JP7090900B2 - Ｘ線発生装置、及びｘ線分析装置 - Google Patents

Ｘ線発生装置、及びｘ線分析装置 Download PDF

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Publication number
JP7090900B2
JP7090900B2 JP2018180385A JP2018180385A JP7090900B2 JP 7090900 B2 JP7090900 B2 JP 7090900B2 JP 2018180385 A JP2018180385 A JP 2018180385A JP 2018180385 A JP2018180385 A JP 2018180385A JP 7090900 B2 JP7090900 B2 JP 7090900B2
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Japan
Prior art keywords
ray
anode
electron beam
ray generator
region
Prior art date
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JP2018180385A
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English (en)
Japanese (ja)
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JP2020053217A (ja
JP2020053217A5 (enExample
Inventor
雅弘 野々口
将史 影山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Corp
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Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Corp filed Critical Rigaku Corp
Priority to JP2018180385A priority Critical patent/JP7090900B2/ja
Priority to PCT/JP2019/024573 priority patent/WO2020066168A1/ja
Priority to DE112019004823.6T priority patent/DE112019004823T5/de
Publication of JP2020053217A publication Critical patent/JP2020053217A/ja
Priority to US17/213,766 priority patent/US11636995B2/en
Publication of JP2020053217A5 publication Critical patent/JP2020053217A5/ja
Application granted granted Critical
Publication of JP7090900B2 publication Critical patent/JP7090900B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/161—Non-stationary vessels
    • H01J2235/162—Rotation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/101—Arrangements for rotating anodes, e.g. supporting means, means for greasing, means for sealing the axle or means for shielding or protecting the driving
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/26—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by rotation of the anode or anticathode

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  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2018180385A 2018-09-26 2018-09-26 Ｘ線発生装置、及びｘ線分析装置 Active JP7090900B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2018180385A JP7090900B2 (ja) 2018-09-26 2018-09-26 Ｘ線発生装置、及びｘ線分析装置
PCT/JP2019/024573 WO2020066168A1 (ja) 2018-09-26 2019-06-20 Ｘ線発生装置、及びｘ線分析装置
DE112019004823.6T DE112019004823T5 (de) 2018-09-26 2019-06-20 Röntgenstrahlung-erzeugungsvorrichtung und röntgenanalyseeinrichtung
US17/213,766 US11636995B2 (en) 2018-09-26 2021-03-26 X-ray generation device and X-ray analysis apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018180385A JP7090900B2 (ja) 2018-09-26 2018-09-26 Ｘ線発生装置、及びｘ線分析装置

Publications (3)

Publication Number Publication Date
JP2020053217A JP2020053217A (ja) 2020-04-02
JP2020053217A5 JP2020053217A5 (enExample) 2021-04-30
JP7090900B2 true JP7090900B2 (ja) 2022-06-27

Family

ID=69953057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018180385A Active JP7090900B2 (ja) 2018-09-26 2018-09-26 Ｘ線発生装置、及びｘ線分析装置

Country Status (4)

Country Link
US (1) US11636995B2 (enExample)
JP (1) JP7090900B2 (enExample)
DE (1) DE112019004823T5 (enExample)
WO (1) WO2020066168A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106132551B (zh) 2014-03-31 2019-08-27 巴斯夫欧洲公司 用于输送磁化材料的磁体装置
PE20170804A1 (es) 2014-11-27 2017-07-04 Basf Se Mejora de la calidad del concentrado
CA2966807C (en) 2014-11-27 2023-05-02 Basf Se Energy input during agglomeration for magnetic separation
WO2023188337A1 (ja) * 2022-03-31 2023-10-05 キヤノンアネルバ株式会社 Ｘ線発生装置、ｘ線撮像装置、および、ｘ線発生装置の調整方法
KR20240167050A (ko) * 2022-03-31 2024-11-26 캐논 아네르바 가부시키가이샤 X선 발생 장치, x선 촬상 장치, 및 x선 발생 장치의 조정 방법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010198778A (ja) 2009-02-23 2010-09-09 Shimadzu Corp Ｘ線管装置
WO2016039091A1 (ja) 2014-09-12 2016-03-17 株式会社リガク Ｘ線発生装置及びｘ線分析装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3229089A (en) * 1962-10-25 1966-01-11 Hayakawa Denki Kogyo Kabushiki An x-ray system for producing a specimen image in color
US3646379A (en) * 1970-05-18 1972-02-29 Machlett Lab Inc X-ray tube having controllable focal spot size
US7012989B2 (en) * 2002-09-03 2006-03-14 Parker Medical, Inc. Multiple grooved x-ray generator
US7289603B2 (en) * 2004-09-03 2007-10-30 Varian Medical Systems Technologies, Inc. Shield structure and focal spot control assembly for x-ray device
JP4716508B2 (ja) 2006-06-01 2011-07-06 株式会社リガク Ｘ線管
JP4774007B2 (ja) 2007-04-19 2011-09-14 株式会社リガク Ｘ線発生装置及びｘ線分析装置
JP5511020B2 (ja) * 2011-11-24 2014-06-04 株式会社リガク Ｘ線分析装置
US9184020B2 (en) * 2013-03-04 2015-11-10 Moxtek, Inc. Tiltable or deflectable anode x-ray tube
JP6281229B2 (ja) * 2013-10-07 2018-02-21 株式会社ニコン Ｘ線源、ｘ線装置、構造物の製造方法、及び構造物製造システム
WO2016039092A1 (ja) 2014-09-12 2016-03-17 株式会社リガク Ｘ線発生装置及びｘ線分析装置
WO2017073109A1 (ja) * 2015-10-28 2017-05-04 東芝電子管デバイス株式会社 回転陽極型ｘ線管

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010198778A (ja) 2009-02-23 2010-09-09 Shimadzu Corp Ｘ線管装置
WO2016039091A1 (ja) 2014-09-12 2016-03-17 株式会社リガク Ｘ線発生装置及びｘ線分析装置

Also Published As

Publication number Publication date
US20210217574A1 (en) 2021-07-15
US11636995B2 (en) 2023-04-25
JP2020053217A (ja) 2020-04-02
WO2020066168A1 (ja) 2020-04-02
DE112019004823T5 (de) 2021-06-17

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