JP7160291B2 - エッチング方法、及びエッチング装置 - Google Patents
エッチング方法、及びエッチング装置 Download PDFInfo
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- 238000005530 etching Methods 0.000 title claims description 186
- 238000000034 method Methods 0.000 title claims description 86
- 239000002156 adsorbate Substances 0.000 claims description 101
- 238000012545 processing Methods 0.000 claims description 84
- 238000001179 sorption measurement Methods 0.000 claims description 47
- 229920006395 saturated elastomer Polymers 0.000 claims description 25
- 238000001816 cooling Methods 0.000 claims description 9
- 229910052756 noble gas Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 description 129
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 76
- 235000012239 silicon dioxide Nutrition 0.000 description 38
- 229910052681 coesite Inorganic materials 0.000 description 37
- 229910052906 cristobalite Inorganic materials 0.000 description 37
- 239000000377 silicon dioxide Substances 0.000 description 37
- 229910052682 stishovite Inorganic materials 0.000 description 37
- 229910052905 tridymite Inorganic materials 0.000 description 37
- 238000005259 measurement Methods 0.000 description 12
- 229920000642 polymer Polymers 0.000 description 12
- 230000002123 temporal effect Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000003507 refrigerant Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000002826 coolant Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000004375 physisorption Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
- H01L21/30655—Plasma etching; Reactive-ion etching comprising alternated and repeated etching and passivation steps, e.g. Bosch process
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
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- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
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- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
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Description
まず、実施形態に係るエッチング装置について、図1に基づき説明する。図1は、実施形態に係るエッチング装置10の断面の一例を概略的に示す図である。図1に示すエッチング装置10は、容量結合型エッチング装置である。
次に、エッチング装置10によりウェハWをエッチングする流れの一例を説明する。エッチング装置10は、まず物理吸着工程を実行する。すなわち、エッチング装置10は、エッチング対象膜が形成されたウェハWを冷却しながら、第1の処理ガスの圧力がウェハWの温度に対する第1の処理ガスの飽和蒸気圧よりも小さい条件下で該第1の処理ガスに基づく吸着物をエッチング対象膜に物理吸着させる。そして、エッチング装置10は、エッチング工程を実行する。すなわち、エッチング装置10は、吸着物とエッチング対象膜とを第2の処理ガスのプラズマにより反応させることにより、エッチング対象膜をエッチングする。エッチング対象膜は、例えばシリコン含有膜である。シリコン含有膜としては、例えばSiO2膜が挙げられる。第1の処理ガスは、例えばCF系ガスである。CF系ガスとしては、例えばC4F8が挙げられる。第2の処理ガスは、例えば希ガスである。希ガスとしては、例えばArが挙げられる。なお、物理吸着工程とエッチング工程とは、複数のサイクル繰り返されても良い。また、物理吸着工程とエッチング工程との間に、第1の処理ガスを第3の処理ガスで置換する置換工程が実行されても良い。第3の処理ガスは、例えば第2の処理ガスと同一であっても良い。
なお、本願に開示された技術は、上記した実施形態に限定されるものではなく、その要旨の範囲内で数々の変形が可能である。
12 チャンバ
16 ステージ
18 下部電極
18f 流路
20 静電チャック
30 上部電極
40 ガスソース群
50 排気装置
62 第1の高周波電源
64 第2の高周波電源
70 制御部
Claims (18)
- エッチング対象膜が形成された被処理体を冷却しながら、第1の処理ガスの圧力が前記被処理体の温度に対する該第1の処理ガスの飽和蒸気圧よりも小さい条件下で該第1の処理ガスに基づく吸着物を前記エッチング対象膜に物理吸着させる物理吸着工程と、
前記吸着物と前記エッチング対象膜とを第2の処理ガスのプラズマにより反応させることにより、前記エッチング対象膜をエッチングするエッチング工程と
を含む、エッチング方法。 - 前記物理吸着工程は、前記吸着物を前記エッチング対象膜に物理吸着させる際に、前記被処理体が配置されるチャンバの壁の温度を前記被処理体の温度よりも高い値に調整する、請求項1に記載のエッチング方法。
- 前記物理吸着工程は、前記吸着物の吸着量が飽和するまで、継続される、請求項1又は2に記載のエッチング方法。
- 前記物理吸着工程は、
前記第1の処理ガスの圧力が前記吸着物の吸着量を飽和させる圧力よりも高い値である条件下で前記吸着物を物理吸着させる第1の工程と、
前記第1の処理ガスの圧力が前記吸着物の吸着量を飽和させる圧力である条件下で前記吸着物を物理吸着させる第2の工程と、
を含む、請求項1に記載のエッチング方法。 - 前記物理吸着工程と前記エッチング工程とは、複数のサイクル繰り返される、請求項1に記載のエッチング方法。
- 前記物理吸着工程と前記エッチング工程とが繰り返される度に、前記物理吸着工程において前記第1の処理ガスの圧力及び前記被処理体の温度の少なくともいずれか一方が変更される、請求項5に記載のエッチング方法。
- 前記物理吸着工程と前記エッチング工程との間に、前記第1の処理ガスを排気する排気工程をさらに含む、請求項1に記載のエッチング方法。
- 前記物理吸着工程と前記エッチング工程との間に、前記第1の処理ガスを第3の処理ガスで置換する置換工程をさらに含む、請求項1に記載のエッチング方法。
- 前記第3の処理ガスは、前記第2の処理ガスと同一である、請求項8に記載のエッチング方法。
- 前記エッチング工程は、前記吸着物と前記エッチング対象膜との反応が完了するまで、継続される、請求項1に記載のエッチング方法。
- 前記エッチング工程の後に、前記第2の処理ガスを排気する排気工程をさらに含む、請求項1に記載のエッチング方法。
- 前記エッチング工程の後に、前記第2の処理ガスを第4の処理ガスで置換する置換工程をさらに含む、請求項1に記載のエッチング方法。
- 前記第1の処理ガスは、CF系ガスを含むことを特徴とする請求項1に記載のエッチング方法。
- 前記物理吸着工程は、前記被処理体を-115℃以下の温度まで冷却しながら、前記吸着物を前記エッチング対象膜に物理吸着させる、請求項1に記載のエッチング方法。
- 前記物理吸着工程は、前記第1の処理ガスの圧力が前記第1の処理ガスの種類に応じて予め定められた下限値以上であり、且つ前記第1の処理ガスの飽和蒸気圧よりも小さい条件下で前記吸着物を前記エッチング対象膜に物理吸着させる、請求項1に記載のエッチング方法。
- 前記第1の処理ガスは、C4F8であり、
前記第1の処理ガスの圧力は、0.5Pa以上である、請求項15に記載のエッチング方法。 - 前記第2の処理ガスは、希ガスを含む、請求項1に記載のエッチング方法。
- 被処理体が配置されるチャンバと、
前記チャンバ内を減圧するための排気部と、
前記チャンバ内に処理ガスを供給するためのガス供給部と、
エッチング対象膜が形成された被処理体を冷却しながら、第1の処理ガスの圧力が前記被処理体の温度に対する該第1の処理ガスの飽和蒸気圧よりも小さい条件下で該第1の処理ガスに基づく吸着物を前記エッチング対象膜に物理吸着させる物理吸着工程と、前記吸着物と前記エッチング対象膜とを第2の処理ガスのプラズマにより反応させることにより、前記エッチング対象膜をエッチングするエッチング工程とを実行する制御部と、
を有する、エッチング装置。
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JP2019109990 | 2019-06-13 | ||
JP2019109990 | 2019-06-13 | ||
PCT/JP2020/021769 WO2020250751A1 (ja) | 2019-06-13 | 2020-06-02 | エッチング方法、及びエッチング装置 |
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JP7160291B2 true JP7160291B2 (ja) | 2022-10-25 |
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US (1) | US20220102160A1 (ja) |
EP (1) | EP3985714A4 (ja) |
JP (1) | JP7160291B2 (ja) |
KR (1) | KR20220020806A (ja) |
CN (1) | CN113966546A (ja) |
TW (1) | TW202105514A (ja) |
WO (1) | WO2020250751A1 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013235912A (ja) | 2012-05-08 | 2013-11-21 | Tokyo Electron Ltd | 被処理基体をエッチングする方法、及びプラズマエッチング装置 |
WO2017159512A1 (ja) | 2016-03-17 | 2017-09-21 | 日本ゼオン株式会社 | プラズマエッチング方法 |
US9793135B1 (en) | 2016-07-14 | 2017-10-17 | ASM IP Holding B.V | Method of cyclic dry etching using etchant film |
WO2018022510A1 (en) | 2016-07-25 | 2018-02-01 | Tokyo Electron Limited | Monolayer film mediated precision material etch |
WO2019054490A1 (ja) | 2017-09-15 | 2019-03-21 | 関東電化工業株式会社 | 酸ハロゲン化物を用いた原子層エッチング |
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US9793135B1 (en) | 2016-07-14 | 2017-10-17 | ASM IP Holding B.V | Method of cyclic dry etching using etchant film |
WO2018022510A1 (en) | 2016-07-25 | 2018-02-01 | Tokyo Electron Limited | Monolayer film mediated precision material etch |
WO2019054490A1 (ja) | 2017-09-15 | 2019-03-21 | 関東電化工業株式会社 | 酸ハロゲン化物を用いた原子層エッチング |
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US20220102160A1 (en) | 2022-03-31 |
KR20220020806A (ko) | 2022-02-21 |
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