JP2007006545A - Periodical magnetic filed generator and linear motor employing it, rotatory motor, oscillating motor - Google Patents
Periodical magnetic filed generator and linear motor employing it, rotatory motor, oscillating motor Download PDFInfo
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本発明は、ハルバッハ配列構造の永久磁石で構成される界磁極を備えた周期磁界発生装置およびそれを用いたリニアモータ、回転型モータ、揺動モータに関する。 The present invention relates to a periodic magnetic field generator having a field pole composed of permanent magnets having a Halbach array structure, and a linear motor, a rotary motor, and a swing motor using the same.
従来から、ＮＣ工作機械や半導体製造装置などのＦＡ分野では、送りや加工の高速化、高精度化を達成できるようにリニアモータが用いられている（例えば、特許文献１〜特許文献３を参照）。
また、ロボットにおいては、可動部材の位置決めおよび速度制御用として回転型のサーボモータが用いられており、ワイヤボンダ装置の上下駆動などにおいては揺動モータ（スイング動作型モータ）が適用されている（例えば、特許文献４．５を参照）。
このうちリニアモータの界磁極には、（１）磁極毎に磁石を配置し隣接する磁石の磁化方向を１８０度異なるように配置した周期磁界発生装置（例えば、特許文献１の図４を参照）、と、（２）磁極の向きが異なる主磁極と副磁極とから構成されるハルバッハ配列構造の永久磁石を配置した周期磁界発生装置が提案されている（例えば、特許文献１の図1を参照）。
特許文献１の図１に開示されたハルバッハ配列磁石を備えた周期磁界発生装置は、同じく特許文献１の図４に開示されたものに比べ、発生磁界が大きく、発生磁界が正弦波分布となる、などの特長を有することから、リニアモータに適用した場合、推力向上や推力リプルの低減を図れるという利点がある。
Conventionally, in the FA field such as NC machine tools and semiconductor manufacturing apparatuses, linear motors have been used so as to achieve high speed and high precision of feeding and processing (see, for example, Patent Documents 1 to 3). ).
Further, in a robot, a rotary servo motor is used for positioning and speed control of a movable member, and a swing motor (swing operation type motor) is applied for vertical drive of a wire bonder device (for example, , See Patent Document 4.5).
Among these, the periodic magnetic field generator in which the magnetic poles of the linear motor are arranged such that (1) magnets are arranged for each magnetic pole and the magnetization directions of adjacent magnets differ by 180 degrees (see, for example, FIG. 4 of Patent Document 1) (2) A periodic magnetic field generator in which a permanent magnet having a Halbach array structure composed of a main magnetic pole and a sub magnetic pole having different magnetic pole directions is arranged has been proposed (see, for example, FIG. 1 of Patent Document 1). ).
The periodic magnetic field generator provided with the Halbach array magnet disclosed in FIG. 1 of Patent Document 1 has a larger generated magnetic field than that disclosed in FIG. 4 of Patent Document 1, and the generated magnetic field has a sinusoidal distribution. Therefore, when applied to a linear motor, there is an advantage that thrust can be improved and thrust ripple can be reduced.
図９は従来のハルバッハ配列構造の永久磁石を配置した周期磁界発生装置の側断面図を示したものである。図９において、１０１は永久磁石、１０２は磁化の方向、１０３はヨークであり、ヨーク１０３の反対側（図の上側）の面に、正弦波またはそれに近い磁束密度波形を有する周期的な磁界を発生させることができる。 FIG. 9 is a side sectional view of a periodic magnetic field generator in which permanent magnets having a conventional Halbach array structure are arranged. In FIG. 9, 101 is a permanent magnet, 102 is the direction of magnetization, 103 is a yoke, and a periodic magnetic field having a sine wave or a magnetic flux density waveform close to it on the surface opposite to the yoke 103 (upper side in the figure). Can be generated.
また、上記のハルバッハ配列構造の永久磁石を配置した周期磁界発生装置を用いたリニアモータは、周期的な発生磁界中にコイルを配置すると共に、周期磁界発生装置とコイルの何れか一方を可動子とし、他方を固定子とした場合にコイルに通電することにより、コイルに発生する磁界と周期磁界発生装置の発生磁界との吸引・反発力により可動子を直線的に移動させることができる。
従来のハルバッハ配列構造の永久磁石を配置した周期磁界発生装置は、永久磁石の動作点を減磁曲線の第１象限に設定することも可能であり、使用する永久磁石の残留飽和磁化よりも高い発生磁界を得ることができる。しかし、昨今の永久磁石の特性向上などにより磁気回路中の磁束密度が高まり、磁気回路の磁気飽和が原因と思われる周期磁界発生装置の発生磁界の限界がみられるという問題があった。
また、従来のハルバッハ配列構造の永久磁石を配置した周期磁界発生装置を用いたリニアモータ、回転型モータ、揺動モータは、周期磁界発生装置の発生磁界が高くできないので、推力またはトルクを高くできないという問題があった。
A conventional periodic magnetic field generator in which permanent magnets having a Halbach array structure are arranged can set the operating point of the permanent magnet to the first quadrant of the demagnetization curve, which is higher than the residual saturation magnetization of the permanent magnet used. A generated magnetic field can be obtained. However, there has been a problem that the magnetic field density of the periodic magnetic field generator, which seems to be caused by the magnetic saturation of the magnetic circuit, is limited due to an increase in the magnetic flux density in the magnetic circuit due to the recent improvement in characteristics of the permanent magnet.
In addition, linear motors, rotary motors, and oscillating motors that use conventional magnetic field generators with permanent magnets having a Halbach array structure cannot increase the thrust or torque because the magnetic field generated by the periodic magnetic field generator cannot be increased. There was a problem.
本発明はこのような問題点を鑑みてなされたものであり、発生磁界を高め、推力またはトルクの向上を図ることができる高周期磁界発生装置およびそれを用いたリニアモータ、回転型モータ、揺動モータを提供することを目的とする。 The present invention has been made in view of such problems, and a high-period magnetic field generator capable of increasing a generated magnetic field and improving thrust or torque, and a linear motor, a rotary motor, a swing motor using the same. An object is to provide a dynamic motor.
上記問題を解決するため、本発明は、次のように構成したものである。
請求項１の発明は、発生磁界の方向に磁化された主磁極永久磁石と前記主磁極永久磁石の磁極の向きと異なるように磁化された副磁極永久磁石から構成されるハルバッハ配列構造の界磁極を備えた周期磁界発生装置において、前記主磁極永久磁石の磁界発生側の一部を軟磁性材料で置き換えたことを特徴としている。
また、請求項２の発明は、請求項１記載の周期磁界発生装置において、前記軟磁性材料の飽和磁束密度が、前記主磁極永久磁石の飽和磁束密度よりも高いことを特徴としている。
また、請求項３の発明は、請求項１または２に記載の周期磁界発生装置において、前記界磁極が直線状に形成されたことを特徴としている。
また、請求項４の発明は、請求項１または２に記載の周期磁界発生装置において、前記界磁極が円形状に形成されたことを特徴としている。
また、請求項５の発明は、請求項１または２に記載の周期磁界発生装置において、前記界磁極が円弧状に形成されたことを特徴としている。
また、請求項６の発明は、請求項１、２、３の何れか１項に記載の周期磁界発生装置を用いたリニアモータとしたことを特徴としている。
また、請求項７の発明は、請求項１、２、４の何れか１項に記載の周期磁界発生装置を用いた回転型モータとしたことを特徴としている。
また、請求項８の発明は、請求項１、２、５の何れか１項に記載の周期磁界発生装置を用いた揺動モータとしたことを特徴としている。
In order to solve the above problems, the present invention is configured as follows.
According to a first aspect of the present invention, there is provided a field pole having a Halbach array structure composed of a main magnetic pole permanent magnet magnetized in the direction of the generated magnetic field and a sub magnetic pole permanent magnet magnetized differently from the direction of the magnetic pole of the main magnetic pole permanent magnet. A part of the main magnetic pole permanent magnet on the magnetic field generation side is replaced with a soft magnetic material.
According to a second aspect of the present invention, in the periodic magnetic field generator according to the first aspect, a saturation magnetic flux density of the soft magnetic material is higher than a saturation magnetic flux density of the main magnetic pole permanent magnet.
According to a third aspect of the present invention, in the periodic magnetic field generator according to the first or second aspect, the field pole is formed in a straight line.
According to a fourth aspect of the present invention, in the periodic magnetic field generator according to the first or second aspect, the field pole is formed in a circular shape.
The invention according to claim 5 is the periodic magnetic field generator according to claim 1 or 2, wherein the field pole is formed in an arc shape.
The invention of claim 6 is characterized in that it is a linear motor using the periodic magnetic field generator according to any one of claims 1, 2, and 3.
The invention of claim 7 is characterized in that it is a rotary motor using the periodic magnetic field generating device according to any one of claims 1, 2, and 4.
The invention of claim 8 is characterized in that it is a swing motor using the periodic magnetic field generator according to any one of claims 1, 2, and 5.
請求項１〜請求項５に記載の周期磁界発生装置によると、磁気回路の磁気飽和の影響が緩和されるため、発生磁界を高めることができる。
請求項６に記載のリニアモータによると、発生磁界が高い周期磁界発生装置を用いることにより、推力を高めることができる。
請求項７に記載の回転モータによると、発生磁界が高い周期磁界発生装置を用いることにより、トルクを高めることができる。
請求項８に記載の揺動モータによると、発生磁界が高い周期磁界発生装置を用いることにより、トルクを高めることができる。
According to the periodic magnetic field generator according to the first to fifth aspects, the influence of magnetic saturation of the magnetic circuit is alleviated, so that the generated magnetic field can be increased.
According to the linear motor of the sixth aspect, the thrust can be increased by using the periodic magnetic field generator having a high generated magnetic field.
According to the rotary motor of the seventh aspect, the torque can be increased by using the periodic magnetic field generator having a high generated magnetic field.
According to the swing motor of the eighth aspect, the torque can be increased by using the periodic magnetic field generator having a high generated magnetic field.
以下、本発明の実施の形態について図を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図１〜図３は本発明の第１の実施例を示す直線状に形成された周期磁界発生装置の断面図である。
図１〜図３において、１は永久磁石、１１は主磁極永久磁石、１２は副磁極永久磁石、２は磁化の方向、３は軟磁性材料である。
本発明が従来技術と異なる点は以下のとおりである。
すなわち、発生磁界の方向に磁化された主磁極永久磁石１１と該主磁極永久磁石１１の磁極の向きと異なるように磁化された副磁極永久磁石１２から構成されるハルバッハ配列構造の界磁極を備えた周期磁界発生装置において、主磁極永久磁石１１の磁界発生側の一部を軟磁性材料で置き換えた点である。なお、主磁極永久磁石１１の磁界発生方向は上方向であり、磁化方向が上向き（↑）と下向き（↓）となる。ここで、本実施例並びに以下の第２、第３実施例を含めて、永久磁石としては飽和磁束密度が１．５［Ｔ］のＮｄ−Ｆｅ−Ｂ系焼結磁石を用いると共に、軟磁性材料としては飽和磁束密度が２．３［Ｔ］のＦｅ−Ｃｏ−Ｖ系の材料を用いた。
1 to 3 are sectional views of a periodic magnetic field generator formed in a straight line shape showing a first embodiment of the present invention.
1 to 3, 1 is a permanent magnet, 11 is a main magnetic pole permanent magnet, 12 is a sub magnetic pole permanent magnet, 2 is a direction of magnetization, and 3 is a soft magnetic material.
The present invention is different from the prior art as follows.
That is, a field pole having a Halbach array structure comprising a main magnetic pole permanent magnet 11 magnetized in the direction of the generated magnetic field and a sub magnetic pole permanent magnet 12 magnetized so as to be different from the magnetic pole direction of the main magnetic pole permanent magnet 11 is provided. In the periodic magnetic field generator, a part of the main pole permanent magnet 11 on the magnetic field generation side is replaced with a soft magnetic material. The magnetic field generation direction of the main magnetic pole permanent magnet 11 is upward, and the magnetization directions are upward (↑) and downward (↓). Here, including this example and the following second and third examples, Nd-Fe-B sintered magnets having a saturation magnetic flux density of 1.5 [T] are used as permanent magnets, and soft magnetism is used. As the material, an Fe—Co—V-based material having a saturation magnetic flux density of 2.3 [T] was used.
ここで、上記の本発明の周期磁界発生装置を用いて磁束密度分布を測定したところ、従来技術の周期磁界発生装置の発生磁界に対して、１０５％の発生磁界（正弦波状の磁束密度分布のピーク値）が得られ、本発明が有効であることが分かった。 Here, the magnetic flux density distribution was measured using the above-described periodic magnetic field generator of the present invention. As a result, 105% of the generated magnetic field (sinusoidal magnetic flux density distribution) Peak value) was obtained and the present invention was found to be effective.
図２および図３のように、永久磁石の分割数を増やし、主磁極永久磁石の幅が小さくなると、主磁極永久磁石の磁気飽和が発生しやすくなるので、本発明の効果はより大きくなる。いずれにしても、本発明は永久磁石の分割数に関係なく有効であり、永久磁石の分割数は自由に設定される。 As shown in FIGS. 2 and 3, when the number of permanent magnets is increased and the width of the main magnetic pole permanent magnet is reduced, magnetic saturation of the main magnetic pole permanent magnet is likely to occur, so the effect of the present invention is further increased. In any case, the present invention is effective regardless of the number of permanent magnet divisions, and the number of permanent magnet divisions is freely set.
第１実施例は上記構成にしたので、磁気回路の磁気飽和の影響が緩和されるので、発生磁界を高めることができる。 Since the first embodiment has the above configuration, the magnetic saturation of the magnetic circuit is alleviated, so that the generated magnetic field can be increased.
図４は、本発明の第２の実施例を示す円形状に形成された周期磁界発生装置の正断面図である。
図４において、１は永久磁石、１１は主磁極永久磁石、１２は副磁極永久磁石、２は磁化の方向、３は軟磁性材料である。本例は磁極が４極の例を示したものであり、磁界発生方向が円形状の内側であり、主磁極永久磁石１１の磁界発生側の一部を軟磁性材料３で置き換えたものとなっている。
FIG. 4 is a front sectional view of a periodic magnetic field generator formed in a circular shape, showing a second embodiment of the present invention.
In FIG. 4, 1 is a permanent magnet, 11 is a main magnetic pole permanent magnet, 12 is a sub magnetic pole permanent magnet, 2 is a magnetization direction, and 3 is a soft magnetic material. This example shows an example in which the magnetic pole has four poles, the magnetic field generation direction is inside the circular shape, and a part of the main magnetic pole permanent magnet 11 on the magnetic field generation side is replaced with the soft magnetic material 3. ing.
ここで、上記の本発明の周期磁界発生装置を用いて磁束密度分布を測定したところ、従来技術となる図１０の周期磁界発生装置の発生磁界が１．７４Ｔであった場合と比較して、本発明の周期磁界発生装置の発生磁界は１．８７Ｔと高くなっていることがわかった。これより、本発明の円形状の周期磁界発生装置においても有効であることが確認された。 Here, when the magnetic flux density distribution was measured using the above-described periodic magnetic field generator of the present invention, compared with the case where the generated magnetic field of the periodic magnetic field generator of FIG. It was found that the magnetic field generated by the periodic magnetic field generator of the present invention was as high as 1.87T. From this, it was confirmed that the present invention is also effective in the circular periodic magnetic field generator of the present invention.
次に、図１１はハルバッハ磁石配列を有する円形状の周期磁界発生装置の磁界解析による磁束線図を示したものである。本発明を磁界解析を用いて検証すると、図１１の磁束線図に示したように、従来技術での円形状周期磁界発生装置において、主磁極の永久磁石の磁界発生側先端部には磁束が集中し、１．８〜１．９Ｔと磁気飽和が生じていることが分かった。一方、磁気飽和している永久磁石部を飽和磁束密度の高い軟磁性材料で置き換えた本発明での円形状周期磁界発生装置における主磁極の先端部の磁束密度は２．２〜２．３Ｔと向上しており、結果として発生磁束密度を高めることができたことを検証できた。 Next, FIG. 11 shows a magnetic flux diagram by magnetic field analysis of a circular periodic magnetic field generator having a Halbach magnet arrangement. When the present invention is verified using magnetic field analysis, as shown in the magnetic flux diagram of FIG. 11, in the circular periodic magnetic field generator of the prior art, magnetic flux is generated at the front end of the permanent magnet of the main pole on the magnetic field generation side. It was found that magnetic saturation occurred with 1.8 to 1.9 T. On the other hand, the magnetic flux density at the tip of the main pole in the circular periodic magnetic field generator in the present invention in which the magnetically saturated permanent magnet portion is replaced with a soft magnetic material having a high saturation magnetic flux density is 2.2 to 2.3 T. As a result, it was verified that the generated magnetic flux density could be increased.
第２実施例は上記構成にしたので、磁気回路の磁気飽和の影響が緩和されるので、発生磁界を高めることができる。 Since the second embodiment has the above-described configuration, the effect of magnetic saturation of the magnetic circuit is alleviated, so that the generated magnetic field can be increased.
図５は、本発明の第３の実施例を示す円弧形状の周期磁界発生装置の正断面図である。
図５において、１は永久磁石、１１は主磁極永久磁石、１２は副磁極永久磁石、２は磁化の方向、３は軟磁性材料である。本例は磁極が２極の例を示したものであり、磁界発生方向は円弧形状の周期磁界発生装置の内側、すなわち図の上方向であり、主磁極永久磁石１１の磁界発生側の一部を軟磁性材料３で置き換えたものとなっている。
FIG. 5 is a front sectional view of an arc-shaped periodic magnetic field generator showing a third embodiment of the present invention.
In FIG. 5, 1 is a permanent magnet, 11 is a main magnetic pole permanent magnet, 12 is a sub magnetic pole permanent magnet, 2 is a direction of magnetization, and 3 is a soft magnetic material. This example shows an example in which there are two magnetic poles. The magnetic field generation direction is the inside of the circular arc-shaped periodic magnetic field generator, that is, the upward direction in the figure, and a part of the main magnetic pole permanent magnet 11 on the magnetic field generation side. Is replaced with the soft magnetic material 3.
ここで、上記の本発明の周期磁界発生装置を用いて磁束密度分布を測定したところ、従来技術となる図１２の周期磁界発生装置と比較して、円弧形状の周期磁界発生装置の発生磁界は高くなっており、円弧形状の周期磁界発生装置においても、本発明は有効であることがわかった。 Here, when the magnetic flux density distribution was measured using the above-described periodic magnetic field generator of the present invention, the magnetic field generated by the circular-arc-shaped periodic magnetic field generator is lower than that of the conventional periodic magnetic field generator of FIG. It has been found that the present invention is effective even in an arc-shaped periodic magnetic field generator.
第３実施例は上記構成にしたので、磁気回路の磁気飽和の影響が緩和されるので、発生磁界を高めることができる。 Since the third embodiment has the above-described configuration, the effect of magnetic saturation of the magnetic circuit is alleviated, so that the generated magnetic field can be increased.
図６は、本発明の第４の実施例を示すリニアモータの側断面図である。
図６において、図２に示す本発明の直線状に形成された２個の周期磁界発生装置を、それらの発生磁界が対向するように間にコイル４を配置してリニアモータを構成したものとなっている。
図１３はリニアモータの全体構成を示す正断面図である。永久磁石１を含む周期磁界発生装置からなる固定子６とコイル４を含む可動子５が支持機構７で結合されている。コイルに通電することにより移動磁界を発生させ、移動磁界と磁石磁界の吸引・反発力を利用し、可動子を直線移動させる。なお、リニアモータの駆動方法や動作については、基本的に従来技術と同じであるために省略する。
FIG. 6 is a side sectional view of a linear motor showing a fourth embodiment of the present invention.
In FIG. 6, a linear motor is configured by arranging the two periodic magnetic field generators of the present invention shown in FIG. 2 in the form of a linear motor with a coil 4 interposed therebetween so that the generated magnetic fields face each other. It has become.
FIG. 13 is a front sectional view showing the entire configuration of the linear motor. A stator 6 composed of a periodic magnetic field generator including a permanent magnet 1 and a mover 5 including a coil 4 are coupled by a support mechanism 7. A moving magnetic field is generated by energizing the coil, and the mover is moved linearly by using the attracting / repulsive force of the moving magnetic field and the magnet magnetic field. Since the driving method and operation of the linear motor are basically the same as those of the prior art, the description thereof is omitted.
第４実施例は上記構成にしたので、周期磁界発生装置の発生磁界の増大にほぼ比例してリニアモータの推力を向上させることができる。 Since the fourth embodiment is configured as described above, the thrust of the linear motor can be improved substantially in proportion to the increase in the generated magnetic field of the periodic magnetic field generator.
図７は、本発明の第５の実施例を示す回転型モータの正断面図である。
図７において、図４に示す本発明の円形状に形成された周期磁界発生装置の内側に、コイル４を配置して回転型モータを構成したものとなっている。図７には図示していない回転型モータの基本構造や回転型モータの駆動方法や動作については、基本的に従来技術と同じであるために省略する。
FIG. 7 is a front sectional view of a rotary motor showing a fifth embodiment of the present invention.
In FIG. 7, a rotary motor is configured by arranging a coil 4 inside the periodic magnetic field generator formed in a circular shape of the present invention shown in FIG. Since the basic structure of the rotary motor and the driving method and operation of the rotary motor which are not shown in FIG. 7 are basically the same as those of the prior art, the description thereof will be omitted.
第５実施例は上記構成にしたので、周期磁界発生装置の発生磁界の増大に伴い回転型モータのトルクを向上させることができる。 Since the fifth embodiment is configured as described above, the torque of the rotary motor can be improved as the magnetic field generated by the periodic magnetic field generator increases.
図８は、本発明の第６の実施例を示す揺動モータの正断面図である。
図８において、図５に示す本発明の円弧形状に形成された周期磁界発生装置の内側（図の上側）に、コイル４を配置して揺動モータを構成したものとなっている。図８には図示していない揺動モータの基本構造や揺動モータの駆動方法や動作については、基本的に従来技術と同じであるために省略する。
FIG. 8 is a front sectional view of a swing motor showing a sixth embodiment of the present invention.
In FIG. 8, a swing motor is configured by arranging a coil 4 on the inner side (upper side in the figure) of the periodic magnetic field generator formed in the arc shape of the present invention shown in FIG. The basic structure of the oscillating motor and the driving method and operation of the oscillating motor are not shown in FIG.
第６実施例は上記構成にしたので、周期磁界発生装置の発生磁界の増大に伴い揺動モータのトルクを向上させることができる。 Since the sixth embodiment has the above-described configuration, the torque of the swing motor can be improved as the magnetic field generated by the periodic magnetic field generator increases.
なお、以上の本発明の実施例の説明では、永久磁石としてＮｄ−Ｆｅ−Ｂ系焼結磁石を、軟磁性材料としてはＦｅ−Ｃｏ−Ｖ系の材料を用いたが、本発明で用いる永久磁石としては、希土類磁石、フェライト磁石、鋳造磁石、ボンド磁石などが使用可能であり、本発明で用いる軟磁性材料としては、純鉄、軟鋼、ケイ素鋼板などが使用可能であり、本発明は永久磁石や軟磁性材料の種類に限定されるものではない。 In the above description of the embodiments of the present invention, an Nd—Fe—B based sintered magnet is used as a permanent magnet and an Fe—Co—V based material is used as a soft magnetic material. As magnets, rare earth magnets, ferrite magnets, cast magnets, bonded magnets and the like can be used. As soft magnetic materials used in the present invention, pure iron, mild steel, silicon steel plates and the like can be used, and the present invention is permanent. It is not limited to the type of magnet or soft magnetic material.
本発明の第１の実施例である図１は正弦波状の発生磁界の１周期を２個の主磁極永久磁石１１と２個の副磁極永久磁石１２で構成した周期磁界発生装置であるが、これに替えて、図２に示すごとく、２個の主磁極永久磁石１１と４個の副磁極永久磁石１２で構成してもよく、また、図３に示すごとく、２個の主磁極永久磁石１１と６個の副磁極永久磁石１２で構成しても構わない。 FIG. 1, which is a first embodiment of the present invention, is a periodic magnetic field generator in which one cycle of a sinusoidal generated magnetic field is composed of two main magnetic pole permanent magnets 11 and two sub magnetic pole permanent magnets 12. Alternatively, as shown in FIG. 2, it may be constituted by two main magnetic pole permanent magnets 11 and four sub magnetic pole permanent magnets 12, and as shown in FIG. 3, two main magnetic pole permanent magnets. 11 and six sub magnetic pole permanent magnets 12 may be used.
また、本発明の第２の実施例である図４は、円形状の周期磁界発生装置の内側に４極の磁界を発生させているが、このような構成に替えて円形状の周期磁界発生装置の外側に磁界を発生させても有効であり、発生磁界の極数や永久磁石の分割数にも関係なく有効であり、磁界の発生方向、発生磁界の極数、永久磁石の分割数に限定されるものではない。 In FIG. 4 showing the second embodiment of the present invention, a quadrupole magnetic field is generated inside the circular periodic magnetic field generator, but instead of such a configuration, a circular periodic magnetic field is generated. It is effective even if a magnetic field is generated outside the device, and is effective regardless of the number of generated magnetic poles and the number of permanent magnet divisions. It is not limited.
また、本発明の第３の実施例である図５は、円弧形状の周期磁界発生装置の内側（図の上側）に２極の磁界を発生させているが、このような構成に替えて円弧形状の周期磁界発生装置の外側に磁界を発生させても有効であり、発生磁界の極数や永久磁石の分割数にも関係なく有効であり、磁界の発生方向、発生磁界の極数、永久磁石の分割数に限定されるものではない。 Further, FIG. 5 showing the third embodiment of the present invention generates a two-pole magnetic field inside the arc-shaped periodic magnetic field generator (upper side in the figure). It is effective even if a magnetic field is generated outside the periodic magnetic field generator of the shape, and is effective regardless of the number of poles of the generated magnetic field and the number of permanent magnets divided. It is not limited to the number of magnet divisions.
また、本発明の第４の実施例である図６に示したリニアモータの構成はあくまでも一例に過ぎず、本発明は他の全てのリニアモータの構造においても有効であり、リニアモータの構造に限定されるものではない。 In addition, the configuration of the linear motor shown in FIG. 6 which is the fourth embodiment of the present invention is merely an example, and the present invention is effective in all other linear motor structures. It is not limited.
また、本発明の第５の実施例である図７に示した回転型モータの構成はあくまでも一例に過ぎず、本発明は他の全ての回転型モータの構造においても有効であり、回転型モータの構造に限定されるものでない。 Further, the configuration of the rotary motor shown in FIG. 7 which is the fifth embodiment of the present invention is merely an example, and the present invention is also effective in the structure of all other rotary motors. It is not limited to the structure.
また、本発明の第６の実施例である図８に示した揺動モータの構成はあくまでも一例に過ぎず、本発明は他の全ての揺動モータの構造においても有効であり、揺動モータの構造に限定されるものではない。 Further, the configuration of the swing motor shown in FIG. 8 which is the sixth embodiment of the present invention is only an example, and the present invention is effective in all other swing motor structures. It is not limited to the structure.
以上、本発明の周期磁界発生装置の適用例として、リニアモータ、回転型モータ、揺動モータの事例を取り上げて説明したが、本発明は磁気回路の形状や適用するモータの種類に限定されるものではない。 As described above, as examples of application of the periodic magnetic field generator of the present invention, examples of linear motors, rotary motors, and oscillating motors have been described. It is not a thing.
本発明の周期磁界発生装置は、発生磁界を高くできることから、リニアモータ、回転型モータ、揺動モータに代表される機器に適用できる。
また、本発明のリニアモータ、回転型モータ、揺動モータは、推力やトルクが高いことから、半導体／液晶製造装置や電子部品実装機、工作機械、金属加工機械、産業用ロボットなどの装置に適用できる。
Since the periodic magnetic field generator of the present invention can increase the generated magnetic field, it can be applied to devices typified by linear motors, rotary motors, and swing motors.
In addition, since the linear motor, rotary motor, and swing motor of the present invention have high thrust and torque, they can be used in devices such as semiconductor / liquid crystal manufacturing equipment, electronic component mounting machines, machine tools, metal processing machines, and industrial robots. Applicable.
１ 永久磁石
１１ 主磁極永久磁石
１２ 副磁極永久磁石
２ 磁化方向
３ 軟磁性材料
４ コイル
５ 可動子
６ 固定子
７ 支持機構
１０１ 永久磁石
１０２ 磁化方向
DESCRIPTION OF SYMBOLS 1 Permanent magnet 11 Main magnetic pole permanent magnet 12 Sub magnetic pole permanent magnet 2 Magnetization direction 3 Soft magnetic material 4 Coil 5 Movable element 6 Stator 7 Support mechanism 101 Permanent magnet 102 Magnetization direction
Claims (8)
前記主磁極永久磁石の磁界発生側の一部を軟磁性材料で置き換えたことを特徴とする周期磁界発生装置。 Periodic magnetic field generator having a Halbach array structure field pole composed of a main magnetic pole permanent magnet magnetized in the direction of the generated magnetic field and a sub magnetic pole permanent magnet magnetized differently from the direction of the magnetic pole of the main magnetic pole permanent magnet In
A periodic magnetic field generator, wherein a part of the main magnetic pole permanent magnet on the magnetic field generating side is replaced with a soft magnetic material.
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