JP7191434B2 - 光照射装置、およびこれを備える露光装置 - Google Patents

光照射装置、およびこれを備える露光装置 Download PDF

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Publication number
JP7191434B2
JP7191434B2 JP2022525083A JP2022525083A JP7191434B2 JP 7191434 B2 JP7191434 B2 JP 7191434B2 JP 2022525083 A JP2022525083 A JP 2022525083A JP 2022525083 A JP2022525083 A JP 2022525083A JP 7191434 B2 JP7191434 B2 JP 7191434B2
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Prior art keywords
light
light irradiation
polarizing element
irradiation unit
heat sink
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JP2022525083A
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Japanese (ja)
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JPWO2022153672A1 (ko
JPWO2022153672A5 (ko
Inventor
智彦 井上
健一 山下
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Phoenix Electric Co Ltd
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Phoenix Electric Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)
JP2022525083A 2021-01-13 2021-11-19 光照射装置、およびこれを備える露光装置 Active JP7191434B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021003723 2021-01-13
JP2021003723 2021-01-13
PCT/JP2021/042631 WO2022153672A1 (ja) 2021-01-13 2021-11-19 光照射装置、およびこれを備える露光装置

Publications (3)

Publication Number Publication Date
JPWO2022153672A1 JPWO2022153672A1 (ko) 2022-07-21
JP7191434B2 true JP7191434B2 (ja) 2022-12-19
JPWO2022153672A5 JPWO2022153672A5 (ko) 2022-12-19

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ID=82447135

Family Applications (1)

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JP2022525083A Active JP7191434B2 (ja) 2021-01-13 2021-11-19 光照射装置、およびこれを備える露光装置

Country Status (5)

Country Link
JP (1) JP7191434B2 (ko)
KR (1) KR20230101902A (ko)
CN (1) CN116635781A (ko)
TW (1) TW202227889A (ko)
WO (1) WO2022153672A1 (ko)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005251588A (ja) 2004-03-04 2005-09-15 Hamamatsu Photonics Kk 光照射装置
JP2011217241A (ja) 2010-04-01 2011-10-27 Ushio Inc Ｌｅｄ線状光源装置および原稿読取装置用光照射装置
JP2017102219A (ja) 2015-11-30 2017-06-08 ウシオ電機株式会社 光照射装置および光照射方法
JP2018017952A (ja) 2016-07-29 2018-02-01 ウシオ電機株式会社 光照射装置および光照射方法
CN209014871U (zh) 2018-07-16 2019-06-21 香港科技大学 用于光取向的曝光头和曝光系统

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04216614A (ja) * 1990-12-17 1992-08-06 Mitsubishi Electric Corp レーザ光照射装置
JP2007017475A (ja) 2005-07-05 2007-01-25 Sanyo Epson Imaging Devices Corp ラビング処理方法及びこのラビング処理方法を用いた液晶表示パネルの製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005251588A (ja) 2004-03-04 2005-09-15 Hamamatsu Photonics Kk 光照射装置
JP2011217241A (ja) 2010-04-01 2011-10-27 Ushio Inc Ｌｅｄ線状光源装置および原稿読取装置用光照射装置
JP2017102219A (ja) 2015-11-30 2017-06-08 ウシオ電機株式会社 光照射装置および光照射方法
JP2018017952A (ja) 2016-07-29 2018-02-01 ウシオ電機株式会社 光照射装置および光照射方法
CN209014871U (zh) 2018-07-16 2019-06-21 香港科技大学 用于光取向的曝光头和曝光系统

Also Published As

Publication number Publication date
WO2022153672A1 (ja) 2022-07-21
JPWO2022153672A1 (ko) 2022-07-21
CN116635781A (zh) 2023-08-22
KR20230101902A (ko) 2023-07-06
TW202227889A (zh) 2022-07-16

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