the lesson is described as the light receiving axis.

A triangulation type laser sensor is known as a reflected light receiving type distance sensor having a light emitting axis and a light receiving axis different from each other as a type of receiving light with a divergence angle. Examples of types in which the light-projecting axis and the light-receiving axis are coaxial include a white confocal sensor system, an FMCW system (Frequency Modulated Continuous Wave), a laser pulse system, and an optical comb system.

FIG. 4 is a schematic diagram showing an irradiation method and an irradiation trajectory when the surface measuring apparatus of the first embodiment irradiates the measurement surface with light. When the distance is measured by the above method, the hollow rotary motor 11 is rotated, and the hollow outer cylinder member 13 is moved in the axial direction by the linear motion motor 14. The rotation of the hollow rotary motor 11 causes the first mirror 12b and the second mirror 14b to rotate together, thereby moving the light beam in the circumferential direction of the measurement surface, and at the same time, by the axial movement of the linear motion motor 14, The radial position when the light beam reflected by the mirror 12b is reflected by the second mirror 14b is moved to the inner diameter side. By the combination of the rotational movement and the rectilinear movement, the irradiation trajectory of the light beam is spirally irradiated to the measurement surface as shown in the schematic front view of the measurement surface in FIG. By combining the rotation speed of the hollow rotary motor 11 and the axial movement speed of the linear motion motor 14, the density of the spiral irradiation trajectory can be adjusted, and the distance of the measurement surface can be measured at the density according to the required accuracy. .. Further, on the spiral irradiation locus, the diameter of the spot light of the light beam is always constant on the measurement surface, and by stabilizing the irradiation intensity distribution within the spot light, high measurement accuracy can be obtained.

In the measuring method of the first embodiment, the central area of the measurement surface is the undetectable area. This is because the light beam of the reflected light receiving type distance sensor 10 is blocked by the first mirror 12a and an unmeasurable region is formed. However, if it is a measurement surface formed in an annular shape like the seal surface 2 of the first embodiment, it is not necessary to detect the central region in the first place, so there is no particular problem.

(Example 1)
FIG. 5 is a sectional view showing a surface measuring apparatus of Example 1 to which the invention of Embodiment 1 is applied. In the first embodiment, as the reflected light receiving type distance sensor 10, a triangulation type laser distance sensor 101 is provided. The triangulation type laser distance sensor 101 includes a light projecting unit 101a that projects a laser beam, a light receiving unit 101b that is arranged at a position different from the light projecting unit 101a, and that receives reflected light, and a laser that is incident from the light receiving unit 101b. And a line sensor 101c that reads light. The laser projection axis of the laser light projected from the projection unit 101a is inclined with respect to the rotation axis of the hollow rotary motor 11, and the laser light reflected from the seal surface 2 as the DUT is the first mirror. The laser receiving axis when the light is reflected by 12b and proceeds to the light receiving section 101b is also inclined with respect to the rotation axis of the hollow rotary motor 11.

When the distance between the light projecting portion 101a and the seal surface 2 changes, the position where the reflected light is reflected on the line sensor 101c moves in the vertical direction in accordance with the change in the distance in the case of FIG. The state on the seal surface 2 is measured by this movement amount. When the hollow rotary motor 11 rotates, the second mirror support member 14a also rotates integrally. At this time, since the second mirror 14b is arranged radially away from the rotation shaft of the hollow rotary motor 11, a balancer or the like may be attached to the second mirror support member 14a in order to balance the rotation.

FIG. 6 is a block diagram showing an inspection measurement flow in the surface measurement processing using the surface measurement apparatus of the first embodiment.
In step S31, the product is carried in and registered in the inspection measurement POS. The inspection/measurement POS is a system for registering a serial number of a product and the like, and attaching a string with the data obtained by the measurement.
In step S32, the product is fixed so that it can be measured.
In step S33, the measuring head attached to the tip of the robot hand is installed near the measuring unit, and the movement of the robot hand is prohibited. The measuring head is a box-shaped device in which a surface measuring device is incorporated and which can be fixed to the tip of a robot hand.
In step S34, the reflected light receiving type distance sensor 10 starts spot irradiation on the seal surface 2 which is the target surface.
In step S35, rotation of the first mirror 12b and the second mirror 12b is started.
In step S36, the first mirror 12b and the second mirror 12b are continuously rotated to the rotation angle threshold.
In step S37, the rotation of the first mirror 12b and the second mirror 12b is stopped.

In step S38, the distance measurement by the reflected light receiving type distance sensor 10 is started simultaneously with the rotation of step S35.
In step S39, the values measured by the reflected light receiving type distance sensor 10 are stored at predetermined intervals.
In step S40, the distance measurement by the reflected light receiving type distance sensor 10 is stopped.

In step S41, the linear movement of the second mirror 12b is started simultaneously with the rotation of step S35.
In step S42, the linear movement position of the second mirror 12b is moved to a predetermined position.
In step S43, the linear movement of the second mirror 12b is stopped and moved to the initial position.
In step S44, the measuring head of the robot hand is retracted from the vicinity of the measuring unit.

In step S30, the information from steps S36, S39, and S42 is accumulated, and the rotational position information of the first mirror 12b and the second mirror 12b, the linear movement position information of the second mirror 12b, and the measured distance information are stored. The three-dimensional 3D data is obtained by linking.

In step S45, the product fixing is released, and in step S4, it is determined whether or not the inspection result of the cut portion secures the required accuracy. If OK, the process proceeds to step S5 to assemble other parts. If the process is not successful, the process proceeds to step S6 and is put into a blast furnace or the like to reuse the material.

FIG. 7 is a front view photograph showing a seal surface measured by the surface measuring apparatus of the first embodiment. This is a case where a circular concave defect shown in FIG. 7A and a streak concave defect shown in FIG. 7B (hereinafter, these defects are also referred to as scratches). FIG. 8 is a schematic diagram showing the scratches and the irradiation trajectory of the photograph shown in FIG. 7, and FIG. 9 shows the relationship between the irradiation trajectory (one-stroke writing spiral trajectory) shown in FIG. The plotted graph, FIG. 10, is a model diagram showing an example in which the relative relationship between the irradiation spot movement distance of the irradiation trajectory and the position on the seal surface is specified by the relationship between the radius and the rotation angle.

In the measurement distance of FIG. 9, the irradiation position is set at the upper part of the graph, and the surface position of the seal surface 2 from the irradiation position is represented as the measurement distance. Illuminated surface reference set based on the specifications at the time of manufacturing is shown by dotted lines, and convex and concave determination thresholds and recessed judgment thresholds that have been offset by a preset difference from the irradiated surface reference are shown by dashed-dotted lines. The measurement distance of is shown in bold practice.
The description will be made in order from the left side of the irradiation spot movement distance axis. Even if there is some depression on the outer peripheral side, it is determined that the sealability is not affected as long as it does not exceed the depression determination threshold value. Further, the defect shape is specified by using the width of the concave portion in the moving distance direction. If the width of the recess in the moving distance direction is less than the recess determination threshold value, it is determined that the sealability is not affected.

Next, in the portion shown in FIG. 8A, the depth of the recesses is deeper than the recess determination threshold value, and three locations are periodically generated. This means that the irradiation locus passes through the circular concave portion three times as shown in FIG. Therefore, the position on the seal surface 2 is specified from the irradiation spot moving distance, the radial position R of the irradiation locus shown in FIG. 10, and the rotation angle position θ, and the defect shape of the recess is determined based on the information of FIG. You can figure it out.
Next, in the portion shown in FIG. 8B, the depth of the recess is deeper than the recess determination threshold value, and the recesses do not occur periodically, and the width in the moving distance direction is wide. This indicates that the irradiation trajectory passes along the inside of the streak-shaped recess as shown in FIG. 8(B). Therefore, the defect shape of the recess can be grasped based on the information of FIG.

Here, the superior operation of the first embodiment will be described. FIG. 11 is a schematic diagram showing an irradiation method and an irradiation trajectory when the surface measuring apparatus of the comparative example irradiates the measurement surface with light. In the comparative example, as the second mirror, a second mirror 14x having a concave curved surface on the entire circumference and a parabolic concave curved shape in a radial cross section passing through the light beam axis is adopted. A case where the irradiation trajectory of the light beam on the measurement surface is formed in a spiral shape by rotating the beam axis and changing the tilt angle of the first mirror 12b is shown.

In the case of the comparative example, the diameter of the spot light of the light beam greatly differs between the central portion and the outer peripheral portion on the spiral irradiation locus. Specifically, the diameter of the spot light increases as it approaches the outer circumference. On the processed surface of the seal surface 2, fine grooves are formed in the circumferential direction during the bite processing. At this time, there is a problem in that the number of grooves of a processing mark that traverses the spot light changes on the measurement surface and is affected by the unevenness of the processing mark. It is difficult to stabilize the measurement accuracy because the number of fine grooves is large at a certain spot light position and the number of fine grooves is small at another spot light position.

On the other hand, in the surface measuring device of Example 1, as shown in FIG. 4, the diameter of the spot light is the same at any radial position. Therefore, the number of fine grooves included in the spot light can be stabilized, and the measurement accuracy can be stabilized.

[Effects of Embodiment 1]
Hereinafter, in the first embodiment, the following operational effects are obtained.
(1) a reflected light receiving type distance sensor 10 which is a light source for generating a light beam,
A first mirror 12b for reflecting the light beam from the reflected light receiving type distance sensor 10,
A second mirror 14b that reflects the reflected light from the first mirror 12b and irradiates a light beam to the seal surface 2 that is the object to be measured;
The second mirror 14b is moved in the irradiation direction of the light beam from the light source to relatively move the first mirror 12b and the second mirror 14b, and the light beam reflected by the second mirror 14b is directed in the same direction and sealed. A straight road motor 14 (first moving mechanism) for moving with respect to the surface 2,
A reflected light receiving type distance sensor 10 (a distance measuring means) for measuring a distance between the reflected light receiving type distance sensor 10 and an irradiated portion of the seal surface 2 by measuring a light beam reflected from the sealing surface 2;
Equipped with.
Therefore, the shape of the spot light with which the seal surface 2 is irradiated can be stabilized, and the measurement accuracy can be improved.

(2) It has a hollow rotary motor 11 (second moving mechanism) that rotates the first mirror 12b and the second mirror 14b about the irradiation direction of the light beam from the reflected light receiving distance sensor 10.
Therefore, the seal surface 2 can be scanned without moving the measuring device, and the scanning accuracy can be improved.
(3) The first mirror 12b and the second mirror 14b are plane mirrors,
The reflected light from the first mirror 12b is reflected in the same direction as the light beam from the reflected light receiving type distance sensor 10 side.
Therefore, the diameter of the spot light with respect to the seal surface 2 is the same at any position, and the measurement accuracy can be stabilized.
(4) a first mirror support member 12a (first housing) that supports the first mirror 12b,
A second mirror support member 14a (second housing) that supports the second mirror 14b;
Have
The first mirror support member 12a and the second mirror support member 14a are movably coupled in the same direction as the light beam from the reflected light receiving type distance sensor 10,
The first mirror support member 12a and the second mirror support member 14a are integrally and rotatably supported about the light beam from the reflected light receiving distance sensor 10 as an axis.
Therefore, the position of the spot light on the seal surface 2 can be moved with a simple configuration.
(5) When the reflected light receiving type distance sensor 10 is a triangulation type distance sensor, the unevenness of the seal surface 2 can be measured from the irradiation position change associated with the light angle change, and the measurement accuracy can be improved. ..
(6) When the reflected light receiving type distance sensor 10 is a reflected light receiving type distance sensor, the light beam and the sensor can be integrally configured, and the configuration can be simplified.

(Embodiment 2)
Next, a second embodiment will be described. Since the basic configuration is the same as that of the first embodiment, only different points will be described. FIG. 12 is a schematic diagram showing an irradiation method and an irradiation trajectory when the surface measuring apparatus of the second embodiment irradiates the measurement surface with light. In the first embodiment, the second mirror 14b, which is a plane mirror, is provided and is rotated by the hollow rotary motor 11 together with the first mirror 12b. On the other hand, in the second embodiment, the second mirror 141b having a 45° conical shape is provided, only the first mirror 12b is rotated by the hollow rotary motor 11, and the second mirror 141b is rotated by the linear motion motor 14 without rotating. It was decided to move in the direction movement. By the combination of the rotational movement and the rectilinear movement, the irradiation trajectory of the light beam is spirally irradiated to the measurement surface as shown in the schematic front view of the measurement surface in FIG.

By combining the rotation speed of the hollow rotary motor 11 and the axial movement speed of the linear motion motor 14, the density of the spiral irradiation trajectory can be adjusted, and the distance of the measurement surface can be measured at the density according to the required accuracy. .. Further, on the spiral irradiation locus, the shape of the spot light of the light beam is narrow in the inner diameter side region and wide in the outer diameter side region. However, since the radial lengths of the spot lights are all the same in the region and only the circumferential lengths are different, the number of fine grooves formed on the processed surface of the seal surface 2 does not change. Therefore, it is possible to stabilize the measurement accuracy while eliminating the mechanism for rotating the second mirror 141b.

(Embodiment 3)
Next, a third embodiment will be described. Since the basic configuration is similar to that of the second embodiment, only different points will be described. FIG. 13 is a schematic diagram showing an irradiation method when the surface measuring apparatus of the third embodiment irradiates the measurement surface with light. In the second embodiment, only the first mirror 12b, which is a plane mirror, is rotated by the hollow rotation motor 11, and the second mirror 141b is moved in the axial direction by the linear motion motor 14 without rotating. On the other hand, in the third embodiment, the surface of the first mirror 121b is a convex mirror with a convex shape (kamaboko shape) or a concave shape, and the shape of the spot light of the light beam is substantially radial in the spiral irradiation locus. The difference is that it is formed so as to form a perfect circle in the intermediate region.

FIG. 14 is a schematic diagram showing a change in shape of spot light on the seal surface of the third embodiment. As shown in FIG. 14, since the shape of the spot light at the central portion in the radial direction is a perfect circle, it is possible to suppress the amount of change in the circumferential length of the spot light on the radially inner side or the radially outer side. it can. In other words, the amount of deformation on the outer side in the radial direction can be suppressed as compared with the case where the shape of the spot light is a perfect circle on the inner side in the radial direction. Therefore, it is possible to stabilize the measurement accuracy while eliminating the mechanism for rotating the second mirror 141b.

(Embodiment 4)
Next, a fourth embodiment will be described. FIG. 15: is a figure showing the surface state measurement process of the piston crown surface of Embodiment 4. In the first embodiment, the seal surface of the brake master cylinder 1 is measured, but in the fourth embodiment, an example of measuring the piston crown surface of the engine is shown.
In step S101, molten metal, which is the material of the piston, is charged into the mold and cast into a rough piston shape.
In step S102, the casting surface of the piston crown surface is cut by a bite process. In the cutting process, the piston is fixed to the lathe, and the surface of the crown surface is ground with a cutting tool while rotating the piston on the lathe to form the piston crown surface P2. A fine spiral cutting mark is formed on the piston crown surface P2. Also in this case, the surface measuring device can stabilize the measurement accuracy by stabilizing the radial size of the spot light.

In step S103, the process proceeds to the piston crown surface inspection step, and it is detected whether or not there is a processing defect such as a porosity hole, a scratch, or a burr. Specifically, a surface measurement process of measuring the processing accuracy of the cutting surface with a light beam is performed. Here, the object of measurement is particularly the outer peripheral area of the piston crown surface. This is because if the crown surface of the piston is damaged near the inner wall of the cylinder, the performance of the engine may be affected. The surface measurement process will be described later.
In step S104, the quality of the piston crown surface P2 is determined, and in any case, the measurement result is stored in the database and the process proceeds to step S105.
In step S105, in the carrying process, the products determined to be non-defective are carried out to the process subsequent to step S106, and those judged to be defective are carried out as defective products in step S107.

FIG. 16 is a graph in which the irradiation trajectory (single-stroke spiral trajectory) on the crown surface P2 of the fourth embodiment is linearly extended and the relationship with the measured distance at each position is plotted. The upper row is the profile when the reference is used, and the middle row is the profile when actually measured. The lower row is the difference between the upper and middle profiles. In the lower row, the convex determination threshold value is set on the positive direction side, and the concave determination threshold value is set on the negative direction side. When a convex portion or a concave portion is detected in excess of the determination threshold value, it is determined that there is a defect. Further, it is possible to detect the state of the defect by detecting the width value of the convex portion or the concave portion.

Conventionally, there is a method of inspecting using a captured image in detecting the state of the piston crown surface P2, but in the case of a captured image, it is difficult to determine whether the defective portion is a concave portion or a convex portion, and , It is difficult to determine the depth of the scratch. On the other hand, in the fourth embodiment, the depth direction of the scratch can be measured using the light beam, and the irradiation trajectory is set to the spiral trajectory, so that the width direction of the scratch can also be measured.

(Other embodiments)
As described above, in each of the first to fourth embodiments, the invention of the present application has been described by taking the measurement of the seal surface and the piston crown surface as specific examples. However, since the undetectable region is formed by the first mirror, it is effective to apply it to the configuration in which the measurement-free portion is provided in the central portion.

1 Brake Master Cylinder 2 Sealing Surface 10 Reflected Light Receiving Type Distance Sensor 11 Hollow Rotation Motor 12 Hollow Inner Cylinder Member 12a First Mirror Support Member 12b First Mirror 13 Hollow Outer Cylinder Member 14 Linear Motor 14a Second Mirror Support Member 14b 2 mirror 121b 1st mirror (kamaboko type)
141b Second mirror (conical shape)
P2 piston crown

Claims (17)

A light source that generates a light beam,
A first mirror for reflecting the light beam from the light source;
A second mirror that reflects the reflected light from the first mirror and irradiates a DUT with a light beam;
The first mirror or the second mirror is moved toward the irradiation direction of the light beam from the light source to relatively move the first mirror and the second mirror, and the light beams reflected by the second mirror are the same. A first moving mechanism that moves the object to be measured while pointing it in a direction,
Distance measuring means for measuring the distance between the light source and the irradiated portion of the measured object by measuring the light beam reflected from the measured object,
A surface measuring device comprising: The surface measuring device according to claim 1,
A surface measuring apparatus comprising a second moving mechanism that rotates the first mirror and/or the second mirror about an irradiation direction of a light beam from the light source as an axis. The surface measuring device according to claim 2,
The first mirror and the second mirror are plane mirrors,
A surface measuring device characterized in that the reflected light from the first mirror is reflected in the same direction as the light beam from the light source. The surface measuring device according to claim 3,
A first housing supporting the first mirror;
A second housing supporting the second mirror;
Have
The first housing and the second housing are movably coupled in the same direction as the light beam from the light source,
The surface measuring device, wherein the first housing and the second housing are integrally and rotatably supported about a light beam from the light source as an axis. The surface measuring device according to claim 4,
The surface measuring apparatus, wherein the distance measuring means is a triangulation type distance sensor. The surface measuring device according to claim 4,
The surface measuring apparatus, wherein the distance measuring means is a reflection/light receiving type distance sensor. The surface measuring device according to claim 2,
The first mirror is a plane mirror,
The second mirror is a cylindrical mirror,
A surface measuring device characterized in that the reflected light from the first mirror is reflected in the same direction as the light beam from the light source. The surface measuring device according to claim 7,
A first housing supporting the first mirror;
A second housing supporting the second mirror;
The first housing and the second housing are movably coupled in the same direction as the light beam from the light source,
The surface measuring apparatus, wherein the first housing is rotatably supported about a light beam from the light source as an axis. The surface measuring device according to claim 2,
The first mirror is a convex mirror,
The second mirror is a conical mirror,
A surface measuring device characterized in that the reflected light from the first mirror is reflected in the same direction as the light beam from the light source. The surface measuring device according to claim 9,
The surface measuring device according to claim 1, wherein the convex mirror of the first mirror is formed so that a light beam reflected at a central position of the conical mirror of the second mirror has a substantially circular curvature. The surface measuring device according to claim 10,
A first housing supporting the first mirror;
A second housing supporting the second mirror;
The first housing and the second housing are movably coupled in the same direction as the light beam from the light source,
The surface measuring apparatus, wherein the first housing is rotatably supported about a light beam from the light source as an axis. A light source that generates a light beam,
A first mirror for reflecting the light beam from the light source;
A second mirror that reflects the reflected light from the first mirror in the same direction as the light beam from the light source to irradiate the object to be measured with the light beam;
Equipped with
While the first mirror and the second mirror are relatively moved toward the irradiation direction side of the light beam from the light source, the first mirror and/or the second mirror are centered on the irradiation direction of the light beam from the light source. Rotating and moving the irradiation position with respect to the measured surface while directing the light beam reflected by the second mirror in the same direction;
Measuring the distance between the light source and the irradiated portion of the measured object by measuring the light beam reflected from the measured object;
A step of identifying the unevenness of the surface to be measured from the distance between the light source and the plurality of irradiated portions of the object to be measured,
And a surface measuring method. The surface measuring method according to claim 12,
The first mirror and the second mirror are plane mirrors,
A surface measuring method, characterized in that the reflected light from the first mirror is reflected in the same direction as the light beam from the light source. The surface measuring method according to claim 13,
A surface measuring method, characterized in that the reflected light from the first mirror is reflected in the same direction as the light beam from the light source. The surface measuring method according to claim 12,
The first mirror is a plane mirror,
The second mirror is a cylindrical mirror,
A surface measuring method comprising rotating the first mirror about a light beam from the light source as an axis. The surface measuring method according to claim 12,
The first mirror is a convex mirror,
The second mirror is a conical mirror,
A surface measuring method comprising rotating the first mirror about a light beam from the light source as an axis. A method for measuring the surface of an object having a circular surface to be measured,
A light source that generates a light beam,
A first mirror for reflecting the light beam from the light source;
A second mirror that reflects the reflected light from the first mirror in the same direction as the light beam from the light source to irradiate the object to be measured with the light beam;
Equipped with
The measured object has a double circular measured surface,
Rotating the first mirror and/or the second mirror about the irradiation direction of the light beam as an axis while relatively moving the first mirror and the second mirror toward the irradiation direction of the light beam from the light source, Rotating the irradiation position along the circle of the surface to be measured while directing the light beam reflected by the second mirror in the same direction;
Measuring the distance between the light source and the irradiated portion of the measured surface by measuring the reflected light from the measured surface irradiated with the light beam;
A step of identifying the unevenness of the measured surface from the distance between the light source and the plurality of irradiated portions of the measured object;
A method for measuring the surface of an object having a circular surface to be measured.