JP7173838B2 - Cleaning method and cleaning equipment - Google Patents

Description

The present invention relates to a cleaning method and cleaning apparatus.

In a cleaning apparatus for cleaning a wafer, a spinner table holds the wafer, a two-fluid nozzle is positioned above the wafer, and a mixture of water and air is jetted from the two-fluid nozzle and the spinner table is rotated. This cleans the wafer. After cleaning, the wafer is dried by blowing air from a drying nozzle positioned above the wafer (see Patent Documents 1 and 2, for example).

Japanese Unexamined Patent Application Publication No. 2008-130818 JP 2015-109324 A

As described above, the conventional cleaning apparatus has two nozzles, a two-fluid nozzle and a drying nozzle, and therefore has a complicated structure. Therefore, instead of providing a drying nozzle, it is conceivable to inject only air from a two-fluid nozzle to dry the wafer.

However, in this case, water is drawn into the air flow by the ejector effect, so the air ejected from the two-fluid nozzle contains moisture. If the air is jetted from the two-fluid nozzle for a long period of time, the moisture contained in the air is reduced, so the two-fluid nozzle can be used as a drying nozzle. However, this method is inefficient because it takes time to start drying. Therefore, it is difficult to omit the drying nozzle from a cleaning apparatus equipped with a two-fluid nozzle.

An object of the present invention is to dry an object to be cleaned such as a wafer using a two-fluid nozzle.

A cleaning method (main cleaning method) of the present invention is a cleaning method for cleaning an object to be cleaned by spraying a mixture of air and water onto the object to be cleaned from a two-fluid nozzle , wherein the two-fluid The nozzle communicates with an air intake section for taking in air, a water intake section for taking in water, the air intake section and the water intake section, and air taken in from the air intake section and water intake section from the water intake section. a holding step for holding the object to be cleaned on a spinner table, comprising a mixing portion for mixing the taken-in water to generate a mixed liquid, and an injection port for injecting the mixed liquid ; and the two fluids. A cleaning step of injecting the mixed liquid from the injection port of the nozzle to clean the object to be washed, a discharge step of discharging the water in the two-fluid nozzle from the injection port, and the injection port of the two-fluid nozzle. a drying step of jetting only air from a nozzle to dry the object to be washed, wherein the discharging step comprises cutting off the supply of water to the mixing portion of the two-fluid nozzle, and supplying air; By intermittently supplying air to the mixing section by repeatedly shutting off the air , the water remaining in the mixing section is discharged from the injection port when the air is supplied, and the water intake is performed when the air is shut off. It includes discharging the water that has moved from the inlet to the mixing section from the injection port when air is supplied .

A cleaning apparatus (main cleaning apparatus) of the present invention is a cleaning apparatus for cleaning an object to be cleaned by the cleaning method, and comprises a spinner table holding the object to be cleaned and rotating the spinner table around its center. a rotating means for rotating the two-fluid nozzle; a water valve disposed in a water pipe connecting the two-fluid nozzle and the water supply source; and an air pipe connecting the two-fluid nozzle and the air supply source. and a control means for controlling the water valve and the air valve, wherein the control means closes the water valve and repeatedly opens and closes the air valve to intermittently operate the two-fluid nozzle . By supplying air to the mixing section, the water remaining in the mixing section is discharged from the injection port when the air is supplied, and the water transferred from the water intake section to the mixing section when the air is shut off is The object to be cleaned is dried by ejecting the air from the injection port when the air is supplied, and then continuously opening the air valve to inject the air toward the object to be cleaned.

In this cleaning method and cleaning apparatus, the supply of water to the two-fluid nozzle is cut off, and the supply and cutoff of air are repeated to intermittently supply air to the two-fluid nozzle, so that the water in the two-fluid nozzle is removed. can be gradually reduced to such an extent that the occurrence of the ejector effect can be suppressed. As a result, the object to be cleaned can be satisfactorily dried using the air ejected from the two-fluid nozzle. Therefore, the drying nozzle and the mechanism for moving the drying nozzle in the radial direction of the object to be cleaned are not required.

1 is a perspective view showing the configuration of a spinner cleaning device according to one embodiment of the present invention; FIG. FIG. 4 is an explanatory diagram showing the configuration of a mixed solution injection part of the spinner cleaning device; FIG. 3 is an explanatory diagram showing the configuration of a two-fluid nozzle of a mixed liquid injection section; It is explanatory drawing which shows a two-fluid nozzle in a washing process. FIG. 5 is an explanatory diagram showing the two-fluid nozzle at the start of the discharge process; FIG. 10 is an explanatory view showing the two-fluid nozzle in a state where only air is supplied in the discharge process; FIG. 10 is an explanatory view showing the two-fluid nozzle in a state where the supply of air is cut off in the discharge process; FIG. 10 is an explanatory view showing the two-fluid nozzle in a state where only air is being supplied again in the discharge process; FIG. 11 is an explanatory view showing the two-fluid nozzle in a state where the supply of air is cut off again in the discharge process; FIG. 10 is an explanatory diagram showing the two-fluid nozzle in a state where only air is supplied again and again in the discharge process; FIG. 5 is an explanatory diagram showing the two-fluid nozzle when the discharge process is completed; 4 is a graph showing flow rates of air and water supplied to a two-fluid nozzle in a cleaning process, a discharging process, and a drying process;

A spinner cleaning apparatus 1 shown in FIG. 1 cleans an object W to be cleaned using a mixture of air and water. The spinner cleaning apparatus 1 includes a lower cylindrical portion 10, a container portion 2 surrounding the cylindrical portion 10, a rotating shaft 3 extending upward from the interior of the cylindrical portion 10, and an upper end of the rotating shaft 3 attached to the upper end of the rotating shaft 3 to hold an object W to be cleaned by suction. The spinner table 4, the mixed liquid injection part 6 for injecting the mixed liquid to the object W held on the spinner table 4, the cover 7 for suppressing the scattering of the mixed liquid, and the spinner cleaning device 1 are controlled. It includes control means 8 for controlling.

The cylindrical portion 10 mainly functions as a device base in the spinner cleaning device 1 . A flange portion 100 extending radially outward of the cylindrical portion 10 is provided at the lower end of the cylindrical portion 10 . The flange portion 100 has a plurality of screw holes, and can be connected to a base such as a grinding device (not shown) with bolts or the like.

The container part 2 is integrally formed with the cylindrical part 10 so as to surround the upper part of the cylindrical part 10 . The outer shape of the container part 2 is formed, for example, on a polygon. A drain pipe 201 is connected to the bottom plate of the container part 2 and communicates with a drain device 202 .

The rotating shaft 3 extends in the Z-axis direction, and the upper end of the rotating shaft 3 is fixed to the center of the spinner table 4 . A lower end side of the rotating shaft 3 is connected to a motor (not shown) that rotates the rotating shaft 3 . This motor is housed inside the cylindrical portion 10 . The rotating shaft 3 corresponds to an example of rotating means for rotating the spinner table 4 about its center.

The spinner table 4 has a circular outer shape and has a holding surface 5 at its center. The holding surface 5 is made of a porous material or the like, and adsorbs the object W to be cleaned. The holding surface 5 is communicated with a suction path (both not shown) that passes through the inside of the rotating shaft 3 and communicates with a suction source. The spinner table 4 sucks and holds the object W to be cleaned by the holding surface 5 due to the suction force of the suction source. A connecting member 41 is arranged below the spinner table 4 . The connecting member 41 prevents the mixture from entering the cylindrical portion 10 .

The cover 7 for suppressing scattering of the mixture includes an upper cover 70 that covers the top of the container portion 2 , side covers 71 that can surround the sides of the spinner table 4 , and bracket covers 72 .

The side cover 71 is formed in a tubular shape and positioned inside the container part 2 . An outwardly extending flange portion 710 is formed on the upper edge of the side cover 71 . The side cover 71 can be moved up and down along the Z-axis direction with respect to the container part 2 by an air cylinder 79 .

The air cylinder 79 has a cylinder tube 791 fixed to the side surface of the container portion 2 and a piston rod 790 inserted into the cylinder tube 791 . The upper end of piston rod 790 is fixed to flange portion 710 of side cover 71 . As the internal pressure of the cylinder tube 791 changes, the piston rod 790 moves up and down along the Z-axis direction, and the side cover 71 moves up and down accordingly.

The side cover 71 is lowered to open the spinner table 4 when the object W to be cleaned is attached to or detached from the spinner table 4 . On the other hand, when cleaning and drying the object W to be cleaned, the side cover 71 rises to a closed state covering the side portion of the spinner table 4, thereby suppressing scattering of the mixed liquid.

The plate-shaped bracket cover 72 is fixed to the upper side surface of the container portion 2 on the -X direction side with fasteners such as bolts. The central portion of the bracket cover 72 is provided with a cutout portion (not shown) for disposing an air cylinder 79, for example. A piston rod 790 of the air cylinder 79 moves up and down within this notch.

The upper cover 70 is formed in the same polygonal shape as the container portion 2, and is fixed to the upper end portion of the bracket cover 72 with fasteners such as bolts. As shown in FIG. 1, a viewing window 701 made of a transparent material such as an acrylic plate is provided at substantially the center of the upper cover 70 . The user can check the state of the object W being cleaned from the +Z direction through the viewing window 701 .

The mixed liquid injection section 6 is arranged above the container section 2 and injects the mixed liquid onto the object to be cleaned W held on the spinner table 4 .
As shown in FIG. 2, the liquid mixture injection part 6 is configured to be rotatable together with a shaft 61 extending in the Z-axis direction. That is, the shaft 61 has a driven gear 612 at its end, and the driven gear 612 meshes with a drive gear 613 connected to a turning motor 614 . The mixed liquid injection unit 6 rotates about the shaft 61 as a rotation axis by the rotational force of the turning motor 614 that is transmitted to the shaft 61 via the driving gear 613 and the driven gear 612 . As a result, the liquid mixture injection unit 6 can move between a cleaning position above the spinner table 4 from the center to the outer periphery and a retracted position away from above the spinner table 4 .
Note that the swing motor 614 may be directly connected to the shaft 61 without using the driven gear 612 and the drive gear 613 .

Further, as shown in FIG. 2, the mixed liquid injection unit 6 includes an air pipe 62, a water pipe 63 provided along the air pipe 62, and two pipes attached to the ends of the air pipe 62 and the water pipe 63. A fluid nozzle 64 is provided.
Furthermore, the mixed liquid injection unit 6 includes an air supply source 621 connected to the end of the air pipe 62, an air valve 622 provided in the air pipe 62, a water supply source 631 connected to the end of the water pipe 63, and water It has a water valve 632 provided in the pipe 63 .

A portion of the air pipe 62 extends inside the shaft 61 and the other portion extends laterally from the upper end of the shaft 61, forming a substantially inverted L shape. . The air pipe 62 connects the two-fluid nozzle 64 and the air supply source 621 .
One end of the water pipe 63 is connected to a water supply source 631 provided outside the side cover 71 . The water pipe 63 is arranged to penetrate the side cover 71 , contact the shaft 61 , and extend along the shaft 61 and the air pipe 62 to the two-fluid nozzle 64 . A water pipe 63 connects the two-fluid nozzle 64 and a water supply source 631 .

The air valve 622 is used to adjust the amount of air flowing from the air supply source 621 to the air pipe 62 . Water valve 632 is used to regulate the amount of water flowing from water supply source 631 to water pipe 63 . These air valve 622 and water pipe flange 633 are controlled by the control means 8 . That is, the amount of water flowing through the water pipe 63 and the amount of air flowing through the air pipe 62 are controlled by the control means 8 .

The two-fluid nozzle 64 cleans the object W to be cleaned by injecting a mixture of air and water. As shown in FIG. 3, the two-fluid nozzle 64 includes an air intake portion 641 that takes in air supplied from the air pipe 62, a water intake portion 642 that takes in water supplied from the water pipe 63, and a mixture of air and water. A mixing portion 643 in which a mixed liquid is generated and an injection port 644 for injecting the mixed liquid are provided.

The air pipe 62 includes a hollow air tube 624 and an air pipe flange 623 provided at the tip of the air tube 624 . An air pipe flange 623 of the air pipe 62 is attached to the air intake portion 641 of the two-fluid nozzle 64 . Therefore, air from the air supply source 621 is supplied from the air intake portion 641 to the two-fluid nozzle 64 via the air valve 622 , the air tube 624 of the air pipe 62 and the air pipe flange 623 .

Furthermore, the water pipe 63 includes a hollow water tube 634 and a water pipe flange 633 attached to the tip of the water tube 634 . A water pipe flange 633 of the water pipe 63 is attached to the water intake portion 642 of the two-fluid nozzle 64 . Therefore, water from the water supply source 631 is supplied from the water intake portion 642 to the two-fluid nozzle 64 via the water valve 632 , the water tube 634 of the water pipe 63 and the water pipe flange 633 .

The mixing section 643 communicates with the air intake section 641 and the water intake section 642 . In the mixing section 643, the air taken in from the air intake section 641 and the water taken in from the water intake section 642 are mixed to form a mixed liquid, which is a two-fluid cleaning liquid. This mixed liquid is injected from the injection port 644 . As shown in FIG. 3, part of the mixing part 643 is located between the air intake part 641 and the injection port 644 and forms part of the air flow path.

Next, the operation of the spinner cleaning device 1 will be described.

(1) Holding Step In the spinner cleaning apparatus 1 , first, the object to be cleaned W is held by the spinner table 4 . As shown in FIG. 1, the object W to be cleaned is, for example, a circular semiconductor wafer, and a device (not shown) is formed on the surface Wa of the object W to be cleaned. The back surface Wb of the object W to be cleaned is, for example, ground by a grinding device (not shown), and is the surface to be cleaned by the spinner cleaning device 1 . The object to be cleaned W after grinding is held by, for example, a robot hand (not shown) and carried from the grinding device to the spinner cleaning device 1 .

In the holding step, the control means 8 controls the air cylinder 79 to lower the piston rod 790 , thereby lowering the side cover 71 and storing it in the container portion 2 . As a result, the space between the upper cover 70 and the container portion 2 is opened, and the robot hand holding the object W to be cleaned can enter and exit. Then, the robot hand enters a predetermined position inside the spinner cleaning device 1, the object W to be cleaned is transported onto the spinner table 4, and the object W to be cleaned is placed on the holding surface so that the back surface Wb faces upward. 5.

After that, the control means 8 sucks the holding surface 5 of the spinner table 4 using the suction source and the suction path communicating with the holding surface 5 . Thereby, a negative pressure is generated on the surface of the holding surface 5 . The holding surface 5 sucks and holds the object W to be cleaned by this negative pressure. As a result, the rear surface Wb of the object W to be cleaned is exposed.

Next, the control means 8 controls the air cylinder 79 to raise the piston rod 790 , thereby raising the side cover 71 from inside the container portion 2 . As a result, the space between the upper cover 70 and the container portion 2 is closed by the side cover 71 to form an enclosed space for cleaning and drying the object W to be cleaned.

(2) Washing Step In this step, the control means 8 controls the turning motor 614 to place the liquid mixture injection section 6 at the washing position above the spinner table 4 . As a result, the two-fluid nozzle 64 of the liquid mixture injection section 6 shown in FIG. 2 is positioned above the object W to be cleaned.
The control means 8 controls a motor (not shown) to rotate the rotary shaft 3 . As a result, the spinner table 4 holding the object W to be cleaned rotates around its center.

Also, the control means 8 opens the air valve 622 and the water valve 632 . As a result, as shown in FIG. 4, air from the air supply source 621 is supplied to the two-fluid nozzle 64 through the air pipe 62, and water from the water supply source 631 is supplied through the water pipe 63. It is supplied to the two-fluid nozzle 64 . 4 to 11, the arrow A indicates that air is flowing in the air pipe 62, and the arrow H indicates that water is flowing in the water pipe 63. As shown in FIG.

Further, as shown in FIG. 12, in the cleaning process performed between times t0 and t1, the flow rate of air in the air pipe 62 and the flow rate of water in the water pipe 63 are substantially constant. In FIG. 12, the flow rate of air is indicated by a solid line, and the flow rate of water is indicated by a broken line.

In the two-fluid nozzle 64, as shown in FIG. 4, the supplied air and water are mixed in the mixing section 643 to generate a liquid mixture. This mixed liquid is jetted from the jet port 644 of the two-fluid nozzle 64 toward the object to be cleaned W rotating together with the spinner table 4 (see FIG. 3). As a result, the entire back surface Wb of the object W to be cleaned is cleaned.

Most of the liquid mixture used for washing the object W to be washed flows down from the object W to be washed into the container portion 2 shown in FIG.
Also, part of the mixture becomes droplets and adheres to the upper cover 70 of the cover 7 , and then flows down along the side cover 71 into the container 2 and is drained toward the drainage device 202 .

(3) Discharging Process In this process, the water in the two-fluid nozzle 64 is discharged. This step consists of interrupting the supply of water to the two-fluid nozzle 64 and intermittently supplying air to the two-fluid nozzle 64 by repeating supply and interruption of air to the two-fluid nozzle 64. , including discharging the water inside the two-fluid nozzle 64 . That is, the control means 8 repeatedly opens and closes the air valve 622 to supply air to the two-fluid nozzle 64 intermittently, thereby discharging the water in the two-fluid nozzle 64 .

In this step, first, the control means 8 closes the air valve 622 and the water valve 632 (see FIG. 3) for a period of time t1 to t2 (for example, about 1 second; see FIG. 12). Thereby, as shown in FIG. 5, the supply of air and water to the two-fluid nozzle 64 is cut off. At this time, in the two-fluid nozzle 64 , water is accumulated in the water intake portion 642 and the mixing portion 643 .

Next, the control means 8 opens the air valve 622 while keeping the water valve 632 closed during the time t2-t3 (for example, about 2 seconds; see FIG. 12). Thereby, only air is supplied to the two-fluid nozzle 64, as shown in FIG. In addition, in the discharging process, the control means 8 makes the air flow rate higher than that in the cleaning process (see FIG. 12). Due to this supply of air, in the two-fluid nozzle 64, part of the water staying in the mixing section 643, that is, the water in the part forming part of the air flow path in the mixing section 643 and the water in the vicinity thereof is removed. , is ejected from the ejection port 644 . Also, due to the pressure increase in the mixing section 643 due to the supply of air, part of the water in the mixing section 643 moves to the water intake section 642 as indicated by the arrow K1. Therefore, in the mixing portion 643, water remains only in a portion surrounding the tip of the air intake portion 641 (a portion not forming an air flow path).

Further, the control means 8 closes the air valve 622 while keeping the water valve 632 closed during the time t3-t4 (for example, about 1 second; see FIG. 12). Thereby, as shown in FIG. 7, the supply of air and water to the two-fluid nozzle 64 is cut off. At this time, in the two-fluid nozzle 64, the pressure in the mixing section 643 decreases (because it becomes atmospheric pressure), so part of the water in the water intake section 642 flows into the mixing section 643 as indicated by the arrow K2. move. Therefore, the two-fluid nozzle 64 is again in a state in which water is accumulated in the water intake portion 642 and the mixing portion 643 . However, since part of the water is discharged between times t2 and t3, the amount of water in the two-fluid nozzle 64 is less in the state shown in FIG. 7 than in the state shown in FIG. .

After that, the control means 8 opens the air valve 622 while keeping the water valve 632 closed during the time t4-t5 (for example, about 2 seconds; see FIG. 12). As a result, air is supplied to the two-fluid nozzle 64 as shown in FIG. part is ejected from the ejection port 644 . Also, due to the pressure increase in the mixing section 643 due to the supply of air, part of the water in the mixing section 643 moves to the water intake section 642 as indicated by the arrow K1. Therefore, in the mixing portion 643 , water remains only in a portion surrounding the tip of the air intake portion 641 . Since some of the water is ejected from the injection port 644, the remaining amount of water in the mixing section 643 is less than the state shown in FIG.

Next, the control means 8 closes the air valve 622 while keeping the water valve 632 closed during the time t5-t6 (for example, about 1 second; see FIG. 12). As a result, the supply of air and water to the two-fluid nozzle 64 is cut off as shown in FIG. 9, similarly to the state shown in FIG. At this time, in the two-fluid nozzle 64, the pressure in the mixing section 643 decreases (because it becomes atmospheric pressure), so the water in the water intake section 642 moves into the mixing section 643 as indicated by arrow K2. Therefore, the two-fluid nozzle 64 is in a state where water is accumulated in the water intake portion 642 and the mixing portion 643 again and again. However, since part of the water is discharged between times t2 and t3 and between times t4 and t5, the state shown in FIG. The amount of water in fluid nozzle 64 is decreasing.

Further, the control means 8 opens the air valve 622 while keeping the water valve 632 closed during time t6-t7 (for example, about 2 seconds; see FIG. 12). As a result, as shown in FIG. 10 , air is supplied to the two-fluid nozzle 64 and part of the water remaining in the mixing section 643 is ejected from the ejection port 644 . Also, due to the pressure increase in the mixing section 643 due to the supply of air, part of the water in the mixing section 643 moves to the water intake section 642 as indicated by the arrow K1. In addition, since some of the water is further ejected from the injection port 644, the water in the mixing section 643 is further reduced from the state shown in FIG. 8, and almost no water remains. In addition, since the water pressure in the water intake portion 642 is lowered by jetting water multiple times, even when the supply of air to the two-fluid nozzle 64 is stopped (time t7 to t8; see FIG. 12), as shown in FIG. As shown, surface tension prevents water in water intake portion 642 from leaking into mixing portion 643 .

(4) Drying Process In this process, the control means 8 jets only air from the two-fluid nozzle 64 to dry the object W to be cleaned. That is, after time t8 (see FIG. 12), the control means 8 continuously opens the air valve 622 while keeping the water valve 632 closed. In the drying process, the control means 8 sets the flow rate of air to the same level as in the discharging process. As a result, air is continuously jetted from the injection port 644 of the two-fluid nozzle 64 toward the object W to be cleaned, and the object W to be cleaned is dried.

It should be noted that, as described above, the water in the mixing section 643 has almost disappeared at the final stage of the discharging process. Therefore, in the drying process, it is possible to suppress the occurrence of a so-called ejector effect in which water remaining in the two-fluid nozzle 64 is drawn into the air and ejected. Therefore, it becomes possible to blow dry air onto the object W to be cleaned, so that the object W to be cleaned can be satisfactorily dried.

As described above, in the spinner cleaning apparatus 1, in the discharge process, the supply of water to the two-fluid nozzle 64 is cut off, and the supply and cutoff of air are repeated to intermittently supply air to the two-fluid nozzle 64. there is As a result, when air is supplied, the water in the mixing portion 643 forming a part of the air flow path is discharged, and when the air is cut off, other portions (such as the water intake portion 642) of the two-fluid nozzle 64 are discharged. The water remaining in the air can be put into the mixing section 643, and this water can be discharged when the next air is supplied. Therefore, by repeating air supply and cutoff, it is possible to gradually reduce the amount of water remaining in the two-fluid nozzle 64 to the extent that the ejector effect can be suppressed. Accordingly, in the drying process, the air jetted from the two-fluid nozzle 64 can be used to satisfactorily dry the object W to be cleaned.

As described above, in the spinner cleaning apparatus 1, the object to be cleaned W can be dried using the mixed liquid injection section 6 without providing a drying nozzle. Therefore, the spinner cleaning apparatus 1 has a simple configuration that does not include a drying nozzle and a mechanism for moving the drying nozzle in the radial direction of the object W to be cleaned. Therefore, the spinner cleaning device 1 can be manufactured at low cost.

1: Spinner cleaning device, 3: Rotating shaft, 4: Spinner table, 5: Holding surface,
8: control means,
6: mixture injection part, 61: shaft, 612: driven gear, 613: driving gear,
614: swing motor, 62: air pipe, 621: air supply source, 622: air valve,
623: air pipe flange, 624: air tube,
63: water pipe, 631: water supply source, 632: water valve, 633: water pipe flange,
634: water tube,
64: two-fluid nozzle, 641: air intake section, 642: water intake section, 643: mixing section,
644: injection port,
W: Object to be washed

Claims (2)

A cleaning method for cleaning an object to be cleaned by injecting a mixture of air and water from a two-fluid nozzle onto the object to be cleaned,
The two-fluid nozzle communicates with an air intake portion for taking in air, a water intake portion for taking in water, the air intake portion and the water intake portion, and the air taken in from the air intake portion and the water intake portion are communicated with each other. A mixing part that mixes with water taken in from the intake part to generate a mixed liquid, and an injection port that injects the mixed liquid,
a holding step of holding the object to be cleaned on a spinner table;
a cleaning step of injecting the mixed liquid from the injection port of the two -fluid nozzle to clean the object to be cleaned;
a discharge step of discharging the water in the two-fluid nozzle from the injection port ;
a drying step of drying the object to be cleaned by injecting only air from the injection port of the two-fluid nozzle;
with
The discharging step includes interrupting the supply of water to the mixing portion of the two-fluid nozzle, and intermittently supplying air to the mixing portion by repeatedly supplying and interrupting the supply of air. water remaining in the part is discharged from the injection port when air is supplied, and water moved from the water intake part to the mixing part when air is shut off is discharged from the injection port when air is supplied . including
cleaning method. A cleaning apparatus for cleaning an object to be cleaned by the cleaning method according to claim 1,
a spinner table holding the object to be cleaned;
rotating means for rotating the spinner table about its center;
the two-fluid nozzle;
a water valve disposed in a water pipe connecting the two-fluid nozzle and a water supply source;
an air valve disposed in an air pipe connecting the two-fluid nozzle and an air supply source;
a control means for controlling the water valve and the air valve;
The control means
By closing the water valve and repeatedly opening and closing the air valve to intermittently supply air to the mixing portion of the two-fluid nozzle, the water remaining in the mixing portion is removed from the injection port when the air is supplied. While discharging, the water transferred from the water intake portion to the mixing portion when the air is cut off is discharged from the injection port when the air is supplied, and then
The object to be washed is dried by continuously opening the air valve and injecting air toward the object to be washed.
cleaning equipment.

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