CN110226038B - 静电蠕动泵及其操作方法 - Google Patents

静电蠕动泵及其操作方法 Download PDF

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Publication number
CN110226038B
CN110226038B CN201880008850.2A CN201880008850A CN110226038B CN 110226038 B CN110226038 B CN 110226038B CN 201880008850 A CN201880008850 A CN 201880008850A CN 110226038 B CN110226038 B CN 110226038B
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CN
China
Prior art keywords
membrane
channel
electrodes
midline
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201880008850.2A
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English (en)
Chinese (zh)
Other versions
CN110226038A (zh
Inventor
R·M·J·冯克恩
J·W·威克普
M·克莱
S·舒列波夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips NV
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Filing date
Publication date
Application filed by Koninklijke Philips NV filed Critical Koninklijke Philips NV
Publication of CN110226038A publication Critical patent/CN110226038A/zh
Application granted granted Critical
Publication of CN110226038B publication Critical patent/CN110226038B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2253/00—Other material characteristics; Treatment of material
    • F05C2253/12—Coating

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
CN201880008850.2A 2016-12-30 2018-01-01 静电蠕动泵及其操作方法 Expired - Fee Related CN110226038B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662440542P 2016-12-30 2016-12-30
US62/440,542 2016-12-30
PCT/EP2018/050001 WO2018122400A1 (en) 2016-12-30 2018-01-01 Electrostatic peristaltic pump and method of operation

Publications (2)

Publication Number Publication Date
CN110226038A CN110226038A (zh) 2019-09-10
CN110226038B true CN110226038B (zh) 2021-06-22

Family

ID=60997448

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880008850.2A Expired - Fee Related CN110226038B (zh) 2016-12-30 2018-01-01 静电蠕动泵及其操作方法

Country Status (5)

Country Link
US (1) US11204026B2 (enExample)
EP (1) EP3563060B1 (enExample)
JP (1) JP7090621B2 (enExample)
CN (1) CN110226038B (enExample)
WO (1) WO2018122400A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4559513B2 (ja) * 2008-09-09 2010-10-06 株式会社神戸製鋼所 積層板および複合成形体
JP2010065564A (ja) * 2008-09-09 2010-03-25 Kobe Steel Ltd 熱線遮蔽カバー
JP7010959B2 (ja) * 2016-12-30 2022-01-26 コーニンクレッカ フィリップス エヌ ヴェ 静電蠕動ポンプ及び動作方法
CN110665089B (zh) * 2019-09-20 2021-10-19 浙江师范大学 一种血液输送用静电蠕动泵

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5836750A (en) * 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
US6007309A (en) * 1995-12-13 1999-12-28 Hartley; Frank T. Micromachined peristaltic pumps
US20020081218A1 (en) * 2000-12-21 2002-06-27 Eastman Kodak Company Electrostrictive micro-pump
US20040020265A1 (en) * 2000-06-02 2004-02-05 Cleopatra Cabuz 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
CN1732026A (zh) * 2002-12-30 2006-02-08 皇家飞利浦电子股份有限公司 流体分配系统
WO2015042192A1 (en) * 2013-09-17 2015-03-26 Pratheev Sabaratnam Sreetharan Zipping actuator fluid motivation

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5192197A (en) * 1991-11-27 1993-03-09 Rockwell International Corporation Piezoelectric pump
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US6659740B2 (en) * 1998-08-11 2003-12-09 Jean-Baptiste Drevet Vibrating membrane fluid circulator
JP2007518910A (ja) * 2003-06-30 2007-07-12 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 媒体流生成装置
EP1644639B1 (en) * 2003-06-30 2009-02-11 Nxp B.V. Device for generating sound by means of a medium stream generated

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6007309A (en) * 1995-12-13 1999-12-28 Hartley; Frank T. Micromachined peristaltic pumps
US5836750A (en) * 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
US20040020265A1 (en) * 2000-06-02 2004-02-05 Cleopatra Cabuz 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US20020081218A1 (en) * 2000-12-21 2002-06-27 Eastman Kodak Company Electrostrictive micro-pump
CN1732026A (zh) * 2002-12-30 2006-02-08 皇家飞利浦电子股份有限公司 流体分配系统
WO2015042192A1 (en) * 2013-09-17 2015-03-26 Pratheev Sabaratnam Sreetharan Zipping actuator fluid motivation

Also Published As

Publication number Publication date
WO2018122400A1 (en) 2018-07-05
JP7090621B2 (ja) 2022-06-24
EP3563060A1 (en) 2019-11-06
EP3563060B1 (en) 2021-03-10
US11204026B2 (en) 2021-12-21
CN110226038A (zh) 2019-09-10
JP2020504797A (ja) 2020-02-13
US20190338764A1 (en) 2019-11-07

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