JP7170038B2 - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
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- JP7170038B2 JP7170038B2 JP2020521211A JP2020521211A JP7170038B2 JP 7170038 B2 JP7170038 B2 JP 7170038B2 JP 2020521211 A JP2020521211 A JP 2020521211A JP 2020521211 A JP2020521211 A JP 2020521211A JP 7170038 B2 JP7170038 B2 JP 7170038B2
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- 230000001902 propagating effect Effects 0.000 claims description 8
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- 230000007246 mechanism Effects 0.000 description 20
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
- C23C16/5096—Flat-bed apparatus
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- H01—ELECTRIC ELEMENTS
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20221—Translation
- H01J2237/20235—Z movement or adjustment
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- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
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Description
次に、実施形態に係るプラズマ処理装置の構成について説明する。以下では、プラズマ処理の対象とされた被処理体として、半導体ウェハ(以下、ウェハと称する。)に対してプラズマ処理により成膜を行うプラズマ処理装置を例に説明する。図1は、実施形態に係るプラズマ処理装置の概略構成の一例を示す断面図である。プラズマ処理装置100は、処理容器1と、載置台2と、上部電極3と、排気部4と、ガス供給機構5と、制御部6とを有している。
2 載置台
21、21a~21e ヒータ
22 電極
31 昇降部
31a 昇降機構
32 フランジ部
50、50a~50e、 配線
51 配線
52 配線
53 配線
55 配管
56 配管
57 配管
60 フィルタ
61 ヒータ電源
62 直流電源
63 整合器
64 第1高周波電源
65 ガス供給源
66 冷媒ユニット
70 静電チャック
71 基台
74 誘電部
75 平板部
76 柱状部
77 中空部
78 隙間
80、80a~80j 貫通穴
81 給電端子
86 給電端子
87 接続端子
88 接続端子
89 接続端子
90 コネクタ
91 接続端子
95 シール
96 シール
97 シール
100 プラズマ処理装置
W ウェハ
Claims (8)
- プラズマ処理の対象とされた被処理体が載置される載置台を支持し、プラズマ処理に用いられる配線が配置された支持部と、
前記配線の端部に接続され、前記配線を伝播するノイズを減衰するフィルタ部と、
前記支持部および前記フィルタ部を一体として昇降する昇降部と、
を有し、
前記フィルタ部は、前記支持部と導通して等電位とされ、
前記支持部は、前記配線を収容する貫通穴が形成された、
ことを特徴とするプラズマ処理装置。 - 前記フィルタ部は、前記支持部に固定された
ことを特徴とする請求項1に記載のプラズマ処理装置。 - 前記支持部は、導電性を有し、接地電位とされた
ことを特徴とする請求項1に記載のプラズマ処理装置。 - 前記配線は、絶縁性部材によって周囲が覆われて前記貫通穴内に静止するように配置された
ことを特徴とする請求項3に記載のプラズマ処理装置。 - 前記載置台は、給電により発熱するヒータが設けられ、
前記配線は、前記ヒータに給電する給電配線とされた
ことを特徴とする請求項1に記載のプラズマ処理装置。 - 前記支持部は、前記載置台を対向する平板状の平板部と、前記平板部と支持し、円柱状とされ、円柱の軸に沿って大気雰囲気の中空部が形成された柱状部を有し、
前記載置台に高周波電力を供給する給電配線が前記中空部に前記柱状部の内壁面と間隔を空けて配置された
ことを特徴とする請求項1に記載のプラズマ処理装置。 - 前記支持部は、前記配線が複数設けられ、
前記フィルタ部は、複数の前記配線に対応して複数設けられ、前記支持部の下部に設けられたフランジ部の下面に周方向に対して均等な配置となるように固定された
ことを特徴とする請求項1に記載のプラズマ処理装置。 - プラズマ処理の対象とされた被処理体が載置される載置台を支持し、プラズマ処理に用いられる配線が配置された支持部と、
前記配線の端部に接続され、前記配線を伝播するノイズを減衰するフィルタ部と、
前記支持部および前記フィルタ部を一体として昇降する昇降部と、
前記載置台と前記支持部との間に誘電体で形成された誘電部と、
を有し、
前記支持部は、前記誘電部との間に大気雰囲気の隙間が形成され、前記誘電体と対向する面の縁部に沿ってシールが設けられた
ことを特徴とするプラズマ処理装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018098952 | 2018-05-23 | ||
JP2018098952 | 2018-05-23 | ||
PCT/JP2019/019801 WO2019225519A1 (ja) | 2018-05-23 | 2019-05-17 | プラズマ処理装置 |
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JPWO2019225519A1 JPWO2019225519A1 (ja) | 2021-07-01 |
JP7170038B2 true JP7170038B2 (ja) | 2022-11-11 |
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JP2020521211A Active JP7170038B2 (ja) | 2018-05-23 | 2019-05-17 | プラズマ処理装置 |
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US (1) | US20210233750A1 (ja) |
JP (1) | JP7170038B2 (ja) |
KR (1) | KR102518712B1 (ja) |
CN (1) | CN112189060B (ja) |
TW (1) | TW202013581A (ja) |
WO (1) | WO2019225519A1 (ja) |
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WO2021111771A1 (ja) * | 2019-12-04 | 2021-06-10 | 日本碍子株式会社 | セラミックヒータ |
JP7488138B2 (ja) * | 2020-07-07 | 2024-05-21 | 東京エレクトロン株式会社 | 真空処理装置、及び真空処理装置の制御方法 |
KR20230042824A (ko) | 2021-09-23 | 2023-03-30 | 삼성전자주식회사 | 플라즈마 제어 장치 및 플라즈마 처리 시스템 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006045635A (ja) | 2004-08-06 | 2006-02-16 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP2014099585A (ja) | 2012-10-19 | 2014-05-29 | Tokyo Electron Ltd | プラズマ処理装置 |
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TW262566B (ja) * | 1993-07-02 | 1995-11-11 | Tokyo Electron Co Ltd | |
US20050194374A1 (en) * | 2004-03-02 | 2005-09-08 | Applied Materials, Inc. | Heated ceramic substrate support with protective coating |
US20050274324A1 (en) * | 2004-06-04 | 2005-12-15 | Tokyo Electron Limited | Plasma processing apparatus and mounting unit thereof |
US7354288B2 (en) * | 2005-06-03 | 2008-04-08 | Applied Materials, Inc. | Substrate support with clamping electrical connector |
JP5031252B2 (ja) * | 2006-03-30 | 2012-09-19 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP5301812B2 (ja) * | 2007-11-14 | 2013-09-25 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP2009170509A (ja) * | 2008-01-11 | 2009-07-30 | Hitachi High-Technologies Corp | ヒータ内蔵静電チャックを備えたプラズマ処理装置 |
JP2011525719A (ja) * | 2008-06-24 | 2011-09-22 | アプライド マテリアルズ インコーポレイテッド | 低温pecvd用途用のペデスタルヒータ |
US20110222038A1 (en) * | 2008-09-16 | 2011-09-15 | Tokyo Electron Limited | Substrate processing apparatus and substrate placing table |
KR102137617B1 (ko) * | 2012-10-19 | 2020-07-24 | 도쿄엘렉트론가부시키가이샤 | 플라즈마 처리 장치 |
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2019
- 2019-05-13 TW TW108116373A patent/TW202013581A/zh unknown
- 2019-05-17 CN CN201980032324.4A patent/CN112189060B/zh active Active
- 2019-05-17 KR KR1020207035663A patent/KR102518712B1/ko active IP Right Grant
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JP2006045635A (ja) | 2004-08-06 | 2006-02-16 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP2014099585A (ja) | 2012-10-19 | 2014-05-29 | Tokyo Electron Ltd | プラズマ処理装置 |
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CN112189060A (zh) | 2021-01-05 |
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US20210233750A1 (en) | 2021-07-29 |
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