JP7086646B2 - A stage device, and an image pickup device and a lens device provided with the stage device. - Google Patents

Description

The present invention relates to a stage device and an image pickup device including a stage device, and particularly includes a stage device and a stage device that use a magnet as a driving force generating unit for electromagnetically moving a movable portion in a plane with respect to a fixed portion. Regarding the image pickup device.

A stage device that moves a movable part in a plane with respect to a fixed part by an electromagnetic driving force is widely used. As a configuration of the driving force generating unit in this stage device, there is a configuration called a voice coil motor (VCM) system. In this configuration, a magnet is provided on one of the fixed portion and the movable portion, and a coil is provided on the other. By energizing the coil in a magnetic circuit formed by the magnet, a driving force derived from Lorentz force is generated and used. Further, it is common to perform drive control in each direction by arranging a plurality of the driving force generating units.

As an example of using such a stage device, there is a blur correction mechanism in an image pickup device. Here, the fixed portion of the stage device is fixed to the optical axis of the image pickup device, and the blur correction is performed by moving the blur correction lens or the image pickup element with respect to the movable portion in a plane orthogonal to the optical axis. Furthermore, by arranging a magnetic field detection element inside the coil in the driving force generating part and detecting the change in the magnetic field due to the movement of the moving part, the position of the movable frame is detected without providing a separate position detecting part and the driving control is performed. The configuration to be used is disclosed in Patent Document 1.

The problems of the stage device as the blur correction mechanism of such an image pickup device are to improve the efficiency in generating the driving force and to improve the linearity of the magnetic circuit for position detection. To solve this problem, Patent Document 2 discloses a configuration in which three magnets are arranged for each driving force generating unit to form a magnetic circuit (hereinafter referred to as "Halbach magnetic circuit") using the concept of Halbach array. There is. According to this Halbach magnetic circuit, it is possible to achieve high efficiency in generating driving force and improvement in linearity of the magnetic circuit for position detection.

Japanese Unexamined Patent Publication No. 2017-3821 Japanese Unexamined Patent Publication No. 2017-111183

However, in order to form the Halbach magnetic circuit in Patent Document 2, an adhesive is used to arrange and fix the magnets in an unstable positional relationship in which they repel each other. The arrangement gradually shifts. Further, the magnetic circuit for position detection changes, which may gradually reduce the position detection accuracy.

Therefore, an object of the present invention is to provide a stage device capable of stably fixing a magnet forming a Halbach magnetic circuit , and an image pickup device and a lens device provided with the stage device.

The stage device according to claim 1 of the present invention is a stage device including a fixed portion and a movable portion that moves in translation relative to the fixed portion in a drive plane, and the fixed portion is the first. It has a fixing member , a second fixing member , and a magnet constituting a magnetic circuit portion fixed between the first and second fixing members , and the movable portion is formed on the movable member and the movable member . A first magnet having a fixed coil, the coil and the magnetic circuit unit facing each other in the direction orthogonal to the drive plane to form a driving force generating unit, and the magnet having a magnetization direction in the direction orthogonal to the drive plane. Provided between a magnet, a second magnet having a magnetization direction opposite to that of the first magnet, and the first and second magnets when viewed from the side of the coil in the direction orthogonal to the drive plane. The first and second magnets have a parallel configuration with a third magnet having a magnetization direction in a direction having a pole in the same direction as the poles of the first and second magnets, and the first and second magnets are driven. At both ends of the plane in a direction orthogonal to the parallel direction, fixed portions having a lower height in the drive plane orthogonal direction than the central portion in the direction orthogonal to the parallel direction are provided, and the first and first portions are provided. The fixing member 2 is characterized in that the magnetic circuit portion is fixed by sandwiching the fixed portion of the first magnet and the second magnet in the direction orthogonal to the drive plane .

According to the present invention, the magnet forming the Halbach magnetic circuit can be stably fixed.

It is a block diagram of a camera as an image pickup apparatus which concerns on Example 1 of this invention. It is an exploded oblique projection drawing of the blur correction mechanism as a stage apparatus which concerns on Example 1 of this invention. It is a front view and the side view exploded view of the blur correction mechanism of FIG. It is an exploded oblique projection drawing of the 1st driving force generation part of the blur correction mechanism of FIG. It is a schematic diagram of the coil and the magnet in Example 1 of this invention. It is a figure for comparing and explaining the structure of the Halbach magnetic circuit of Embodiment 1 of this invention, and the feature of the structure of a general magnetic circuit in a voice coil motor system. It is a schematic diagram of the 1st driving force generation part of FIG. It is a figure explaining the arrangement relation of the magnet and the screw in the 1st driving force generation part of FIG. It is a figure explaining the arrangement of the driving force generation part in the shake correction mechanism of Example 1 of this invention. It is a schematic diagram of the magnet and the 1st fixed frame in Example 2 of this invention. It is the top view and the partial sectional view of the 1st driving force generating part of the blur correction mechanism in 2nd Embodiment of this invention. It is a figure which shows the deformation example of the magnet in FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings, but the present invention is not limited to the following embodiments. Further, the embodiments of the present invention show preferred embodiments of the invention, and do not limit the scope of the invention.

(Example 1)
Hereinafter, the stage apparatus of the present invention and the image pickup apparatus provided with the stage apparatus will be described with reference to FIGS. 1 to 9.

FIG. 1 is a block diagram of a camera 10 as an image pickup apparatus according to a first embodiment of the present invention.

In FIG. 1, the camera system (hereinafter, simply referred to as a camera) 10 as an image pickup apparatus according to the present embodiment has a camera body (or simply referred to as a body) 10a and an interchangeable lens (or simply referred to as a lens) 10b. And the frame member 13c in the body 10a.

The body 10a includes an image pickup element 11 having an image pickup surface 11a on the subject side, a frame member 13c, a camera control means 14, and an image processing means 17.

The lens 10b includes an image pickup optical system 12 having a blur correction lens 12b, an image pickup optical axis (hereinafter, simply referred to as an optical axis) 12a irradiated on the image pickup surface 11a via the image pickup optical system 12, and an optical axis 12a. The optical axis orthogonal planes 12c that are orthogonal to each other are shown. Further, for convenience, in the following description, the optical axis direction and the optical axis orthogonal plane direction (hereinafter, simply referred to as the optical axis orthogonal direction) are also indicated by 12a and 12c, respectively. In particular, the optical axis direction 12a is a direction toward the subject side (not shown).

Further, the body 10a and the lens 10b have mount members 13a and 13b, image stabilization control means 15a and 15b, vibration detection means 16a and 16b, and first and second image stabilization corresponding to the stage device in the present invention, respectively. The mechanisms 20 and 40 are provided.

The image pickup element 11 is composed of at least one of a CMOS image sensor and a CCD image sensor, and is arranged in the body 10a so that the image pickup surface 11a faces the subject side (not shown) and is orthogonal to the optical axis 12a. The image pickup element 11 plays a role of generating an image signal by photoelectrically converting the subject luminous flux formed by the image pickup optical system 12 described later on the image pickup surface 11a. The image signal generated by the image pickup device 11 is converted into image data by performing various processes by the image processing means 17, and is stored in a memory means (not shown).

The image pickup optical system 12 is composed of a lens group (not shown) in the lens 10b, and plays a role of forming an image of a subject light flux (not shown) on the image pickup surface 11a of the image pickup element 11. The image pickup optical system 12 includes a blur correction lens 12b, which will be described later.

Since the optical axis 12a is formed by the image pickup optical system 12 in the lens 10b, in the camera 10, both the lens 10b and the image pickup element 11 are body 10a in order to accurately arrange the image pickup element 11 with respect to the optical axis 12a. It is connected to the inner frame member 13c. At this time, the image pickup device 11 is connected to the frame member 13c via the first image stabilization mechanism 20, which will be described later. Further, the lens 10b is connected to the frame member 13c via the mount member 13b on the lens 10b side and the mount member 13a on the body 10a side.

The camera control means 14 is a calculation means in a main IC (not shown), and plays a role of controlling various operations related to shooting by the camera 10, input operations by the user, display operations, and the like. In the following embodiments, the camera control means 14 controls the control operation by various other control means, the detection operation by the detection means, and the like, unless otherwise specified.

In the camera 10, the image pickup element 11 and the image stabilization lens 12b are the image stabilization means of the present invention, and the image stabilization is performed by translating or rotating them along the optical axis orthogonal plane 12c. More specifically, when the camera 10 changes its posture with respect to a subject (not shown) during shooting, that is, when it shakes, the image formation position of the subject luminous flux on the image pickup surface 11a of the image pickup element 11 changes. The image is blurred. When the change in posture is sufficiently small, the change in the image formation position is uniform in the image pickup surface 11a, and can be regarded as translational or rotational movement in the optical axis orthogonal plane 12c (image plane blur). Therefore, blur correction can be performed by performing translational or rotational movement control on the optical axis orthogonal plane 12c of the image sensor 11 so as to cancel this image plane blur. Further, the image stabilization lens 12b can refract the optical axis 12a by translating in the optical axis orthogonal plane 12c. Therefore, blur correction can be performed by controlling the translational movement of the blur correction lens 12b on the optical axis orthogonal plane 12c so as to cancel the above-mentioned image plane blur. Since a more detailed principle and control of image stabilization are known and are not a main part of the present invention, the description thereof will be omitted.

The image sensor 11 and the image stabilization lens 12b, which are image stabilization means, have an optical axis on the optical axis 12a by the first and second image stabilization mechanisms 20 and 40 as the stage device according to the first embodiment of the present invention, respectively. It is held movably within a certain range of the orthogonal plane 12c and is controlled to move. In general, the wider the movable range, the larger the amount of the above-mentioned image plane blur that can be corrected, so that it becomes easier to correct the blur in more shooting scenes, but at the same time, the body 10a and the lens 10b become larger. Therefore, the movable range is set to an appropriate required amount.

The first blur correction mechanism 20 has a fixed portion and a movable portion (not shown in FIG. 1) and a plurality of driving force generating portions, although the detailed structure is illustrated and described later. This fixed portion supports the movable portion with three degrees of freedom and translates and rotates in a predetermined drive plane relative to the fixed portion. Then, the fixed portion is fixed to the frame member 13c, and the movable portion holds the image pickup element 11, so that the image pickup element 11 can be translated and rotated in the direction of the optical axis orthogonal plane 12c. That is, the first image stabilization mechanism 20 constitutes a planar stage device (so-called XYθ stage) capable of 3-axis drive control.

Like the first image stabilization mechanism 20, the second image stabilization mechanism 40 has a fixed portion and a movable portion (not shown in FIG. 1) and a plurality of driving force generating portions. This fixed portion supports the movable portion with two degrees of freedom and translates in a predetermined drive plane relative to the fixed portion. Then, the fixed portion is fixed to the frame member 13c via the housing of the lens 10b and the mount members 13b and 13a, and the movable portion holds the blur correction lens 12b so that the blur correction lens 12b is optical axis. Translation is possible on the orthogonal plane 12c. That is, the second image stabilization mechanism 40 constitutes a planar stage device (so-called XY stage) capable of biaxial drive control.

In the following examples of the present invention, the detailed structure of the first blur correction mechanism 20 will be illustrated and described as a representative of the stage apparatus according to the present invention, but since the main part of the present invention is the configuration of the driving force generating portion. The configuration of the present invention can also be applied to the second blur correction mechanism 40.

The image stabilization control means 15a and 15b on the body 10a side and the lens 10b side control the movement of the image sensor 11 and the image stabilization lens 12b by driving and controlling the first and second image stabilization mechanisms 20 and 40, respectively. , Plays a role in image stabilization. At this time, the movement target values of the image sensor 11 and the image stabilization lens 12b are both calculated based on the vibration information of the camera 10, and this vibration information is the vibration detection means 16a on the body 10a side and the vibration detection on the lens 10b side. Obtained from means 16b.

The vibration detecting means 16a and 16b detect information on the amount of change in angle and the amount of movement of the camera 10 in each direction. For example, both of them are composed of a gyro sensor, an acceleration sensor, and the like, and detect the angular velocity and acceleration in each direction of the camera 10. Therefore, the image stabilization control means 15a on the body 10a side and the image stabilization control means 15b on the lens 10b side calculate the amount of change in angle and the amount of movement of the camera 10 as blur information in each direction by integrating the angular velocity and acceleration. can do. From this, the movement target values of the image sensor 11 and the image stabilization lens 12b are calculated, and the drive control of the first image stabilization mechanism 20 and the second image stabilization mechanism 40 is performed.

As described above, the body 10a and the interchangeable lens 11b are interconnected via the frame member 13c, the mount member 13a on the body 10a side, and the mount member 13b on the lens 10b side. Therefore, the vibration detecting means 16a on the body 10a side and the vibration detecting means 16b on the lens 10b side basically detect the angular velocity and acceleration of the same camera 10. Therefore, the camera 10 includes only one of the vibration detecting means 16a and 16b, the detection result is shared by both sides of the body 10a and the lens 10b, and the blur correction control means 15a and 15b on both sides perform the blur correction. It may be configured. On the other hand, the vibration detection means 16a on the body 10a side and the vibration detection means 16b on the lens 10b side have detection errors due to differences in performance depending on the manufacturing time, rigidity of the place where they are installed, and susceptibility to vibration. May occur. Therefore, it is advisable to appropriately combine the detection results of the vibration detecting means 16a and 16b to calculate the blur information of the camera 10 according to various shooting settings and the state of the camera 10. Since the details of the combination method are known and not the main part of the present invention, the description thereof will be omitted.

Further, as described above, the image stabilization of the camera 10 is performed by two means: the movement control of the image sensor 11 by the first image stabilization mechanism 20 and the movement control of the image stabilization lens 12b by the second image stabilization mechanism 40. be able to. Therefore, the camera 10 may be configured to include only one of the first and second image stabilization mechanisms 20, 40. In this case, the image stabilization means (that is, the image sensor 11 or the image stabilization lens 12b) on the side of the body 10a and the lens 10b that does not have the image stabilization mechanism is fixedly arranged with respect to the optical axis 12a. On the other hand, since the image sensor 11 and the image stabilization lens 12b are each unique image stabilization means, it is preferable to appropriately combine them to perform image stabilization. Since the features of the image stabilization means and the details of the combination method are known and are not the main parts of the present invention, the description thereof will be omitted.

Subsequently, a detailed configuration of the first image stabilization mechanism (hereinafter, simply referred to as an image stabilization mechanism) 20 will be described.

FIG. 2 is an exploded oblique projection drawing of the image stabilization mechanism 20 as the stage device according to the first embodiment of the present invention. Further, FIG. 3 is a front view and an exploded view of the side surface of the image stabilization mechanism 20 of FIG. Further, FIG. 4 is an exploded oblique projection drawing of the first driving force generating unit 20c1 of the image stabilization mechanism 20 of FIG. Here, only the main parts constituting the image stabilization mechanism 20 are shown, and the other parts are not shown. Further, in the front view of FIG. 3A, some parts shown in FIG. 2 are hidden.

In FIGS. 2 to 4, the image stabilization mechanism 20 includes a fixed portion 20a and a movable portion 20b.

Further, each part of the fixed portion 20a and the movable portion 20b constitutes the first to third driving force generating portions 20c1 to 20c3. Hereinafter, these are collectively defined as the driving force generating unit 20c. Specifically, the first to third driving force generating portions 20c1 to 20c3 have magnetic circuit portions 20d1 to 20d3 as portions on the fixed portion 20a side, and coil portions 20e1 to 20e3 as portions on the movable portion 20b side. Each has. These are collectively defined as a magnetic circuit unit 20d and a coil unit 20e, respectively.

Further, the first to third driving force generating units 20c1 to 20c3 have first to third magnets 24_11 to 24_33, respectively. Hereinafter, these are collectively defined as a magnet 24. For example, the second driving force generating unit 20c2 has a third magnet 24_23.

The first to third driving force generating units 20c1 to 20c3 have first to third coils 25_1 to 25_3, respectively. Hereinafter, these are collectively defined as the coil 25.

Further, the fixed portion 20a has a first fixed frame 21 and a second fixed frame 22 composed of a single or a plurality of members, and the movable portion 20b has a movable frame 23.

Further, the fixing portion 20a includes a resin magnet holder 26 as a cushioning member of the present invention, a resin compression spacer 27 as a compression member of the present invention, a screw 28 as a locking member of the present invention, and a ball. 30 and a third fixed frame 31 are provided. On the other hand, the movable portion 20b includes a magnetic field detecting element 29 and a thin steel plate 32 as an attracted member of the present invention.

In each of FIGS. 2 to 4, a drive plane direction 20f in which the fixed portion 20a translates and rotationally moves the movable portion 20b, and a drive plane orthogonal direction 20g orthogonal to the drive plane direction 20f are shown. As described above, the blur correction mechanism 20 in the camera 10 is configured so that the drive plane direction 20f and the drive plane orthogonal direction 20g are aligned in parallel with the optical axis orthogonal plane 12c and the optical axis direction 12a, respectively. There is.

Each member of the image stabilization mechanism 20 has a drive plane orthogonal direction of 20 g, and from the subject side (not shown), a third fixed frame 31, a thin steel plate 32, an FPC 33, a movable frame 23, a coil 25, a ball 30, and a first fixed frame 21. , Magnet holder 26, magnet 24, second fixed frame 22, screw 28, in that order. Further, the magnetic field detection element 29 is arranged at the axial center portion of the coil 25 which is an air core coil, and the compression spacer 27 is sandwiched by the first and second fixed frames 21 and 22 together with the magnet 24.

The thin steel plate 32, the FPC 33, the coil 25, and the magnetic field detection element 29 are each fixed to the movable frame 23 to form a part of the movable portion 20b. The third fixing frame 31, the magnet 24, the magnet holder 26, the compression spacer 27, the second fixing frame 22, and the screw 28 are each fixed to the first fixing frame 21 to form a part of the fixing portion 20a. do. Further, the image pickup device 11 is fixed to the movable frame 23 in a posture in which the image pickup surface 11a is parallel to the drive plane direction 20f.

Further, the movable frame 23 is supported by the ball 30 on the first fixed frame 21 in the direction of the optical axis 12a, and the thin steel plate 32 as the attracted member of the present invention on the movable frame 23 is attracted by the magnet 24. .. As a result, the image stabilization mechanism 20 fixes the movable portion 20b with respect to the fixed portion 20a in the drive plane orthogonal direction 20 g while translating and rotating the movable portion 20b in the drive plane direction 20f. Further, as described above, the drive plane direction 20f and the drive plane orthogonal direction 20g are parallel to the optical axis orthogonal plane 12c and the optical axis direction 12a, respectively. Therefore, the image stabilization mechanism 20 can perform image stabilization of the camera 10 by translating and rotating the image pickup surface 11a of the image pickup element 11 in the optical axis orthogonal plane 12c.

The first and second fixed frames 21 and 22 in this embodiment are plate-shaped members extending substantially parallel to the drive plane direction 20f, and the main plane portions thereof are shown below in FIG. 3 (b). Defined in. Specifically, they are defined as the first surface 21a and 22a and the second surface 21b and 22b, respectively, in order from the side closer to the movable frame 23 in the drive plane orthogonal direction 20 g. Further, the first fixed frame 21 is provided with an opening in a portion corresponding to the driving force generating portion 20c, and as shown in FIG. 2, this is defined as the first to third openings 21c1 to 21c3.

The image stabilization mechanism 20 (and the second image stabilization mechanism 40 (not shown) of this embodiment has a configuration called a voice coil motor (VCM) system as a configuration of the driving force generating unit 20c. In this configuration, a magnet is provided on one of the fixed portion 20a and the movable portion 20b, and a coil is provided on the other, and a driving force is generated by energizing the coil in a magnetic circuit formed by the magnet. Further, in this embodiment, a moving coil system is adopted in which the magnet 24 is arranged on the fixed portion 20a side and the coil 25 is arranged on the movable portion 20b side. Generally, in the magnet (combination) and coil used in the voice coil motor method, the total weight of the coil can be reduced, so by adopting the moving coil method, the efficiency and response can be improved. It has the characteristic of being easy. However, the configuration of the present invention may be applied to a moving magnet system in which these arrangements are reversed.

As a configuration for improving efficiency in the VCM type image stabilization mechanism 20, the coil 25 is arranged as close to the magnet 24 as possible in the drive plane orthogonal direction 20 g. Further, the third fixed frame 31 and the second fixed frame 22 are made of a sheet metal material having a higher magnetic permeability than the first fixed frame 21 such as an electromagnetic steel plate or an iron plate, and as a yoke around the magnetic flux generated by the magnet 24. It plays a role in preventing leakage. Further, since the first fixed frame 21 plays a role of fixing the magnet 24, the third fixed frame 31, the second fixed frame 22, etc. as the main skeleton and supporting the movable frame 23 via the ball 30. It is desirable to use a sheet metal material having a higher Young's modulus and surface hardness than the second fixed frame 22. Further, in order not to affect the magnetic circuit composed of the magnet 24 and the second and third fixed frames 22 and 31 which are the yokes, it is desirable to use a material having a low magnetic permeability. Therefore, it is desirable that the first fixed frame 21 is made of, for example, a stainless steel plate or a material obtained by combining engineering plastic with a thin stainless steel plate.

In this embodiment, the magnetic circuit unit 20d in the driving force generation unit 20c of the blur correction mechanism 20 forms a magnetic circuit (hereinafter, referred to as a Halbach magnetic circuit for convenience) using the concept of Halbach array. Therefore, the magnets 24 of the magnetic circuit unit 20d are arranged in the magnetization direction shown in FIG. 6, which will be described later. As a result, the efficiency of generating the driving force is high and the linearity of the magnetic circuit is improved (that is, the position detection accuracy is high) as compared with the configuration of the general magnetic circuit unit. Subsequently, the features of this Halbach magnetic circuit will be described. In the following description, as shown in FIG. 4, in the image stabilization mechanism 20 as the stage device according to the first embodiment of the present invention, the first is particularly representative of the driving force generating unit 20c which is the main part of the present invention. Only the portion of the driving force generating portion 20c1 of the above is shown. At this time, each member is displayed by omitting the display or the detailed shape as appropriate, and the screw 28 and the compression spacer 27 are additionally displayed as appropriate.

Prior to the explanation of the features of the Halbach magnetic circuit, various directions and parts of the magnet 24 and the coil 25 will be defined.

FIG. 5 is a schematic diagram of the coil 25 and the magnet 24 in this embodiment. As shown in FIG. 5A, the coil 25 is configured by winding a conductor wire into a rectangular or oval shape with rounded corners, whereas the winding core direction 25a, the long side direction 25b, and the short side direction are formed. 25c and the energization direction 25d are defined. The long side direction 25b is orthogonal to the winding core direction 25a, and the short side direction 25c is orthogonal to the winding core direction 25a and the long side direction 25b, respectively. Further, the energization direction 25d rotates along the winding direction. Further, as shown in FIG. 5A, the coil 25 has two long side portions 25e and 25f extending in the long side direction 25b. Although the terms 25b in the long side direction and 25c in the short side direction are used here for convenience, the present invention does not limit the magnitude relationship between them, and the coil 25 is shorter than the long side portions 25e and 25f. The portion extending in the side direction 25c may be longer.

As shown in FIG. 5B, the magnet 24 has a substantially rectangular parallelepiped outer shape. On the other hand, the height direction 24a, the long side direction 24b, and the short side direction 24c are defined. The long side direction 24b is orthogonal to the height direction 24a, and the short side direction 24c is orthogonal to the height direction 24a and the long side direction 24b. Further, although the details will be described later, the magnet 24 has fixed portions 24e and 24f at both ends in the long side direction 24b thereof, and other than the portions of the fixed portions 24e and 24f in the long side direction 24b of the magnet 24. That is, it has a coil facing portion 24g between the fixed portions 24e and 24f. Further, the plane facing the coil 25 in the coil facing portion 24g is defined as the coil facing surface 24h. Similar to the long side direction 25b and the short side direction 25c of the coil 25, the present invention does not limit the magnitude relationship between the long side direction 24b and the short side direction 24c of the magnet 24. That is, the portion extending in the short side direction 24c may be longer than the portion extending in the long side direction 24b of the magnet 24.

FIG. 6 is a diagram for comparing and explaining the characteristics of the configuration of the Halbach magnetic circuit of this embodiment and the configuration of a general magnetic circuit in the VCM system. As described above, FIG. 6 partially illustrates the first driving force generating unit 20c1 in the image stabilization mechanism 20. In the following description, unnumbered arrows indicating up, down, left, and right directions and symbols indicating the direction from the back to the front or vice versa indicate the magnetization direction of the magnet 24. That is, in the magnet 24, the inlet side of these arrows and symbols is the S pole, and the outlet side is the N pole.

FIG. 6A is a diagram for explaining the configuration of the Halbach magnetic circuit of this embodiment, and FIG. 6B or FIG. 6C is a diagram for explaining the configuration of a general magnetic circuit. 6 (a) to 6 (c) show a top view of the first driving force generating unit 20c1, a front sectional view projected by the third trigonometry, and qualitative magnetic flux density profiles 401a to 401c. Here, the magnetic flux density profiles 401a to 401c affect the efficiency of generating the driving force in the coil 25 and the accuracy of position detection by the magnetic field detecting element 29, as will be described later. The top views of FIGS. 6 (a) to 6 (c) typically have an arrangement direction with respect to the top view of FIG. 6 (a), but FIGS. 6 (b) and 6 (c). The top view of) is also in the same arrangement direction. Further, the front sectional views of FIGS. 6 (a) to 6 (c) and the front sectional views of FIGS. 6 (d) to 6 (e) described later are typically shown in the front sectional view of FIG. 6 (e). On the other hand, although the arrangement direction is attached, the arrangement direction is the same in the front sectional views of FIGS. 6 (a) to 6 (d).

The magnetic flux density profiles shown in FIGS. 6A to 6C are for generating the driving force and detecting the position by the magnetic field detection element 29 at each position in the short side direction 25c of the coil 25_1 which is the driving force generation direction. The strength of the magnetic flux density in the winding core direction 25a of the coil 25_1 acting is shown. Hereinafter, the short side direction 25c of the coil 25_1 is conveniently defined as the x direction, and the winding core direction 25a of the coil 25_1 is conveniently defined as the z direction. In the long side direction 25b of the coil 25_1 orthogonal to the x direction and the z direction, the magnetic flux density profile is almost constant in the range of the two long side portions 25e and 25f of the coil 25, so that the magnetic flux density profile is typically one place. The profile is illustrated. Hereinafter, the long side direction 25b of the coil 25_1 is defined as the y direction for convenience.

Further, FIG. 6D is a schematic diagram showing the interaction of forces between the first to third magnets 24_11 to 24_13 in the Halbach magnetic circuit of FIG. 6A. Arrows 402a and 402b in FIG. 6D indicate the directions of the moments of the forces acting on the magnets 24_11 and 24_12, which will be described later, respectively. Further, FIG. 6 (e) is a schematic diagram showing a mutual arrangement in which the magnets 24_11 to 24_13 are finally stabilized by the interaction of the forces between the first to third magnets 24_11 to 24_13 shown in FIG. 6 (d). be.

In the VCM method, as shown in the front sectional views of FIGS. 6 (a) to 6 (c), the first to third magnets 24_11 to 24_13 are arranged in parallel in the short side direction 24c and then in the height direction. Face the coil 25_1 at 24a (match the height direction 24a with the winding core direction 25a). Further, with the long side direction 24b of the first to third magnets 24_11 to 24_13 (that is, the direction orthogonal to the short side direction 24c which is the parallel direction of the first to third magnets 24_11 to 24_13 in the drive plane). Match the long side direction 25b of the coil 25_1. In this state, in the vicinity of the long side portions 25e and 25f of the coil 25_1, the first to third magnets 24_1 to the third magnets 24_1 to form strong magnetic fields in opposite directions in the winding core direction 25a orthogonal to the energization direction 25d. The magnetization direction of 24_13 is arranged.

The configuration that simply satisfies the above requirements is the configuration of the general magnetic circuit shown in FIGS. 6 (b) and 6 (c). That is, the magnetization direction of the first magnet 24_11 is 20 g orthogonal to the drive plane, and the magnetization direction of the second magnet 24_12 is the opposite direction of the first magnet 24_11. Further, in the drive plane orthogonal direction 20 g, the third fixed frame 31 and the second fixed frame 22 which are yokes for preventing the leakage of magnetic flux, respectively, on the coil 25_1 and under the first to third magnets 24_11 to 24_13, respectively. To place. As a result, the magnetic flux emitted from the first magnet 24_1 toward the coil 25_1 enters the second magnet 24_1 via the third fixed frame 31. On the other hand, the magnetic flux emitted from the second magnet 24_1 in the direction opposite to the coil 25_1 returns to the first magnet 24_1 via the second fixed frame 22. Therefore, in the vicinity of the long side portions 25e and 25f of the coil 25_1 arranged between the first and second magnets 24_11 to 24_12 and the third fixed frame 31, FIGS. 6 (b) and 6 (c). ), Strong magnetic fields in opposite directions are formed in the z direction. When the coil 25_1 is energized in this state, the directions of the Lorentz forces at the long side portions 25e and 25f are aligned, so that the coil 25_1 generates a driving force in the x direction.

Further, the position can be detected by the magnetic field detection element 29 by the general magnetic circuit shown in FIGS. 6 (b) and 6 (c) above. That is, in the region between the long side portions 25e and 25f of the coil 25_1 in the x direction, the magnetic flux density in the z direction changes linearly in the x direction as shown in FIGS. 6 (b) and 6 (c). Shown (linearity of magnetic circuit). Therefore, by arranging the magnetic field detection element 29 having the magnetic field detection direction in the z direction in the region between the long side portions 25e and 25f of the coil 25_1 in the x direction, the x of the coil 25_1 based on the driving force generated by energization. It is possible to detect a change in the position of the direction with high sensitivity. Since the details of the position detection method are not the main parts of the present invention, detailed description thereof will be omitted.

Here, the configuration of the magnetic circuit shown in FIG. 6C improves the linearity of the above-mentioned magnetic circuit by providing a gap between the first magnet 24_11 and the second magnet 24_12 in the x direction (straight line). It is a known technology that can (expand the range). This makes it possible to improve the position detection accuracy. On the other hand, the configuration of the magnetic circuit shown in FIG. 6 (b) is inferior to the configuration shown in FIG. 6 (c) in the linearity of the above-mentioned magnetic circuit, but the absolute value of the magnetic flux density can be improved. It has excellent driving force generation efficiency.

In contrast to the above, in the configuration of the Halbach magnetic circuit in the present invention shown in FIG. 6A, a third magnet 24_13 is further arranged between the first magnet 24_11 and the second magnet 24_12 described above. Further, as shown in FIG. 6A, the magnetization directions of the third magnet 24_1 are the poles of the first magnet 24_1 and the second magnet 24_1 when viewed from the coil 25_1 side in the drive plane orthogonal direction 20 g. Place in the direction with the poles in the same direction. Since the detailed principle is known, the description thereof will be omitted, but the third magnet 24_13 allows the coil 25_1 side and the opposite side in the drive plane orthogonal direction 20 g between the first magnet 24_1 and the second magnet 24_1. The magnetic flux leakage to (the second fixed frame 22 side) is reduced. Therefore, in the configuration of the Halbach magnetic circuit of FIG. 6A, the magnetic flux density at the long side portions 25e and 25f of the coil 25_1 is improved as compared with the general magnetic circuit configuration shown in FIGS. 6B and 6C. In addition, the linearity of the magnetic circuit is improved. That is, the configuration of the Halbach magnetic circuit of FIG. 6A can improve both the driving force generation efficiency and the position detection accuracy as compared with the general magnetic circuit configuration shown in FIGS. 6B and 6C. ..

However, the configuration of the Halbach magnetic circuit shown in FIG. 6 (a) is unstable in that the first magnet 24_11 and the second magnet 24_12 repel each other due to the third magnet 24_13, as shown in FIG. 6 (d). It is arranged properly. That is, the moment of the force acting on each of the first magnet 24_11 and the second magnet 24_12 shown by the arrows 402a and 402b so as to start rotating around the axis parallel to the long side direction 24b is the third magnet 24_13. Caused by. This is because the forces at which the poles of the first and second magnets 24_11, 24_12 are attracted to the opposite poles of the third magnet 24_13, that is, the first to third magnets 24_11 to 24_13 are finally. This is due to the force toward the mutual arrangement shown in FIG. 6 (e), which is stable. On the other hand, the third magnet 24_13 does not receive such a rotational force because the forces received from the first magnet 24_11 and the second magnet 24_12 are balanced. Although the details will be described later, the third magnet 24_13 receives a force in the arrow 402c direction as a reaction of the force exerting a force in the rotational direction on the first magnet 24_11 and the second magnet 24_12.

Therefore, when using the configuration of the Halbach magnetic circuit shown in FIG. 6 (a), the circumference of the axis parallel to the long side direction 24b of the first magnet 24_11 and the second magnet 24_12 as shown in FIG. 6 (d). It is necessary to consider a method of fixing the magnet 24 that regulates the rotation of the magnet 24. Subsequently, a method of fixing the magnet 24 in the configuration of the Halbach magnetic circuit, which is a main part of the present invention, will be described.

FIG. 7 is a schematic view of the first driving force generating unit 20c1 in the image stabilization mechanism 20 of FIG. 4, a top view, a right side sectional view (AA') projected by the third trigonometry, and two front surfaces. A cross-sectional view (BB', CC') is shown.

As shown in FIG. 7, in the present embodiment, the fixed portions 24e and 24f at both ends of the long side direction 24b of the magnet 24 are sandwiched between the first fixed frame 21 and the second fixed frame 22. The rotation shown in 6 (d) is restricted, and the magnet 24 is fixed. At this time, fixing the third magnet 24_13 is not essential. For example, as in the modified example of the magnet 24 shown in FIG. 12, the fixed portions 24e and 24f of FIG. 5 have only the first and second magnets 24_11 and 24_12, and do not have the third magnet 24_13. It may have a different configuration. However, in this embodiment, in order to more reliably fix all of the first to third magnets 24_11 to 24_13, the third magnet 24_13 is also fixed by the same method. More detailed configurations will be described in order.

In this embodiment, as described above in FIG. 5, the fixed portions 24e and 24f of the first to third magnets 24_11 to 24_13 have a flange shape in which the fixed portions 24e and 24f are stepped down in the height direction 24a. As a result, the coil facing portion 24g has a shape protruding in the height direction 24a. Then, the fixed portions 24e and 24f are sandwiched between the second surface 21b of the first fixed frame 21 and the first surface 22a of the second fixed frame 22, and the second fixed frame 22 is attached to the first fixed frame 21. On the other hand, it is fixed with a screw 28. As a result, the rotation of the first magnet 24_11 and the second magnet 24_12 with respect to the long side direction 24b is restricted, so that the magnet 24 can be reliably fixed.

In the above configuration, the first fixed frame 21 includes the first opening 21c1, and the coil facing portions 24g of the first to third magnets 24_11 to 24_13 are inserted into the first opening 21c1 in the drive plane orthogonal direction 20 g. As a result, the coil facing surfaces 24h of the first to third magnets 24_1 to 24_13 are closer to the hidden coil 25_1 than the second surface 21b of the first fixed frame 21 at least in the drive plane orthogonal direction 20 g. Protrude. In this embodiment, in particular, the coil facing surface 24h projects to the side closer to the hidden coil 25_1 than the first surface 21a in the drive plane orthogonal direction 20g. Therefore, even if the first to third magnets 24_1 to 24_13 are sandwiched between the first fixed frame 21 and the second fixed frame 22, the presence of the first fixed frame 21 causes the coil 25_1 in the drive plane orthogonal direction 120 g. The distance between the magnets 24 does not increase. Therefore, the driving force generating unit 20c can fix the magnet 24 without lowering the driving efficiency in the VCM method. In order to make the coil facing surface 24h project in this way, the flange shapes of the fixed portions 24e and 24f of the magnet 24 are the plates of the first fixed frame 21 in the height direction 24a (drive plane orthogonal direction 20 g). It has a structure that is larger than the thickness and is stepped down.

In the above configuration, the compression spacer 27 is sandwiched between the first fixed frame 21 and the second fixed frame 22 and fastened together with the magnet 24, so that the axial force of the screw 28 causes the fixed portion 24e of the magnet 24 to be fastened. It plays a role of preventing the 24f from buckling and breaking. Therefore, the compression spacer 27 may be configured so that the natural length in the compression direction is higher than the height of the fixed portions 24e and 24f of the magnet 24, and the compression length is substantially equal to the height of the fixed portions 24e and 24f. .. Further, the magnet holder 26 is interposed between the edge portion of the first opening 21c1 of the first fixed frame 21 and the magnet 24, and protects the magnet 24 by preventing direct contact between the edge portion and the magnet 24. Play a role.

With the configuration described above, since the magnet 24 forming the Halbach magnetic circuit is mechanically fixed, stable fixing with less deviation of the magnet 24 due to creep deformation, which is a concern when adhesively fixed, can be performed.

As described above, also in the shake correction mechanism 20 as the stage device according to the first embodiment of the present invention, a desirable configuration in the driving force generating unit 20c, which is the main part of the present invention, has been described. Subsequently, a desirable configuration of the blur correction mechanism 20 as a whole will be described.

FIG. 8 is a diagram illustrating the arrangement relationship between the magnet 24 and the screw 28 in the first driving force generating unit 20c1 of FIG.

In each of FIGS. 8 (a) to 8 (c), as shown in FIG. 4, only the peripheral portions of the first to third driving force generating portions 20c1 to 20c3 are extracted and shown, and are orthogonal to the driving plane. It is a figure seen from the opposite side of the hidden coil 25 in a direction 20g. In FIG. 8, as a representative, the direction is attached to FIG. 8 (a), but the directions are the same in FIGS. 8 (b) and 8 (c).

It is desirable that the plurality of screws 28 for fixing the second fixing frame 22 to the first fixing frame 21, which corresponds to the locking member in the present invention, are arranged so as to satisfy the following conditions. That is, as shown in FIGS. 8A and 8B, when the magnet 24 and the screw 28 are projected onto the drive plane, at least one of the plurality of line segments connecting the center points of the screws 28 is the first. It is set to be applied to each of the magnets 24_13, 24_23, 24_33 of 3.

The reason for this is that, as described in FIG. 6D, the third magnet 24_13 receives a force in the direction of arrow 402c as a reaction that exerts a force in the rotational direction on the first magnet 24_11 and the second magnet 24_12. .. As a result, the third magnet 24_13 exerts a force on the second fixed frame 22 in the direction of floating from the first fixed frame 21, but when the second fixed frame 22 is lifted, the first and second magnets The rotation of 24_11 and 24_12 is not regulated, and the arrangement of the magnet 24 is displaced. Therefore, in order to suppress the lifting of the second fixed frame 22 by the third magnet 24_13, it is desirable to arrange the screw 28 as described above. For example, in the first driving force generating unit 20c1 in FIG. 8A, of the plurality of line segments connecting the center points of the four screws 28, the line segments 701 and 702 are applied to the third magnet 24_13. As a result, the floating of the second fixed frame 22 by the third magnet 24_13 can be appropriately suppressed. Further, in FIG. 8B, in the driving force generating units 20c2 and 20c3, the line segment 703 is applied to the third magnet 24_23 among the plurality of line segments connecting the center points of the three screws 28, respectively, and the line segment is formed. 704 hangs on the third magnet 24_33. As a result, the floating of the second fixed frame 22 by the third magnets 24_23 and 24_33 can be appropriately suppressed.

On the other hand, FIG. 8C shows the arrangement of the screws 28 that do not satisfy the above conditions. Specifically, in the driving force generating portions 20c2 and 20c3, since none of the line segments 703 to 705 connecting the center points of the three screws 28 is applied to the third magnet 24_33, the floating of the second fixed frame 22 May occur.

FIG. 9 shows the first to third driving force generating units 20c1 to 20c3 in the image stabilization mechanism 20 of the present embodiment, and the first and second driving force generating units 40c1 and 40c2 in the second image stabilization mechanism 40. It is a schematic diagram which shows the arrangement.

9 (a) is a schematic diagram of the image stabilization mechanism 20, and FIG. 9 (b) is a schematic diagram of the second image stabilization mechanism 40, both of which are viewed from the subject side (not shown) in the optical axis 12a direction. ..

In the first driving force generating unit 20c1, the driving force is generated in the x direction (direction of the double-headed arrow 20f1 in FIG. 9) described above in FIG. Similarly, in the other driving force generating units (20c2, 20c3, 40c1, 40c2), driving force is generated in the directions of the double-headed arrows 20f2, 20f3, 40f1, 40f2, respectively. In FIG. 9, the arrangement direction of the image stabilization mechanism 20 is shown in FIG. 9A as a representative, but the arrangement direction of the second image stabilization mechanism 40 in FIG. 9B is also the same.

As described above, the image stabilization mechanism 20 performs drive control of three axes. Therefore, at least three driving force generating units 20c are provided, and at least one set of driving force generation directions (x direction) is substantially parallel to each other, and another set of driving force generation directions is substantially orthogonal to each other. It is desirable to arrange it so as to be (x direction). In FIG. 9A, the driving force generation directions (directions of the double-headed arrows 20f2, 20f3) of the set of the second and third driving force generating units 20c2, 20c3 are substantially parallel. On the other hand, the driving force generation direction (directions of double arrows 20f1, 20f2 and double arrows) of the set of the first and second driving force generating units 20c1, 20c2 and the set of the first and third driving force generating units 20c1, 20c3. The directions of 20f1 and 20f3) are substantially orthogonal to each other. By arranging at least three driving force generating units 20c in this way, translational two-axis drive control becomes possible in the set of the driving force generating units 20c in which the driving force generation directions are substantially orthogonal to each other. In addition, it is possible to control the drive of one axis of rotation in a set in which the driving force generation directions are substantially parallel. This makes it possible to control the drive of three axes. Similarly, the second image stabilization mechanism 40 is provided with at least two driving force generating units 40c, and is arranged so that at least one set of driving force generating directions (x direction) is substantially orthogonal to each other. Is desirable. In FIG. 9B, the driving force generation directions of the first and second driving force generating units 40c1 and 40c2 are substantially orthogonal to each other. By arranging at least two driving force generating units 40c in this way, it is possible to perform driving control of two translational axes.

Further, in the present invention, since the driving force generating portion 20c sandwiches the fixed portions 24e and 24f at both ends of the magnet 24 in the long side direction 24b to fix the magnet, it generally tends to increase in the long side direction 24b. Therefore, the long side direction 24b of the magnet 24 is arranged along the outer peripheral direction around the image pickup element 11 and the image stabilization lens 12b, which are the image stabilization means for controlling the movement of the driving force generation unit 20c of the image stabilization mechanism 20. It is good to place it in. At least, as shown in FIG. 9A, when viewed from the subject side (not shown) in the direction of the optical axis 12a, the straight lines 601 and 602 in which the outer diameter of the magnet 24 is extended in the long side direction 24b are the image sensor 11 and the blur. Do not cover the correction lens 12b. As a result, the first image stabilization mechanism 20 and the second image stabilization mechanism 40 can be configured without enlarging the outer shape thereof. As shown in the straight lines 603 and 604 of FIG. 9B, it is desirable that the driving force generating portion 40c of the second image stabilization mechanism 40 has the same arrangement.

With the configuration described above, in the present invention, the magnet forming the Halbach magnetic circuit can be stably fixed.

(Example 2)
In this embodiment, another fixing method of the magnet 24 as a modification of the first embodiment will be described. As will be described below, the shape of the fixed portion of the magnet in the driving force generating portion of the present invention is not limited to the flange shape such as the fixed portions 24e and 24f of the magnet 24 of the first embodiment, and other shapes may be used. I do not care.

FIG. 10 is a schematic view of the magnet and the first fixed frame in this embodiment.

FIG. 10A is a schematic view showing the magnet 240 and the fixing method thereof in this embodiment. The numbers shown in FIG. 10 are assigned in the same manner as the magnet 24 of the first embodiment. For example, in this embodiment, the magnet 24 of the first embodiment is numbered 240b with respect to the direction corresponding to the long side direction 24b. As shown in FIG. 10A, in this embodiment, the fixed portions 240e and 240f at both ends of the magnet 240 in the long side direction 240b have a shape in which one side is chamfered in the height direction 240a.

10 (b) and 10 (c) are a top view and a cross-sectional view of two types of first fixed frames 211 and 212 in this embodiment. Here, the directions are given with respect to the top views of FIGS. 10 (b) and 10 (c). Here, as in FIG. 4, only the portion corresponding to the first driving force generating unit 20c1 is shown. For any of the first fixed frames 211 and 212, the first surface 212a and the second surfaces 211b and 212b are defined as in the case of the first embodiment, but the first fixed frame in FIG. 10B is defined. Since the 211 has a standing bending portion described later, the first surface is not defined.

The first fixed frame 211 shown in FIG. 10B is made of, for example, a metal sheet metal, and includes a first opening 211c1. Further, the slope portion is bent a plurality of times at the short side portions 901a and 901b of the first opening portion 211c1 which are positioned so as to face the fixed portions 240e and 240f and the second surface 211b when the magnet 240 is fixed. It forms 901c and 901d. Further, the edge portions 901e to 901h are separately removed by cutting or face-cutting.

The first fixed frame 212 shown in FIG. 10 (c) is made of, for example, a molded resin member and includes a first opening 212c1. Further, the slope portions 902c and 902d are formed on the short side portions 902a and 902b of the first opening portion 212c1 which are positioned so as to face the fixed portions 240e and 240f when the magnet 240 is fixed.

FIG. 11 is a top view and a partial cross-sectional view of the first driving force generating unit 20c1 of the image stabilization mechanism 20 in this embodiment. 11 (a) and 11 (b) each explain two different fixing methods of the magnet 240, and both show a top view and a partial cross-sectional view of the first driving force generating unit 200c1. Here, as a representative, directions are given to the top views of FIGS. 11 (a) and 11 (b).

In the configuration shown in FIG. 11A, the slope portion 901c (901d) of the first fixed frame 211 and the chamfered portion of the fixed portion 240e (240f) of the magnet 240 mesh with each other in the vicinity of the point 1001a. Therefore, in a state where the second fixed frame 22 is fixed to the first fixed frame 211 by the screw 28, the magnet 240 receives a fixing force 1001b in a direction substantially orthogonal to the chamfered portion of the fixed portion 240e (240f). Since the fixing force 1001b contains a component of 20 g in the direction orthogonal to the drive plane, the first magnet 240_11 and the second magnet 240_12 of the magnet 240 are restricted from rotating and are appropriately fixed. Further, the coil facing surface 240h of the magnet 240 projects toward the hidden coil 25_1 with respect to the second surface 211b of the first fixed frame 211 in the drive plane orthogonal direction 20 g. Therefore, since the distance between the coil 25_1 and the magnet 240 in the drive plane orthogonal direction 120 g does not become long due to the presence of the first fixed frame 211, the driving force generating unit 20c is a magnet without degrading the driving efficiency in the VCM method. 240 can be fixed.

In the configuration shown in FIG. 11A, since the standing bending portion 901j of the short side portion 901a exhibits elasticity in the bending direction, it is possible to absorb the axial force due to the screw 28 to some extent. That is, in this embodiment, the compression spacer 27 used in the first embodiment can be eliminated. Further, in the configuration shown in FIG. 11A, the first fixed frame 211 is a metal sheet metal, but as described above, the standing bending portion 901j has elasticity in the bending direction, and the edge portion in the first opening 212c1. 901e to 901h are separately removed by excision or face-cutting.

In the configuration shown in FIG. 11B, the chamfered portion of the slope portion 902c (902d) of the first fixed frame 212 and the fixed portion 240e (240f) of the magnet 240 is located in the vicinity of the point 1002a via the compression spacer 27. Engage with each other. Therefore, in a state where the second fixed frame 22 is fixed to the first fixed frame 212 by the screw 28, the magnet 240 receives a fixing force 1002b in a direction substantially orthogonal to the chamfered portion of the fixed portion 240e (240f). Since the fixing force 1002b contains a component of 20 g in the direction orthogonal to the drive plane, the first magnet 240_11 and the second magnet 240_12 of the magnet 240 are restricted from rotating and are appropriately fixed. Further, the coil facing surface 240h of the magnet 240 protrudes toward the hidden coil 25_1 from the second surface 212b of the first fixed frame 212 in the drive plane orthogonal direction 20 g, and in this embodiment, particularly above the first surface 212a. It protrudes to the hidden coil 25_1 side. Therefore, since the distance between the coil 25_1 and the magnet 240 in the drive plane orthogonal direction 120 g does not become long due to the presence of the first fixed frame 212, the driving force generating unit 20c is a magnet without degrading the driving efficiency in the VCM method. 240 can be fixed.

In the configuration shown in FIG. 11B, the first fixed frame 212 is a resin member, and the sharp edge portion in the first opening 212c1 is small, so that the cushioning member used in the first embodiment is used. The resin magnet holder 26 can be eliminated.

Compared with the configuration of the first embodiment, the configuration of the present embodiment has a feature that the magnet 240 has less stress concentration portions in the outer shape than the magnet 24, so that the workability of the magnet can be easily improved.

As described above, with reference to FIGS. 1 to 12, as an embodiment of the stage apparatus according to the present invention, the image stabilization mechanism 20 for the image sensor 11 of the camera 10 and the second image stabilization mechanism 40 for the image stabilization lens 12b will be described. did. However, specific application examples of the stage device are not limited to these. The stage device can be widely applied as a component of an electronic device that performs blur correction by an electromagnetic driving force using a voice coil motor (VCM) method. Examples of the electronic device include an exposure device for manufacturing a semiconductor element, an exposure device for manufacturing a liquid crystal display element or a display, a thin film magnetic head, a micromachine, and an exposure device for manufacturing a MEMS or a DNA chip. Can be exemplified.

10 Camera 11 Image sensor 12 Imaging optical system 12b Image stabilization lens 20 First image stabilization mechanism 20c Driving force generator 21 First fixed frame 22 Second fixed frame 23 Movable frame 24 Magnets 24e, 24f Fixed part 40 Second image stabilization mechanism

Claims (11)

A stage device including a fixed portion and a movable portion that translates relative to the fixed portion in a drive plane.
The fixing portion has a magnet constituting a first fixing member , a second fixing member , and a magnetic circuit portion fixed between the first and second fixing members .
The movable portion has a movable member and a coil fixed to the movable member .
The coil and the magnetic circuit unit face each other in the direction orthogonal to the drive plane to form a driving force generating unit.
The magnets are a first magnet having a magnetization direction in the direction orthogonal to the drive plane, a second magnet having a magnetization direction in the direction opposite to the first magnet, and a magnet from the side of the coil in the direction orthogonal to the drive plane. When viewed , a third magnet provided between the first and second magnets and having a magnetization direction in a direction having a pole in the same direction as the poles of the first and second magnets. Has a parallel configuration,
The first and second magnets have heights at both ends of the drive plane in the direction orthogonal to the parallel direction and higher in the drive plane orthogonal direction than the central portion in the direction orthogonal to the parallel direction. With a low fixed part,
The first and second fixing members are characterized in that the magnetic circuit portion is fixed by sandwiching the fixed portion of the first magnet and the second magnet in a direction orthogonal to the drive plane . Stage device. The magnet includes a coil facing portion at the center portion in a direction orthogonal to the parallel direction in the drive plane.
In the direction orthogonal to the drive plane, the coil facing portion has a shape protruding toward the coil from the first fixing member .
The stage device according to claim 1, wherein the first fixing member includes an opening into which the coil facing portion is inserted. The stage device according to claim 1 or 2 , wherein the third magnet is provided with the fixed portions at both ends in a direction orthogonal to the parallel direction in the drive plane. The stage device according to claim 2, further comprising a cushioning member interposed between the opening of the first fixing member and the magnet. The stage device according to any one of claims 1 to 4 , further comprising a compression member sandwiched between the first and second fixing members . A plurality of locking members for fixing the second fixing member to the first fixing member are further provided.
The plurality of locking members are any one of a plurality of line segments connecting the center points of the plurality of locking members when the third magnet and the plurality of locking members are projected onto the drive plane. The stage device according to any one of claims 1 to 5 , wherein at least one of the arrangements is applied to the third magnet. The first fixing member is made of a sheet metal material having a higher Young's modulus and surface hardness than the second fixing member , and the second fixing member is made of a sheet metal material having a higher magnetic permeability than the first fixing member . The stage apparatus according to any one of claims 1 to 6 , wherein the stage apparatus is configured. The stage device according to any one of claims 1 to 7 , wherein the movable portion further rotates and moves relative to the fixed portion in the drive plane. The stage apparatus according to any one of claims 1 to 8.
An image pickup device comprising: an image pickup element fixed to the movable member of the stage device . The stage apparatus according to any one of claims 1 to 8.
An image pickup apparatus comprising: an image pickup optical system fixed to the movable member of the stage apparatus. The stage apparatus according to any one of claims 1 to 8.
A lens device including an imaging optical system fixed to the movable member of the stage device.

Images