JP7090621B2 - 静電蠕動ポンプ及び動作方法 - Google Patents

静電蠕動ポンプ及び動作方法 Download PDF

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Publication number
JP7090621B2
JP7090621B2 JP2019535779A JP2019535779A JP7090621B2 JP 7090621 B2 JP7090621 B2 JP 7090621B2 JP 2019535779 A JP2019535779 A JP 2019535779A JP 2019535779 A JP2019535779 A JP 2019535779A JP 7090621 B2 JP7090621 B2 JP 7090621B2
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Japan
Prior art keywords
central
side portion
electrodes
passage
membrane
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Expired - Fee Related
Application number
JP2019535779A
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English (en)
Japanese (ja)
Other versions
JP2020504797A5 (enExample
JP2020504797A (ja
Inventor
ルドルフ マリア ジョゼフ フォンケン
ヨハネス ウィルヘルムス ウィーカンプ
マレイケ クリー
セルゲイ シュレポフ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips NV
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Publication date
Application filed by Koninklijke Philips NV filed Critical Koninklijke Philips NV
Publication of JP2020504797A publication Critical patent/JP2020504797A/ja
Publication of JP2020504797A5 publication Critical patent/JP2020504797A5/ja
Application granted granted Critical
Publication of JP7090621B2 publication Critical patent/JP7090621B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2253/00—Other material characteristics; Treatment of material
    • F05C2253/12—Coating

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2019535779A 2016-12-30 2018-01-01 静電蠕動ポンプ及び動作方法 Expired - Fee Related JP7090621B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662440542P 2016-12-30 2016-12-30
US62/440,542 2016-12-30
PCT/EP2018/050001 WO2018122400A1 (en) 2016-12-30 2018-01-01 Electrostatic peristaltic pump and method of operation

Publications (3)

Publication Number Publication Date
JP2020504797A JP2020504797A (ja) 2020-02-13
JP2020504797A5 JP2020504797A5 (enExample) 2021-02-12
JP7090621B2 true JP7090621B2 (ja) 2022-06-24

Family

ID=60997448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019535779A Expired - Fee Related JP7090621B2 (ja) 2016-12-30 2018-01-01 静電蠕動ポンプ及び動作方法

Country Status (5)

Country Link
US (1) US11204026B2 (enExample)
EP (1) EP3563060B1 (enExample)
JP (1) JP7090621B2 (enExample)
CN (1) CN110226038B (enExample)
WO (1) WO2018122400A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010029946A1 (ja) * 2008-09-09 2010-03-18 株式会社神戸製鋼所 熱線遮蔽カバー
WO2010029955A1 (ja) * 2008-09-09 2010-03-18 株式会社神戸製鋼所 積層板および複合成形体

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7010959B2 (ja) * 2016-12-30 2022-01-26 コーニンクレッカ フィリップス エヌ ヴェ 静電蠕動ポンプ及び動作方法
CN110665089B (zh) * 2019-09-20 2021-10-19 浙江师范大学 一种血液输送用静电蠕动泵

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007518910A (ja) 2003-06-30 2007-07-12 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 媒体流生成装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5192197A (en) * 1991-11-27 1993-03-09 Rockwell International Corporation Piezoelectric pump
US5705018A (en) * 1995-12-13 1998-01-06 Hartley; Frank T. Micromachined peristaltic pump
US5836750A (en) * 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US6659740B2 (en) * 1998-08-11 2003-12-09 Jean-Baptiste Drevet Vibrating membrane fluid circulator
US6568286B1 (en) * 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US6435840B1 (en) * 2000-12-21 2002-08-20 Eastman Kodak Company Electrostrictive micro-pump
AU2003283673A1 (en) * 2002-12-30 2004-07-22 Koninklijke Philips Electronics N.V. Fluid dispensing system
EP1644639B1 (en) * 2003-06-30 2009-02-11 Nxp B.V. Device for generating sound by means of a medium stream generated
WO2015042192A1 (en) * 2013-09-17 2015-03-26 Pratheev Sabaratnam Sreetharan Zipping actuator fluid motivation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007518910A (ja) 2003-06-30 2007-07-12 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 媒体流生成装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010029946A1 (ja) * 2008-09-09 2010-03-18 株式会社神戸製鋼所 熱線遮蔽カバー
WO2010029955A1 (ja) * 2008-09-09 2010-03-18 株式会社神戸製鋼所 積層板および複合成形体

Also Published As

Publication number Publication date
WO2018122400A1 (en) 2018-07-05
EP3563060A1 (en) 2019-11-06
EP3563060B1 (en) 2021-03-10
US11204026B2 (en) 2021-12-21
CN110226038B (zh) 2021-06-22
CN110226038A (zh) 2019-09-10
JP2020504797A (ja) 2020-02-13
US20190338764A1 (en) 2019-11-07

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