JP2010104136A - Linear motor - Google Patents

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JP2010104136A
JP2010104136A JP2008272741A JP2008272741A JP2010104136A JP 2010104136 A JP2010104136 A JP 2010104136A JP 2008272741 A JP2008272741 A JP 2008272741A JP 2008272741 A JP2008272741 A JP 2008272741A JP 2010104136 A JP2010104136 A JP 2010104136A
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magnetic pole
auxiliary magnetic
linear motor
driving direction
stator
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JP5188357B2 (en
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Misa Nakayama
美佐 中山
Kazumasa Ito
一将 伊藤
Shinichi Yamaguchi
信一 山口
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a linear motor which exhibits high demagnetization resistance without reducing the magnetic field to be generated. <P>SOLUTION: The linear motor 1 includes a stator 10 where main magnetic poles and sub-magnetic poles are arranged alternately and linearly in Halbach array, and a moving member 20 having a coil facing the stator. The sub-magnetic poles of the stator are anisotropically magnetized. The magnetization direction is substantially perpendicular to the driving direction at both the ends of the sub-magnetic pole in the driving direction and is different from each other by 180°. The magnetization direction is substantially the same as the driving direction in the central part of the driving direction, and changes into a substantially arcuate form between both the ends in the driving direction and the central part of the driving direction. Consequently, demagnetization of the magnetic poles can be avoided and the magnetic field can be maintained by magnets having a high remanent flux density. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

この発明はリニアモータに関し、特に工作機械や半導体製造装置などの産業機械のテーブル送りに用いるのに適したリニアモータに関するものである。   The present invention relates to a linear motor, and more particularly to a linear motor suitable for use in table feed of industrial machines such as machine tools and semiconductor manufacturing apparatuses.

工作機械のテーブル送りや搬送機器のアクチュエータに対しては、高速化・高精度化の要求が高い。そこで近年工作機械などにリニアモータがよく用いられている。リニアモータはダイレクト駆動であり、従来の回転型サーボモータとボールネジを組み合わせた駆動方式に比べ、高速度・高加速度特性を得ることができ、かつバックラッシュや摩擦による応答誤差が生じないため高精度なシステムを構築可能である。しかしその反面、モータの発熱や振動が機械に伝わりやすいという問題点がある。そこで、リニアモータは低損失でかつコギング推力が小さい必要がある。   There is a high demand for high speed and high precision for table feed of machine tools and actuators of transfer equipment. In recent years, linear motors are often used in machine tools and the like. The linear motor is direct drive, and can achieve high speed and high acceleration characteristics compared to the conventional drive system combining a rotary servo motor and a ball screw. A simple system can be constructed. On the other hand, however, there is a problem that heat generation and vibration of the motor are easily transmitted to the machine. Therefore, the linear motor needs to have low loss and small cogging thrust.

リニアモータを低損失化するためには、発生する磁界を高めることが必要であり、コギング推力を小さくするためには発生する磁界を正弦波に近づけることが必要である。このことから、リニアモータの固定子の磁石配列として、発生する磁界が大きく正弦波分布になるハルバッハ配列を用いることが知られている。   In order to reduce the loss of the linear motor, it is necessary to increase the generated magnetic field, and in order to reduce the cogging thrust, it is necessary to bring the generated magnetic field closer to a sine wave. For this reason, it is known to use a Halbach array in which the generated magnetic field is large and has a sinusoidal distribution as the magnet array of the stator of the linear motor.

しかし、ハルバッハ配列は隣接する磁石の磁化方向が９０°異なるため、大きな減磁界によって磁石が減磁する恐れがある。この解決方法として、ハルバッハ配列に用いる磁石の主磁極と補磁極で保磁力の異なる磁石とすることが提案されている。主磁極は発生する磁界を高めるため残留磁束密度が高く保磁力が低い磁石を用い、減磁の原因となる補磁極には保磁力が高く残留磁束密度が低い磁石を用いることにより、発生磁界を高めつつ減磁を回避するのである（例えば特許文献１参照）。   However, since the magnetization directions of adjacent magnets differ by 90 ° in the Halbach array, there is a possibility that the magnets are demagnetized by a large demagnetizing field. As a solution to this problem, it has been proposed to use magnets having different coercive forces between the main magnetic pole and the auxiliary magnetic pole of the magnet used in the Halbach array. The main magnetic pole uses a magnet with high residual magnetic flux density and low coercive force to increase the generated magnetic field, and the auxiliary magnetic pole that causes demagnetization uses a magnet with high coercive force and low residual magnetic flux density. Demagnetization is avoided while increasing (see, for example, Patent Document 1).

特開２００７−１９１２７号公報JP 2007-19127 A

しかしながら、特許文献１の方法では、補磁極に残留磁束密度が低い磁石を用いているため、すべて残留磁束密度が高い磁石を用いた固定子と比較して、発生する磁界が小さくなる問題がある。また、隣接する主磁極と補磁極の磁化方向が９０°異なるので、たとえ保磁力が大きい磁石を用いても減磁条件の厳しい補磁極角部は減磁を避けられない。   However, since the method of Patent Document 1 uses a magnet having a low residual magnetic flux density for the auxiliary magnetic pole, there is a problem that the generated magnetic field is smaller than that of a stator using a magnet having a high residual magnetic flux density. . Further, since the magnetization directions of the adjacent main magnetic pole and the auxiliary magnetic pole differ by 90 °, demagnetization is unavoidable in the auxiliary magnetic pole corner portion having severe demagnetization conditions even if a magnet having a large coercive force is used.

従って、この発明の目的は発生する磁界を低減させずに減磁耐力の高いリニアモータを提供することである。   Accordingly, an object of the present invention is to provide a linear motor having a high demagnetization resistance without reducing the generated magnetic field.

この発明によれば、複数の主磁極および複数の補磁極を交互に直線状にハルバッハ配列して構成した固定子と、上記固定子に対して直線的に駆動される可動子とを備えたリニアモータにおいて、上記補磁極は、磁化方向が駆動方向と異なる箇所を持ち、駆動方向両端部における磁化方向が隣接の上記主磁極の磁化方向とおよそ同じ方向成分を持つように着磁されていることを特徴とするリニアモータが得られる。   According to the present invention, a linear device including a stator configured by alternately arranging a plurality of main magnetic poles and a plurality of auxiliary magnetic poles in a linear Halbach arrangement, and a mover linearly driven with respect to the stator. In the motor, the auxiliary magnetic pole is magnetized so that the magnetization direction has a portion different from the driving direction, and the magnetization direction at both ends of the driving direction has approximately the same direction component as the magnetization direction of the adjacent main magnetic pole. Is obtained.

この発明によれば、隣接する主磁極と補磁極の磁化方向がおよそ同じであるため、磁化方向が異なることによる減磁が回避できる。このことから、主磁極と補磁極は残留磁束密度の高い磁石を用いることができ、発生する磁界を十分に確保できる。   According to the present invention, since the magnetization directions of the adjacent main magnetic pole and auxiliary magnetic pole are approximately the same, demagnetization due to different magnetization directions can be avoided. For this reason, a magnet having a high residual magnetic flux density can be used for the main magnetic pole and the auxiliary magnetic pole, and the generated magnetic field can be sufficiently secured.

実施の形態１．
図１は、この発明の実施の形態１のリニアモータを示す模式的断面図である。図１において、リニアモータ１は、固定子１０と可動子２０を備えていて、固定子１０と可動子２０とは間に所定の空隙が形成されるように配置され、可動子２０が電磁力によって固定子１０に沿って駆動方向Ｅ（矢印Ｅで示す）に駆動される。固定子１０は、磁石板である支持体１１と、支持体１１上でハルバッハ配列状に固着された複数の主磁極１２および補磁極１３とを備えている。 Embodiment 1 FIG.
FIG. 1 is a schematic cross-sectional view showing a linear motor according to Embodiment 1 of the present invention. In FIG. 1, the linear motor 1 includes a stator 10 and a mover 20. The linear motor 1 is disposed such that a predetermined gap is formed between the stator 10 and the mover 20. Is driven in the driving direction E (indicated by arrow E) along the stator 10. The stator 10 includes a support body 11 that is a magnet plate, and a plurality of main magnetic poles 12 and auxiliary magnetic poles 13 fixed on the support body 11 in a Halbach array.

固定子１０は、支持体１１の上に複数の主磁極１２と補磁極１３を交互に直線状に配列して構成されている。複数の主磁極１２は、一定の極ピッチＰで等間隔に直線状に配置され、それらの磁化方向ＡおよびＢ（矢印ＡおよびＢで示す）は、いずれも可動子２０の駆動方向Ｅに対して直角な方向であるが、交互に逆方向となるようにされている。主磁極１２の間には、補磁極１３が隙間なしに配置されているが、補磁極１３は、駆動方向両端部における磁化方向が隣接の主磁極１２の磁化方向ＡあるいはＢと同じ方向成分を持つように極異方性着磁されて円弧状の磁化方向ＣおよびＤ（矢印ＣおよびＤで示す）となっている。換言すれば、補磁極１３の磁化方向Ｃは、補磁極１３の駆動方向両端部においては駆動方向Ｅに対してほぼ直角方向で互いに１８０°異なり（図１において上方向と下方向）、駆動方向中央部においてはほぼ駆動方向Ｅであって、駆動方向両端部と駆動方向中央部との間においてはほぼ円弧状に変化するものである。   The stator 10 is configured by alternately arranging a plurality of main magnetic poles 12 and auxiliary magnetic poles 13 on a support 11. The plurality of main magnetic poles 12 are linearly arranged at regular intervals with a constant pole pitch P, and their magnetization directions A and B (indicated by arrows A and B) are all relative to the driving direction E of the mover 20. The directions are perpendicular to each other, but are alternately reversed. The auxiliary magnetic pole 13 is disposed between the main magnetic poles 12 with no gap. However, the auxiliary magnetic pole 13 has the same direction component as the magnetization direction A or B of the adjacent main magnetic pole 12 in the magnetization direction at both ends. The magnets are poled anisotropically so as to have arc-shaped magnetization directions C and D (indicated by arrows C and D). In other words, the magnetization direction C of the auxiliary magnetic pole 13 differs from the driving direction E by 180 ° at both ends in the driving direction of the auxiliary magnetic pole 13 (upward and downward in FIG. 1). The central portion is substantially in the driving direction E, and changes substantially in an arc shape between both ends in the driving direction and the central portion in the driving direction.

可動子２０は、固定子１０に所定の間隙を介して対向し、複数のティース２１が設けられた電機子コア２２と、ティース２１に巻回されたコイル２３とを備えている。極数とティース数の組み合わせであるスロットコンビは任意でよい。   The mover 20 includes an armature core 22 that faces the stator 10 with a predetermined gap and is provided with a plurality of teeth 21, and a coil 23 wound around the teeth 21. A slot combination that is a combination of the number of poles and the number of teeth may be arbitrary.

図２には、補磁極１３のような円弧状の磁化方向ＣあるいはＤを持つ磁石の製造方法を示す。複数の極を持つ極異方性リング磁石１４は、公知の方法で作製することができる。このリング磁石１４の加工部１５を機械加工により除去して、長方形断面を持つ直方体である補磁極１３を切り出すことにより製作される。   FIG. 2 shows a method for manufacturing a magnet having an arcuate magnetization direction C or D like the auxiliary magnetic pole 13. The polar anisotropic ring magnet 14 having a plurality of poles can be produced by a known method. The processed portion 15 of the ring magnet 14 is removed by machining, and the auxiliary magnetic pole 13 which is a rectangular parallelepiped having a rectangular cross section is cut out.

また、主磁極１２の極ピッチＰに対する主磁極１の駆動方向Ｅの長さＬの割合は、０．２５〜０．６とするのが望ましい。即ち、図３は、極ピッチＰに対する主磁極の長さＬの割合Ｌ／Ｐを横軸に表し、そのときの損失ＭＬの大きさを縦軸に表して、それらの間の関係を示すグラフとしたものである。図３から、極ピッチＰに対する主磁極の長さＬの割合Ｌ／Ｐが０．４２となる場合に損失ＭＬが最小となることが判る。ただし、損失ＭＬが１％程度増加してもリニアモータの性能に対する影響はほとんどないため、図３のグラフより、極ピッチＰに対する主磁極１２の長さＬの割合Ｌ／Ｐは０．２５〜０．６とするのがよい。割合Ｌ／Ｐが０．２５〜０．６の範囲を越えると、図３のグラフからわかるように損失が増加する割合が大きくなるからである。   The ratio of the length L in the driving direction E of the main magnetic pole 1 to the pole pitch P of the main magnetic pole 12 is preferably 0.25 to 0.6. That is, FIG. 3 is a graph showing the ratio L / P of the length L of the main magnetic pole to the pole pitch P on the horizontal axis and the magnitude of the loss ML at that time on the vertical axis, and showing the relationship between them. It is what. 3 that the loss ML is minimized when the ratio L / P of the length L of the main magnetic pole to the pole pitch P is 0.42. However, even if the loss ML increases by about 1%, there is almost no influence on the performance of the linear motor. Therefore, the ratio L / P of the length L of the main pole 12 to the pole pitch P is 0.25- It should be 0.6. This is because when the ratio L / P exceeds the range of 0.25 to 0.6, the loss increase ratio increases as can be seen from the graph of FIG.

以上のように主磁極１２と補磁極１３を配置することにより、隣接する主磁極１２と補磁極１３の磁化方向がおよそ同じであるため、磁化方向が異なることによる減磁が回避できる。このことから、主磁極１２と補磁極１３は残留磁束密度の高い磁石を用いることができ、発生する磁界を十分に確保できる。   By disposing the main magnetic pole 12 and the auxiliary magnetic pole 13 as described above, the magnetization directions of the adjacent main magnetic pole 12 and the auxiliary magnetic pole 13 are approximately the same, so demagnetization due to the different magnetization directions can be avoided. For this reason, the main magnetic pole 12 and the auxiliary magnetic pole 13 can use magnets having a high residual magnetic flux density, and can sufficiently secure the generated magnetic field.

実施の形態２．
図４に示すリニアモータの固定子１０においては、補磁極１３は、図５に示すように複数の極を持つ極異方性リング磁石１４を径方向切断面１４ａに沿って切断加工してリングあるいはチューブの一つのセクションとして製作されたものである。従って、補磁極１３は扇形であって、両端にリング磁石１４の軸心を通る径方向切断面１４ａであった傾斜面１３ａを持ち、一側にリング磁石１４の外周面１４ｂであった湾曲凸面１３ｂを持ち、他側にリング磁石１４の内周面１４ｃであった湾曲凹面１３ｃを持っている。 Embodiment 2. FIG.
In the stator 10 of the linear motor shown in FIG. 4, the auxiliary magnetic pole 13 is formed by cutting a polar anisotropic ring magnet 14 having a plurality of poles along the radial cut surface 14a as shown in FIG. Or it was made as one section of the tube. Accordingly, the auxiliary magnetic pole 13 has a sector shape, and has an inclined surface 13a which is a radial cut surface 14a passing through the axis of the ring magnet 14 at both ends, and a curved convex surface which is the outer peripheral surface 14b of the ring magnet 14 on one side. 13b, and a curved concave surface 13c that is the inner peripheral surface 14c of the ring magnet 14 is provided on the other side.

磁石板である支持体１１には、補磁極１３の湾曲凹面１３ｃにぴったりと合い、相補的に嵌合する形状の凸部１６が設けられていて、この凸部１６に補磁極１３の湾曲凹面１３ｃが嵌合させて固着されている。このため、補磁極１３を支持体１１の凸部１６上で、位置決めして、間に隙間が無い状態で支持することができる。支持体１１上にはまた、補磁極１３の間で主磁極１２が配置されて支持されていて、主磁極１２は、補磁極１３の傾斜面１３ａにぴったりと合うように対応した傾斜面１２ａを持っている。   The support 11, which is a magnet plate, is provided with a convex portion 16 having a shape that fits and complementarily fits the curved concave surface 13 c of the auxiliary magnetic pole 13. The curved concave surface of the auxiliary magnetic pole 13 is provided on the convex portion 16. 13c is fitted and fixed. For this reason, the auxiliary magnetic pole 13 can be positioned on the convex part 16 of the support body 11, and can be supported in the state without a space | gap. The main magnetic pole 12 is also disposed and supported between the auxiliary magnetic poles 13 on the support 11, and the main magnetic pole 12 has an inclined surface 12 a corresponding to the inclined surface 13 a of the auxiliary magnetic pole 13. have.

このような構成とすることにより、補磁極１３を極異方性リング磁石１４を周方向に分割する加工だけにより製造できるので補磁極の製造が容易となり、また支持体１１上での補磁極１３の位置決めができるので組立が容易となりコストが低減できる。   With such a configuration, the auxiliary magnetic pole 13 can be manufactured only by the process of dividing the polar anisotropic ring magnet 14 in the circumferential direction, so that the auxiliary magnetic pole can be easily manufactured, and the auxiliary magnetic pole 13 on the support 11 can be manufactured. Positioning can be facilitated and the cost can be reduced.

実施の形態３．
図６に示すリニアモータの固定子１０においては、主磁極１２が図１に示すものと同様の直方体で、駆動方向Ｅの前端および後端が駆動方向Ｅに直角な平面１２ｂとなっており、主磁極１２の平面１２ｂと補磁極１３の傾斜面１３ａとの間には、三角柱状のスペーサ１９が設けられている。スペーサ１９は、磁性体でも非磁性体でも良く、コスト低減のためにはスペーサ１９を用いずに三角柱状の空間を残して置いても良い。 Embodiment 3 FIG.
In the stator 10 of the linear motor shown in FIG. 6, the main magnetic pole 12 is a rectangular parallelepiped similar to that shown in FIG. 1, and the front end and the rear end in the driving direction E are planes 12 b perpendicular to the driving direction E, A triangular prism spacer 19 is provided between the flat surface 12 b of the main magnetic pole 12 and the inclined surface 13 a of the auxiliary magnetic pole 13. The spacer 19 may be a magnetic material or a non-magnetic material, and may be placed leaving a triangular prism space without using the spacer 19 in order to reduce the cost.

このような構成とすることにより、主磁極１２の端部の斜め加工が不要となり、コストが低減できる。   By adopting such a configuration, the oblique machining of the end portion of the main magnetic pole 12 becomes unnecessary, and the cost can be reduced.

実施の形態４．
図７および８に示すリニアモータの固定子１０においては、図４に示すものと同様の固定子１０に、補磁極１３を主磁極１２と共に支持体１１に保持する磁石押さえである保持体１７が設けられている。保持体１７は、補磁極１３の駆動方向前後の縁部に沿って延び、更に端部で曲げられて補磁極１３の厚さ方向に支持体１１に向かって延び、縁部を上から押圧する長い保持部１７ａと、保持部１７ａの両端に設けられて支持体１１にネジ１７ｂで締結される締結部１７ｃとを持つ長い板部材である。 Embodiment 4 FIG.
In the stator 10 of the linear motor shown in FIGS. 7 and 8, a holding body 17 that is a magnet presser that holds the auxiliary magnetic pole 13 together with the main magnetic pole 12 on the support body 11 is provided on the same stator 10 as shown in FIG. Is provided. The holding body 17 extends along the front and rear edges of the auxiliary magnetic pole 13, is further bent at the end, extends toward the support body 11 in the thickness direction of the auxiliary magnetic pole 13, and presses the edge from above. It is a long plate member having a long holding portion 17a and fastening portions 17c provided at both ends of the holding portion 17a and fastened to the support 11 with screws 17b.

図示の例では、２本の保持部１７ａが一対で一組となって共通の板状の締結部１７ｃに連結されていて、全体として両端がクランク状に折り曲げられた一体のフレーム形状とされている。２本の保持部１７ａの間隔は補磁極１３の駆動方向Ｅ前後の縁部の間隔と対応させてあり、一つの補磁極１３に保持体１７を適用して二本の保持部１７ａで二つの縁部を保持したときに、補磁極１３の湾曲凸面１３ｂが二本の保持部１７ａの間から露出するようにしてある。   In the illustrated example, a pair of two holding portions 17a are connected to a common plate-like fastening portion 17c, and as a whole, the two holding portions 17a are formed into an integral frame shape with both ends bent into a crank shape. Yes. The interval between the two holding portions 17a is made to correspond to the interval between the front and rear edges of the auxiliary magnetic pole 13 in the driving direction E. The holding member 17 is applied to one auxiliary magnetic pole 13, and the two holding portions 17a When the edge portion is held, the curved convex surface 13b of the auxiliary magnetic pole 13 is exposed from between the two holding portions 17a.

主磁極１２と補磁極１３は組立時に互いに磁気的に反発するため、接着のみでの固定は信頼性が低い可能性があるが、このような保持体１７を用いれば保持が確実に行われる。図４に示す実施の形態２および図６に示す実施の形態３では、補磁極１３の外径が円弧状即ち湾曲凸面１３ｂとなっており、主磁極１２の高さは補磁極１３の縁部の高さに合わせてあるため、主磁極１２の高さは補磁極１３よりも低く、この高さの差による空間内に保持体１７の保持部１７ａが収容された状態で磁石の固定を行うことができ、保持体１７が磁極部分から突出してしまうことがない。   Since the main magnetic pole 12 and the auxiliary magnetic pole 13 repel each other at the time of assembly, there is a possibility that the fixing by bonding alone may be unreliable. However, such a holding body 17 ensures the holding. In the second embodiment shown in FIG. 4 and the third embodiment shown in FIG. 6, the outer diameter of the auxiliary magnetic pole 13 is an arc shape, that is, a curved convex surface 13 b, and the height of the main magnetic pole 12 is the edge of the auxiliary magnetic pole 13. Therefore, the height of the main magnetic pole 12 is lower than that of the auxiliary magnetic pole 13, and the magnet is fixed in a state where the holding portion 17a of the holding body 17 is accommodated in the space due to the difference in height. The holding body 17 does not protrude from the magnetic pole portion.

支持体１１に主磁極１２と補磁極１３を貼り付けた後、磁石押さえ板である保持体１７により補磁極１３の両端を押さえつけ、図示しないねじにより磁石板である支持体１１に設けたねじ穴１８にねじを挿入して固定する。このとき、組み立てた状態にて保持体１７が補磁極１３の高さを超えないようにする。組立後の状態を図８に斜視図で示す。   After the main magnetic pole 12 and the auxiliary magnetic pole 13 are attached to the support 11, both ends of the auxiliary magnetic pole 13 are pressed by a holding body 17 that is a magnet pressing plate, and screw holes provided in the support 11 that is a magnetic plate with screws (not shown). Insert a screw into 18 and fix. At this time, the holding body 17 is made not to exceed the height of the auxiliary magnetic pole 13 in the assembled state. The state after assembly is shown in a perspective view in FIG.

このような構成とすることにより、固定子１０と可動子２０の距離を増大させることなしに磁極を確実に固定することが可能である。   With such a configuration, the magnetic pole can be reliably fixed without increasing the distance between the stator 10 and the mover 20.

実施の形態５．
図９および１０に示すリニアモータの固定子においては、磁石押さえ板である保持体１７が、主磁極１２の上面全体を覆いつつ主磁極１２を保持するとともに、補磁極１３の端部に僅かな距離だけ重なって押さえることによって補磁極１３を保持するようにしてある。すなわち、保持体１７の駆動方向Ｅの寸法は主磁極１２の駆動方向Ｅの寸法よりも僅かに大きい。その他の構成は図７および８に示すものと同様である。保持体１７を取り付ける。実施の形態５の場合も、組み立てた状態にて保持体１７が補磁極１３の高さを超えないようにする。組立後の俯瞰図を図１０に示す。 Embodiment 5 FIG.
In the linear motor stator shown in FIGS. 9 and 10, the holding body 17 that is a magnet pressing plate holds the main magnetic pole 12 while covering the entire upper surface of the main magnetic pole 12, and a little at the end of the auxiliary magnetic pole 13. The auxiliary magnetic pole 13 is held by overlapping and pressing the distance. That is, the dimension of the holding body 17 in the driving direction E is slightly larger than the dimension of the main magnetic pole 12 in the driving direction E. Other configurations are the same as those shown in FIGS. The holding body 17 is attached. Also in the case of the fifth embodiment, the holding body 17 is prevented from exceeding the height of the auxiliary magnetic pole 13 in the assembled state. An overhead view after assembly is shown in FIG.

このような構成とすることにより、リニアモータの性能に悪影響を与えることなく、単純な形状の保持体１７にて磁極を確実に固定することが可能である。   With such a configuration, it is possible to securely fix the magnetic pole with the holder 17 having a simple shape without adversely affecting the performance of the linear motor.

実施の形態６．
図１１および１２に示すリニアモータの固定子１０においては、補磁極１３が複数の独立した補磁極要素１３ｄ〜１３ｉを組み合わせた複合体で構成されている。即ち、補磁極１３は、支持体１１上に並べて配置して固定した複数の補磁極要素１３ｄ〜１３ｉによって構成されていて、それぞれの補磁極要素１３ｄ〜１３ｉは磁化方向が互いに少しずつ異なっていて、全体としての補磁極１３が駆動方向両端部における磁化方向が隣接の主磁極１２の磁化方向と同じ方向成分を持つように極異方性着磁された状態と同様にされている。 Embodiment 6 FIG.
In the stator 10 of the linear motor shown in FIGS. 11 and 12, the auxiliary magnetic pole 13 is composed of a composite body in which a plurality of independent auxiliary magnetic pole elements 13d to 13i are combined. That is, the auxiliary magnetic pole 13 is composed of a plurality of auxiliary magnetic pole elements 13d to 13i arranged and fixed on the support 11, and the magnetization directions of the auxiliary magnetic pole elements 13d to 13i are slightly different from each other. The magnetic pole 13 as a whole is set in the same manner as in the state of being poled anisotropically so that the magnetization direction at both ends in the driving direction has the same direction component as the magnetization direction of the adjacent main magnetic pole 12.

図示の例では、補磁極１３は、互いに密着して駆動方向Ｅに並べられた６本の棒状の補磁極要素１３ｄ〜１３ｉで構成されていて、補磁極１３の全体として、磁化方向が、補磁極の駆動方向両端部においては駆動方向Ｅに対してほぼ直角方向で互いに１８０°異なり、駆動方向中央部においてはほぼ駆動方向であって、駆動方向両端部と駆動方向中央部との間においてはほぼ円弧状に変化するものとされている。個々の補磁極要素１３ｄ〜１３ｉはそれぞれが支持体１１との間および相互間で接着材や締結金具などで固定されている。   In the illustrated example, the auxiliary magnetic pole 13 is composed of six rod-shaped auxiliary magnetic pole elements 13d to 13i arranged in close contact with each other in the driving direction E, and the magnetization direction of the auxiliary magnetic pole 13 as a whole is increased. At both ends of the magnetic pole in the driving direction, they are different from each other by 180 ° in a direction substantially perpendicular to the driving direction E. At the central portion in the driving direction, the driving direction is substantially the same. It is supposed to change to a substantially arc shape. Each of the auxiliary magnetic pole elements 13d to 13i is fixed to the support 11 and between each other with an adhesive or a fastener.

図１１の固定子１０においては、補磁極１３は６個の補磁極要素１３ｄ〜１３ｉで構成されているが、組み合わされて構成された補磁極１３が、全体として駆動方向両端部における磁化方向が隣接の主磁極１２の磁化方向と同じ方向成分を持つように極異方性着磁された状態となっていれば、補磁極要素の数に制限はない。図１２には、例として、補磁極１３を５分割した固定子を示し、この補磁極１３は、次第に磁化方向が変化するように配列された５個の補磁極要素１３ｄ〜１３ｈによって構成されている。   In the stator 10 of FIG. 11, the auxiliary magnetic pole 13 is composed of six auxiliary magnetic pole elements 13 d to 13 i, but the auxiliary magnetic poles 13 that are configured in combination have magnetization directions at both ends in the driving direction as a whole. The number of auxiliary magnetic pole elements is not limited as long as it is in a state of being poled anisotropically so as to have the same direction component as the magnetization direction of the adjacent main magnetic pole 12. FIG. 12 shows, as an example, a stator in which the auxiliary magnetic pole 13 is divided into five. The auxiliary magnetic pole 13 is composed of five auxiliary magnetic pole elements 13d to 13h arranged so that the magnetization direction gradually changes. Yes.

このような構成により、駆動方向両端部における磁化方向が隣接の主磁極１２の磁化方向と同じ方向成分を持つように極異方性着磁された状態の補磁極１３を容易に製作することができ、図２あるいは５に示すような極異方性リング磁石１４の加工が不要となり、より簡易的に減磁が回避できる。また、磁化方向が異なる補磁極要素１３ｄ〜１３ｉはそれぞれ磁化方向が一方向であるため、通常の磁石と同様に製作可能である。つまり補磁極に残留磁束密度の高い磁石を用いることができ、大きな発生磁界が得られる。   With such a configuration, it is possible to easily manufacture the auxiliary magnetic pole 13 in the state of being polar-anisotropically magnetized so that the magnetization directions at both ends in the driving direction have the same direction component as the magnetization direction of the adjacent main magnetic pole 12. In addition, the processing of the polar anisotropic ring magnet 14 as shown in FIG. 2 or 5 becomes unnecessary, and demagnetization can be avoided more easily. Further, each of the auxiliary magnetic pole elements 13d to 13i having different magnetization directions has one magnetization direction, and can be manufactured in the same manner as a normal magnet. That is, a magnet having a high residual magnetic flux density can be used as the auxiliary magnetic pole, and a large generated magnetic field can be obtained.

実施の形態７．
図１３に示すリニアモータの固定子１０の補磁極１３は、一体成形された複数の補磁極要素１３ｄ〜１３ｉで構成されている。即ち、図１１および１２に示すような別個の補磁極極要素１３ｄ〜１３ｉを、磁化方向を連続して変化する補磁極１３が構成されるように並べた後、一体となるように加熱、加圧および接着などの少なくともいずれかの処理によって成形する。このように構成した固定子１０を図１３に示す。 Embodiment 7 FIG.
The auxiliary magnetic pole 13 of the linear motor stator 10 shown in FIG. 13 includes a plurality of integrally formed auxiliary magnetic pole elements 13d to 13i. That is, separate auxiliary magnetic pole elements 13d to 13i as shown in FIGS. 11 and 12 are arranged so that the auxiliary magnetic poles 13 whose magnetization directions are continuously changed are arranged, and then heated and heated so as to be integrated. Molding is performed by at least one of treatments such as pressure and adhesion. FIG. 13 shows the stator 10 configured as described above.

以上のように一体成形された補磁極１３により固定子１０を構成することにより、リニアモータ１の部品点数が低減し、組み立てやすくなるという利点がある。   By configuring the stator 10 with the supplementary magnetic pole 13 integrally molded as described above, there is an advantage that the number of parts of the linear motor 1 is reduced and the assembly becomes easy.

以上に図示して説明したリニアモータは単なる例であって様々な変形が可能であり、またそれぞれの具体例の特徴を全てあるいは選択的に組み合わせて用いることもできる。例えば、図４および６に示す支持体１１に設けられていて、補磁極１３の湾曲凹面１３ｃにぴったりと合い、相補的に嵌合する形状の凸部１６は、コスト低減のために除去して平坦面とすることもできる。また、主磁極１２および補磁極１３のすくなくともいずれか一つを直接支持体１１に固定して、残りの主磁極１２および補磁極１３は、主磁極１２および補磁極１３の隣接側縁部の形状による係合関係、保持体１７の形状あるいは接着材の塗布位置によって、間接的に固定するようにしても良い。さらに、保持体１７は二本以上の複数の保持部１７ａを平行に並べて共通の締結部１７ｃに連結することもできる。   The linear motor illustrated and described above is merely an example, and various modifications can be made, and the features of each specific example can be used altogether or selectively combined. For example, the convex portion 16 that is provided on the support 11 shown in FIGS. 4 and 6 and that fits the curved concave surface 13c of the auxiliary magnetic pole 13 and fits in a complementary manner is removed for cost reduction. It can also be a flat surface. In addition, at least one of the main magnetic pole 12 and the auxiliary magnetic pole 13 is directly fixed to the support 11, and the remaining main magnetic pole 12 and the auxiliary magnetic pole 13 are formed on the adjacent side edges of the main magnetic pole 12 and the auxiliary magnetic pole 13. It may be fixed indirectly depending on the engagement relationship by the above, the shape of the holding body 17 or the application position of the adhesive. Furthermore, the holding body 17 can also be connected to the common fastening part 17c by arranging two or more holding parts 17a in parallel.

この発明の実施の形態１によるリニアモータの概略断面図である。It is a schematic sectional drawing of the linear motor by Embodiment 1 of this invention. 図１に示す補磁極の製造方法を示すリング磁石の説明図である。It is explanatory drawing of the ring magnet which shows the manufacturing method of the supplementary magnetic pole shown in FIG. 図１に示すリニアモータの固定子における極ピッチに対する主磁極長さの割合と損失の関係を示すグラフである。It is a graph which shows the ratio of the main magnetic pole length with respect to the pole pitch in the stator of the linear motor shown in FIG. 1, and the relationship of a loss. この発明の実施の形態２によるリニアモータの固定子の概略断面図である。It is a schematic sectional drawing of the stator of the linear motor by Embodiment 2 of this invention. 図４に示す補磁極の製造方法を示すリング磁石の説明図である。It is explanatory drawing of the ring magnet which shows the manufacturing method of the supplementary magnetic pole shown in FIG. この発明の実施の形態３のリニアモータの固定子の概略断面図である。It is a schematic sectional drawing of the stator of the linear motor of Embodiment 3 of this invention. この発明の実施の形態４のリニアモータの固定子の概略分解斜視図である。It is a general | schematic disassembled perspective view of the stator of the linear motor of Embodiment 4 of this invention. 図７の固定子の組み立てられた状態を示す概略斜視図である。It is a schematic perspective view which shows the assembled state of the stator of FIG. この発明の実施の形態５のリニアモータの固定子の概略分解斜視図である。It is a general | schematic disassembled perspective view of the stator of the linear motor of Embodiment 5 of this invention. 図９の固定子の組み立てられた状態を示す概略斜視図である。FIG. 10 is a schematic perspective view showing an assembled state of the stator of FIG. 9. この発明の実施の形態６のリニアモータの固定子の概略断面図である。It is a schematic sectional drawing of the stator of the linear motor of Embodiment 6 of this invention. この発明の実施の形態６のリニアモータの固定子の変形例を示す概略断面図である。It is a schematic sectional drawing which shows the modification of the stator of the linear motor of Embodiment 6 of this invention. この発明の実施の形態７のリニアモータの固定子の断面図である。It is sectional drawing of the stator of the linear motor of Embodiment 7 of this invention.

符号の説明Explanation of symbols

１ リニアモータ、１０ 固定子、１１ 磁石板、１２ 主磁極、１３ 補磁極、１３ｂ 湾曲凸面、１３ｃ 湾曲凹面、１３ｄ〜ｉ 補磁極要素、１４ リング磁石、１６ 凸部、１７ 保持体、２０ 可動子。   DESCRIPTION OF SYMBOLS 1 Linear motor, 10 Stator, 11 Magnet plate, 12 Main magnetic pole, 13 Supplementary magnetic pole, 13b Curved convex surface, 13c Curved concave surface, 13d-i Supplementary magnetic pole element, 14 Ring magnet, 16 Convex part, 17 Holder, 20 Movable element .

Claims (8)

複数の主磁極および複数の補磁極を支持体上に交互に直線状にハルバッハ配列して構成した固定子と、
上記固定子に対して直線的に駆動される可動子とを備えたリニアモータにおいて、
上記補磁極は、磁化方向が駆動方向と異なる箇所を持ち、駆動方向両端部における磁化方向が隣接の上記主磁極の磁化方向とおよそ同じ方向成分を持つように着磁されていることを特徴とするリニアモータ。 A stator constituted by alternately arranging a plurality of main magnetic poles and a plurality of auxiliary magnetic poles on a support in a linear Halbach arrangement;
In a linear motor comprising a mover that is linearly driven with respect to the stator,
The auxiliary magnetic pole is magnetized so that the magnetization direction has a portion different from the driving direction, and the magnetization direction at both ends of the driving direction has approximately the same direction component as the magnetization direction of the adjacent main magnetic pole. Linear motor. 上記補磁極は、磁化方向が、上記補磁極の駆動方向両端部においては駆動方向に対してほぼ直角方向で互いに１８０°異なり、駆動方向中央部においてはほぼ駆動方向であって、駆動方向両端部と駆動方向中央部との間においてはほぼ円弧状に変化するものであることを特徴とする請求項１に記載のリニアモータ。   The auxiliary magnetic poles have directions of magnetization that are 180 ° different from each other in a direction substantially perpendicular to the driving direction at both ends in the driving direction of the auxiliary magnetic pole, and are substantially in the driving direction at the central portion in the driving direction. 2. The linear motor according to claim 1, wherein the linear motor changes in a substantially arc shape between the center and the driving direction central portion. 上記主磁極の駆動方向の長さの極ピッチに対する割合が０．２５〜０．６であることを特徴とする請求項１あるいは２に記載のリニアモータ。   The linear motor according to claim 1, wherein a ratio of a length of the main magnetic pole in a driving direction to a pole pitch is 0.25 to 0.6. 上記補磁極は複数の極を持つ極異方性着磁された極異方性リング磁石から切り出されたものであることを特徴とする請求項１〜３のいずれか一項に記載のリニアモータ。   The linear motor according to any one of claims 1 to 3, wherein the auxiliary magnetic pole is cut from a polar anisotropic ring magnet having a plurality of poles. . 上記補磁極は、複数の極を持つ極異方性リング磁石を径方向切断面に沿って切断加工して製作され、一側に湾曲凸面を持ち他側に湾曲凹面を持つ扇形形状のセクションであり、
上記支持体が上記湾曲凹面に相補的に嵌合する凸部を持っていることを特徴とする請求項４に記載のリニアモータ。 The auxiliary magnetic pole is a fan-shaped section that is manufactured by cutting a polar anisotropic ring magnet having a plurality of poles along a radial cut surface, and has a curved convex surface on one side and a curved concave surface on the other side. Yes,
The linear motor according to claim 4, wherein the support has a convex portion that is complementarily fitted to the curved concave surface. 上記主磁極および補磁極のいずれか一つが、保持体にて上記支持体に固定されていることを特徴とする請求項５に記載のリニアモータ。   6. The linear motor according to claim 5, wherein any one of the main magnetic pole and the auxiliary magnetic pole is fixed to the support by a holding body. 上記補磁極は、並べて配置した複数の補磁極要素で構成されていることを特徴とする請求項１〜３のいずれか一項に記載のリニアモータ。   The linear motor according to any one of claims 1 to 3, wherein the auxiliary magnetic pole is composed of a plurality of auxiliary magnetic pole elements arranged side by side. 上記補磁極は、一体成形された複数の補磁極要素で構成されていることを特徴とする請求項１〜３のいずれか一項に記載のリニアモータ。   The linear motor according to any one of claims 1 to 3, wherein the auxiliary magnetic pole is formed of a plurality of integrally formed auxiliary magnetic pole elements.
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